EP0567985A3 - Process for thin film formation - Google Patents

Process for thin film formation Download PDF

Info

Publication number
EP0567985A3
EP0567985A3 EP19930106784 EP93106784A EP0567985A3 EP 0567985 A3 EP0567985 A3 EP 0567985A3 EP 19930106784 EP19930106784 EP 19930106784 EP 93106784 A EP93106784 A EP 93106784A EP 0567985 A3 EP0567985 A3 EP 0567985A3
Authority
EP
European Patent Office
Prior art keywords
thin film
film formation
irradiated region
substrate
hydrogen atoms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19930106784
Other versions
EP0567985B1 (en
EP0567985A2 (en
Inventor
Kazuo Tsubouchi
Kazuya Masu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP0567985A2 publication Critical patent/EP0567985A2/en
Publication of EP0567985A3 publication Critical patent/EP0567985A3/en
Application granted granted Critical
Publication of EP0567985B1 publication Critical patent/EP0567985B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H01L21/28562—Selective deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Semiconductor Memories (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A process for thin film formation comprises selectively irradiating with an energy ray a substrate to the surface of which a surface treatment for providing hydrogen atoms is applied to thereby form an irradiated region and a non-irradiated region on the surface of the substrate, and forming a thin film selectively on the non-irradiated region.
EP93106784A 1992-04-28 1993-04-27 Process for thin film formation Expired - Lifetime EP0567985B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4136042A JP3048749B2 (en) 1992-04-28 1992-04-28 Thin film formation method
JP136042/92 1992-04-28
JP13604292 1992-04-28

Publications (3)

Publication Number Publication Date
EP0567985A2 EP0567985A2 (en) 1993-11-03
EP0567985A3 true EP0567985A3 (en) 1994-05-18
EP0567985B1 EP0567985B1 (en) 2001-10-17

Family

ID=15165822

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93106784A Expired - Lifetime EP0567985B1 (en) 1992-04-28 1993-04-27 Process for thin film formation

Country Status (8)

Country Link
US (1) US5604153A (en)
EP (1) EP0567985B1 (en)
JP (1) JP3048749B2 (en)
KR (1) KR0164614B1 (en)
AT (1) ATE207241T1 (en)
DE (1) DE69330921T2 (en)
MY (1) MY112082A (en)
TW (1) TW228603B (en)

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US5780362A (en) * 1996-06-04 1998-07-14 Wang; Qingfeng CoSi2 salicide method
JP3917698B2 (en) * 1996-12-12 2007-05-23 株式会社半導体エネルギー研究所 Laser annealing method and laser annealing apparatus
FR2757881B1 (en) * 1996-12-31 1999-04-09 Univ Paris Curie PROCESS FOR TREATING A SURFACE OF A SEMICONDUCTOR, CORRESPONDING DEVICE AND ASSOCIATED SEMICONDUCTOR
JP3399814B2 (en) * 1997-11-27 2003-04-21 科学技術振興事業団 Method for manufacturing fine projection structure
US6273099B1 (en) * 1998-07-01 2001-08-14 Taiwan Semiconductor Manufacturing Company Simplified method for cleaning silicon wafers after application of laser marks
AUPQ975900A0 (en) * 2000-08-30 2000-09-21 Unisearch Limited A process for the fabrication of a quantum computer
AU2001281595B2 (en) * 2000-08-30 2006-02-09 Newsouth Innovations Pty Limited Single molecule array on silicon substrate for quantum computer
KR100396891B1 (en) * 2001-03-21 2003-09-03 삼성전자주식회사 Method for forming metal wiring layer
US6855584B2 (en) * 2001-03-29 2005-02-15 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
US7253032B2 (en) 2001-04-20 2007-08-07 Semiconductor Energy Laboratory Co., Ltd. Method of flattening a crystallized semiconductor film surface by using a plate
JP4854866B2 (en) * 2001-04-27 2012-01-18 株式会社半導体エネルギー研究所 Method for manufacturing semiconductor device
US6787460B2 (en) * 2002-01-14 2004-09-07 Samsung Electronics Co., Ltd. Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses and conductive contacts so formed
KR100455382B1 (en) * 2002-03-12 2004-11-06 삼성전자주식회사 Method for forming metal interconnections of semiconductor device having dual damascene structure
US20070117287A1 (en) * 2005-11-23 2007-05-24 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus
US9112003B2 (en) 2011-12-09 2015-08-18 Asm International N.V. Selective formation of metallic films on metallic surfaces
US9895715B2 (en) 2014-02-04 2018-02-20 Asm Ip Holding B.V. Selective deposition of metals, metal oxides, and dielectrics
US10047435B2 (en) 2014-04-16 2018-08-14 Asm Ip Holding B.V. Dual selective deposition
US9490145B2 (en) 2015-02-23 2016-11-08 Asm Ip Holding B.V. Removal of surface passivation
US10428421B2 (en) 2015-08-03 2019-10-01 Asm Ip Holding B.V. Selective deposition on metal or metallic surfaces relative to dielectric surfaces
US10566185B2 (en) 2015-08-05 2020-02-18 Asm Ip Holding B.V. Selective deposition of aluminum and nitrogen containing material
US10121699B2 (en) 2015-08-05 2018-11-06 Asm Ip Holding B.V. Selective deposition of aluminum and nitrogen containing material
US10814349B2 (en) 2015-10-09 2020-10-27 Asm Ip Holding B.V. Vapor phase deposition of organic films
US10695794B2 (en) 2015-10-09 2020-06-30 Asm Ip Holding B.V. Vapor phase deposition of organic films
US9981286B2 (en) * 2016-03-08 2018-05-29 Asm Ip Holding B.V. Selective formation of metal silicides
US11081342B2 (en) 2016-05-05 2021-08-03 Asm Ip Holding B.V. Selective deposition using hydrophobic precursors
US10453701B2 (en) 2016-06-01 2019-10-22 Asm Ip Holding B.V. Deposition of organic films
US10373820B2 (en) 2016-06-01 2019-08-06 Asm Ip Holding B.V. Deposition of organic films
US9803277B1 (en) 2016-06-08 2017-10-31 Asm Ip Holding B.V. Reaction chamber passivation and selective deposition of metallic films
US11430656B2 (en) 2016-11-29 2022-08-30 Asm Ip Holding B.V. Deposition of oxide thin films
US11094535B2 (en) 2017-02-14 2021-08-17 Asm Ip Holding B.V. Selective passivation and selective deposition
US11501965B2 (en) 2017-05-05 2022-11-15 Asm Ip Holding B.V. Plasma enhanced deposition processes for controlled formation of metal oxide thin films
KR102684628B1 (en) 2017-05-16 2024-07-15 에이에스엠 아이피 홀딩 비.브이. Selective PEALD of oxides on dielectrics
US10900120B2 (en) 2017-07-14 2021-01-26 Asm Ip Holding B.V. Passivation against vapor deposition
JP7146690B2 (en) 2018-05-02 2022-10-04 エーエスエム アイピー ホールディング ビー．ブイ． Selective layer formation using deposition and removal
JP2020056104A (en) 2018-10-02 2020-04-09 エーエスエム アイピー ホールディング ビー．ブイ． Selective passivation and selective deposition
US11965238B2 (en) 2019-04-12 2024-04-23 Asm Ip Holding B.V. Selective deposition of metal oxides on metal surfaces
US11139163B2 (en) 2019-10-31 2021-10-05 Asm Ip Holding B.V. Selective deposition of SiOC thin films
TW202204658A (en) 2020-03-30 2022-02-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Simultaneous selective deposition of two different materials on two different surfaces
TW202140832A (en) 2020-03-30 2021-11-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Selective deposition of silicon oxide on metal surfaces
TW202140833A (en) 2020-03-30 2021-11-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces
US11613807B2 (en) 2020-07-29 2023-03-28 The Curators Of The University Of Missouri Area selective nanoscale-thin layer deposition via precise functional group lithography

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02137313A (en) * 1988-11-18 1990-05-25 Res Dev Corp Of Japan Method for forming pattern on silicon solid surface
EP0425084A1 (en) * 1989-09-09 1991-05-02 Canon Kabushiki Kaisha Process for forming deposited film by use of alkyl aluminum hydride

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GB1595659A (en) * 1978-05-25 1981-08-12 Standard Telephones Cables Ltd Providing conductive tracks on semiconductor devices
US5196372A (en) * 1989-09-09 1993-03-23 Canon Kabushiki Kaisha Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride
JP2721023B2 (en) * 1989-09-26 1998-03-04 キヤノン株式会社 Deposition film formation method
JP2726118B2 (en) * 1989-09-26 1998-03-11 キヤノン株式会社 Deposition film formation method
US5217756A (en) * 1990-06-08 1993-06-08 Nec Corporation Selective chemical vapor deposition of aluminum, aluminum CVD materials and process for preparing the same
ATE174450T1 (en) * 1990-07-06 1998-12-15 Tsubochi Kazuo METHOD FOR PRODUCING A METAL LAYER

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02137313A (en) * 1988-11-18 1990-05-25 Res Dev Corp Of Japan Method for forming pattern on silicon solid surface
EP0425084A1 (en) * 1989-09-09 1991-05-02 Canon Kabushiki Kaisha Process for forming deposited film by use of alkyl aluminum hydride

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
K.TSUBOUCHI ET AL.: "AREA SELECTIVE ALUMINUM PATTERNING BY ATOMIC HYDROGEN RESIST", EXTENDED ABSTRACTS OF THE 1992 INTERNATIONAL CONFERENCE ON SOLID STATE DEVICES & MATERIALS, 26 August 1992 (1992-08-26), TSUKUBA,JP, pages 208 - 210 *
K.TSUBOUCHI ET AL.: "COMPLETE PLANARIZATION OF VIA HOLES WITH ALUMINUM BY SELECTIVE AND NONSELECTIVE CHEMICAL VAPOR DEPOSITION", APPLIED PHYSICS LETTERS., vol. 57, no. 12, 17 September 1990 (1990-09-17), NEW YORK US, pages 1221 - 1223, XP000163177, DOI: doi:10.1063/1.103490 *
PATENT ABSTRACTS OF JAPAN vol. 14, no. 380 (E - 0965) 16 August 1990 (1990-08-16) *

Also Published As

Publication number Publication date
JP3048749B2 (en) 2000-06-05
KR0164614B1 (en) 1999-02-01
EP0567985B1 (en) 2001-10-17
MY112082A (en) 2001-04-30
TW228603B (en) 1994-08-21
DE69330921T2 (en) 2002-04-25
EP0567985A2 (en) 1993-11-03
DE69330921D1 (en) 2001-11-22
JPH0629220A (en) 1994-02-04
KR930022602A (en) 1993-11-24
US5604153A (en) 1997-02-18
ATE207241T1 (en) 2001-11-15

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