DE69612152D1 - Verfahren und Vorrichtung zur Reinigung von Argon - Google Patents

Verfahren und Vorrichtung zur Reinigung von Argon

Info

Publication number
DE69612152D1
DE69612152D1 DE69612152T DE69612152T DE69612152D1 DE 69612152 D1 DE69612152 D1 DE 69612152D1 DE 69612152 T DE69612152 T DE 69612152T DE 69612152 T DE69612152 T DE 69612152T DE 69612152 D1 DE69612152 D1 DE 69612152D1
Authority
DE
Germany
Prior art keywords
purifying argon
purifying
argon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69612152T
Other languages
English (en)
Inventor
Shinji Tomita
Takashi Nagamura
Takao Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Japan GK
Original Assignee
Air Liquide Japan GK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide Japan GK filed Critical Air Liquide Japan GK
Application granted granted Critical
Publication of DE69612152D1 publication Critical patent/DE69612152D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0094—Combined chemical and physical processing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/0228—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream
    • F25J3/028—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream separation of noble gases
    • F25J3/0285—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream characterised by the separated product stream separation of noble gases of argon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0006—Chemical processing by reduction
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0034—Argon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0045—Oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/005—Carbon monoxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0051—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0062—Water
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/02—Processes or apparatus using separation by rectification in a single pressure main column system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00—Processes or apparatus using separation by rectification
    • F25J2200/30—Processes or apparatus using separation by rectification using a side column in a single pressure column system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/60—Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/82—Processes or apparatus using other separation and/or other processing means using a reactor with combustion or catalytic reaction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2210/00—Processes characterised by the type or other details of the feed stream
    • F25J2210/42—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/58—Argon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2270/00—Refrigeration techniques used
    • F25J2270/60—Closed external refrigeration cycle with single component refrigerant [SCR], e.g. C1-, C2- or C3-hydrocarbons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2270/00—Refrigeration techniques used
    • F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
    • F25J2270/904—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by liquid or gaseous cryogen in an open loop

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Separation By Low-Temperature Treatments (AREA)
DE69612152T 1995-09-05 1996-09-04 Verfahren und Vorrichtung zur Reinigung von Argon Expired - Lifetime DE69612152D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7228106A JP3020842B2 (ja) 1995-09-05 1995-09-05 アルゴン精製方法及び装置

Publications (1)

Publication Number Publication Date
DE69612152D1 true DE69612152D1 (de) 2001-04-26

Family

ID=16871303

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69612152T Expired - Lifetime DE69612152D1 (de) 1995-09-05 1996-09-04 Verfahren und Vorrichtung zur Reinigung von Argon

Country Status (5)

Country Link
US (1) US5783162A (de)
EP (1) EP0761596B1 (de)
JP (1) JP3020842B2 (de)
KR (1) KR970015461A (de)
DE (1) DE69612152D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1183309A (ja) * 1997-09-04 1999-03-26 Nippon Air Rikiide Kk アルゴン精製方法及び装置
US6500235B2 (en) 2000-12-29 2002-12-31 Praxair Technology, Inc. Pressure swing adsorption process for high recovery of high purity gas
US20020174680A1 (en) * 2001-05-22 2002-11-28 Wong Kenneth Kai Cryogenic system for producing high purity argon
DE60319204T4 (de) * 2003-04-30 2009-04-09 Air Products And Chemicals, Inc. Verfahren und System zur Reinigung von Abgasen
US7604683B2 (en) * 2005-06-14 2009-10-20 Canon Kabushiki Kaisha Gas separation method using adsorbent
TW201012988A (en) * 2008-08-27 2010-04-01 Bp Corp North America Inc Gas recirculation heat exchanger for casting silicon
DE102009003350C5 (de) 2009-01-14 2017-02-09 Reicat Gmbh Verfahren und Vorrichtung zur Abtrennung von Argon aus einem Gasgemisch
DE102009044249B3 (de) * 2009-10-14 2011-06-30 ReiCat GmbH, 63571 Verfahren und Vorrichtung zur Abtrennung von Argon aus einem Gasgemisch
CN102142359B (zh) * 2010-12-13 2012-05-30 浙江大学 一种硅片外吸杂方法
JP2012140254A (ja) * 2010-12-28 2012-07-26 Covalent Materials Corp 不活性ガス回収装置
JP5614808B2 (ja) * 2011-01-18 2014-10-29 住友精化株式会社 ヘリウムガスの精製方法および精製装置
KR102034912B1 (ko) 2011-12-07 2019-11-18 프랙스에어 테크놀로지, 인코포레이티드 규소 결정 성장 인상 공정을 위한 불활성 가스 회수 및 재순환
CN102583281B (zh) * 2012-03-23 2014-01-29 杭州杭氧股份有限公司 单晶硅生产中氩气回收纯化的方法与装置
US9676629B2 (en) * 2015-06-09 2017-06-13 Praxair Technology, Inc. Helium enhanced heat transfer in adsorptive liquid or gas phase argon purification processes
EP3359489A2 (de) 2015-10-09 2018-08-15 Milwaukee Silicon, LLC Vorrichtungen und systeme zur reinigung von silicium
CN108862220A (zh) * 2018-07-02 2018-11-23 凯盛石墨碳材料有限公司 一种石墨高温提纯尾气中氩气回收的方法
EP4189311A1 (de) 2020-08-03 2023-06-07 Linde GmbH Verfahren und anlage zur durchführung eines industrieprozesses
CN117902554A (zh) * 2024-03-19 2024-04-19 上海联风气体有限公司 惰性气体纯化的处理***和方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2429181A1 (fr) * 1979-03-27 1980-01-18 Air Liquide Procede et installation d'argon substantiellement pur
GB2053878B (en) * 1979-07-12 1983-01-19 Petrocarbon Dev Ltd Process for the recovery of argon
US4623524A (en) * 1985-02-08 1986-11-18 Hitachi, Ltd. Process and apparatus for recovering inert gas
US4762542A (en) * 1987-03-20 1988-08-09 The Boc Group, Inc. Process for the recovery of argon
US4859435A (en) * 1988-06-10 1989-08-22 Air Products And Chemicals, Inc. Deoxygenation of inert gas streams with methanol
JPH02272228A (ja) * 1989-04-11 1990-11-07 Matsushita Electric Ind Co Ltd 排煙装置付レンジ
JPH02272288A (ja) * 1989-04-12 1990-11-07 Sumitomo Metal Ind Ltd アルゴンの回収方法
JPH03134482A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd アルゴン精製装置
FR2675567A1 (fr) * 1991-04-16 1992-10-23 Air Liquide Procede et installation de production d'argon.
JP2838623B2 (ja) * 1992-08-06 1998-12-16 日本エア・リキード株式会社 超高純度窒素製造方法及びその装置
JP2893562B2 (ja) * 1992-09-22 1999-05-24 日本エア・リキード株式会社 超高純度窒素製造方法及びその装置
US5399246A (en) * 1993-08-26 1995-03-21 Ceramatec, Inc. Inert gas purification

Also Published As

Publication number Publication date
EP0761596B1 (de) 2001-03-21
US5783162A (en) 1998-07-21
EP0761596A1 (de) 1997-03-12
KR970015461A (ko) 1997-04-28
JPH0972656A (ja) 1997-03-18
JP3020842B2 (ja) 2000-03-15

Similar Documents

Publication Publication Date Title
DE69603577D1 (de) Verfahren und vorrichtung zur verabreichung von analgetika
DE69804808D1 (de) Verfahren und vorrichtung zur reduzierung von verunreinigungen
DE69634829D1 (de) Verfahren und vorrichtung zur leukozytenfiltration
DE69606885T2 (de) Verfahren und vorrichtung zur durchführung von bereichserweiterten tcas
DE69611977T2 (de) Verfahren und Vorrichtung zur Vermeidung von Fehlerstrom
DE69610569T2 (de) Vorrichtung und Verfahren zur Entnahme von Fäkalien
DE69733463D1 (de) Vorrichtung und verfahren zur rahmung von paketen
DE59601862D1 (de) Verfahren und Vorrichtung zur Elektrolyse
DE69633844D1 (de) Verfahren und Vorrichtung zur mehrfachen Kommunikation
ATE247513T1 (de) Vorrichtung und verfahren zur trennung
DE69528743T2 (de) Verfahren und Vorrichtung zur Plasmabehandlung
DE69623879D1 (de) Vorrichtung und Verfahren zur Volumenermittlung
DE69612152D1 (de) Verfahren und Vorrichtung zur Reinigung von Argon
DE69620699T2 (de) Verfahren und Vorrichtung zur Herstellung von porösen Metallplatten
DE69628494D1 (de) Vorrichtung und Verfahren zur Koordinateneingabe
ATA219392A (de) Verfahren und vorrichtung zur filtration
DE59708284D1 (de) Vorrichtung und verfahren zur formgebung von oberflächen
DE69622420T2 (de) Verfahren und vorrichtung zur reduzierung unerwünschter rückkopplung
DE69506449D1 (de) Verfahren und vorrichtung zur zwischenbildkodierung
DE69604374T2 (de) Verfahren und vorrichtung zur freien kurveninterpolation
DE69607593D1 (de) Verfahren und vorrichtung zur reinigung von verunreinigten säuren
DE69625041D1 (de) Verfahren und vorrichtung zur informationsbehandlung
DE69631467D1 (de) Verfahren und vorrichtung zur abtrennung von argon
DE59609401D1 (de) Verfahren und Vorrichtung zur Antriebsschlupfregelung
DE69503266T2 (de) Verfahren und Vorrichtung zur Aufbereitung von Sand

Legal Events

Date Code Title Description
8332 No legal effect for de