DE69924240D1 - Ladungsträgerteilchenstrahlvorrichtung - Google Patents

Ladungsträgerteilchenstrahlvorrichtung

Info

Publication number
DE69924240D1
DE69924240D1 DE69924240T DE69924240T DE69924240D1 DE 69924240 D1 DE69924240 D1 DE 69924240D1 DE 69924240 T DE69924240 T DE 69924240T DE 69924240 T DE69924240 T DE 69924240T DE 69924240 D1 DE69924240 D1 DE 69924240D1
Authority
DE
Germany
Prior art keywords
ladungsträgerteilchenstrahlvorrichtung
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69924240T
Other languages
English (en)
Other versions
DE69924240T2 (de
Inventor
Dr Feuerbaum
Dr Winkler
Dr Kella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Application granted granted Critical
Publication of DE69924240D1 publication Critical patent/DE69924240D1/de
Publication of DE69924240T2 publication Critical patent/DE69924240T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69924240T 1999-06-23 1999-06-23 Ladungsträgerteilchenstrahlvorrichtung Expired - Lifetime DE69924240T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99112116A EP1063677B1 (de) 1999-06-23 1999-06-23 Ladungsträgerteilchenstrahlvorrichtung

Publications (2)

Publication Number Publication Date
DE69924240D1 true DE69924240D1 (de) 2005-04-21
DE69924240T2 DE69924240T2 (de) 2006-02-09

Family

ID=8238407

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69924240T Expired - Lifetime DE69924240T2 (de) 1999-06-23 1999-06-23 Ladungsträgerteilchenstrahlvorrichtung

Country Status (6)

Country Link
US (1) US6730907B1 (de)
EP (1) EP1063677B1 (de)
JP (1) JP3806647B2 (de)
KR (1) KR100443761B1 (de)
DE (1) DE69924240T2 (de)
WO (1) WO2001001439A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10301579A1 (de) * 2003-01-16 2004-07-29 Leo Elektronenmikroskopie Gmbh Elektronenstrahlgerät und Detektoranordnung
CN1820194B (zh) * 2003-07-30 2012-06-13 应用材料以色列公司 具有多检测器的扫描电子显微镜和基于多检测器成像方法
JP2006114225A (ja) * 2004-10-12 2006-04-27 Hitachi High-Technologies Corp 荷電粒子線装置
WO2006120005A1 (en) * 2005-05-11 2006-11-16 El-Mul Technologies Ltd. Particle detector for secondary ions and direct and or indirect secondary electrons
US20070090288A1 (en) * 2005-10-20 2007-04-26 Dror Shemesh Method and system for enhancing resolution of a scanning electron microscope
EP1801838B1 (de) * 2005-12-20 2012-05-09 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung für die Emission von Teilchenstrahlen und Verfahren zu deren Betrieb
GB0712052D0 (en) * 2007-06-21 2007-08-01 Oxford Instr Molecular Biotool Method for quantitive analysis of a material
US8222600B2 (en) * 2009-05-24 2012-07-17 El-Mul Technologies Ltd. Charged particle detection system and method
WO2012023354A1 (ja) * 2010-08-18 2012-02-23 株式会社日立ハイテクノロジーズ 電子線装置
US8319181B2 (en) 2011-01-30 2012-11-27 Fei Company System and method for localization of large numbers of fluorescent markers in biological samples
JP5663412B2 (ja) 2011-06-16 2015-02-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US9190241B2 (en) * 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
US9177758B2 (en) 2013-03-25 2015-11-03 Hermes Microvision Inc. Charged particle beam apparatus
WO2015199169A1 (ja) 2014-06-27 2015-12-30 国立大学法人九州大学 カテキンの機能性増強法
JP6701228B2 (ja) 2015-03-24 2020-05-27 ケーエルエー コーポレイション 像ビームの安定化及び識別性が改善された荷電粒子顕微システム及び方法
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
US11515120B2 (en) * 2018-09-21 2022-11-29 Hitachi High-Tech Corporation Charged particle beam apparatus

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3749926A (en) * 1971-08-03 1973-07-31 Du Pont Charged particle energy analysis
JPS58189950A (ja) * 1982-04-30 1983-11-05 Hitachi Ltd 電子顕微鏡
EP0113746B1 (de) * 1982-07-16 1988-01-07 Lintech Instruments Limited Elektrodensystem für ein gegenfeldspektrometer eines elektronenstrahl-spannungsmessgerätes
EP0178431B1 (de) * 1984-09-18 1990-02-28 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Gegenfeld-Spektrometer für die Elektronenstrahl-Messtechnik
US4810883A (en) * 1985-05-31 1989-03-07 Turner David W Device for providing an energy filtered charge particle image
JPS63126148A (ja) * 1986-11-14 1988-05-30 Hiroshi Daimon 荷電粒子アナライザ−
GB8816403D0 (en) * 1988-07-09 1988-08-17 Turner D W Device for providing energy filtered electron image
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
DE4216730C2 (de) * 1992-05-20 2003-07-24 Advantest Corp Rasterelektronenstrahlgerät
EP1022766B1 (de) * 1998-11-30 2004-02-04 Advantest Corporation Teilchenstrahlgerät

Also Published As

Publication number Publication date
US6730907B1 (en) 2004-05-04
KR100443761B1 (ko) 2004-08-09
EP1063677A1 (de) 2000-12-27
DE69924240T2 (de) 2006-02-09
KR20020026468A (ko) 2002-04-10
JP3806647B2 (ja) 2006-08-09
EP1063677B1 (de) 2005-03-16
WO2001001439A1 (en) 2001-01-04
JP2003503820A (ja) 2003-01-28

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Legal Events

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8364 No opposition during term of opposition