DE69529116T2 - Optischer Verschiebungssensor - Google Patents
Optischer VerschiebungssensorInfo
- Publication number
- DE69529116T2 DE69529116T2 DE69529116T DE69529116T DE69529116T2 DE 69529116 T2 DE69529116 T2 DE 69529116T2 DE 69529116 T DE69529116 T DE 69529116T DE 69529116 T DE69529116 T DE 69529116T DE 69529116 T2 DE69529116 T2 DE 69529116T2
- Authority
- DE
- Germany
- Prior art keywords
- displacement sensor
- optical displacement
- optical
- sensor
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP08999094A JP3530573B2 (ja) | 1994-04-27 | 1994-04-27 | 光学式変位センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69529116D1 DE69529116D1 (de) | 2003-01-23 |
DE69529116T2 true DE69529116T2 (de) | 2003-08-21 |
Family
ID=13986079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529116T Expired - Lifetime DE69529116T2 (de) | 1994-04-27 | 1995-04-26 | Optischer Verschiebungssensor |
Country Status (4)
Country | Link |
---|---|
US (1) | US5569913A (de) |
EP (1) | EP0679870B1 (de) |
JP (1) | JP3530573B2 (de) |
DE (1) | DE69529116T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011077963B4 (de) * | 2010-07-12 | 2021-03-11 | Dmg Mori Seiki Co., Ltd. | Verlagerungserfassungsvorrichtung |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3327718B2 (ja) * | 1995-01-23 | 2002-09-24 | オークマ株式会社 | 光学式エンコーダ |
EP0729013B1 (de) * | 1995-02-21 | 2002-07-17 | Canon Kabushiki Kaisha | Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung |
US6229140B1 (en) | 1995-10-27 | 2001-05-08 | Canon Kabushiki Kaisha | Displacement information detection apparatus |
US6151185A (en) * | 1996-09-05 | 2000-11-21 | Canon Kabushiki Kaisha | Position detecting apparatus, positioning apparatus, and information recording apparatus using the same |
US6631047B2 (en) | 1997-09-22 | 2003-10-07 | Canon Kabushiki Kaisha | Interference device, position detecting device, positioning device and information recording apparatus using the same |
JPH11351813A (ja) | 1998-06-08 | 1999-12-24 | Canon Inc | 干渉装置及びそれを用いた位置検出装置 |
JP4365927B2 (ja) | 1999-03-12 | 2009-11-18 | キヤノン株式会社 | 干渉計測装置及び格子干渉式エンコーダ |
DE60033075T3 (de) | 1999-04-16 | 2012-08-30 | Canon K.K. | Kodierer |
JP2000321021A (ja) | 1999-05-10 | 2000-11-24 | Canon Inc | 干渉装置、変位測定装置、及びそれを用いた情報記録又は/及び再生装置 |
JP4846909B2 (ja) | 2000-02-15 | 2011-12-28 | キヤノン株式会社 | 光学式エンコーダ及び回折格子の変位測定方法 |
AU2000240414A1 (en) * | 2000-03-28 | 2001-10-08 | Aim Controls, Inc. | Rotary encoder |
US6713756B2 (en) * | 2000-05-09 | 2004-03-30 | Olympus Corporation | Optical encoder and optical rotary encoder |
JP2001336952A (ja) | 2000-05-26 | 2001-12-07 | Canon Inc | 測定装置 |
JP4713019B2 (ja) * | 2001-06-13 | 2011-06-29 | 株式会社ミツトヨ | 格子干渉型変位検出装置 |
EP1345082A1 (de) * | 2002-03-15 | 2003-09-17 | ASML Netherlands BV | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
US7193204B2 (en) * | 2002-07-08 | 2007-03-20 | Gsi Group Corporation | Multi-track optical encoder employing beam divider |
US7295315B2 (en) * | 2003-06-30 | 2007-11-13 | Kenneth C. Johnson | Focus and alignment sensors and methods for use with scanning microlens-array printer |
JP4498024B2 (ja) * | 2004-06-15 | 2010-07-07 | キヤノン株式会社 | 光学式エンコーダ |
EP1619477A2 (de) * | 2004-06-25 | 2006-01-25 | Fanuc Ltd | Linearer Lagekodier |
JP4908764B2 (ja) * | 2005-02-04 | 2012-04-04 | キヤノン株式会社 | 光学式エンコーダ |
JP2006284520A (ja) * | 2005-04-05 | 2006-10-19 | Sendai Nikon:Kk | エンコーダおよびエンコーダ監視システム |
DE102005029917A1 (de) * | 2005-06-28 | 2007-01-04 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
US7561280B2 (en) * | 2007-03-15 | 2009-07-14 | Agilent Technologies, Inc. | Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components |
DE102007023300A1 (de) * | 2007-05-16 | 2008-11-20 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Anordnung derselben |
US7924433B2 (en) * | 2008-09-08 | 2011-04-12 | Agilent Technologies, Inc. | Displacement measurement system and method of use |
US8604413B2 (en) * | 2011-06-13 | 2013-12-10 | Mitutoyo Corporation | Optical encoder including displacement sensing normal to the encoder scale grating surface |
JP2014119427A (ja) * | 2012-12-19 | 2014-06-30 | Fujitsu Semiconductor Ltd | スポット探索装置、スポット探索方法 |
JP7032045B2 (ja) | 2013-10-01 | 2022-03-08 | レニショウ パブリック リミテッド カンパニー | 測定エンコーダ |
EP3052900B1 (de) | 2013-10-01 | 2022-03-30 | Renishaw PLC | Verfahren zur herstellung einer elektronischen vorrichtung und entsprechende elektronische vorrichtung |
CN106104216B (zh) | 2013-10-01 | 2018-11-02 | 瑞尼斯豪公司 | 编码器设备 |
DE102014220214B4 (de) * | 2014-10-07 | 2020-06-04 | Baumer Hübner GmbH | Optisches Positionserfassungsgerät, Drehgeber mit einem optischen Positionserfassungsgerät und Verfahren zur Positionserfassung mit erhöhter Betriebssicherheit |
JP2016223999A (ja) * | 2015-06-03 | 2016-12-28 | 並木精密宝石株式会社 | 反射型エンコーダ |
RU175968U1 (ru) * | 2017-05-02 | 2017-12-25 | федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) | Оптическая схема ультрапрецизионного голографического датчика линейных перемещений с блоком управляемых зеркал |
RU176011U1 (ru) * | 2017-05-02 | 2017-12-26 | федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) | Оптическая схема ультрапрецизионного голографического датчика линейных перемещений с управляемым фазовым модулятором |
US11237024B2 (en) * | 2018-10-08 | 2022-02-01 | Pixart Imaging Inc. | Optical encoder with covered photo diode |
US11885828B2 (en) | 2021-04-26 | 2024-01-30 | Pixart Imaging Inc. | Optical encoder with changeable comparator hysteresis and operating method thereof |
US11644345B2 (en) * | 2021-04-26 | 2023-05-09 | Pixart Imaging Inc. | Optical encoder capable of regulating gain of index output |
CN113720445A (zh) * | 2021-07-16 | 2021-11-30 | 内蒙古普析通用仪器有限责任公司 | 基于直流电机加编码器的光度计光栅控制机构及驱动方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH626169A5 (de) * | 1976-11-25 | 1981-10-30 | Leitz Ernst Gmbh | |
DE3700777C2 (de) * | 1986-01-14 | 1994-05-05 | Canon Kk | Vorrichtung zur Erfassung der Position eines Objektes |
JP2567036B2 (ja) * | 1988-05-10 | 1996-12-25 | キヤノン株式会社 | 光学式エンコーダ |
DE9116546U1 (de) * | 1991-02-21 | 1993-01-21 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Positionsmeßeinrichtung mit einer Justiereinrichtung |
US5283434A (en) * | 1991-12-20 | 1994-02-01 | Canon Kabushiki Kaisha | Displacement detecting device with integral optics |
US5390022A (en) * | 1992-04-07 | 1995-02-14 | Canon Kabushiki Kaisha | Displacement information detection apparatus for receiving a divergent light beam |
-
1994
- 1994-04-27 JP JP08999094A patent/JP3530573B2/ja not_active Expired - Lifetime
-
1995
- 1995-04-25 US US08/429,236 patent/US5569913A/en not_active Expired - Lifetime
- 1995-04-26 DE DE69529116T patent/DE69529116T2/de not_active Expired - Lifetime
- 1995-04-26 EP EP95106255A patent/EP0679870B1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011077963B4 (de) * | 2010-07-12 | 2021-03-11 | Dmg Mori Seiki Co., Ltd. | Verlagerungserfassungsvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
JP3530573B2 (ja) | 2004-05-24 |
EP0679870A2 (de) | 1995-11-02 |
DE69529116D1 (de) | 2003-01-23 |
JPH07294214A (ja) | 1995-11-10 |
EP0679870B1 (de) | 2002-12-11 |
EP0679870A3 (de) | 1997-04-16 |
US5569913A (en) | 1996-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |