DE69321329T2 - Vorrichtung zur Detektion einer Verschiebung - Google Patents

Vorrichtung zur Detektion einer Verschiebung

Info

Publication number
DE69321329T2
DE69321329T2 DE69321329T DE69321329T DE69321329T2 DE 69321329 T2 DE69321329 T2 DE 69321329T2 DE 69321329 T DE69321329 T DE 69321329T DE 69321329 T DE69321329 T DE 69321329T DE 69321329 T2 DE69321329 T2 DE 69321329T2
Authority
DE
Germany
Prior art keywords
detection device
displacement detection
displacement
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69321329T
Other languages
English (en)
Other versions
DE69321329D1 (de
Inventor
Yasushi Kaneda
Koh Ishizuka
Hiroshi Kondo
Satoshi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69321329D1 publication Critical patent/DE69321329D1/de
Publication of DE69321329T2 publication Critical patent/DE69321329T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69321329T 1992-12-24 1993-12-23 Vorrichtung zur Detektion einer Verschiebung Expired - Lifetime DE69321329T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34457592A JP3210111B2 (ja) 1992-12-24 1992-12-24 変位検出装置

Publications (2)

Publication Number Publication Date
DE69321329D1 DE69321329D1 (de) 1998-11-05
DE69321329T2 true DE69321329T2 (de) 1999-04-29

Family

ID=18370337

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69321329T Expired - Lifetime DE69321329T2 (de) 1992-12-24 1993-12-23 Vorrichtung zur Detektion einer Verschiebung

Country Status (4)

Country Link
US (1) US5680211A (de)
EP (1) EP0603905B1 (de)
JP (1) JP3210111B2 (de)
DE (1) DE69321329T2 (de)

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JPH08219812A (ja) * 1995-02-15 1996-08-30 Canon Inc 変位情報検出装置、変位情報検出用スケール及びこれを用いたドライブ制御装置
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
US6151185A (en) * 1996-09-05 2000-11-21 Canon Kabushiki Kaisha Position detecting apparatus, positioning apparatus, and information recording apparatus using the same
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
US6437323B1 (en) * 1998-02-10 2002-08-20 Dr. Johannes Heidenhain G.Mbh Optoelectronic path-, angle- or rotation-measuring device
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
IL141536A (en) 1998-08-21 2005-07-25 Olivier M Parriaux Device for measuring translation, rotation or velocity via light beam interference
US6188484B1 (en) * 1998-10-29 2001-02-13 Maxtor Corporation Method and apparatus for measuring angular displacement of an actuator arm relative to a reference position
US7064842B1 (en) * 1999-01-13 2006-06-20 Olympus Optical Co., Ltd. Optical displacement sensor and optical encoder
DE19908328A1 (de) * 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
EP1045227B2 (de) 1999-04-16 2012-04-18 Canon Kabushiki Kaisha Kodierer
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
US6956230B1 (en) * 1999-09-17 2005-10-18 California Institute Of Technology Integrated particles sensor formed on single substrate using fringes formed by diffractive elements
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001336952A (ja) 2000-05-26 2001-12-07 Canon Inc 測定装置
US6567572B2 (en) * 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
US6717172B2 (en) * 2000-12-19 2004-04-06 California Institute Of Technology Diffractive optical fluid shear stress sensor
KR100496162B1 (ko) * 2003-03-26 2005-06-20 한국전자통신연구원 레이저 변위센서의 기준 거리를 변경하는 장치
US7046342B2 (en) * 2004-01-29 2006-05-16 International Business Machines Corporation Apparatus for characterization of photoresist resolution, and method of use
US7332709B2 (en) 2004-12-13 2008-02-19 Nikon Corporation Photoelectric encoder
JP4899455B2 (ja) * 2004-12-13 2012-03-21 株式会社ニコン 光電式エンコーダ
KR101184167B1 (ko) * 2006-09-08 2012-09-18 지에스아이 그룹 코포레이션 광 위치 인코더
JP4951008B2 (ja) * 2008-01-10 2012-06-13 エーエスエムエル ネザーランズ ビー．ブイ． ゼロレベルを規定するように構成されたエンコーダを有するリソグラフィ装置
JP5562076B2 (ja) * 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダおよび変位計測装置
JP5574226B2 (ja) * 2010-03-23 2014-08-20 株式会社ニコン 干渉対物レンズ及びこれを有する顕微鏡装置
NL2006743A (en) * 2010-06-09 2011-12-12 Asml Netherlands Bv Position sensor and lithographic apparatus.
WO2013054226A1 (en) * 2011-10-12 2013-04-18 Koninklijke Philips Electronics N.V. Light-emitting arrangement
RU2554596C1 (ru) * 2013-12-16 2015-06-27 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" Баллистический гравиметр

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US4433585A (en) * 1981-12-21 1984-02-28 North American Philips Corporation Device for measurement of the torsional angular deviation of a loaded rotating or static shaft
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JPS6225212A (ja) * 1985-07-26 1987-02-03 Agency Of Ind Science & Technol 相対変位量測定装置
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WO1987007943A1 (en) * 1986-06-21 1987-12-30 Renishaw Plc Interpolation apparatus
GB8615196D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
DE3702314C1 (de) * 1987-01-27 1988-01-14 Heidenhain Gmbh Dr Johannes Lichtelektrische Messeinrichtung
US5064290A (en) * 1987-12-12 1991-11-12 Renishaw Plc Opto-electronic scale-reading apparatus wherein phase-separated secondary orders of diffraction are generated
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
DE8816647U1 (de) * 1988-03-25 1990-02-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Positionsmeßeinrichtung
JPH01307926A (ja) * 1988-06-07 1989-12-12 Ricoh Co Ltd 光情報読取装置
US5015835A (en) * 1988-12-23 1991-05-14 Ricoh Company, Ltd. Optical information reading and writing device with diffraction means
US5216478A (en) * 1989-03-31 1993-06-01 Canon Kabushiki Kaisha Doppler velocity meter
EP0428641A1 (de) * 1989-04-15 1991-05-29 Renishaw plc Opto-elektronischer skalenleseapparat
JPH0648339Y2 (ja) * 1989-05-08 1994-12-12 双葉電子工業株式会社 光学式変位検出装置
DE3918726C1 (de) * 1989-06-08 1991-01-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
JPH04229702A (ja) * 1990-06-20 1992-08-19 Canon Inc 信号処理方法及び装置、並びにこれを用いた変位検出装置等のシステム
JP3038860B2 (ja) * 1990-09-21 2000-05-08 キヤノン株式会社 エンコーダ
EP0486050B1 (de) * 1990-11-16 1998-02-04 Canon Kabushiki Kaisha Verfahren und Vorrichtung zum Messen von Verschiebungen
JP2862417B2 (ja) * 1990-11-16 1999-03-03 キヤノン株式会社 変位測定装置及び方法
AT395914B (de) * 1991-04-18 1993-04-26 Rsf Elektronik Gmbh Photoelektrische positionsmesseinrichtung
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics

Also Published As

Publication number Publication date
EP0603905A3 (en) 1996-07-31
EP0603905A2 (de) 1994-06-29
DE69321329D1 (de) 1998-11-05
JP3210111B2 (ja) 2001-09-17
JPH06194124A (ja) 1994-07-15
EP0603905B1 (de) 1998-09-30
US5680211A (en) 1997-10-21

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Legal Events

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8364 No opposition during term of opposition