EA201690827A1 - Модульный лазерный аппарат - Google Patents
Модульный лазерный аппаратInfo
- Publication number
- EA201690827A1 EA201690827A1 EA201690827A EA201690827A EA201690827A1 EA 201690827 A1 EA201690827 A1 EA 201690827A1 EA 201690827 A EA201690827 A EA 201690827A EA 201690827 A EA201690827 A EA 201690827A EA 201690827 A1 EA201690827 A1 EA 201690827A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- laser
- modules
- line
- microlenses
- row
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0911—Anamorphotic systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0081—Simple or compound lenses having one or more elements with analytic function to create variable power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/06—Simple or compound lenses with non-spherical faces with cylindrical or toric faces
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
Объектом изобретения является лазерный аппарат, содержащий несколько лазерных модулей, каждый из которых генерирует лазерную линию на уровне рабочей плоскости (6), при этом упомянутые лазерные модули расположены рядом друг с другом таким образом, чтобы генерируемые модулями лазерные линии объединялись в единую лазерную линию. Лазерный аппарат содержит также первый ряд (1) микролинз, собирающую линзу (2) и второй ряд (3) микролинз, расположенный в фокальной плоскости собирающей линзы (2), при этом конечная лазерная линия имеет на уровне рабочей плоскости (6) профиль плотности мощности, имеющий форму остроконечного колпака (1a,1b,1c,1d). Лазерные модули расположены рядом друг с другом таким образом, чтобы генерируемые лазерные линии объединялись в единую лазерную линию (3) общей длиной, превышающей 1,2 м.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1360222A FR3012264B1 (fr) | 2013-10-21 | 2013-10-21 | Appareil laser modulaire |
PCT/FR2014/052642 WO2015059388A1 (fr) | 2013-10-21 | 2014-10-16 | Appareil laser modulaire |
Publications (2)
Publication Number | Publication Date |
---|---|
EA201690827A1 true EA201690827A1 (ru) | 2016-08-31 |
EA030536B1 EA030536B1 (ru) | 2018-08-31 |
Family
ID=49667484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EA201690827A EA030536B1 (ru) | 2013-10-21 | 2014-10-16 | Модульный лазерный аппарат |
Country Status (17)
Country | Link |
---|---|
US (1) | US9753290B2 (ru) |
EP (1) | EP3060957B1 (ru) |
JP (1) | JP6363718B2 (ru) |
KR (1) | KR102229320B1 (ru) |
CN (1) | CN105658371B (ru) |
AU (1) | AU2014338782B2 (ru) |
BR (1) | BR112016005652A8 (ru) |
CA (1) | CA2925491A1 (ru) |
EA (1) | EA030536B1 (ru) |
ES (1) | ES2658750T3 (ru) |
FR (1) | FR3012264B1 (ru) |
HU (1) | HUE036628T2 (ru) |
MX (1) | MX352465B (ru) |
MY (1) | MY187674A (ru) |
PL (1) | PL3060957T3 (ru) |
TW (1) | TWI635533B (ru) |
WO (1) | WO2015059388A1 (ru) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201528379A (zh) * | 2013-12-20 | 2015-07-16 | Applied Materials Inc | 雙波長退火方法與設備 |
FR3040319B1 (fr) * | 2015-08-25 | 2017-11-24 | Saint Gobain | Appareil laser modulaire |
CN106842587B (zh) * | 2015-12-04 | 2020-12-15 | 北京润和微光科技有限公司 | 衍射光学方法实现高斯光整形为超高长宽比的极细线型均匀光斑 |
CN115121940A (zh) * | 2016-07-27 | 2022-09-30 | 通快激光有限责任公司 | 激光线照射 |
CN107252981B (zh) * | 2017-07-14 | 2018-10-09 | 中国科学院微电子研究所 | 一种激光加工晶圆的方法及装置 |
FR3072895B1 (fr) * | 2017-10-31 | 2019-10-18 | Saint-Gobain Glass France | Procede d'alignement d'une pluralite de lignes lasers |
US10822270B2 (en) | 2018-08-01 | 2020-11-03 | Guardian Glass, LLC | Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same |
CN109860034B (zh) * | 2019-01-25 | 2021-03-30 | 云谷(固安)科技有限公司 | 激光退火装置和方法、显示面板及其制备装置 |
US11137246B2 (en) * | 2019-01-31 | 2021-10-05 | Himax Technologies Limited | Optical device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737325A (en) * | 1980-08-15 | 1982-03-01 | Ricoh Co Ltd | Imaging device |
JP3017277B2 (ja) * | 1989-12-07 | 2000-03-06 | 株式会社リコー | 光アニール装置 |
JPH07202263A (ja) * | 1993-12-28 | 1995-08-04 | Ricoh Co Ltd | 端面発光型発光ダイオード、アレイ状光源、側面受光型受光素子、受発光素子、端面発光型発光ダイオードアレイ状光源 |
JP3883592B2 (ja) * | 1995-08-07 | 2007-02-21 | 株式会社半導体エネルギー研究所 | レーザ照射方法および半導体作製方法および半導体装置の作製方法および液晶電気光学装置の作製方法 |
US6005717A (en) * | 1998-11-17 | 1999-12-21 | Ceramoptec Industries, Inc. | Diode laser beam combiner system |
JP2002141301A (ja) | 2000-11-02 | 2002-05-17 | Mitsubishi Electric Corp | レーザアニーリング用光学系とこれを用いたレーザアニーリング装置 |
JP2002268001A (ja) * | 2001-03-13 | 2002-09-18 | Ricoh Co Ltd | 照明装置 |
DE10111871A1 (de) * | 2001-03-13 | 2002-09-19 | Heidelberger Druckmasch Ag | Bebilderungseinrichtung für eine Druckform mit einem Array von VCSEL-Lichtquellen |
JP2005221872A (ja) * | 2004-02-06 | 2005-08-18 | Nec Viewtechnology Ltd | 照明装置および表示装置 |
WO2008024211A2 (en) * | 2006-08-23 | 2008-02-28 | Applied Materials, Inc. | Fast axis beam profile shaping |
JP2008300602A (ja) * | 2007-05-31 | 2008-12-11 | Sony Corp | 照射装置、半導体装置の製造装置、半導体装置の製造方法および表示装置の製造方法 |
DE102009021251A1 (de) * | 2009-05-14 | 2010-11-18 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Formung von Laserstrahlung sowie Laservorrichtung mit einer derartigen Vorrichtung |
JP5894529B2 (ja) * | 2009-08-20 | 2016-03-30 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 設定変更可能な輝度分布を備えるレーザー装置 |
-
2013
- 2013-10-21 FR FR1360222A patent/FR3012264B1/fr not_active Expired - Fee Related
-
2014
- 2014-10-16 ES ES14796824.2T patent/ES2658750T3/es active Active
- 2014-10-16 WO PCT/FR2014/052642 patent/WO2015059388A1/fr active Application Filing
- 2014-10-16 MY MYPI2016701416A patent/MY187674A/en unknown
- 2014-10-16 AU AU2014338782A patent/AU2014338782B2/en not_active Expired - Fee Related
- 2014-10-16 JP JP2016548439A patent/JP6363718B2/ja not_active Expired - Fee Related
- 2014-10-16 PL PL14796824T patent/PL3060957T3/pl unknown
- 2014-10-16 EA EA201690827A patent/EA030536B1/ru not_active IP Right Cessation
- 2014-10-16 KR KR1020167010029A patent/KR102229320B1/ko active IP Right Grant
- 2014-10-16 HU HUE14796824A patent/HUE036628T2/hu unknown
- 2014-10-16 MX MX2016005139A patent/MX352465B/es active IP Right Grant
- 2014-10-16 CN CN201480057591.4A patent/CN105658371B/zh not_active Expired - Fee Related
- 2014-10-16 BR BR112016005652A patent/BR112016005652A8/pt not_active Application Discontinuation
- 2014-10-16 US US15/024,486 patent/US9753290B2/en active Active
- 2014-10-16 EP EP14796824.2A patent/EP3060957B1/fr active Active
- 2014-10-16 CA CA2925491A patent/CA2925491A1/fr not_active Abandoned
- 2014-10-17 TW TW103135976A patent/TWI635533B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP3060957B1 (fr) | 2017-12-13 |
BR112016005652A8 (pt) | 2020-02-18 |
TWI635533B (zh) | 2018-09-11 |
US9753290B2 (en) | 2017-09-05 |
ES2658750T3 (es) | 2018-03-12 |
JP2017504219A (ja) | 2017-02-02 |
KR20160073376A (ko) | 2016-06-24 |
MX352465B (es) | 2017-11-27 |
EA030536B1 (ru) | 2018-08-31 |
CN105658371A (zh) | 2016-06-08 |
MY187674A (en) | 2021-10-08 |
FR3012264A1 (fr) | 2015-04-24 |
EP3060957A1 (fr) | 2016-08-31 |
CA2925491A1 (fr) | 2015-04-30 |
PL3060957T3 (pl) | 2018-07-31 |
JP6363718B2 (ja) | 2018-07-25 |
TW201523706A (zh) | 2015-06-16 |
MX2016005139A (es) | 2016-07-18 |
AU2014338782A1 (en) | 2016-05-12 |
WO2015059388A1 (fr) | 2015-04-30 |
HUE036628T2 (hu) | 2018-07-30 |
AU2014338782B2 (en) | 2019-09-26 |
KR102229320B1 (ko) | 2021-03-19 |
US20160216522A1 (en) | 2016-07-28 |
FR3012264B1 (fr) | 2017-04-21 |
CN105658371B (zh) | 2017-09-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): AM AZ BY KZ KG TJ TM |
|
MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): RU |