EP0000866B1 - Procédé de fabrication d'un système analyseur pour filtre de masse multipôles - Google Patents

Procédé de fabrication d'un système analyseur pour filtre de masse multipôles Download PDF

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Publication number
EP0000866B1
EP0000866B1 EP78100260A EP78100260A EP0000866B1 EP 0000866 B1 EP0000866 B1 EP 0000866B1 EP 78100260 A EP78100260 A EP 78100260A EP 78100260 A EP78100260 A EP 78100260A EP 0000866 B1 EP0000866 B1 EP 0000866B1
Authority
EP
European Patent Office
Prior art keywords
tube
core
metal
grooves
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP78100260A
Other languages
German (de)
English (en)
Other versions
EP0000866A1 (fr
Inventor
Jochen Dr.Rer.Nat. Franzen
Gerhard Dipl.-Phys. Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Daltonics GmbH and Co KG
Original Assignee
Bruken Franzen Analytik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19772737903 external-priority patent/DE2737903C2/de
Priority claimed from DE19772752674 external-priority patent/DE2752674A1/de
Application filed by Bruken Franzen Analytik GmbH filed Critical Bruken Franzen Analytik GmbH
Publication of EP0000866A1 publication Critical patent/EP0000866A1/fr
Application granted granted Critical
Publication of EP0000866B1 publication Critical patent/EP0000866B1/fr
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/4255—Device types with particular constructional features
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S228/00—Metal fusion bonding
    • Y10S228/903—Metal to nonmetal

Definitions

  • the invention relates to a method according to the first part of patent claim 1.
  • a multipole usually consists of the number of poles corresponding to electrically conductive round or hyperbole rods;
  • a quadrupole consists of four parallel, electrically conductive round or hyperbole rods.
  • the rods are held parallel to one another by one or more electrically insulating mounting parts that surround them on the outside in the form of rings or cages, the rod centers being arranged square in section.
  • the requirements for parallelism, freedom from torsion, the equality of the spacing of diagonally opposite rods and the right angle of these diagonals are used in particular for those mass filters that are used in higher mass ranges with masses greater than 500 atomic mass units (m > 500 u) should be extremely high.
  • GB-B-13 67 638 has therefore described a filter which consists of a tubular, torsion-free and low-deflection insulator with conductive surface coverings, this filter being produced from an extruded ceramic tube by subsequent firing and partial covering of the inner surfaces with a conductive layer becomes.
  • the firing causes the pipe to shrink by about 10% and therefore does not permit the dimensional accuracy requirements described above; therefore the use of such quadrupole filters as residual gas analyzers is only in the lower mass range.
  • DE-B-12 97 360 describes a method according to the first part of claim 1, which allows the production of high-precision glass tubes on a mandrel with subsequent metallization of the indented inner surfaces for use as a quadrupole system.
  • the structure of the mandrel, especially a quadrupole structure, is impressed on the softenable tube material, whereupon the mass filter is produced by subsequent metallization of the indentations.
  • FR-A-22 75 877 describes an analyzer system for a multipole mass filter, in which a carrier is produced from dimensionally stable material, in particular glass, according to the known KPG method, which then receives ground pole rods.
  • a sufficiently high precision of the quadrupole spacing cannot be achieved.
  • the invention has for its object to improve the method according to the first part of claim 1 in such a way that a highly precise and extremely smooth surface of the metal layer is achieved with excellent adhesion of the same to the pipe material.
  • a particularly preferred embodiment of the invention is characterized in that metal foils are used as layers, which are inserted into the grooves of the mandrel. It can in particular be provided that glass is used as the tube material and a highly ductile material is used as the foil material. As an alternative to this, it can also be provided that glass is used as the tube material and a metal with a largely identical coefficient of thermal expansion as the tube material is used as the foil material.
  • Gold and platinum are suitable as film material.
  • the invention optionally further provides that the film surface is provided with a meltable coating, in particular made of glass, before being inserted into the grooves of the mandrel to facilitate melting. This will ver melting the metal foils with the pipe material facilitated.
  • the metal foils are provided with protrusions extending from the foil surface facing away from the mold core, in particular in the form of bent flanges, notches, ribs soldered or welded onto the foils or wires soldered to the foils, before introduction that dig into the soft pipe material when the layer material and pipe material merge.
  • a coating with a conductive metal composition in particular conductive varnish, is applied to the inside of the tube and then dried as metallic components, whereupon Gold, silver or copper can preferably be used as conductive metals.
  • a further modified embodiment of the invention provides that the metallic components are produced by means of reduction metallization, for example tin oxide applied in the dipping process.
  • An essential part of the idea of the invention lies in the fact that during the final shaping process of the tube from softenable material, the metal electrodes are shaped at the same time - in particular by the grooves of the mandrel resting thereon - and pressed there by the surrounding tube material, which results in a highly precise and extremely smooth surface of the metal layer results.
  • the metallization is carried out only after the analyzer tube has been formed on the mandrel, and, as explained, insufficient accuracy is not guaranteed.
  • a pre-machined mandrel which in the case shown is made of ground special steel and ground in the semicircular grooves 3, is provided with metal foils 5, in particular gold foils, by the metal foils 5 being inserted into the semicircular grooves 3 be inserted.
  • a glass tube 7 is then pulled over the mold core 1 provided with metal foils 5 and, if necessary, closed and evacuated.
  • the glass tube 7 filled with the mandrel 1 is then heated, for example in an oven, to a temperature slightly above the transformation point of the glass, the glass tube 7 laying on the metal foils 5 located in the grooves 3 and fusing with them (FIG. 3) .
  • the mandrel 1 contracts more than the shaped glass tube 7, so that the mandrel 1 can be easily pulled out of the shaped glass tube 7.
  • FIG. 4 shows the completely manufactured analyzer system for a quadrupole mass filter as a glass tube 7 provided with tube indentations 9, the metal foils 5 being melted onto the tube indentations 9 in the interior of the glass tube 7.
  • a pre-machined mandrel 1 in the exemplary embodiment shown consisting of ground special steel, is ground in be inserted into the semicircular grooves 2.
  • the metal foils 5 are provided on the side facing away from the mandrel 1 with longitudinally extending flanges 6 perpendicular to the metal surface.
  • a glass tube 7 is pulled over the mold core 1 provided with the metal foils 5 and optionally closed and evacuated. Then will the glass tube 7 filled with the mandrel 1 is heated, for example in an oven, to a temperature slightly above the transformation point of the glass, the glass tube 7 laying on the metal foils in the grooves 3.
  • the flanges 6 dig into the soft material of the glass tube (FIG. 6). When cooling, the mandrel 1 contracts more than the shaped glass tube 7, so that the mandrel 1 can be easily pulled out of the shaped glass tube 7.
  • the metal foils 5 remain firmly connected to the tube indentations 9 of the glass tube 7 formed over the grooves 3 of the mandrel 1, the hold being reinforced in particular by the flanges 6 of the metal foils 5 melted into the glass tube 7.
  • FIG. 7 shows the completely manufactured analyzer system for a quadrupole mass filter as a glass tube provided with the tube indentations 9, the metal foils 5 being applied to the tube indentations 9 in the interior of the glass tube 7 and fused to the tube material in particular by means of their flanges 6.
  • the mandrel 1 is then introduced into the tube 7 provided with the metal coatings in such a way that the metal coatings are located above the grooves 3 of the mandrel and rest on the tube indentations 9 formed in the interior of the glass tube 7 according to the method steps described above.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Claims (10)

1. Procédé de fabrication d'un système analyseur de haute précision et de forme stable pour filtre de masse multipolaire, dans lequel un tube (7) en matière mauvaise conductrice de l'électricité et se ramollissant à la chaleur est mis autour d'un noyau (1) de cotes précises, ayant un plus grand coefficient de dilatation thermique que le tube et pourvu de gorges parallèles (3), après quoi le tube est mis sous vide et chauffé" avec le noyau de façon que la matière du tube épouse les gorges du noyau puis, après refroidissement produisant la solidification, est séparé du noyau, pourvu de concavités, et dans lequel des couches d'éléments métalliques (5) bons conducteurs de l'électricité sont appliquées sur la face intérieure du tube dans la zone des gorges, caractérisé par le fait que les couches (5) sont placées entre le noyau (1) et le tube (7) avant le chauffage de ce dernier et que la matière des couches s'unit à celle du tube quan ce dernier se ramollit et s'applique au fond des gorges (3) et est déformée par la matière du tube qui l'entoure et serrée contre le fond des gorges, de sorte qu'à l'enlèvement du tube ainsi façonné solidifié, les couches unies aux concavités formées peuvent être séparées du noyau avec le tube.
2. Procédé selon la revendication 1, dans lequel on utilise, comme couches, des feuilles métalliques qui sont placées dans les gorges du noyau.
3. Procédé selon la revendication 2, dans lequel la matière du tube est du verre et la matière des feuilles un métal de haute ductilité.
4. Procédé selon la revendication 2, dans lequel la matière du tube est du verre et celle des feuilles un métal ayant un coefficient de dilatation thermique semblable à celui de la matière du tube.
5. Procédé selon l'une quelconque des revendications 2 à 4, dans lequel, avant la mise des feuilles dans les gorges du noyau, la surface des feuilles, pour que l'union soit plus facile, est pourvue d'un revêtement fusible en particulier en verre.
6. Procédé selon l'une quelconque des revendications 2 à 4, dans lequel les feuilles métalliques, avant leur mise en place, sont pourvues de saillies partant de leur face opposée au noyau, en particulier d'ailes rabattues, d'entailles, de nervures ou de fils soudés à elles, lesquelles saillies s'enfoncent dans la matière molle du tube lors de l'union de celle-ci et de la matière des couches.
7. Procédé selon la revendication 1, dans lequel on applique, comme éléments métalliques, sur la face intérieure du tube, un revêtement constitué d'une pâte contenant du métal, en particulier d'or ou d'argent brillant, qui se transforme en métal lors du chauffage du tube.
8. Procédé selon la revendication 1, dans lequel on applique comme éléments métalliques, sur la face intérieure du tube, un revêtement de composition à base de métal conducteur, en particulier de vernis conducteur, qui est ensuite séché.
9. Procédé selon la revendication 8, dans lequel on utilise comme métal conducteur de l'or, de l'argent ou du cuivre.
10. Procédé selon la revendication 1, dans lequel les éléments métalliques sont produits par métallisation par réduction, par exemple d'oxyde d'étain appliqué au trempé.
EP78100260A 1977-08-23 1978-06-28 Procédé de fabrication d'un système analyseur pour filtre de masse multipôles Expired EP0000866B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE2737903 1977-08-23
DE19772737903 DE2737903C2 (de) 1977-08-23 1977-08-23 Verfahren zur Herstellung eines Analysatorsystems für ein Multipol-Massenfilter
DE2752674 1977-11-25
DE19772752674 DE2752674A1 (de) 1977-11-25 1977-11-25 Verfahren zum herstellen eines massenfilter-analysatorsystems sowie danach hergestelltes analysatorsystem

Publications (2)

Publication Number Publication Date
EP0000866A1 EP0000866A1 (fr) 1979-03-07
EP0000866B1 true EP0000866B1 (fr) 1981-05-20

Family

ID=25772594

Family Applications (1)

Application Number Title Priority Date Filing Date
EP78100260A Expired EP0000866B1 (fr) 1977-08-23 1978-06-28 Procédé de fabrication d'un système analyseur pour filtre de masse multipôles

Country Status (2)

Country Link
US (1) US4213557A (fr)
EP (1) EP0000866B1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3784138T2 (de) * 1986-11-19 1993-06-03 Hewlett Packard Co Quarz-quadrupol fuer massenfilter.
GB8707169D0 (en) * 1987-03-25 1987-04-29 Philips Nv Electron beam device
US4983195A (en) * 1990-01-04 1991-01-08 Corning Incorporated Method of making fiber optic coupler with longitudinal protrusions
GB2304991B (en) * 1992-12-02 1997-05-28 Hewlett Packard Co Multipole apparatus having integral interpole bridges
US5298745A (en) * 1992-12-02 1994-03-29 Hewlett-Packard Company Multilayer multipole
US5525084A (en) * 1994-03-25 1996-06-11 Hewlett Packard Company Universal quadrupole and method of manufacture
US5644131A (en) * 1996-05-22 1997-07-01 Hewlett-Packard Co. Hyperbolic ion trap and associated methods of manufacture
US5852270A (en) * 1996-07-16 1998-12-22 Leybold Inficon Inc. Method of manufacturing a miniature quadrupole using electrode-discharge machining
EP1137046A2 (fr) * 2000-03-13 2001-09-26 Agilent Technologies Inc. a Delaware Corporation Réalisation de filtres et de multipôles à haute précision
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
DE102004014584B4 (de) * 2004-03-25 2009-06-10 Bruker Daltonik Gmbh Hochfrequenz-Quadrupolsysteme mit Potentialgradienten
DE102004048496B4 (de) * 2004-10-05 2008-04-30 Bruker Daltonik Gmbh Ionenführung mit HF-Blendenstapeln
US10147595B2 (en) 2016-12-19 2018-12-04 Agilent Technologies, Inc. Quadrupole rod assembly

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2592614A (en) * 1946-01-08 1952-04-15 Champion Paper & Fibre Co Method of making tubular metallic wave guides
DE1297360B (de) * 1962-07-21 1969-06-12 Siemens Ag Verfahren zum Herstellen eines verwindungsfreien Analysatorsystems fuer ein Multipolmassenfilter
CH409463A (de) * 1962-07-21 1966-03-15 Siemens Ag Verfahren zum Herstellen des Analysatorsystems von Massenspektrometern
US3248788A (en) * 1962-11-21 1966-05-03 Martin Marietta Corp Application of flame-sprayed linings on the inside diameter of tubes
GB1468139A (en) * 1974-06-18 1977-03-23 Varian Mat Gmbh Monopole or multipole electrode system for a mass filter

Also Published As

Publication number Publication date
US4213557A (en) 1980-07-22
EP0000866A1 (fr) 1979-03-07

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