DE69722688T2 - Fiberoptisch-gekoppelter interferometrischer Sensor - Google Patents

Fiberoptisch-gekoppelter interferometrischer Sensor Download PDF

Info

Publication number
DE69722688T2
DE69722688T2 DE1997622688 DE69722688T DE69722688T2 DE 69722688 T2 DE69722688 T2 DE 69722688T2 DE 1997622688 DE1997622688 DE 1997622688 DE 69722688 T DE69722688 T DE 69722688T DE 69722688 T2 DE69722688 T2 DE 69722688T2
Authority
DE
Germany
Prior art keywords
coupled
fiber optic
interferometric sensor
interferometric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997622688
Other languages
English (en)
Other versions
DE69722688D1 (de
Inventor
John A Bell
Barbara A Capron
Charles Ray Pond
Thomas S Breidenbach
David A Leep
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of DE69722688D1 publication Critical patent/DE69722688D1/de
Application granted granted Critical
Publication of DE69722688T2 publication Critical patent/DE69722688T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE1997622688 1996-02-29 1997-02-20 Fiberoptisch-gekoppelter interferometrischer Sensor Expired - Lifetime DE69722688T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61009196A 1996-02-29 1996-02-29

Publications (2)

Publication Number Publication Date
DE69722688D1 DE69722688D1 (de) 2003-07-17
DE69722688T2 true DE69722688T2 (de) 2004-01-15

Family

ID=24443601

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997622688 Expired - Lifetime DE69722688T2 (de) 1996-02-29 1997-02-20 Fiberoptisch-gekoppelter interferometrischer Sensor

Country Status (4)

Country Link
EP (1) EP0793079B1 (de)
JP (1) JP4316691B2 (de)
CN (1) CN1091874C (de)
DE (1) DE69722688T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3578214B2 (ja) * 2002-12-09 2004-10-20 オムロン株式会社 回帰反射型光電センサ
IL154680A (en) 2003-02-27 2010-05-17 Avram Matcovitch Relatively powerful optical beam input polarity recovery system
US7130056B2 (en) * 2004-02-20 2006-10-31 Agilent Technologies, Inc. System and method of using a side-mounted interferometer to acquire position information
CN100451694C (zh) * 2004-09-20 2009-01-14 奥普森斯公司 采用低相干的干涉测量法的光学传感器
CN100394367C (zh) * 2004-12-29 2008-06-11 达方电子股份有限公司 具有光学式位移传感器的电子装置及其光标控制方法
CN100447694C (zh) * 2004-12-31 2008-12-31 中山大学 一种大行程纳米精度定位控制***
JP4670438B2 (ja) 2005-04-01 2011-04-13 ソニー株式会社 コンテンツおよびそのプレイリストの提供方法
FR2902523B1 (fr) * 2006-06-16 2008-09-05 Inst Nat Polytech Grenoble Sonde electro-optique de mesure vectorielle d'un champ electromagnetique
FR2942049B1 (fr) * 2009-02-12 2011-04-01 Ecole Norm Superieure Lyon Microscope de plasmon de surface a haute resolution comportant un interferometre heterodyne fibre
CN101893452B (zh) * 2009-05-20 2013-07-17 上海华魏光纤传感技术有限公司 一种相干涉光信号的共模分量系数消除装置
WO2010136810A2 (en) * 2009-05-27 2010-12-02 Silixa Ltd Method and apparatus for optical sensing
CN101890659A (zh) * 2010-06-30 2010-11-24 沈机集团昆明机床股份有限公司 双频激光测量***检测补偿落地镗铣床空间位置的方法
CN102230826B (zh) * 2011-03-31 2012-08-22 上海理工大学 一种外差干涉仪的信号处理方法
JP6335495B2 (ja) * 2013-12-09 2018-05-30 パナソニック デバイスＳｕｎｘ株式会社 変位センサ
CN103743336B (zh) * 2013-12-23 2016-04-06 哈尔滨工业大学 基于直角棱镜的对角入射光激光外差干涉测量方法与装置
CN103743346B (zh) * 2013-12-23 2016-04-13 哈尔滨工业大学 基于角锥棱镜的对角入射光激光外差干涉测量方法与装置
JP5839759B1 (ja) * 2015-07-30 2016-01-06 浜松ホトニクス株式会社 光干渉計
CN105841609B (zh) * 2016-03-22 2018-04-24 哈尔滨工业大学 一种基于光束扫描探测的组合悬臂梁探针传感装置及传感方法
CN105841608A (zh) * 2016-03-22 2016-08-10 哈尔滨工业大学 一种基于光纤出射光准直探测的组合悬臂梁探针传感装置及其传感方法
CN106289050A (zh) * 2016-07-21 2017-01-04 哈尔滨工业大学 一种基于奇偶探测策略的超分辨量子干涉测量***及方法
CN108387251B (zh) * 2018-01-22 2020-07-14 大连理工大学 一种光纤光栅解调仪器及方法
CN108519153A (zh) * 2018-04-23 2018-09-11 中国科学院光电研究院 双通道平行摆镜式傅里叶变换红外光谱仪
CN108663158B (zh) * 2018-08-01 2024-05-28 桂林电子科技大学 推挽式光纤差压传感器
CN109238146A (zh) * 2018-08-16 2019-01-18 华进半导体封装先导技术研发中心有限公司 电磁近场扫描中确定及调整元件间相对位置的方法、装置
CN110411335B (zh) * 2019-07-26 2020-06-16 浙江理工大学 差动式正弦相位调制激光干涉纳米位移测量装置及方法
RU2760504C1 (ru) * 2020-09-28 2021-11-25 Акционерное Общество "Институт "Оргэнергострой" Линейная часть с интерферометром с двумя плечами для извещателя охранного волоконно-оптического
RU2760503C1 (ru) * 2020-09-28 2021-11-25 Акционерное Общество "Институт "Оргэнергострой" Линейная часть с комбинированными интерферометрами для извещателя охранного волоконно-оптического

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881823A (en) * 1967-06-02 1975-05-06 Philips Corp Apparatus for measuring the variation of an optical path length with the aid of an interferometer
US4784489A (en) * 1987-04-29 1988-11-15 Hewlett-Packard Company Fiber-optic based remote receiver for laser interferometer systems
JPH01203906A (ja) * 1988-02-10 1989-08-16 Brother Ind Ltd 光ファイバセンサ装置
JPH01206283A (ja) * 1988-02-13 1989-08-18 Brother Ind Ltd 光ヘテロダイン測定装置
DE4031291A1 (de) * 1990-10-04 1992-06-04 Kerner Martin Karl Artur Heterodynes doppel-interferometer
US5270793A (en) * 1990-12-27 1993-12-14 Jenoptik Gmbh Symmetrical carrier frequency interferometer
DE69111432T2 (de) * 1991-05-24 1996-02-29 Hewlett Packard Co Heterodyn-Interferometer Einrichtung.
JPH085314A (ja) * 1994-06-20 1996-01-12 Canon Inc 変位測定方法及び変位測定装置

Also Published As

Publication number Publication date
JP4316691B2 (ja) 2009-08-19
DE69722688D1 (de) 2003-07-17
EP0793079B1 (de) 2003-06-11
JPH09325005A (ja) 1997-12-16
CN1091874C (zh) 2002-10-02
EP0793079A3 (de) 1999-06-09
CN1168967A (zh) 1997-12-31
EP0793079A2 (de) 1997-09-03

Similar Documents

Publication Publication Date Title
DE69722688D1 (de) Fiberoptisch-gekoppelter interferometrischer Sensor
DE59700293D1 (de) Optischer sensor
DE59704257D1 (de) Mikromechanischer sensor
BR9608046A (pt) Sensor
DE69841889D1 (de) Faseroptisches sensorsystem
DE69826753D1 (de) Optischer Profilsensor
FI953888A (fi) Anturi
DE59709592D1 (de) Opto-elektronischer Sensor
DE69529116T2 (de) Optischer Verschiebungssensor
NO972327D0 (no) Optisk posisjonssensor
FR2744844B1 (fr) Capteur laser interferometrique
DK78096A (da) Interferometer
DE69619850D1 (de) Sensoranordnung
DE69528735T2 (de) Faseroptischer Rotationssensor
IDP000009398A (id) Serat geser-dispersi
DE69723332D1 (de) Optischer Schwingungsfühler
DE69713375T2 (de) Integrierter interferometer
DE69528866D1 (de) Optischer Sensor
DE69527498T2 (de) Optischer Sensor
DE59809683D1 (de) Opto-elektronischer Sensor
DE69715357D1 (de) Optischer geschwindigkeitssensor
ATA159897A (de) Sensor
DE69528208D1 (de) Optischer Verschiebungssensor
DE59812575D1 (de) Opto-elektronischer Sensor
NO20002790L (no) Interferometrisk følerapparat

Legal Events

Date Code Title Description
8364 No opposition during term of opposition