DE69832567D1 - Verfahren und Vorrichtung zum Entfernen von einer Flüssigkeit von der Oberfläche eines rotierenden Substrats - Google Patents
Verfahren und Vorrichtung zum Entfernen von einer Flüssigkeit von der Oberfläche eines rotierenden SubstratsInfo
- Publication number
- DE69832567D1 DE69832567D1 DE69832567T DE69832567T DE69832567D1 DE 69832567 D1 DE69832567 D1 DE 69832567D1 DE 69832567 T DE69832567 T DE 69832567T DE 69832567 T DE69832567 T DE 69832567T DE 69832567 D1 DE69832567 D1 DE 69832567D1
- Authority
- DE
- Germany
- Prior art keywords
- liquid
- substrate
- gaseous substance
- removing liquid
- rotating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
- Weting (AREA)
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5992997P | 1997-09-24 | 1997-09-24 | |
US59929P | 1997-09-24 | ||
EP98870056 | 1998-03-20 | ||
EP98870056A EP0905746A1 (de) | 1997-09-24 | 1998-03-20 | Verfahren zum Entfernen einer Flüssigkeit von einer Oberfläche einer umlaufenden Substrat |
US7968898P | 1998-03-27 | 1998-03-27 | |
US79688P | 1998-03-27 | ||
US8465198P | 1998-05-06 | 1998-05-06 | |
US84651P | 1998-05-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69832567D1 true DE69832567D1 (de) | 2006-01-05 |
DE69832567T2 DE69832567T2 (de) | 2007-01-18 |
Family
ID=27443759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69832567T Expired - Lifetime DE69832567T2 (de) | 1997-09-24 | 1998-09-22 | Verfahren und Vorrichtung zum Entfernen von einer Flüssigkeit von der Oberfläche eines rotierenden Substrats |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0905747B1 (de) |
JP (1) | JP4616948B2 (de) |
AT (1) | ATE311665T1 (de) |
DE (1) | DE69832567T2 (de) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE287126T1 (de) * | 1997-09-24 | 2005-01-15 | Imec Inter Uni Micro Electr | Verfahren zum entfernen einer flüssigkeit von einer oberfläche einer substrat |
AT407680B (de) * | 1999-06-04 | 2001-05-25 | Sez Semiconduct Equip Zubehoer | Verfahren und vorrichtung zum trocknen von scheibenförmigen gegenständen |
JP4931285B2 (ja) * | 2000-04-20 | 2012-05-16 | アイメック | 基板の表面の局所化された液体処理のための方法及び装置 |
US7021319B2 (en) * | 2000-06-26 | 2006-04-04 | Applied Materials Inc. | Assisted rinsing in a single wafer cleaning process |
US7000622B2 (en) | 2002-09-30 | 2006-02-21 | Lam Research Corporation | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus |
US7234477B2 (en) | 2000-06-30 | 2007-06-26 | Lam Research Corporation | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
DE10052762A1 (de) * | 2000-10-25 | 2002-05-16 | Infineon Technologies Ag | Verfahren und Vorrichtung zum Reinigen einer Halbleiterscheibe |
WO2002095809A2 (en) * | 2001-05-18 | 2002-11-28 | Lam Research Corporation | Apparatus and method for substrate preparation implementing a surface tension reducing process |
US7100304B2 (en) * | 2001-06-12 | 2006-09-05 | Akrion Technologies, Inc. | Megasonic cleaner and dryer |
WO2002101795A2 (en) | 2001-06-12 | 2002-12-19 | Verteq, Inc | Megasonic cleaner and dryer system |
US6770151B1 (en) | 2001-07-13 | 2004-08-03 | Lam Research Corporation | Drying a substrate using a combination of substrate processing technologies |
JP3993048B2 (ja) | 2002-08-30 | 2007-10-17 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US7632376B1 (en) | 2002-09-30 | 2009-12-15 | Lam Research Corporation | Method and apparatus for atomic layer deposition (ALD) in a proximity system |
US7045018B2 (en) | 2002-09-30 | 2006-05-16 | Lam Research Corporation | Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same |
US7997288B2 (en) | 2002-09-30 | 2011-08-16 | Lam Research Corporation | Single phase proximity head having a controlled meniscus for treating a substrate |
US7389783B2 (en) | 2002-09-30 | 2008-06-24 | Lam Research Corporation | Proximity meniscus manifold |
US7383843B2 (en) | 2002-09-30 | 2008-06-10 | Lam Research Corporation | Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer |
US6988327B2 (en) | 2002-09-30 | 2006-01-24 | Lam Research Corporation | Methods and systems for processing a substrate using a dynamic liquid meniscus |
US7093375B2 (en) | 2002-09-30 | 2006-08-22 | Lam Research Corporation | Apparatus and method for utilizing a meniscus in substrate processing |
US7513262B2 (en) | 2002-09-30 | 2009-04-07 | Lam Research Corporation | Substrate meniscus interface and methods for operation |
WO2004030052A2 (en) * | 2002-09-30 | 2004-04-08 | Lam Research Corporation | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
US7069937B2 (en) | 2002-09-30 | 2006-07-04 | Lam Research Corporation | Vertical proximity processor |
US7293571B2 (en) | 2002-09-30 | 2007-11-13 | Lam Research Corporation | Substrate proximity processing housing and insert for generating a fluid meniscus |
AU2003277185A1 (en) * | 2002-09-30 | 2004-04-19 | Lam Research Corporation | System for substrate processing with meniscus, vacuum, ipa vapor, drying manifold |
US8236382B2 (en) | 2002-09-30 | 2012-08-07 | Lam Research Corporation | Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same |
US7614411B2 (en) | 2002-09-30 | 2009-11-10 | Lam Research Corporation | Controls of ambient environment during wafer drying using proximity head |
US7153400B2 (en) | 2002-09-30 | 2006-12-26 | Lam Research Corporation | Apparatus and method for depositing and planarizing thin films of semiconductor wafers |
US7240679B2 (en) | 2002-09-30 | 2007-07-10 | Lam Research Corporation | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold |
US6954993B1 (en) | 2002-09-30 | 2005-10-18 | Lam Research Corporation | Concentric proximity processing head |
US7367345B1 (en) | 2002-09-30 | 2008-05-06 | Lam Research Corporation | Apparatus and method for providing a confined liquid for immersion lithography |
US7675000B2 (en) | 2003-06-24 | 2010-03-09 | Lam Research Corporation | System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology |
US7170190B1 (en) | 2003-12-16 | 2007-01-30 | Lam Research Corporation | Apparatus for oscillating a head and methods for implementing the same |
US8062471B2 (en) | 2004-03-31 | 2011-11-22 | Lam Research Corporation | Proximity head heating method and apparatus |
TWI286353B (en) | 2004-10-12 | 2007-09-01 | Tokyo Electron Ltd | Substrate processing method and substrate processing apparatus |
JP4527660B2 (ja) | 2005-06-23 | 2010-08-18 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
US7928366B2 (en) | 2006-10-06 | 2011-04-19 | Lam Research Corporation | Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access |
US8813764B2 (en) | 2009-05-29 | 2014-08-26 | Lam Research Corporation | Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer |
JP5143498B2 (ja) | 2006-10-06 | 2013-02-13 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置、プログラムならびに記録媒体 |
JP4912916B2 (ja) * | 2006-10-10 | 2012-04-11 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4810411B2 (ja) * | 2006-11-30 | 2011-11-09 | 東京応化工業株式会社 | 処理装置 |
US8146902B2 (en) | 2006-12-21 | 2012-04-03 | Lam Research Corporation | Hybrid composite wafer carrier for wet clean equipment |
US8464736B1 (en) | 2007-03-30 | 2013-06-18 | Lam Research Corporation | Reclaim chemistry |
US7975708B2 (en) | 2007-03-30 | 2011-07-12 | Lam Research Corporation | Proximity head with angled vacuum conduit system, apparatus and method |
DE102007027112B4 (de) | 2007-06-13 | 2011-06-22 | Siltronic AG, 81737 | Verfahren zur Reinigung, Trocknung und Hydrophilierung einer Halbleiterscheibe |
US8141566B2 (en) | 2007-06-19 | 2012-03-27 | Lam Research Corporation | System, method and apparatus for maintaining separation of liquids in a controlled meniscus |
US20110289795A1 (en) | 2010-02-16 | 2011-12-01 | Tomoatsu Ishibashi | Substrate drying apparatus, substrate drying method and control program |
KR101806191B1 (ko) | 2010-06-17 | 2017-12-07 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법, 이 기판 처리 방법을 실행하기 위한 컴퓨터 프로그램이 기록된 기록 매체 및 기판 처리 장치 |
KR101596750B1 (ko) | 2010-06-23 | 2016-02-23 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법, 이 기판 처리 방법을 실행하기 위한 컴퓨터 프로그램이 기록된 기록 매체 및 기판 처리 장치 |
JP5538102B2 (ja) | 2010-07-07 | 2014-07-02 | 株式会社Sokudo | 基板洗浄方法および基板洗浄装置 |
US9421617B2 (en) | 2011-06-22 | 2016-08-23 | Tel Nexx, Inc. | Substrate holder |
US8613474B2 (en) | 2011-07-06 | 2013-12-24 | Tel Nexx, Inc. | Substrate loader and unloader having a Bernoulli support |
JP5941023B2 (ja) * | 2013-08-21 | 2016-06-29 | 東京エレクトロン株式会社 | 基板洗浄装置、基板洗浄方法、及びコンピュータ読み取り可能な記録媒体 |
US10962285B2 (en) | 2018-07-13 | 2021-03-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer drying system |
CN115287661B (zh) * | 2022-08-23 | 2023-07-07 | 广州安博新能源科技有限公司 | 一种大功率模组生产焊接用酸洗装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4027686A (en) * | 1973-01-02 | 1977-06-07 | Texas Instruments Incorporated | Method and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized water |
US5271774A (en) * | 1990-03-01 | 1993-12-21 | U.S. Philips Corporation | Method for removing in a centrifuge a liquid from a surface of a substrate |
JP3351082B2 (ja) * | 1994-01-14 | 2002-11-25 | ソニー株式会社 | 基板乾燥方法と、基板乾燥槽と、ウェーハ洗浄装置および半導体装置の製造方法 |
JPH09162159A (ja) * | 1995-12-05 | 1997-06-20 | Dainippon Screen Mfg Co Ltd | 回転式基板乾燥装置 |
EP0905746A1 (de) * | 1997-09-24 | 1999-03-31 | Interuniversitair Micro-Elektronica Centrum Vzw | Verfahren zum Entfernen einer Flüssigkeit von einer Oberfläche einer umlaufenden Substrat |
-
1998
- 1998-09-22 JP JP30625698A patent/JP4616948B2/ja not_active Expired - Lifetime
- 1998-09-22 AT AT98870200T patent/ATE311665T1/de not_active IP Right Cessation
- 1998-09-22 DE DE69832567T patent/DE69832567T2/de not_active Expired - Lifetime
- 1998-09-22 EP EP98870200A patent/EP0905747B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH11233481A (ja) | 1999-08-27 |
EP0905747B1 (de) | 2005-11-30 |
JP4616948B2 (ja) | 2011-01-19 |
EP0905747A1 (de) | 1999-03-31 |
DE69832567T2 (de) | 2007-01-18 |
ATE311665T1 (de) | 2005-12-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition |