DE69304522D1 - Stabilisator fuer schalt-mode geleistet radio-frequenz plasma einrichtung - Google Patents

Stabilisator fuer schalt-mode geleistet radio-frequenz plasma einrichtung

Info

Publication number
DE69304522D1
DE69304522D1 DE69304522T DE69304522T DE69304522D1 DE 69304522 D1 DE69304522 D1 DE 69304522D1 DE 69304522 T DE69304522 T DE 69304522T DE 69304522 T DE69304522 T DE 69304522T DE 69304522 D1 DE69304522 D1 DE 69304522D1
Authority
DE
Germany
Prior art keywords
stabilizer
radio frequency
switching mode
frequency plasma
plasma device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69304522T
Other languages
English (en)
Other versions
DE69304522T2 (de
Inventor
Robert Porter
Michael Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Energy Industries Inc
Original Assignee
Advanced Energy Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25354279&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69304522(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advanced Energy Industries Inc filed Critical Advanced Energy Industries Inc
Publication of DE69304522D1 publication Critical patent/DE69304522D1/de
Application granted granted Critical
Publication of DE69304522T2 publication Critical patent/DE69304522T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Amplifiers (AREA)
  • Plasma Technology (AREA)
DE69304522T 1992-04-16 1993-04-15 Stabilisator fuer schalt-mode geleistet radio-frequenz plasma einrichtung Expired - Lifetime DE69304522T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86979492A 1992-04-16 1992-04-16
PCT/US1993/003543 WO1993021685A1 (en) 1992-04-16 1993-04-15 Stabilizer for switch-mode powered rf plasma processing

Publications (2)

Publication Number Publication Date
DE69304522D1 true DE69304522D1 (de) 1996-10-10
DE69304522T2 DE69304522T2 (de) 1997-01-23

Family

ID=25354279

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304522T Expired - Lifetime DE69304522T2 (de) 1992-04-16 1993-04-15 Stabilisator fuer schalt-mode geleistet radio-frequenz plasma einrichtung

Country Status (5)

Country Link
US (2) US5747935A (de)
EP (1) EP0636285B1 (de)
JP (1) JP2710467B2 (de)
DE (1) DE69304522T2 (de)
WO (1) WO1993021685A1 (de)

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Also Published As

Publication number Publication date
JP2710467B2 (ja) 1998-02-10
WO1993021685A1 (en) 1993-10-28
US6046546A (en) 2000-04-04
JPH07505974A (ja) 1995-06-29
EP0636285B1 (de) 1996-09-04
DE69304522T2 (de) 1997-01-23
US5747935A (en) 1998-05-05
EP0636285A1 (de) 1995-02-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WITTE, WELLER, GAHLERT, OTTEN & STEIL, 70178 STUTT

8310 Action for declaration of annulment
8328 Change in the person/name/address of the agent

Representative=s name: WITTE, WELLER & PARTNER, 70178 STUTTGART