DE69628774D1 - Vorrichtung zur Verschiebungsdetektion sowie Skala und Antriebsapparat dafür - Google Patents
Vorrichtung zur Verschiebungsdetektion sowie Skala und Antriebsapparat dafürInfo
- Publication number
- DE69628774D1 DE69628774D1 DE69628774T DE69628774T DE69628774D1 DE 69628774 D1 DE69628774 D1 DE 69628774D1 DE 69628774 T DE69628774 T DE 69628774T DE 69628774 T DE69628774 T DE 69628774T DE 69628774 D1 DE69628774 D1 DE 69628774D1
- Authority
- DE
- Germany
- Prior art keywords
- scale
- detection device
- drive apparatus
- displacement detection
- apparatus therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 title 1
- 238000006073 displacement reaction Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02B—INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL
- F02B75/00—Other engines
- F02B75/02—Engines characterised by their cycles, e.g. six-stroke
- F02B2075/022—Engines characterised by their cycles, e.g. six-stroke having less than six strokes per cycle
- F02B2075/027—Engines characterised by their cycles, e.g. six-stroke having less than six strokes per cycle four
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7026747A JPH08219812A (ja) | 1995-02-15 | 1995-02-15 | 変位情報検出装置、変位情報検出用スケール及びこれを用いたドライブ制御装置 |
JP2674795 | 1995-02-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69628774D1 true DE69628774D1 (de) | 2003-07-31 |
DE69628774T2 DE69628774T2 (de) | 2004-05-13 |
Family
ID=12201896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69628774T Expired - Fee Related DE69628774T2 (de) | 1995-02-15 | 1996-02-14 | Vorrichtung zur Verschiebungsdetektion sowie Skala und Antriebsapparat dafür |
Country Status (4)
Country | Link |
---|---|
US (1) | US5663794A (de) |
EP (1) | EP0727646B1 (de) |
JP (1) | JPH08219812A (de) |
DE (1) | DE69628774T2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08210824A (ja) * | 1995-02-07 | 1996-08-20 | Canon Inc | 回転検出装置及び回転制御装置 |
US6229140B1 (en) | 1995-10-27 | 2001-05-08 | Canon Kabushiki Kaisha | Displacement information detection apparatus |
US6151185A (en) * | 1996-09-05 | 2000-11-21 | Canon Kabushiki Kaisha | Position detecting apparatus, positioning apparatus, and information recording apparatus using the same |
US6631047B2 (en) | 1997-09-22 | 2003-10-07 | Canon Kabushiki Kaisha | Interference device, position detecting device, positioning device and information recording apparatus using the same |
JPH11351813A (ja) | 1998-06-08 | 1999-12-24 | Canon Inc | 干渉装置及びそれを用いた位置検出装置 |
EP0978708B1 (de) * | 1998-08-01 | 2005-10-05 | Dr. Johannes Heidenhain GmbH | Rotatorische Positionsmesseinrichtung |
US6130745A (en) | 1999-01-07 | 2000-10-10 | Biometric Imaging, Inc. | Optical autofocus for use with microtiter plates |
JP4365927B2 (ja) * | 1999-03-12 | 2009-11-18 | キヤノン株式会社 | 干渉計測装置及び格子干渉式エンコーダ |
DE60033075T3 (de) | 1999-04-16 | 2012-08-30 | Canon K.K. | Kodierer |
JP2000321021A (ja) | 1999-05-10 | 2000-11-24 | Canon Inc | 干渉装置、変位測定装置、及びそれを用いた情報記録又は/及び再生装置 |
FR2795504B1 (fr) * | 1999-06-25 | 2001-08-10 | Codechamp | Codeur optique haute resolution |
JP4846909B2 (ja) | 2000-02-15 | 2011-12-28 | キヤノン株式会社 | 光学式エンコーダ及び回折格子の変位測定方法 |
JP2001336952A (ja) | 2000-05-26 | 2001-12-07 | Canon Inc | 測定装置 |
DK1368689T3 (da) * | 2001-02-02 | 2006-09-18 | Cellomics Inc | Fremgangsmåde til estimering af den bedste indledende fokusposition |
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
US6897961B2 (en) * | 2003-03-19 | 2005-05-24 | The Boeing Company | Heterodyne lateral grating interferometric encoder |
CN1328575C (zh) * | 2003-07-31 | 2007-07-25 | 阿尔卑斯电气株式会社 | 绝对角检测装置 |
DE10351560A1 (de) * | 2003-11-03 | 2005-06-02 | Metronic Ag | Impulsgeber |
US7348545B2 (en) * | 2005-06-17 | 2008-03-25 | Avago Technologies Ecbu Ip Pte Ltd | System and method for optical encoding on two opposed surfaces of a pattern medium |
US7595480B2 (en) * | 2006-10-16 | 2009-09-29 | Arcus Technology, Inc. | Optical encoder with encoder member having one or more digital diffractive optic regions |
JP4827019B2 (ja) * | 2007-02-14 | 2011-11-30 | コニカミノルタオプト株式会社 | 光学素子及び光ピックアップ装置 |
US7646482B2 (en) * | 2007-05-31 | 2010-01-12 | Genetix Limited | Methods and apparatus for optical analysis of samples in biological sample containers |
US7535556B2 (en) * | 2007-05-31 | 2009-05-19 | Genetix Limited | Methods and apparatus for optical analysis of samples in biological sample containers |
US7942044B2 (en) * | 2007-12-18 | 2011-05-17 | Michigan Technological University | Wrist pin sensing system and method |
JP5159663B2 (ja) * | 2009-02-13 | 2013-03-06 | キヤノン株式会社 | 原点検出装置、変位測定装置および電子機器 |
EP2487453B1 (de) * | 2009-10-05 | 2016-12-14 | Taiyo Yuden Co., Ltd. | Wegmessverfahren und wegmessvorrichtung |
WO2012029927A1 (ja) * | 2010-09-02 | 2012-03-08 | 株式会社安川電機 | エンコーダ、サーボモータ、及びモータユニット |
CN103064262B (zh) * | 2013-01-17 | 2015-10-28 | 清华大学 | 一种用于激光干涉光刻***的光栅相位调制器 |
JP6593868B2 (ja) | 2015-07-28 | 2019-10-23 | 株式会社ミツトヨ | 変位検出装置 |
US10274344B2 (en) | 2016-12-27 | 2019-04-30 | Mitutoyo Corporation | Displacement encoder |
JP7063743B2 (ja) | 2018-06-19 | 2022-05-09 | 株式会社ミツトヨ | エンコーダ |
CN109443402B (zh) * | 2018-12-12 | 2024-04-05 | 珠海格力电器股份有限公司 | 一种码盘及编码器 |
CN112013768B (zh) * | 2019-05-29 | 2022-09-02 | 深圳市立林智感科技有限公司 | 用于位移测量的信号携带体装置、***及设备 |
US11982550B2 (en) * | 2020-11-06 | 2024-05-14 | Panasonic Intellectual Property Management Co., Ltd. | Encoder |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5283434A (en) * | 1991-12-20 | 1994-02-01 | Canon Kabushiki Kaisha | Displacement detecting device with integral optics |
US5390022A (en) * | 1992-04-07 | 1995-02-14 | Canon Kabushiki Kaisha | Displacement information detection apparatus for receiving a divergent light beam |
JP3254737B2 (ja) * | 1992-06-17 | 2002-02-12 | キヤノン株式会社 | エンコーダー |
JP3478567B2 (ja) * | 1992-09-25 | 2003-12-15 | キヤノン株式会社 | 回転情報検出装置 |
JP3210111B2 (ja) * | 1992-12-24 | 2001-09-17 | キヤノン株式会社 | 変位検出装置 |
JPH06194123A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
JP3173208B2 (ja) * | 1993-01-29 | 2001-06-04 | キヤノン株式会社 | 変位測定装置 |
DE4317064A1 (de) * | 1993-05-21 | 1994-11-24 | Bosch Gmbh Robert | Positionsmeßvorrichtung |
JPH08210824A (ja) * | 1995-02-07 | 1996-08-20 | Canon Inc | 回転検出装置及び回転制御装置 |
-
1995
- 1995-02-15 JP JP7026747A patent/JPH08219812A/ja active Pending
-
1996
- 1996-02-14 EP EP96102193A patent/EP0727646B1/de not_active Revoked
- 1996-02-14 DE DE69628774T patent/DE69628774T2/de not_active Expired - Fee Related
- 1996-02-15 US US08/601,694 patent/US5663794A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH08219812A (ja) | 1996-08-30 |
EP0727646A2 (de) | 1996-08-21 |
EP0727646B1 (de) | 2003-06-25 |
DE69628774T2 (de) | 2004-05-13 |
US5663794A (en) | 1997-09-02 |
EP0727646A3 (de) | 1997-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8339 | Ceased/non-payment of the annual fee |