DE69924240D1 - Ladungsträgerteilchenstrahlvorrichtung - Google Patents
LadungsträgerteilchenstrahlvorrichtungInfo
- Publication number
- DE69924240D1 DE69924240D1 DE69924240T DE69924240T DE69924240D1 DE 69924240 D1 DE69924240 D1 DE 69924240D1 DE 69924240 T DE69924240 T DE 69924240T DE 69924240 T DE69924240 T DE 69924240T DE 69924240 D1 DE69924240 D1 DE 69924240D1
- Authority
- DE
- Germany
- Prior art keywords
- ladungsträgerteilchenstrahlvorrichtung
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/05—Arrangements for energy or mass analysis
- H01J2237/053—Arrangements for energy or mass analysis electrostatic
- H01J2237/0535—Mirror analyser
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99112116A EP1063677B1 (de) | 1999-06-23 | 1999-06-23 | Ladungsträgerteilchenstrahlvorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69924240D1 true DE69924240D1 (de) | 2005-04-21 |
DE69924240T2 DE69924240T2 (de) | 2006-02-09 |
Family
ID=8238407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69924240T Expired - Lifetime DE69924240T2 (de) | 1999-06-23 | 1999-06-23 | Ladungsträgerteilchenstrahlvorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6730907B1 (de) |
EP (1) | EP1063677B1 (de) |
JP (1) | JP3806647B2 (de) |
KR (1) | KR100443761B1 (de) |
DE (1) | DE69924240T2 (de) |
WO (1) | WO2001001439A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10301579A1 (de) * | 2003-01-16 | 2004-07-29 | Leo Elektronenmikroskopie Gmbh | Elektronenstrahlgerät und Detektoranordnung |
CN1820194B (zh) * | 2003-07-30 | 2012-06-13 | 应用材料以色列公司 | 具有多检测器的扫描电子显微镜和基于多检测器成像方法 |
JP2006114225A (ja) * | 2004-10-12 | 2006-04-27 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
WO2006120005A1 (en) * | 2005-05-11 | 2006-11-16 | El-Mul Technologies Ltd. | Particle detector for secondary ions and direct and or indirect secondary electrons |
US20070090288A1 (en) * | 2005-10-20 | 2007-04-26 | Dror Shemesh | Method and system for enhancing resolution of a scanning electron microscope |
EP1801838B1 (de) * | 2005-12-20 | 2012-05-09 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Vorrichtung für die Emission von Teilchenstrahlen und Verfahren zu deren Betrieb |
GB0712052D0 (en) * | 2007-06-21 | 2007-08-01 | Oxford Instr Molecular Biotool | Method for quantitive analysis of a material |
US8222600B2 (en) * | 2009-05-24 | 2012-07-17 | El-Mul Technologies Ltd. | Charged particle detection system and method |
WO2012023354A1 (ja) * | 2010-08-18 | 2012-02-23 | 株式会社日立ハイテクノロジーズ | 電子線装置 |
US8319181B2 (en) | 2011-01-30 | 2012-11-27 | Fei Company | System and method for localization of large numbers of fluorescent markers in biological samples |
JP5663412B2 (ja) | 2011-06-16 | 2015-02-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
US9190241B2 (en) * | 2013-03-25 | 2015-11-17 | Hermes-Microvision, Inc. | Charged particle beam apparatus |
US9177758B2 (en) | 2013-03-25 | 2015-11-03 | Hermes Microvision Inc. | Charged particle beam apparatus |
WO2015199169A1 (ja) | 2014-06-27 | 2015-12-30 | 国立大学法人九州大学 | カテキンの機能性増強法 |
JP6701228B2 (ja) | 2015-03-24 | 2020-05-27 | ケーエルエー コーポレイション | 像ビームの安定化及び識別性が改善された荷電粒子顕微システム及び方法 |
US10236156B2 (en) | 2015-03-25 | 2019-03-19 | Hermes Microvision Inc. | Apparatus of plural charged-particle beams |
US11515120B2 (en) * | 2018-09-21 | 2022-11-29 | Hitachi High-Tech Corporation | Charged particle beam apparatus |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3749926A (en) * | 1971-08-03 | 1973-07-31 | Du Pont | Charged particle energy analysis |
JPS58189950A (ja) * | 1982-04-30 | 1983-11-05 | Hitachi Ltd | 電子顕微鏡 |
EP0113746B1 (de) * | 1982-07-16 | 1988-01-07 | Lintech Instruments Limited | Elektrodensystem für ein gegenfeldspektrometer eines elektronenstrahl-spannungsmessgerätes |
EP0178431B1 (de) * | 1984-09-18 | 1990-02-28 | ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH | Gegenfeld-Spektrometer für die Elektronenstrahl-Messtechnik |
US4810883A (en) * | 1985-05-31 | 1989-03-07 | Turner David W | Device for providing an energy filtered charge particle image |
JPS63126148A (ja) * | 1986-11-14 | 1988-05-30 | Hiroshi Daimon | 荷電粒子アナライザ− |
GB8816403D0 (en) * | 1988-07-09 | 1988-08-17 | Turner D W | Device for providing energy filtered electron image |
US5032724A (en) * | 1990-08-09 | 1991-07-16 | The Perkin-Elmer Corporation | Multichannel charged-particle analyzer |
DE4216730C2 (de) * | 1992-05-20 | 2003-07-24 | Advantest Corp | Rasterelektronenstrahlgerät |
EP1022766B1 (de) * | 1998-11-30 | 2004-02-04 | Advantest Corporation | Teilchenstrahlgerät |
-
1999
- 1999-06-23 DE DE69924240T patent/DE69924240T2/de not_active Expired - Lifetime
- 1999-06-23 EP EP99112116A patent/EP1063677B1/de not_active Expired - Lifetime
-
2000
- 2000-06-23 KR KR10-2001-7016545A patent/KR100443761B1/ko not_active IP Right Cessation
- 2000-06-23 JP JP2001506570A patent/JP3806647B2/ja not_active Expired - Fee Related
- 2000-06-23 US US10/031,001 patent/US6730907B1/en not_active Expired - Lifetime
- 2000-06-23 WO PCT/EP2000/005800 patent/WO2001001439A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US6730907B1 (en) | 2004-05-04 |
KR100443761B1 (ko) | 2004-08-09 |
EP1063677A1 (de) | 2000-12-27 |
DE69924240T2 (de) | 2006-02-09 |
KR20020026468A (ko) | 2002-04-10 |
JP3806647B2 (ja) | 2006-08-09 |
EP1063677B1 (de) | 2005-03-16 |
WO2001001439A1 (en) | 2001-01-04 |
JP2003503820A (ja) | 2003-01-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |