DK1192505T3 - Fremgangsmåder til at forsyne polymerfilm med mönster og anvendelse af fremgangsmåderne - Google Patents

Fremgangsmåder til at forsyne polymerfilm med mönster og anvendelse af fremgangsmåderne

Info

Publication number
DK1192505T3
DK1192505T3 DK00927984T DK00927984T DK1192505T3 DK 1192505 T3 DK1192505 T3 DK 1192505T3 DK 00927984 T DK00927984 T DK 00927984T DK 00927984 T DK00927984 T DK 00927984T DK 1192505 T3 DK1192505 T3 DK 1192505T3
Authority
DK
Denmark
Prior art keywords
polymer
stamp
thin film
methods
material surface
Prior art date
Application number
DK00927984T
Other languages
English (en)
Inventor
Olle Inganaes
Tobias Nyberg
Tomas Granlund
Original Assignee
Thin Film Electronics Asa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thin Film Electronics Asa filed Critical Thin Film Electronics Asa
Application granted granted Critical
Publication of DK1192505T3 publication Critical patent/DK1192505T3/da

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
    • B41C1/00—Forme preparation
    • B41C1/06—Transferring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laminated Bodies (AREA)
  • Silicon Polymers (AREA)
  • Formation Of Insulating Films (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Polyethers (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
DK00927984T 1999-05-12 2000-05-12 Fremgangsmåder til at forsyne polymerfilm med mönster og anvendelse af fremgangsmåderne DK1192505T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO19992295A NO311797B1 (no) 1999-05-12 1999-05-12 Fremgangsmåter til mönstring av polymerfilmer og anvendelse av fremgangsmåtene

Publications (1)

Publication Number Publication Date
DK1192505T3 true DK1192505T3 (da) 2006-11-20

Family

ID=19903327

Family Applications (1)

Application Number Title Priority Date Filing Date
DK00927984T DK1192505T3 (da) 1999-05-12 2000-05-12 Fremgangsmåder til at forsyne polymerfilm med mönster og anvendelse af fremgangsmåderne

Country Status (13)

Country Link
US (1) US6966997B1 (da)
EP (1) EP1192505B1 (da)
JP (1) JP3469204B2 (da)
KR (1) KR100453255B1 (da)
CN (1) CN100354754C (da)
AT (1) ATE333666T1 (da)
AU (1) AU4628600A (da)
DE (1) DE60029445T2 (da)
DK (1) DK1192505T3 (da)
ES (1) ES2267533T3 (da)
NO (1) NO311797B1 (da)
RU (1) RU2217785C2 (da)
WO (1) WO2000070406A1 (da)

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Also Published As

Publication number Publication date
NO992295L (no) 2000-11-13
DE60029445T2 (de) 2007-02-08
US6966997B1 (en) 2005-11-22
CN100354754C (zh) 2007-12-12
EP1192505A1 (en) 2002-04-03
JP3469204B2 (ja) 2003-11-25
ES2267533T3 (es) 2007-03-16
KR20020026161A (ko) 2002-04-06
EP1192505B1 (en) 2006-07-19
CN1350659A (zh) 2002-05-22
NO311797B1 (no) 2002-01-28
RU2217785C2 (ru) 2003-11-27
ATE333666T1 (de) 2006-08-15
KR100453255B1 (ko) 2004-10-15
JP2002544373A (ja) 2002-12-24
DE60029445D1 (de) 2006-08-31
WO2000070406A1 (en) 2000-11-23
NO992295D0 (no) 1999-05-12
AU4628600A (en) 2000-12-05

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