FR2567208B1 - Pompe rotative a vide eleve - Google Patents
Pompe rotative a vide eleveInfo
- Publication number
- FR2567208B1 FR2567208B1 FR8410681A FR8410681A FR2567208B1 FR 2567208 B1 FR2567208 B1 FR 2567208B1 FR 8410681 A FR8410681 A FR 8410681A FR 8410681 A FR8410681 A FR 8410681A FR 2567208 B1 FR2567208 B1 FR 2567208B1
- Authority
- FR
- France
- Prior art keywords
- high vacuum
- rotary pump
- vacuum rotary
- pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/913—Seal for fluid pressure below atmospheric, e.g. vacuum
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/928—Seal including pressure relief or vent feature
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8410681A FR2567208B1 (fr) | 1984-07-05 | 1984-07-05 | Pompe rotative a vide eleve |
US06/751,908 US4588361A (en) | 1984-07-05 | 1985-07-05 | High vacuum rotary pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8410681A FR2567208B1 (fr) | 1984-07-05 | 1984-07-05 | Pompe rotative a vide eleve |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2567208A1 FR2567208A1 (fr) | 1986-01-10 |
FR2567208B1 true FR2567208B1 (fr) | 1988-12-09 |
Family
ID=9305829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8410681A Expired FR2567208B1 (fr) | 1984-07-05 | 1984-07-05 | Pompe rotative a vide eleve |
Country Status (2)
Country | Link |
---|---|
US (1) | US4588361A (fr) |
FR (1) | FR2567208B1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4022523A1 (de) * | 1990-07-16 | 1992-01-23 | Pfeiffer Vakuumtechnik | Einrichtung zum fluten von schnell rotierenden vakuumpumpen |
US5568985A (en) * | 1994-10-26 | 1996-10-29 | General Signal Corporation | Mixer apparatus having an improved steady bearing |
JP3415402B2 (ja) * | 1997-08-15 | 2003-06-09 | 株式会社荏原製作所 | ターボ分子ポンプ |
JP3307572B2 (ja) * | 1997-10-17 | 2002-07-24 | ミネベア株式会社 | スピンドルモータ |
DE10148251B4 (de) * | 2001-09-28 | 2016-10-20 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb einer Gasreibungspumpe |
GB2552958B (en) | 2016-08-15 | 2019-10-30 | Edwards Ltd | Turbo pump vent assembly and method |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2670898A (en) * | 1950-05-22 | 1954-03-02 | Specialized Instr Corp | Centrifuge apparatus |
US3347604A (en) * | 1964-02-19 | 1967-10-17 | Ion Physics Corp | High vacuum rotary seal and bearing combination |
DE1286785B (de) * | 1964-06-10 | 1969-01-09 | Heraeus Christ Gmbh | Vakuumzentrifuge |
US3399827A (en) * | 1967-05-19 | 1968-09-03 | Everett H. Schwartzman | Vacuum pump system |
BE790969A (fr) * | 1971-11-16 | 1973-05-07 | Cit Alcatel | Pivot pour pompes moleculaires rotatives |
DE2359456A1 (de) * | 1973-11-29 | 1975-06-05 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularvakuumpumpe mit gasgelagertem rotor |
DE2408256A1 (de) * | 1974-02-21 | 1975-09-04 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularvakuumpumpe |
US3949131A (en) * | 1974-06-19 | 1976-04-06 | Bell Telephone Laboratories, Incorporated | Photomasks with antistatic control |
US4180370A (en) * | 1975-03-22 | 1979-12-25 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Turbomolecular pump |
DE2526164A1 (de) * | 1975-06-12 | 1976-12-30 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor |
FR2446934A1 (fr) * | 1979-01-19 | 1980-08-14 | Cit Alcatel | Pompe rotative a vide eleve |
SU868124A1 (ru) * | 1980-01-11 | 1981-09-30 | Московский Ордена Трудового Красного Знамени Институт Химического Машиностроения | Турбомолекул рный вакуумный насос |
FR2521650A1 (fr) * | 1982-02-16 | 1983-08-19 | Cit Alcatel | Pompe rotative a vide eleve |
-
1984
- 1984-07-05 FR FR8410681A patent/FR2567208B1/fr not_active Expired
-
1985
- 1985-07-05 US US06/751,908 patent/US4588361A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2567208A1 (fr) | 1986-01-10 |
US4588361A (en) | 1986-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |