EP0086460B1 - Pompe rotative à vide élevé - Google Patents

Pompe rotative à vide élevé Download PDF

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Publication number
EP0086460B1
EP0086460B1 EP83101276A EP83101276A EP0086460B1 EP 0086460 B1 EP0086460 B1 EP 0086460B1 EP 83101276 A EP83101276 A EP 83101276A EP 83101276 A EP83101276 A EP 83101276A EP 0086460 B1 EP0086460 B1 EP 0086460B1
Authority
EP
European Patent Office
Prior art keywords
pump
gas
motor
ball bearings
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP83101276A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0086460A1 (fr
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Compagnie Industrielle de Telecommunication CIT Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Compagnie Industrielle de Telecommunication CIT Alcatel SA filed Critical Compagnie Industrielle de Telecommunication CIT Alcatel SA
Publication of EP0086460A1 publication Critical patent/EP0086460A1/fr
Application granted granted Critical
Publication of EP0086460B1 publication Critical patent/EP0086460B1/fr
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings

Definitions

  • the present invention relates to a rotary high vacuum pump such as a molecular or turbomolecular vacuum pump.
  • high vacuum pumps which operate in the molecular or turbomolecular domain comprise a rotor rotating at high speed in a fixed stator.
  • the molecules transport effect is generated at the periphery of the rotor rotating at high speed by reflection of a large part of these molecules in the region of the stator opposite it; the stator then returns part of the molecules received in the part of the rotor which is located below and so on, so that the rotor-stator assembly has a pressure ratio between the partial pressure of the gas on the discharge side and the pressure of the same gas on the suction side.
  • It comprises a rotor driven by a motor arranged outside the pumping enclosure and connected to the latter by a drive shaft, the sealing of which is ensured by a dynamic seal with grooves.
  • the shaft is supported on the one hand by an external bearing disposed outside the pumping enclosure and on the other hand by an internal bearing disposed inside the pumping enclosure and lubricated to fat.
  • the internal bearing is arranged between the dynamic grooved seal and a viscous dynamic seal interposed between the internal bearing and the external bearing.
  • a longitudinal groove connects the two faces of the internal bearing.
  • the cooling of the ball bearing located in the empty zone is easily carried out by conduction through the shaft, one end of which is easily cooled since it is located in the atmosphere.
  • the cooling of the rotor and of the stator of the motor is carried out by conventional means since these two parts are located in the atmosphere, as well as the external bearing.
  • the position of the ball bearings relative to the flow of pumped gas is not excellent despite the arrangement of the longitudinal groove avoiding the direct passage of the bearing by the gas and other part as the movable assembly has one of its ends located in an enclosure at very low pressure and the other located at atmospheric pressure, this results in a significant axial load supported by one of the two bearings which limits the duration of pump life.
  • the present invention aims to overcome these drawbacks while also ensuring good cooling of the bearings and the motor.
  • the subject of the invention is therefore a rotary high-vacuum pump of the type comprising a pump body to which a multistage stator is connected, and a rotor also with several stages mounted on a shaft driven by a motor, said shaft journalling in at at least two ball bearings arranged in a sleeve formed by an extension of said pump body, a dynamic seal being wedged on said shaft at the end close to the body of the sleeve, characterized in that the opposite end of the sleeve is closed, a fitting connected to an external source of gas being disposed at this closed end, said pump body being moreover connected to an external primary vacuum pump, so that said ball bearings and the rotor of said motor are permanently swept by said gas, entering by said adjustment, evacuated by said dynamic seal and circulating under an intermediate pressure between atmospheric pressure and the discharge pressure of the pump.
  • the pump comprises, in known manner, a pump body 4 to which is linked a stator 3 with several stages, as well as a rotor 2 also with several stages mounted on a drive shaft 1.
  • the pump body 4 is open at its upper end to allow its connection to the enclosure (not shown) in which a high vacuum must be achieved.
  • the body 4 has at its lower part an extension constituting a sleeve 18 closed at its lower end by a closure tape 11.
  • the shaft 1 pivots in the body 4 by means of two ball bearings 5 and 6 respectively secured to the upper part and to the lower part of said sleeve 18 and it is driven by means of an electric motor, the rotor and the stator are referenced 9 and 10 respectively.
  • This motor is disposed between the bearings 5 and 6, but it could also be installed at the level of the lower part of the shaft 1.
  • a dynamic joint 7 with grooves is disposed on the shaft 1, at the upper part of the sleeve 18, above the ball bearing 5.
  • Such a dynamic seal seals along the shaft 1, and separates the ball bearings 5 and 6 as well that the rotor 9 of the electric motor of the pumping zone delimited by the body 4.
  • This pumping zone is moreover connected to an external primary vacuum pump (not shown) by means of the tube 19.
  • An adjustment 8 is provided in the closing tape 11, this adjustment being able to introduce outside air or a neutral gas into the pump.
  • channels 12 and 12 ' provided in the wall of the sleeve 18 allow the two faces of each of the ball bearings 5 and 6 to be placed in communication.
  • the members such as in particular the ball bearings 5 and 6, the rotor 9 of the motor are permanently swept by a flow of said outside air or said neutral gas under a pressure of the order of a few tens of Torr, intermediate between the atmospheric pressure and the pump discharge pressure, such a gas flow being pumped by the primary pump connected to the pipe 19, this pump also ensuring the discharge of the molecular pumping cell.
  • the pressure at the level of the lubricant is maintained at a value such that its evaporation rate has a minimum value. It is therefore possible not to periodically renew the lubrication of the ball bearings. Furthermore, and unlike the cited earlier document, the end of the moving assembly, situated on the side opposite the rotor, is no longer subjected to atmospheric pressure but only a few tens of Torr, the axial load supported by the bearings is therefore much lower.
  • said gaseous sweep prevents any migration of the lubricant towards the suction of the pump, thus giving said pump according to the invention the qualities required for a so-called “dry pump” pump.
  • the pump according to the invention allows for more efficient cooling, because the heating area at the ball bearings and the electric motor is subjected to a pressure of a few tens of Torr.
  • the invention is advantageously implemented in all types of molecular vacuum pumps and in particular in pumps used in microelectronics techniques.
  • the dynamic seal 7 with grooves can be replaced by a dynamic seal of very simple design and can be obtained simply by two opposite surfaces, suitably associated, with or without grooves, the condition of the surfaces then having the effect of grooves.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Mounting Of Bearings Or Others (AREA)
EP83101276A 1982-02-16 1983-02-10 Pompe rotative à vide élevé Expired EP0086460B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8202496 1982-02-16
FR8202496A FR2521650A1 (fr) 1982-02-16 1982-02-16 Pompe rotative a vide eleve

Publications (2)

Publication Number Publication Date
EP0086460A1 EP0086460A1 (fr) 1983-08-24
EP0086460B1 true EP0086460B1 (fr) 1985-10-09

Family

ID=9271019

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83101276A Expired EP0086460B1 (fr) 1982-02-16 1983-02-10 Pompe rotative à vide élevé

Country Status (5)

Country Link
US (1) US4512725A (ja)
EP (1) EP0086460B1 (ja)
JP (1) JPS58150096A (ja)
DE (1) DE3360947D1 (ja)
FR (1) FR2521650A1 (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
FR2567208B1 (fr) * 1984-07-05 1988-12-09 Cit Alcatel Pompe rotative a vide eleve
JPS62153597A (ja) * 1985-12-27 1987-07-08 Hitachi Ltd 真空ポンプ
DE3616319C1 (de) * 1986-05-15 1987-07-02 Cit Alcatel Gmbh Heliumlecksuchanlage
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
FR2611819B1 (fr) * 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump
JP2998441B2 (ja) * 1992-08-19 2000-01-11 株式会社日立製作所 ターボ真空ポンプ
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
IT1292764B1 (it) * 1997-06-11 1999-02-11 Varian Spa Pompa da vuoto.
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
US6196813B1 (en) 1999-07-06 2001-03-06 Flowserve Management Company Pump assembly including integrated adapter
DE10004263A1 (de) 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
US6821099B2 (en) * 2002-07-02 2004-11-23 Tilia International, Inc. Rotary pump
DE10256086A1 (de) * 2002-11-29 2004-06-17 Leybold Vakuum Gmbh Kugellager und mit einem Lager dieser Art ausgerüstete Vakuumpumpe
DE202006017846U1 (de) * 2006-11-23 2008-03-27 Oerlikon Leybold Vacuum Gmbh Hochvakuumpumpe
AR072364A1 (es) * 2008-06-13 2010-08-25 Weir Minerals Australia Ltd Alojamiento para un conjunto de sellos de una bomba, dispositivo extractor para uso con dicho alojamiento y metodo para extraer y mover el alojamiento de un conjunto de sellos de una bomba centrifuga
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung
CN103671578A (zh) * 2012-09-26 2014-03-26 上海阔步机械模具有限公司 一种用于动压轴承的润滑装置
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11338258B2 (en) * 2019-09-19 2022-05-24 Limited Liability Company “Bioenergy” Rotary-pulsation device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1230206A (en) * 1911-04-27 1917-06-19 Richmond Radiator Company Suction-producer.
US1657550A (en) * 1922-04-29 1928-01-31 Doherty Res Co Method and apparatus for cooling electrical apparatus
US3355179A (en) * 1964-08-24 1967-11-28 Gen Electric Gas buffered screw seal
US3411707A (en) * 1967-03-23 1968-11-19 Rotron Mfg Co Apparatus for preventing gas flow through bearings
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2359456A1 (de) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit gasgelagertem rotor
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem

Also Published As

Publication number Publication date
DE3360947D1 (en) 1985-11-14
US4512725A (en) 1985-04-23
JPH0133677B2 (ja) 1989-07-14
FR2521650A1 (fr) 1983-08-19
EP0086460A1 (fr) 1983-08-24
FR2521650B1 (ja) 1984-04-06
JPS58150096A (ja) 1983-09-06

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