DK1787168T3 - Ikke-vandige mikroelektroniske rengøringssammensætninger indeholdende fruktose - Google Patents

Ikke-vandige mikroelektroniske rengøringssammensætninger indeholdende fruktose

Info

Publication number: DK1787168T3
Authority: DK; Denmark
Prior art keywords: aqueous; compositions containing; cleaning compositions; containing fructose; microelectronic cleaning
Prior art date: 2004-07-15

Application number

DK05712754.0T

Other languages

English (en)

Inventor

Seiji Inaoka

Original Assignee

Mallinckrodt Baker Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-07-15

Filing date

2005-02-01

Publication date

2010-08-09

2005-02-01 Application filed by Mallinckrodt Baker Inc filed Critical Mallinckrodt Baker Inc

2010-08-09 Application granted granted Critical

2010-08-09 Publication of DK1787168T3 publication Critical patent/DK1787168T3/da

Links

239000000203 mixture Substances 0.000 title abstract 3
RFSUNEUAIZKAJO-ARQDHWQXSA-N Fructose Chemical compound OC[C@H]1O[C@](O)(CO)[C@@H](O)[C@@H]1O RFSUNEUAIZKAJO-ARQDHWQXSA-N 0.000 title abstract 2
229930091371 Fructose Natural products 0.000 title abstract 2
239000005715 Fructose Substances 0.000 title abstract 2
238000004140 cleaning Methods 0.000 title 1
238000004377 microelectronic Methods 0.000 title 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
229910052782 aluminium Inorganic materials 0.000 abstract 1
150000001412 amines Chemical class 0.000 abstract 1
229910052802 copper Inorganic materials 0.000 abstract 1
239000010949 copper Substances 0.000 abstract 1
230000007797 corrosion Effects 0.000 abstract 1
238000005260 corrosion Methods 0.000 abstract 1
239000003112 inhibitor Substances 0.000 abstract 1
230000009972 noncorrosive effect Effects 0.000 abstract 1
229920002120 photoresistant polymer Polymers 0.000 abstract 1
239000003495 polar organic solvent Substances 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0073—Anticorrosion compositions
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2065—Polyhydric alcohols
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2096—Heterocyclic compounds
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

Landscapes

Chemical & Material Sciences (AREA)
General Physics & Mathematics (AREA)
Physics & Mathematics (AREA)
Organic Chemistry (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Oil, Petroleum & Natural Gas (AREA)
Wood Science & Technology (AREA)
Life Sciences & Earth Sciences (AREA)
Health & Medical Sciences (AREA)
Emergency Medicine (AREA)
Detergent Compositions (AREA)
Cleaning Or Drying Semiconductors (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Photosensitive Polymer And Photoresist Processing (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

DK05712754.0T 2004-07-15 2005-02-01 Ikke-vandige mikroelektroniske rengøringssammensætninger indeholdende fruktose DK1787168T3 (da)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US58824804P	2004-07-15	2004-07-15
PCT/US2005/003422 WO2006019402A1 (en)	2004-07-15	2005-02-01	Non-aqueous microelectronic cleaning compositions containing fructose

Publications (1)

Publication Number	Publication Date
DK1787168T3 true DK1787168T3 (da)	2010-08-09

Family

ID=34960702

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK05712754.0T DK1787168T3 (da)	2004-07-15	2005-02-01	Ikke-vandige mikroelektroniske rengøringssammensætninger indeholdende fruktose

Country Status (19)

Country	Link
US (1)	US7825078B2 (da)
EP (1)	EP1787168B1 (da)
JP (1)	JP4272676B2 (da)
KR (1)	KR100642185B1 (da)
CN (1)	CN1985217B (da)
AT (1)	ATE471537T1 (da)
BR (1)	BRPI0513315A (da)
CA (1)	CA2573788A1 (da)
DE (1)	DE602005021890D1 (da)
DK (1)	DK1787168T3 (da)
ES (1)	ES2345616T3 (da)
IL (1)	IL180532A (da)
MY (1)	MY140032A (da)
NO (1)	NO20070835L (da)
PL (1)	PL1787168T3 (da)
PT (1)	PT1787168E (da)
TW (1)	TW200613544A (da)
WO (1)	WO2006019402A1 (da)
ZA (1)	ZA200610563B (da)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR20060064441A (ko) *	2004-12-08	2006-06-13	말린크로트 베이커, 인코포레이티드	비수성 비부식성 마이크로전자 세정 조성물
KR101088568B1 (ko) *	2005-04-19	2011-12-05	아반토르 퍼포먼스 머티리얼스, 인크.	갈바닉 부식을 억제하는 비수성 포토레지스트 스트립퍼
KR100829376B1 (ko) *	2006-12-20	2008-05-13	동부일렉트로닉스 주식회사	반도체 소자의 세정방법
JP2009008768A (ja) *	2007-06-26	2009-01-15	Kobe Steel Ltd	表示装置の製造方法
TW200925800A (en) *	2007-12-06	2009-06-16	Mallinckrodt Baker Inc	Fluoride-free photoresist stripper or residue removing cleaning compositions containing conjugate oligomeric or polymeric material of alpha-hydroxycarbonyl compound/amine or ammonia reaction
KR101579846B1 (ko) *	2008-12-24	2015-12-24	주식회사 이엔에프테크놀로지	포토레지스트 패턴 제거용 조성물 및 이를 이용한 금속 패턴의 형성 방법
MY152051A (en) *	2009-02-25	2014-08-15	Avantor Performance Mat Inc	Multipurpose acidic, organic solvent based microelectronic cleaning composition
KR101089211B1 (ko) *	2010-12-02	2011-12-02	엘티씨 (주)	1차 알칸올 아민을 포함하는 ｌｃｄ 제조용 포토레지스트 박리액 조성물
WO2012166902A1 (en) *	2011-06-01	2012-12-06	Avantor Performance Materials, Inc.	SEMI-AQUEOUS POLYMER REMOVAL COMPOSITIONS WITH ENHANCED COMPATIBILITY TO COPPER, TUNGSTEN, AND POROUS LOW-ĸ DIELECTRICS
WO2013052809A1 (en)	2011-10-05	2013-04-11	Avantor Performance Materials, Inc.	Microelectronic substrate cleaning compositions having copper/azole polymer inhibition
JP6144468B2 (ja) *	2012-08-22	2017-06-07	富士フイルム株式会社	レジスト剥離方法および半導体基板製品の製造方法
CN103937627B (zh) *	2014-03-28	2017-10-10	张海鹏	一种用于贴片电容的清洗剂

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6326130B1 (en)	1993-10-07	2001-12-04	Mallinckrodt Baker, Inc.	Photoresist strippers containing reducing agents to reduce metal corrosion
US5567574A (en)	1995-01-10	1996-10-22	Mitsubishi Gas Chemical Company, Inc.	Removing agent composition for photoresist and method of removing
US6440326B1 (en) *	1998-08-13	2002-08-27	Mitsubishi Gas Chemical Company, Inc.	Photoresist removing composition
KR100286860B1 (ko)	1998-12-31	2001-07-12	주식회사 동진쎄미켐	포토레지스트 리무버 조성물
JP4224651B2 (ja) *	1999-02-25	2009-02-18	三菱瓦斯化学株式会社	レジスト剥離剤およびそれを用いた半導体素子の製造方法
US6916772B2 (en) *	2001-07-13	2005-07-12	Ekc Technology, Inc.	Sulfoxide pyrolid(in)one alkanolamine cleaner composition
JP4252758B2 (ja) *	2002-03-22	2009-04-08	関東化学株式会社	フォトレジスト残渣除去液組成物

2005
- 2005-02-01 AT AT05712754T patent/ATE471537T1/de active
- 2005-02-01 US US11/630,602 patent/US7825078B2/en not_active Expired - Fee Related
- 2005-02-01 DE DE602005021890T patent/DE602005021890D1/de active Active
- 2005-02-01 PL PL05712754T patent/PL1787168T3/pl unknown
- 2005-02-01 PT PT05712754T patent/PT1787168E/pt unknown
- 2005-02-01 CA CA002573788A patent/CA2573788A1/en not_active Abandoned
- 2005-02-01 BR BRPI0513315-7A patent/BRPI0513315A/pt not_active IP Right Cessation
- 2005-02-01 JP JP2006534481A patent/JP4272676B2/ja not_active Expired - Fee Related
- 2005-02-01 CN CN2005800237425A patent/CN1985217B/zh not_active Expired - Fee Related
- 2005-02-01 EP EP05712754A patent/EP1787168B1/en not_active Not-in-force
- 2005-02-01 ES ES05712754T patent/ES2345616T3/es active Active
- 2005-02-01 WO PCT/US2005/003422 patent/WO2006019402A1/en active Application Filing
- 2005-02-01 DK DK05712754.0T patent/DK1787168T3/da active
- 2005-02-21 KR KR1020050014181A patent/KR100642185B1/ko not_active IP Right Cessation
- 2005-02-25 MY MYPI20050742A patent/MY140032A/en unknown
- 2005-03-23 TW TW094108991A patent/TW200613544A/zh unknown
2006
- 2006-12-15 ZA ZA200610563A patent/ZA200610563B/en unknown
2007
- 2007-01-03 IL IL180532A patent/IL180532A/en not_active IP Right Cessation
- 2007-02-13 NO NO20070835A patent/NO20070835L/no not_active Application Discontinuation

Also Published As

Publication number	Publication date
CN1985217B (zh)	2011-10-12
ATE471537T1 (de)	2010-07-15
KR100642185B1 (ko)	2006-11-10
BRPI0513315A (pt)	2008-05-06
KR20060043033A (ko)	2006-05-15
CN1985217A (zh)	2007-06-20
EP1787168B1 (en)	2010-06-16
IL180532A0 (en)	2007-06-03
US20080287333A1 (en)	2008-11-20
IL180532A (en)	2012-03-29
ZA200610563B (en)	2008-07-30
US7825078B2 (en)	2010-11-02
PT1787168E (pt)	2010-07-16
JP4272676B2 (ja)	2009-06-03
EP1787168A1 (en)	2007-05-23
NO20070835L (no)	2007-04-10
CA2573788A1 (en)	2006-02-23
DE602005021890D1 (de)	2010-07-29
PL1787168T3 (pl)	2010-11-30
MY140032A (en)	2009-11-30
ES2345616T3 (es)	2010-09-28
TW200613544A (en)	2006-05-01
WO2006019402A1 (en)	2006-02-23
JP2007511784A (ja)	2007-05-10

Publication	Publication Date	Title
DK1787168T3 (da)	2010-08-09	Ikke-vandige mikroelektroniske rengøringssammensætninger indeholdende fruktose
TW200619379A (en)	2006-06-16	Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors
TW200509237A (en)	2005-03-01	Compositions suitable for removing photoresist, photoresist byproducts and etching residue, and use thereof
MY141293A (en)	2010-04-16	Non-aqueous, non-corrosive microelectronic cleaning compositions
TW200508300A (en)	2005-03-01	Composition and method for removing copper-compatible resist
MY163132A (en)	2017-08-15	Cleaning formulations
JP2008509554A5 (da)	2008-08-07
AR069474A1 (es)	2010-01-27	Material anticorrosivo
TW200801856A (en)	2008-01-01	Composition for removing photoresist
CR9664A (es)	2009-07-07	Inhibidores de histona deacetilasa
PA8660001A1 (es)	2006-09-08	Amino-imidazolonas para la inhibicion de b-secretasa
NO20050076L (no)	2005-01-06	Mikroelektronikk-rengjoringssammensetninger som inneholder oksidasjonsmidler og organiske losemidler
DE602005025830D1 (de)	2011-02-24	Zusammensetzung zum Abziehen und Reinigen und deren Verwendung
TW200736857A (en)	2007-10-01	Chemical rinse composition for removing resist stripper
ATE498859T1 (de)	2011-03-15	Wasserfreie photolackätzlösung, welche die galvanische korrosion verhindert
JP2008537182A5 (da)	2009-04-30
SG152961A1 (en)	2009-06-29	Flouride-containing photoresist stripper or residue removing cleaning compositions containing conjugate oligomeric or polymeric material of alpha-hydroxycarbonyl compound/amine or ammonia reaction
ATE484774T1 (de)	2010-10-15	Fotoresist-entfernungszusammensetzung für die halbleiterherstellung
WO2011008051A3 (ko)	2011-04-21	구리 또는 구리합금용 레지스트 제거용 조성물
DK1994134T3 (da)	2009-11-02	Stabilierede, ikke-vandige rensningssammensætninger for mikroelektroniske substrater
TW200715073A (en)	2007-04-16	Photoresist stripper composition and method for manufacturing a semiconductor device using the same
SG146575A1 (en)	2008-10-30	Semiconductor etch residue remover and cleansing compositions
SG152960A1 (en)	2009-06-29	Flouride-free photoresist stripper or residue removing cleaning compositions containing conjugate oligomeric or polymeric material of alpha-hydroxycarbonyl compound/amine or ammonia reaction
ITVE20040053A1 (it)	2005-03-23	Scatola di vincolo di piastrine portafrutti per impianti elettrici.
RU2009149494A (ru)	2011-07-10	Антидоты гербицида 2,4-дихлорфеноксиуксусной кислоты