DE69512349T2 - Verfahren zur Herstellung von Kompositsinterkörpern aus Siliciumkarbid und Siliciumnitrid - Google Patents
Verfahren zur Herstellung von Kompositsinterkörpern aus Siliciumkarbid und SiliciumnitridInfo
- Publication number
- DE69512349T2 DE69512349T2 DE69512349T DE69512349T DE69512349T2 DE 69512349 T2 DE69512349 T2 DE 69512349T2 DE 69512349 T DE69512349 T DE 69512349T DE 69512349 T DE69512349 T DE 69512349T DE 69512349 T2 DE69512349 T2 DE 69512349T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- sintered bodies
- composite sintered
- silicon nitride
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title 1
- 239000002131 composite material Substances 0.000 title 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title 1
- 229910010271 silicon carbide Inorganic materials 0.000 title 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
- C04B35/5755—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering obtained by gas pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31123394A JP3567001B2 (ja) | 1994-11-21 | 1994-11-21 | 炭化珪素と窒化珪素の複合焼結体の製造方法 |
JP6335076A JPH08175874A (ja) | 1994-12-20 | 1994-12-20 | 炭化珪素と窒化珪素の複合焼結体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69512349D1 DE69512349D1 (de) | 1999-10-28 |
DE69512349T2 true DE69512349T2 (de) | 2000-01-13 |
Family
ID=26566636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69512349T Expired - Fee Related DE69512349T2 (de) | 1994-11-21 | 1995-11-14 | Verfahren zur Herstellung von Kompositsinterkörpern aus Siliciumkarbid und Siliciumnitrid |
Country Status (3)
Country | Link |
---|---|
US (1) | US5785922A (de) |
EP (1) | EP0712819B1 (de) |
DE (1) | DE69512349T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100325325B1 (ko) * | 1999-08-17 | 2002-03-06 | 황해웅 | 강도와 인성이 우수한 질화규소 세라믹 제조방법 |
KR100395685B1 (ko) * | 2000-09-05 | 2003-08-25 | 김영욱 | 고온강도가 향상된 탄화규소 소재 및 그의 제조방법 |
US6680267B2 (en) * | 2001-08-20 | 2004-01-20 | Saint-Gobain Ceramics & Plastics, Inc. | Silicon carbide ceramic composition and method of making |
US6762140B2 (en) | 2001-08-20 | 2004-07-13 | Saint-Gobain Ceramics & Plastics, Inc. | Silicon carbide ceramic composition and method of making |
JP4008230B2 (ja) * | 2001-11-14 | 2007-11-14 | 住友大阪セメント株式会社 | 静電チャックの製造方法 |
CN101550600B (zh) * | 2009-04-22 | 2011-05-25 | 中国地质大学(北京) | 高纯度高密度单晶氮化硅纳米阵列的制备方法 |
CN101603207B (zh) * | 2009-07-21 | 2011-11-09 | 中国地质大学(北京) | 高纯高产率网络状分枝氮化硅单晶纳米结构的制备方法 |
CN104311135B (zh) * | 2014-10-22 | 2015-12-02 | 山东理工大学 | 一种氮化硅、碳化硅结合氮化铝泡沫陶瓷的制备方法 |
CN107573080A (zh) * | 2017-09-29 | 2018-01-12 | 山东大学 | 一种浸渍法制备SiCN/Si3N4复合陶瓷的方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1377487A (en) * | 1970-12-23 | 1974-12-18 | Tokyo Shibaura Electric Co | Heat resistant composite materials |
US4187116A (en) * | 1976-03-25 | 1980-02-05 | Westinghouse Electric Corp. | Silicon nitride-silicon carbide composite material |
US4184882A (en) * | 1976-03-25 | 1980-01-22 | Westinghouse Electric Corp. | Silicon nitride-silicon carbide composite material |
US4209474A (en) * | 1977-08-31 | 1980-06-24 | General Electric Company | Process for preparing semiconducting silicon carbide sintered body |
JPS5891070A (ja) * | 1981-11-27 | 1983-05-30 | 旭硝子株式会社 | 炭化珪素と窒化珪素の複合焼結体の製法 |
US4690790A (en) * | 1985-07-23 | 1987-09-01 | Stemcor Corporation | Silicon nitride/silicon carbide composition and articles thereof |
US4800182A (en) * | 1987-01-22 | 1989-01-24 | Mitsubishi Gas Chemical Company, Inc. | Silicon nitride-silicon carbide composite material and process for production thereof |
US4826791A (en) * | 1987-05-29 | 1989-05-02 | Kennametal Inc. | Silicon carbide-alpha prime sialon beta prime sialon |
JPH02160669A (ja) | 1988-09-14 | 1990-06-20 | Mitsubishi Gas Chem Co Inc | 窒化ケイ素―炭化ケイ素複合焼結体およびその製造法 |
US5244621A (en) * | 1989-12-26 | 1993-09-14 | Mitsubishi Gas Chemical Company, Inc. | Process for shaping ceramic composites |
-
1995
- 1995-11-14 EP EP95117928A patent/EP0712819B1/de not_active Expired - Lifetime
- 1995-11-14 DE DE69512349T patent/DE69512349T2/de not_active Expired - Fee Related
- 1995-11-16 US US08/559,001 patent/US5785922A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0712819B1 (de) | 1999-09-22 |
EP0712819A3 (de) | 1996-10-30 |
DE69512349D1 (de) | 1999-10-28 |
US5785922A (en) | 1998-07-28 |
EP0712819A2 (de) | 1996-05-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |