BR8707718A - Sensor de pressao - Google Patents

Sensor de pressao

Info

Publication number
BR8707718A
BR8707718A BR8707718A BR8707718A BR8707718A BR 8707718 A BR8707718 A BR 8707718A BR 8707718 A BR8707718 A BR 8707718A BR 8707718 A BR8707718 A BR 8707718A BR 8707718 A BR8707718 A BR 8707718A
Authority
BR
Brazil
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
BR8707718A
Other languages
English (en)
Inventor
Thomas A Knecht
James Ruf
John P Schulte
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of BR8707718A publication Critical patent/BR8707718A/pt

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/145Housings with stress relieving means
    • G01L19/146Housings with stress relieving means using flexible element between the transducer and the support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
BR8707718A 1986-06-23 1987-06-01 Sensor de pressao BR8707718A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/877,278 US4800758A (en) 1986-06-23 1986-06-23 Pressure transducer with stress isolation for hard mounting
PCT/US1987/001265 WO1987007948A1 (en) 1986-06-23 1987-06-01 Pressure transducer with stress isolation for hard mounting

Publications (1)

Publication Number Publication Date
BR8707718A true BR8707718A (pt) 1989-08-15

Family

ID=25369620

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8707718A BR8707718A (pt) 1986-06-23 1987-06-01 Sensor de pressao

Country Status (8)

Country Link
US (1) US4800758A (pt)
EP (1) EP0311613B1 (pt)
JP (2) JP2660247B2 (pt)
BR (1) BR8707718A (pt)
CA (1) CA1311365C (pt)
DE (1) DE3772992D1 (pt)
IL (1) IL82882A (pt)
WO (1) WO1987007948A1 (pt)

Families Citing this family (68)

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FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
DE3932618A1 (de) * 1989-09-29 1991-04-18 Fraunhofer Ges Forschung Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
US5094109A (en) * 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5421956A (en) * 1991-11-20 1995-06-06 Nippondenso Co., Ltd. Method of fabricating an integrated pressure sensor
DE4321804A1 (de) * 1993-06-30 1995-01-12 Ranco Inc Verfahren zur Herstellung von Kleinbauelementen
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
US5424650A (en) * 1993-09-24 1995-06-13 Rosemont Inc. Capacitive pressure sensor having circuitry for eliminating stray capacitance
CN1058569C (zh) * 1993-09-24 2000-11-15 罗斯蒙德公司 指示工作流体压力输出量的传感器
US5520054A (en) * 1994-03-29 1996-05-28 Rosemount Inc. Increased wall thickness for robust bond for micromachined sensor
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5587601A (en) * 1995-06-05 1996-12-24 Kulite Semiconductor Products, Inc. Support structure for a semiconductor pressure transducer
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor
US6059254A (en) * 1997-03-27 2000-05-09 Rosemount Inc. Process instrument mount
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US20020003274A1 (en) * 1998-08-27 2002-01-10 Janusz Bryzek Piezoresistive sensor with epi-pocket isolation
US6006607A (en) * 1998-08-31 1999-12-28 Maxim Integrated Products, Inc. Piezoresistive pressure sensor with sculpted diaphragm
DE19844808C1 (de) * 1998-09-30 2000-04-20 Bosch Gmbh Robert Drucksensorvorrichtung
US6351996B1 (en) 1998-11-12 2002-03-05 Maxim Integrated Products, Inc. Hermetic packaging for semiconductor pressure sensors
US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
US6255728B1 (en) 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
CN1151367C (zh) 2000-01-06 2004-05-26 罗斯蒙德公司 微机电***(mems)用的电互联的晶粒生长
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US20040041254A1 (en) * 2002-09-04 2004-03-04 Lewis Long Packaged microchip
US6946742B2 (en) * 2002-12-19 2005-09-20 Analog Devices, Inc. Packaged microchip with isolator having selected modulus of elasticity
US7166911B2 (en) 2002-09-04 2007-01-23 Analog Devices, Inc. Packaged microchip with premolded-type package
US6768196B2 (en) * 2002-09-04 2004-07-27 Analog Devices, Inc. Packaged microchip with isolation
US20050056870A1 (en) * 2002-12-19 2005-03-17 Karpman Maurice S. Stress sensitive microchip with premolded-type package
AU2004202234B2 (en) * 2003-07-18 2009-12-17 St. Jude Medical Coordination Center Bvba Sensor and guide wire assembly
US7021152B2 (en) * 2003-07-18 2006-04-04 Radi Medical Systems Ab Sensor and guide wire assembly
DE10349540A1 (de) * 2003-10-22 2005-05-25 Endress + Hauser Gmbh + Co. Kg Halbleiterdrucksensor und Verfahren zu seiner Herstellung
FR2881224B1 (fr) * 2005-01-21 2007-11-23 Auxitrol Sa Sa Ensemble de detection de la pression absolue d'un fluide
US20070013014A1 (en) * 2005-05-03 2007-01-18 Shuwen Guo High temperature resistant solid state pressure sensor
US7622782B2 (en) * 2005-08-24 2009-11-24 General Electric Company Pressure sensors and methods of making the same
US7661318B2 (en) * 2006-02-27 2010-02-16 Auxitrol S.A. Stress isolated pressure sensing die, sensor assembly inluding said die and methods for manufacturing said die and said assembly
DE602007013484D1 (de) * 2006-02-27 2011-05-12 Auxitrol Sa Spannungsisolierter Drucksensorchip
WO2008003051A2 (en) * 2006-06-29 2008-01-03 Analog Devices, Inc. Stress mitigation in packaged microchips
US7694610B2 (en) * 2007-06-27 2010-04-13 Siemens Medical Solutions Usa, Inc. Photo-multiplier tube removal tool
US7798010B2 (en) * 2007-10-11 2010-09-21 Honeywell International Inc. Sensor geometry for improved package stress isolation
WO2009108230A1 (en) * 2007-12-13 2009-09-03 The Timken Company Sensor module with stress isolated temperature compensation and method of manufacture
US8614491B2 (en) * 2009-04-07 2013-12-24 Honeywell International Inc. Package interface plate for package isolation structures
DE102009046692A1 (de) * 2009-11-13 2011-05-19 Endress + Hauser Gmbh + Co. Kg Druck-Messeinrichtung
BR112013019244B1 (pt) 2011-01-31 2021-03-16 Bae Systems Plc sistema de transferência de dados não penetrante
JP6051873B2 (ja) * 2013-01-09 2016-12-27 株式会社デンソー 物理量センサおよびその製造方法
US9676614B2 (en) 2013-02-01 2017-06-13 Analog Devices, Inc. MEMS device with stress relief structures
US10167189B2 (en) 2014-09-30 2019-01-01 Analog Devices, Inc. Stress isolation platform for MEMS devices
US10131538B2 (en) 2015-09-14 2018-11-20 Analog Devices, Inc. Mechanically isolated MEMS device
DE102016107856A1 (de) * 2016-04-28 2017-11-02 Endress + Hauser Gmbh + Co. Kg Druckmesseinrichtung
US10481025B2 (en) 2017-01-26 2019-11-19 Rosemount Aerospace Inc. Piezoresistive sensor with spring flexures for stress isolation
CN110546516B (zh) 2017-05-08 2022-11-15 赛峰蜂鸟股份有限公司 用于加速度计的去耦结构
US11153985B2 (en) * 2017-06-29 2021-10-19 Rosemount Inc. Modular hybrid circuit packaging
DE102017127704A1 (de) 2017-11-23 2019-05-23 Endress+Hauser SE+Co. KG Druckmesseinrichtung
JP6810680B2 (ja) * 2017-12-20 2021-01-06 株式会社鷺宮製作所 圧力センサ
CA3099745A1 (en) 2018-05-17 2019-11-21 Rosemount Inc. Measuring element and measuring device comprising the same
CN109738098A (zh) * 2018-12-29 2019-05-10 菲比蓝科技(深圳)有限公司 压力传感器及其形成方法
US11417611B2 (en) 2020-02-25 2022-08-16 Analog Devices International Unlimited Company Devices and methods for reducing stress on circuit components
US11981560B2 (en) 2020-06-09 2024-05-14 Analog Devices, Inc. Stress-isolated MEMS device comprising substrate having cavity and method of manufacture
CN112082681B (zh) * 2020-09-18 2021-11-23 重庆齿轮箱有限责任公司 一种风电主齿轮箱无应力安装方法
US11607589B1 (en) 2020-10-01 2023-03-21 Mark E. Van Denend Device for accurately measuring string bed stiffness in a racket
US11692895B2 (en) * 2021-03-30 2023-07-04 Rosemount Aerospace Inc. Differential pressure sensor

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US3390579A (en) * 1966-09-06 1968-07-02 Bourns Inc Over-pressure diaphragm protection
US4021766A (en) * 1975-07-28 1977-05-03 Aine Harry E Solid state pressure transducer of the leaf spring type and batch method of making same
AU505804B2 (en) * 1975-09-30 1979-12-06 Tokyo Shibaura Electric Co. Suz Pressure gauge
JPS5339191A (en) * 1976-09-22 1978-04-10 Hitachi Ltd Structure of electrode for oxygen concentration detector
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
DE2709858B2 (de) * 1977-03-07 1979-01-04 Hebel Gasbetonwerk Gmbh, 8080 Emmering Verfahren zur Herstellung von dampfgehärtetem Gasbeton
JPS6022638B2 (ja) * 1977-06-24 1985-06-03 富士写真フイルム株式会社 記録材料
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter
US4454440A (en) * 1978-12-22 1984-06-12 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
JPS58146827A (ja) * 1982-02-25 1983-09-01 Fuji Electric Co Ltd 半導体式圧力センサ
JPS59100833A (ja) * 1982-11-30 1984-06-11 Shimadzu Corp 半導体圧力センサ
US4527428A (en) * 1982-12-30 1985-07-09 Hitachi, Ltd. Semiconductor pressure transducer
DE3313259A1 (de) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld Sensor
DE3313261A1 (de) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh, 4800 Bielefeld Sensor
JPS59217126A (ja) * 1983-05-25 1984-12-07 Mitsubishi Electric Corp 絶対圧形半導体圧力変換素子
US4536820A (en) * 1984-03-29 1985-08-20 General Signal Corporation Electrical feedthrough means for pressure transducer
DE3436440A1 (de) * 1984-10-04 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Halbleiter-messeinrichtung

Also Published As

Publication number Publication date
US4800758A (en) 1989-01-31
IL82882A0 (en) 1987-12-20
JPH01503002A (ja) 1989-10-12
IL82882A (en) 1991-05-12
WO1987007948A1 (en) 1987-12-30
JP2775430B2 (ja) 1998-07-16
EP0311613B1 (en) 1991-09-11
JPH102824A (ja) 1998-01-06
EP0311613A1 (en) 1989-04-19
JP2660247B2 (ja) 1997-10-08
DE3772992D1 (de) 1991-10-17
EP0311613A4 (en) 1989-04-27
CA1311365C (en) 1992-12-15

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Legal Events

Date Code Title Description
B21A Patent or certificate of addition expired [chapter 21.1 patent gazette]

Free format text: PATENTE EXTINTA EM 01/06/2002