DE69513433D1 - Positiv arbeitende Photoresistzusammensetzung - Google Patents

Positiv arbeitende Photoresistzusammensetzung

Info

Publication number
DE69513433D1
DE69513433D1 DE69513433T DE69513433T DE69513433D1 DE 69513433 D1 DE69513433 D1 DE 69513433D1 DE 69513433 T DE69513433 T DE 69513433T DE 69513433 T DE69513433 T DE 69513433T DE 69513433 D1 DE69513433 D1 DE 69513433D1
Authority
DE
Germany
Prior art keywords
photoresist composition
positive working
working photoresist
positive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69513433T
Other languages
English (en)
Other versions
DE69513433T2 (de
Inventor
Shiro Tan
Yasumasa Kawabe
Tadayoshi Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of DE69513433D1 publication Critical patent/DE69513433D1/de
Application granted granted Critical
Publication of DE69513433T2 publication Critical patent/DE69513433T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE69513433T 1994-04-12 1995-02-27 Positiv arbeitende Photoresistzusammensetzung Expired - Fee Related DE69513433T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07311994A JP3230925B2 (ja) 1994-04-12 1994-04-12 ポジ型フオトレジスト組成物

Publications (2)

Publication Number Publication Date
DE69513433D1 true DE69513433D1 (de) 1999-12-30
DE69513433T2 DE69513433T2 (de) 2000-05-04

Family

ID=13509047

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69513433T Expired - Fee Related DE69513433T2 (de) 1994-04-12 1995-02-27 Positiv arbeitende Photoresistzusammensetzung

Country Status (4)

Country Link
US (1) US5494773A (de)
EP (1) EP0677789B1 (de)
JP (1) JP3230925B2 (de)
DE (1) DE69513433T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3373072B2 (ja) * 1994-12-28 2003-02-04 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
JP3467118B2 (ja) * 1995-05-24 2003-11-17 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
JP2001220420A (ja) * 2000-02-08 2001-08-14 Shin Etsu Chem Co Ltd 高分子化合物及びポジ型レジスト材料
JP3943058B2 (ja) * 2003-07-16 2007-07-11 東京応化工業株式会社 ポジ型フォトレジスト組成物、及びレジストパターン形成方法
DE602004022677D1 (de) * 2003-07-16 2009-10-01 Tokyo Ohka Kogyo Co Ltd Positivphotoresistzusammensetzung und verfahren zur ausbildung einer resiststruktur
KR20050022494A (ko) * 2003-09-02 2005-03-08 삼성전자주식회사 스핀레스 코터용 액정표시소자의 포토레지스트 조성물과이를 이용한 포토레지스트 패턴 형성 방법
US7557369B2 (en) * 2004-07-29 2009-07-07 Samsung Mobile Display Co., Ltd. Display and method for manufacturing the same
JP5190000B2 (ja) * 2009-01-30 2013-04-24 東京応化工業株式会社 ポジ型レジスト組成物及びこれを用いたレジストパターンの形成方法
TWI733541B (zh) * 2019-08-09 2021-07-11 長春人造樹脂廠股份有限公司 含烯丙基樹脂及其應用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4123279A (en) * 1974-03-25 1978-10-31 Fuji Photo Film Co., Ltd. Light-sensitive o-quinonediazide containing planographic printing plate
JPS6180246A (ja) * 1984-09-28 1986-04-23 Nec Corp ポジレジスト材料
DE3718416A1 (de) * 1987-06-02 1988-12-15 Hoechst Ag Lichtempfindliches gemisch auf basis von 1,2-naphthochinondiaziden, daraus hergestelltes aufzeichnungsmaterial und dessen verwendung
JPH0656488B2 (ja) * 1990-05-01 1994-07-27 日本合成ゴム株式会社 ポジ型感光性樹脂組成物
US5395727A (en) * 1990-06-05 1995-03-07 Sumitomo Chemical Company, Limited Positive resist composition containing a novolak resin made from an aldehyde and dimer of isopropenyl phenol
EP0460416B1 (de) * 1990-06-05 1996-08-21 Sumitomo Chemical Company, Limited Positivresistzusammensetzung
JP3182823B2 (ja) * 1991-12-27 2001-07-03 住友化学工業株式会社 ポジ型レジスト組成物
JP3391471B2 (ja) * 1992-02-25 2003-03-31 住友化学工業株式会社 ポジ型レジスト組成物
JPH05249666A (ja) * 1992-03-05 1993-09-28 Sumitomo Chem Co Ltd ポジ型レジスト組成物

Also Published As

Publication number Publication date
JPH07281430A (ja) 1995-10-27
JP3230925B2 (ja) 2001-11-19
EP0677789A1 (de) 1995-10-18
EP0677789B1 (de) 1999-11-24
DE69513433T2 (de) 2000-05-04
US5494773A (en) 1996-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUJIFILM CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee