DK0424483T3 - Tryksensor - Google Patents

Tryksensor

Info

Publication number
DK0424483T3
DK0424483T3 DK90904828.2T DK90904828T DK0424483T3 DK 0424483 T3 DK0424483 T3 DK 0424483T3 DK 90904828 T DK90904828 T DK 90904828T DK 0424483 T3 DK0424483 T3 DK 0424483T3
Authority
DK
Denmark
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
DK90904828.2T
Other languages
English (en)
Inventor
Frank Hegner
Manfred Frank
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Application granted granted Critical
Publication of DK0424483T3 publication Critical patent/DK0424483T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DK90904828.2T 1989-04-13 1990-03-24 Tryksensor DK0424483T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3912217A DE3912217A1 (de) 1989-04-13 1989-04-13 Drucksensor

Publications (1)

Publication Number Publication Date
DK0424483T3 true DK0424483T3 (da) 1993-10-11

Family

ID=6378642

Family Applications (1)

Application Number Title Priority Date Filing Date
DK90904828.2T DK0424483T3 (da) 1989-04-13 1990-03-24 Tryksensor

Country Status (9)

Country Link
US (1) US5076147A (da)
EP (1) EP0424483B1 (da)
JP (1) JP2675190B2 (da)
CA (1) CA2028836C (da)
DE (2) DE3912217A1 (da)
DK (1) DK0424483T3 (da)
ES (1) ES2042290T3 (da)
IE (1) IE901049L (da)
WO (1) WO1990012300A1 (da)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4028366A1 (de) * 1990-09-07 1992-03-12 Daimler Benz Ag Detektor zur messung eines magnetfeldes und messeinrichtung unter verwendung dieses detektors
DE9013464U1 (de) * 1990-09-25 1991-01-31 Arnheiter, Bernd, Dipl.-Phys., 4040 Neuss Temperatursensor
DE4136995C2 (de) * 1991-11-11 1996-08-08 Sensycon Ind Sensorsyst Kapazitiver Drucksensor
DE4207951C2 (de) * 1992-03-10 1995-08-31 Mannesmann Ag Kapazitiver Druck- oder Differenzdrucksensor in Glas-Silizium-Technik
DE4231120C2 (de) * 1992-09-17 2002-01-24 Mannesmann Vdo Ag Drucksensor
US5461922A (en) * 1993-07-27 1995-10-31 Lucas-Novasensor Pressure sensor isolated within housing having integral diaphragm and method of making same
US5889211A (en) * 1995-04-03 1999-03-30 Motorola, Inc. Media compatible microsensor structure and methods of manufacturing and using the same
DE19700773A1 (de) * 1997-01-13 1998-07-16 Bosch Gmbh Robert Membran für einen Drucksensor
US5744214A (en) * 1997-01-30 1998-04-28 International Business Machines Corporation Corrosion resistant molybdenum mask
JP3404563B2 (ja) * 1997-10-09 2003-05-12 理化工業株式会社 圧力センサ
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
US6311561B1 (en) 1997-12-22 2001-11-06 Rosemount Aerospace Inc. Media compatible pressure sensor
US6578427B1 (en) * 1999-06-15 2003-06-17 Envec Mess- Und Regeltechnik Gmbh + Co. Capacitive ceramic relative-pressure sensor
JP2001324398A (ja) * 2000-03-07 2001-11-22 Anelva Corp 耐蝕型真空センサ
DE10031135A1 (de) 2000-06-30 2002-01-17 Grieshaber Vega Kg Druckmeßvorrichtung
DE10031129A1 (de) * 2000-06-30 2002-01-17 Grieshaber Vega Kg Überlastfester Drucksensor
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
DE10114665A1 (de) * 2001-03-23 2002-09-26 Bernhard Trier Drucksensor mit Membran
DE10114666A1 (de) * 2001-03-23 2002-09-26 Bernhard Trier Differenzdrucksensor
DE10133745A1 (de) 2001-07-11 2003-01-23 Endress & Hauser Gmbh & Co Kg Drucksensor und Verfahren zu dessen Betrieb
US6593209B2 (en) * 2001-11-15 2003-07-15 Kulite Semiconductor Products, Inc. Closing of micropipes in silicon carbide (SiC) using oxidized polysilicon techniques
JP2003315193A (ja) * 2002-04-24 2003-11-06 Denso Corp 圧力センサ
DE10227479A1 (de) * 2002-06-19 2004-01-08 Endress + Hauser Gmbh + Co. Kg Druckmeßgerät
DE10308820B4 (de) * 2003-02-27 2006-10-12 Ifm Electronic Gmbh Sensor, Meßzelle zur Verwendung in einem Sensor und Verfahren zur Herstellung einer Meßzelle
US7100453B2 (en) * 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
US6945118B2 (en) * 2004-01-13 2005-09-20 Honeywell International Inc. Ceramic on metal pressure transducer
JP2006322783A (ja) * 2005-05-18 2006-11-30 Dainippon Screen Mfg Co Ltd 圧力センサおよび基板処理装置
DE102006056172A1 (de) * 2006-11-27 2008-05-29 Endress + Hauser Gmbh + Co. Kg Elastischer Keramikkörper und Drucksensor mit einem elastischen Keramikkörper
DE102007008506B4 (de) * 2007-02-21 2010-08-19 Continental Automotive Gmbh Verfahren zum Schutz eines elektronischen Sensorelements und elektronisches Sensorelement
US20090013759A1 (en) * 2007-07-13 2009-01-15 General Electric Company Wobbe index sensor system
DE102010063723A1 (de) 2010-12-21 2012-06-21 Endress + Hauser Gmbh + Co. Kg Keramischer Drucksensor mit Überlastschutz
DE102013101936A1 (de) 2013-02-27 2014-08-28 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102013226775A1 (de) * 2013-12-19 2015-06-25 Vega Grieshaber Kg Messzelle
WO2016026541A1 (de) * 2014-08-20 2016-02-25 Endress+Hauser Gmbh+Co. Kg Druckmesszelle
US10739218B2 (en) * 2016-04-11 2020-08-11 The Alfred E. Mann Foundation For Scientific Research Pressure sensors with tensioned membranes
US11940336B2 (en) * 2021-03-26 2024-03-26 Sporian Microsystems, Inc. Driven-shield capacitive pressure sensor
DE102021118954A1 (de) 2021-07-22 2023-01-26 Endress+Hauser SE+Co. KG Druckmesseinrichtung

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753196A (en) * 1971-10-05 1973-08-14 Kulite Semiconductor Products Transducers employing integral protective coatings and supports
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
JPS53142888A (en) * 1977-05-18 1978-12-12 Matsushita Electric Ind Co Ltd Pressure converter of semiconductor
DE2938205A1 (de) * 1979-09-21 1981-04-09 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver druckgeber und auswerteeinrichtung hierfuer
US4320664A (en) * 1980-02-25 1982-03-23 Texas Instruments Incorporated Thermally compensated silicon pressure sensor
US4382247A (en) * 1980-03-06 1983-05-03 Robert Bosch Gmbh Pressure sensor
DE3008572C2 (de) * 1980-03-06 1982-05-27 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose
DE3118366A1 (de) * 1981-05-08 1982-11-25 Siemens AG, 1000 Berlin und 8000 München Drucksensor
JPS61428A (ja) * 1984-06-13 1986-01-06 Toshiba Corp 空気清浄方式
US4858557A (en) * 1984-07-19 1989-08-22 L.P.E. Spa Epitaxial reactors
US4725345A (en) * 1985-04-22 1988-02-16 Kabushiki Kaisha Kenwood Method for forming a hard carbon thin film on article and applications thereof
JPS633468A (ja) * 1986-06-24 1988-01-08 Nec Corp 半導体圧力センサ
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
JPS63117906A (ja) * 1986-11-07 1988-05-21 Shin Etsu Chem Co Ltd 多結晶シリコン製造装置用部材
US4737756A (en) * 1987-01-08 1988-04-12 Imo Delaval Incorporated Electrostatically bonded pressure transducers for corrosive fluids
US4798089A (en) * 1987-03-12 1989-01-17 Rosemount Inc. Isolator apparatus
JPS63225591A (ja) * 1987-03-12 1988-09-20 住友金属工業株式会社 炭化珪素被覆黒鉛材料の製造方法
US4932265A (en) * 1987-12-11 1990-06-12 The Babcock & Wilcox Company Pressure transducer using thick film resistor
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction

Also Published As

Publication number Publication date
US5076147A (en) 1991-12-31
CA2028836A1 (en) 1990-10-14
CA2028836C (en) 2000-07-04
JPH03501062A (ja) 1991-03-07
IE901049L (en) 1990-10-13
JP2675190B2 (ja) 1997-11-12
DE3912217C2 (da) 1993-06-17
EP0424483A1 (de) 1991-05-02
WO1990012300A1 (de) 1990-10-18
ES2042290T3 (es) 1993-12-01
EP0424483B1 (de) 1993-07-28
DE3912217A1 (de) 1990-10-18
DE59002092D1 (de) 1993-09-02

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