DE69330010D1 - Vorrichtung und Verfahren zur Schichtdickenbestimmung mittels Bildverarbeitung - Google Patents
Vorrichtung und Verfahren zur Schichtdickenbestimmung mittels BildverarbeitungInfo
- Publication number
- DE69330010D1 DE69330010D1 DE69330010T DE69330010T DE69330010D1 DE 69330010 D1 DE69330010 D1 DE 69330010D1 DE 69330010 T DE69330010 T DE 69330010T DE 69330010 T DE69330010 T DE 69330010T DE 69330010 D1 DE69330010 D1 DE 69330010D1
- Authority
- DE
- Germany
- Prior art keywords
- image processing
- layer thickness
- determining layer
- determining
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N21/8903—Optical details; Scanning details using a multiple detector array
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/50—Control of the SSIS exposure
- H04N25/53—Control of the integration time
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0162—Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing
- G01N2021/0168—Arrangements or apparatus for facilitating the optical investigation using microprocessors for control of a sequence of operations, e.g. test, powering, switching, processing for the measurement cycle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8427—Coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8838—Stroboscopic illumination; synchronised illumination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
- G01N2021/936—Adjusting threshold, e.g. by way of moving average
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/102—Video camera
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Textile Engineering (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Mathematical Physics (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US89131892A | 1992-05-29 | 1992-05-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69330010D1 true DE69330010D1 (de) | 2001-04-19 |
DE69330010T2 DE69330010T2 (de) | 2001-09-13 |
Family
ID=25397973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69330010T Expired - Fee Related DE69330010T2 (de) | 1992-05-29 | 1993-05-25 | Vorrichtung und Verfahren zur Beschichtungsdichteanalyse mittels Bildverarbeitung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5533139A (de) |
EP (1) | EP0572336B1 (de) |
JP (1) | JPH0643115A (de) |
DE (1) | DE69330010T2 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5668887A (en) * | 1992-05-29 | 1997-09-16 | Eastman Kodak Company | Coating density analyzer and method using non-synchronous TDI camera |
DE19505190A1 (de) * | 1995-02-16 | 1996-08-22 | Marquardt Gmbh | Elektronischer Schlüssel |
ES2146730T3 (es) * | 1995-05-10 | 2000-08-16 | Mahlo Gmbh & Co Kg | Procedimiento y dispositivo para detectar defectos en telas o similares en movimiento. |
US5722287A (en) * | 1995-05-31 | 1998-03-03 | Forstein; Micah Aaron | Video pedobarograph system |
US5899959A (en) * | 1996-10-25 | 1999-05-04 | International Paper Company | Measurement of visual characteristics of paper |
US6438256B1 (en) * | 1996-11-08 | 2002-08-20 | E.I. Du Pont De Nemours And Company | Method of quantifying visual uniformity of planar objects |
JPH1115755A (ja) * | 1997-06-20 | 1999-01-22 | Matsushita Graphic Commun Syst Inc | ファクシミリ型電子メール装置 |
FR2770646B1 (fr) * | 1997-11-06 | 1999-12-17 | Eastman Kodak Co | Procede d'identification de defauts d'une enduction |
US7408156B2 (en) * | 1999-06-21 | 2008-08-05 | Yannacone Jr Victor John | System and method for identifying and classifying dynamic thermodynamic processes in mammals and discriminating between and among such processes |
WO2000078211A1 (en) * | 1999-06-21 | 2000-12-28 | Yannacone Victor John Jr | Method and apparatus for high resolution dynamic digital infrared imaging |
US6384421B1 (en) * | 1999-10-07 | 2002-05-07 | Logical Systems Incorporated | Vision system for industrial parts |
EP1164369A3 (de) * | 2000-06-13 | 2004-02-04 | Konica Corporation | Optisches Lesegerät und optisches Leseverfahren |
JP2003043991A (ja) * | 2001-08-02 | 2003-02-14 | Fujitsu Hitachi Plasma Display Ltd | プラズマディスプレイ装置 |
US6805899B2 (en) | 2002-01-30 | 2004-10-19 | Honeywell International Inc. | Multi-measurement/sensor coating consolidation detection method and system |
US6833913B1 (en) * | 2002-02-26 | 2004-12-21 | Kla-Tencor Technologies Corporation | Apparatus and methods for optically inspecting a sample for anomalies |
US7061616B2 (en) * | 2002-03-28 | 2006-06-13 | Samsung Electronics Co., Ltd. | Optical transceiver and method for image density measurement |
US6871409B2 (en) * | 2002-12-18 | 2005-03-29 | Snap-On Incorporated | Gradient calculating camera board |
US7017492B2 (en) * | 2003-03-10 | 2006-03-28 | Quad/Tech, Inc. | Coordinating the functioning of a color control system and a defect detection system for a printing press |
DE10326217A1 (de) * | 2003-06-11 | 2004-12-30 | Bayerische Motoren Werke Ag | Verfahren zum Erkennen von Fehlern der Haftung einer Beschichtung |
DE10326216B4 (de) * | 2003-06-11 | 2007-03-15 | Bayerische Motoren Werke Ag | Verfahren zum Erkennen von Fehlern der Haftung einer Beschichtung auf einem Substrat |
US8921733B2 (en) * | 2003-08-11 | 2014-12-30 | Raydiance, Inc. | Methods and systems for trimming circuits |
JP4610182B2 (ja) * | 2003-12-05 | 2011-01-12 | 株式会社日立ハイテクノロジーズ | 走査型電子顕微鏡 |
US9292904B2 (en) | 2004-01-16 | 2016-03-22 | Nvidia Corporation | Video image processing with parallel processing |
US20050207655A1 (en) * | 2004-03-22 | 2005-09-22 | Nasreen Chopra | Inspection system and method for providing feedback |
US20050226466A1 (en) * | 2004-04-06 | 2005-10-13 | Quad/Tech, Inc. | Image acquisition assembly |
US7525654B2 (en) * | 2004-10-20 | 2009-04-28 | Duquesne University Of The Holy Spirit | Tunable laser-based chemical imaging system |
US7528950B2 (en) * | 2005-01-11 | 2009-05-05 | Duquesne University Of The Holy Spirit | Tunable laser-based process monitoring apparatus |
US7869666B2 (en) | 2005-01-13 | 2011-01-11 | Nvidia Corporation | Video processing system and method with dynamic tag architecture |
US20060152627A1 (en) * | 2005-01-13 | 2006-07-13 | Ruggiero Carl J | Video processing system and method with dynamic tag architecture |
US8045002B2 (en) | 2005-07-29 | 2011-10-25 | Mitutoyo Corporation | Systems and methods for controlling strobe illumination |
US9234852B2 (en) | 2005-07-29 | 2016-01-12 | Mitutoyo Corporation | Systems and methods for controlling strobe illumination |
US7545971B2 (en) * | 2005-08-22 | 2009-06-09 | Honeywell International Inc. | Method and apparatus for measuring the crepe of a moving sheet |
US7800009B2 (en) | 2007-10-30 | 2010-09-21 | Logical Systems Incorporated | Air separator conveyor and vision system |
WO2012021748A1 (en) | 2010-08-12 | 2012-02-16 | Raydiance, Inc. | Polymer tubing laser micromachining |
US9114482B2 (en) | 2010-09-16 | 2015-08-25 | Raydiance, Inc. | Laser based processing of layered materials |
US10239160B2 (en) | 2011-09-21 | 2019-03-26 | Coherent, Inc. | Systems and processes that singulate materials |
US9244124B2 (en) * | 2014-03-28 | 2016-01-26 | International Business Machines Corporation | Initializing and testing integrated circuits with selectable scan chains with exclusive-or outputs |
CN104483328B (zh) * | 2014-12-05 | 2016-09-28 | 华兆鼎泰科技(天津)有限公司 | Led外观检测机 |
DE102018103171A1 (de) * | 2017-11-23 | 2019-05-23 | Tdk Electronics Ag | Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie |
Family Cites Families (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3518013A (en) * | 1966-09-26 | 1970-06-30 | Itek Corp | Densitometer |
US3582219A (en) * | 1967-10-27 | 1971-06-01 | Agfa Gevaert Ag | Light measuring means for microfilm cameras |
US3814943A (en) * | 1969-08-26 | 1974-06-04 | Sira Institute | Method of and apparatus for analysing patterns and inspecting objects |
JPS5540809B1 (de) * | 1970-03-31 | 1980-10-20 | ||
JPS4874865A (de) * | 1971-12-29 | 1973-10-09 | ||
JPS5531450B2 (de) * | 1972-08-25 | 1980-08-18 | ||
GB1449044A (en) * | 1972-11-14 | 1976-09-08 | Kongsberg Vapenfab As | Procedures and apparatuses for determining the shapes of surfaces |
US3932023A (en) * | 1974-11-18 | 1976-01-13 | E. I. Du Pont De Nemours & Company | Optical coupler for transmitting light linearly between a single point and plural points |
US4005281A (en) * | 1975-05-14 | 1977-01-25 | E. I. Du Pont De Nemours And Company | Defect identification with normalizing of gain function in optical-electrical inspection |
US4120582A (en) * | 1976-10-27 | 1978-10-17 | Donnelly Mirrors, Inc. | Light reflectivity and transmission testing apparatus and method |
US4183666A (en) * | 1977-03-10 | 1980-01-15 | Mitsubishi Rayon Company, Limited | Method of measuring light transmission losses of optical materials |
JPS5474792A (en) * | 1977-11-28 | 1979-06-15 | Nippon Steel Corp | Surface defect inspection method of steel plates |
US4224513A (en) * | 1978-04-06 | 1980-09-23 | Measurex Corporation | Apparatus for the on-line measurement of the opacity of a paper sheet |
US4292672A (en) * | 1979-03-19 | 1981-09-29 | Rca Corporation | Inspection system for detecting defects in regular patterns |
GB2046432B (en) * | 1979-04-09 | 1983-05-11 | Infrared Eng Ltd | Apparatus for determining the thickness moisture content or other parameter of a film or coating |
US4299451A (en) * | 1980-04-15 | 1981-11-10 | The United States Of America As Represented By The Secretary Of The Air Force | Minimum resolvable contrast measurement device |
EP0048568A3 (de) * | 1980-09-19 | 1983-09-21 | Trw Inc. | Einrichtung zur Fehlerbestimmung |
US4439038A (en) * | 1981-03-03 | 1984-03-27 | Sentrol Systems Ltd. | Method and apparatus for measuring and controlling the color of a moving web |
US4565444A (en) * | 1982-11-01 | 1986-01-21 | Sentrol Systems Ltd. | Electronically scanned spectrometer color, brightness and opacity measurement and control system |
GB8424074D0 (en) * | 1984-09-24 | 1984-10-31 | British Aerospace | Testing light transmitting articles |
GB8425273D0 (en) * | 1984-10-05 | 1984-11-14 | Spandrel Etab | Signal responsive to parameter of objects |
US4603956A (en) * | 1984-11-16 | 1986-08-05 | Pako Corporation | Film-width and transmittance scanner system |
JPS61223605A (ja) * | 1985-03-29 | 1986-10-04 | Fuji Photo Film Co Ltd | 表面形状検査方法 |
US5068799A (en) | 1985-04-24 | 1991-11-26 | Jarrett Jr Harold M | System and method for detecting flaws in continuous web materials |
CA1222319A (en) * | 1985-05-16 | 1987-05-26 | Cip Inc. | Apparatus for analysing the formation of a paper web |
JPS62138740A (ja) * | 1985-12-13 | 1987-06-22 | Hiyuutec:Kk | シ−ト面の欠陥検出方法 |
US4730213A (en) * | 1986-04-25 | 1988-03-08 | Rca Corporation | Method measuring transparent elements and an opaque medium |
US4883963A (en) * | 1986-04-28 | 1989-11-28 | Bran+Luebbe Gmbh | Optical analysis method and apparatus having programmable rapid random wavelength access |
JPS6332338A (ja) * | 1986-07-26 | 1988-02-12 | Hitachi Ltd | 光学特性測定装置 |
JPS63134941A (ja) * | 1986-11-26 | 1988-06-07 | Koyo Seiko Co Ltd | 連続性を有する欠陥の検出装置 |
JPH01253641A (ja) * | 1988-04-01 | 1989-10-09 | Fuji Photo Film Co Ltd | 筋状欠陥弁別処理回路 |
US4922337B1 (en) * | 1988-04-26 | 1994-05-03 | Picker Int Inc | Time delay and integration of images using a frame transfer ccd sensor |
US5113454A (en) * | 1988-08-19 | 1992-05-12 | Kajaani Electronics Ltd. | Formation testing with digital image analysis |
US4868383A (en) * | 1988-09-08 | 1989-09-19 | Eastman Kodak Company | Linear integrating cavity light source used for generating an intense beam of light |
US5040057A (en) * | 1990-08-13 | 1991-08-13 | Picker International, Inc. | Multi-mode TDI/raster-scan television camera system |
US4989973A (en) * | 1988-10-03 | 1991-02-05 | Nissan Motor Co., Ltd. | Surface condition estimating apparatus |
US4946282A (en) * | 1988-11-18 | 1990-08-07 | The United States Of America As Represented By The Secretary Of The Air Force | Transparency transmissivity measurement device |
US4955720A (en) * | 1989-01-05 | 1990-09-11 | International Paper Company | On-line fiber orientation distribution measurement |
US4931657A (en) * | 1989-04-13 | 1990-06-05 | Macmillan Bloedel Limited | On-line texture sensing |
DE69116348T2 (de) | 1990-03-13 | 1996-06-13 | Du Pont | Gewebeband-inspektionssystem |
US5045135A (en) * | 1990-11-15 | 1991-09-03 | Paper Converting Machine Company | Apparatus and method for cutoff register control for diaper machines |
US5440648A (en) * | 1991-11-19 | 1995-08-08 | Dalsa, Inc. | High speed defect detection apparatus having defect detection circuits mounted in the camera housing |
-
1993
- 1993-05-25 EP EP93420208A patent/EP0572336B1/de not_active Expired - Lifetime
- 1993-05-25 DE DE69330010T patent/DE69330010T2/de not_active Expired - Fee Related
- 1993-05-27 JP JP5126124A patent/JPH0643115A/ja active Pending
-
1994
- 1994-09-12 US US08/304,603 patent/US5533139A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5533139A (en) | 1996-07-02 |
EP0572336A1 (de) | 1993-12-01 |
JPH0643115A (ja) | 1994-02-18 |
EP0572336B1 (de) | 2001-03-14 |
DE69330010T2 (de) | 2001-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |