DE69213097D1 - Methode und Vorrichtung zur Positionsregelung - Google Patents

Methode und Vorrichtung zur Positionsregelung

Info

Publication number
DE69213097D1
DE69213097D1 DE69213097T DE69213097T DE69213097D1 DE 69213097 D1 DE69213097 D1 DE 69213097D1 DE 69213097 T DE69213097 T DE 69213097T DE 69213097 T DE69213097 T DE 69213097T DE 69213097 D1 DE69213097 D1 DE 69213097D1
Authority
DE
Germany
Prior art keywords
position control
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69213097T
Other languages
English (en)
Other versions
DE69213097T2 (de
Inventor
Yuichi Okazaki
Shin Asano
Takayuki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Mitsubishi Heavy Industries Ltd filed Critical Agency of Industrial Science and Technology
Application granted granted Critical
Publication of DE69213097D1 publication Critical patent/DE69213097D1/de
Publication of DE69213097T2 publication Critical patent/DE69213097T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • G05D3/1436—Control of position or direction using feedback using an analogue comparing device with fine or coarse devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Control Of Position Or Direction (AREA)
  • Automatic Control Of Machine Tools (AREA)
DE69213097T 1991-05-24 1992-05-20 Methode und Vorrichtung zur Positionsregelung Expired - Lifetime DE69213097T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3120034A JP2721757B2 (ja) 1991-05-24 1991-05-24 位置決め制御方法及び装置

Publications (2)

Publication Number Publication Date
DE69213097D1 true DE69213097D1 (de) 1996-10-02
DE69213097T2 DE69213097T2 (de) 1997-01-23

Family

ID=14776270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69213097T Expired - Lifetime DE69213097T2 (de) 1991-05-24 1992-05-20 Methode und Vorrichtung zur Positionsregelung

Country Status (4)

Country Link
US (1) US5262707A (de)
EP (1) EP0515970B1 (de)
JP (1) JP2721757B2 (de)
DE (1) DE69213097T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994001861A1 (en) * 1992-07-10 1994-01-20 Wangtek, Inc. Servo controlled magnetic head positioner
JPH0737786A (ja) * 1993-07-21 1995-02-07 Canon Inc ステージ位置決め制御方法
JP3184044B2 (ja) * 1994-05-24 2001-07-09 キヤノン株式会社 微動位置決め制御装置
JP2735153B2 (ja) * 1995-03-03 1998-04-02 工業技術院長 精密位置制御装置及び精密位置制御方法
US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
US5808435A (en) * 1996-05-28 1998-09-15 Kmy Instruments Micropositioning device for disk head testing system
US6008610A (en) * 1998-03-20 1999-12-28 Nikon Corporation Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
US6211638B1 (en) * 1998-03-27 2001-04-03 Texas Instruments Incorporated Method and apparatus for linearizing control of a reluctance force motor
US6260282B1 (en) 1998-03-27 2001-07-17 Nikon Corporation Stage control with reduced synchronization error and settling time
US6320343B1 (en) * 1999-02-19 2001-11-20 Stmicroelectronics S.R.L. Fine phase frequency multipiler for a brushless motor and corresponding control method
US8497450B2 (en) 2001-02-16 2013-07-30 Electro Scientific Industries, Inc. On-the fly laser beam path dithering for enhancing throughput
US7245412B2 (en) * 2001-02-16 2007-07-17 Electro Scientific Industries, Inc. On-the-fly laser beam path error correction for specimen target location processing
US6816294B2 (en) 2001-02-16 2004-11-09 Electro Scientific Industries, Inc. On-the-fly beam path error correction for memory link processing
EP1461602A4 (de) * 2001-11-28 2011-09-14 James W Overbeck Rastermikroskopie, fluoreszenznachweis und laserstrahlpositionierung
US6706998B2 (en) 2002-01-11 2004-03-16 Electro Scientific Industries, Inc. Simulated laser spot enlargement
JP2005288672A (ja) * 2004-04-06 2005-10-20 Mitsubishi Heavy Ind Ltd 微小構造体の製造方法及び製造装置
JP4683279B2 (ja) * 2005-07-04 2011-05-18 ソニー株式会社 駆動装置
JP4643509B2 (ja) * 2006-07-14 2011-03-02 株式会社東芝 追尾照準装置
US7884566B2 (en) * 2008-05-15 2011-02-08 Honeywell International Inc. Adaptive servo control system and method
DE102010001781A1 (de) * 2010-02-10 2011-08-11 Siemens Aktiengesellschaft, 80333 Verfahren zur Bewegung eines Maschinenelements einer Maschine aus der Automatisierungstechnik und Steuereinrichtung
DE102010001829B4 (de) * 2010-02-11 2011-09-01 Siemens Aktiengesellschaft Verfahren zur Bewegung eines Maschinenelements einer Maschine aus der Automatisierungstechnik und Antriebssystem
FR2978933B1 (fr) * 2011-08-12 2013-09-06 Fatronik France Procede de commande d'un automate a actionnement parallele redondant, dispositif de commande associe et automate.
WO2013118404A1 (ja) * 2012-02-08 2013-08-15 三菱電機株式会社 サーボ制御装置
US9170580B2 (en) * 2012-10-19 2015-10-27 Mitsubishi Electric Rsearch Laboratories, Inc. Determining trajectories of redundant actuators jointly tracking reference trajectory
US9696709B2 (en) 2014-02-21 2017-07-04 Mitsubishi Electric Research Laboratories, Inc. Method and system for computing reference signals for machines with redundant positioning
US9744620B2 (en) 2015-04-06 2017-08-29 Mitsubishi Electric Research Laboratories, Inc. Control of processing machines with redundant actuators
CN107283828B (zh) * 2016-03-31 2023-04-28 上海微电子装备（集团）股份有限公司 3d打印装置、打印方法及其运动控制方法
US10324446B2 (en) 2017-03-02 2019-06-18 Mitsubishi Electric Research Laboratories, Inc. System and method for controlling redundant actuators with different dynamics

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH436751A (de) * 1966-05-31 1967-05-31 Contraves Ag Koordinatograph
JPS547078A (en) * 1977-06-16 1979-01-19 Oki Electric Ind Co Ltd Automatic positioning method to inherent position of machine in numerical control
JPS5654523A (en) * 1979-10-09 1981-05-14 Fanuc Ltd Controller for stopping main axle at fixed position
JPS60146650A (ja) * 1984-01-11 1985-08-02 Toshiba Mach Co Ltd 精密位置決め制御システム
JP2612556B2 (ja) * 1985-10-21 1997-05-21 キヤノン株式会社 位置制御装置
US4843293A (en) * 1987-02-02 1989-06-27 Research Development Corporation Apparatus for controlling servo system employing piezo-electric actuator
JPH01224621A (ja) * 1988-03-04 1989-09-07 Hitachi Ltd 位置検出方法又は装置
DE3814810A1 (de) * 1988-05-02 1989-11-16 Bodenseewerk Geraetetech Stellantrieb zum einstellen eines drehbeweglichen elements
JPH07122830B2 (ja) * 1989-05-31 1995-12-25 新技術事業団 超精密位置決め装置

Also Published As

Publication number Publication date
EP0515970B1 (de) 1996-08-28
EP0515970A1 (de) 1992-12-02
JPH07168625A (ja) 1995-07-04
DE69213097T2 (de) 1997-01-23
JP2721757B2 (ja) 1998-03-04
US5262707A (en) 1993-11-16

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