DE69133585D1 - Einrichtung und Verfahren zur Herstellungssteuerung - Google Patents

Einrichtung und Verfahren zur Herstellungssteuerung

Info

Publication number
DE69133585D1
DE69133585D1 DE69133585T DE69133585T DE69133585D1 DE 69133585 D1 DE69133585 D1 DE 69133585D1 DE 69133585 T DE69133585 T DE 69133585T DE 69133585 T DE69133585 T DE 69133585T DE 69133585 D1 DE69133585 D1 DE 69133585D1
Authority
DE
Germany
Prior art keywords
manufacturing control
manufacturing
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69133585T
Other languages
English (en)
Other versions
DE69133585T2 (de
Inventor
Yasumasa Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69133585D1 publication Critical patent/DE69133585D1/de
Application granted granted Critical
Publication of DE69133585T2 publication Critical patent/DE69133585T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Theoretical Computer Science (AREA)
  • Economics (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Physics & Mathematics (AREA)
  • Human Resources & Organizations (AREA)
  • Strategic Management (AREA)
  • General Physics & Mathematics (AREA)
  • Tourism & Hospitality (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Marketing (AREA)
  • Game Theory and Decision Science (AREA)
  • General Business, Economics & Management (AREA)
  • Educational Administration (AREA)
  • Development Economics (AREA)
  • Databases & Information Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Control By Computers (AREA)
  • Multi-Process Working Machines And Systems (AREA)
DE69133585T 1990-11-21 1991-11-20 Einrichtung und Verfahren zur Fertigungssteuerung Expired - Fee Related DE69133585T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP31756790 1990-11-21
JP31756790 1990-11-21
JP31756590 1990-11-21
JP31756590 1990-11-21
JP31756690 1990-11-21
JP31756890 1990-11-21
JP31756890 1990-11-21
JP31756690 1990-11-21
JP29003291A JP3189326B2 (ja) 1990-11-21 1991-11-06 生産管理装置および該装置を用いた生産管理方法
JP29003291 1991-11-06

Publications (2)

Publication Number Publication Date
DE69133585D1 true DE69133585D1 (de) 2007-12-27
DE69133585T2 DE69133585T2 (de) 2008-09-18

Family

ID=27530789

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69133585T Expired - Fee Related DE69133585T2 (de) 1990-11-21 1991-11-20 Einrichtung und Verfahren zur Fertigungssteuerung

Country Status (5)

Country Link
US (1) US5282139A (de)
EP (1) EP0487419B1 (de)
JP (1) JP3189326B2 (de)
KR (1) KR100253742B1 (de)
DE (1) DE69133585T2 (de)

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US5745364A (en) * 1994-12-28 1998-04-28 Nec Corporation Method of producing semiconductor wafer
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US7949495B2 (en) 1996-03-28 2011-05-24 Rosemount, Inc. Process variable transmitter with diagnostics
US6017143A (en) 1996-03-28 2000-01-25 Rosemount Inc. Device in a process system for detecting events
US8290721B2 (en) 1996-03-28 2012-10-16 Rosemount Inc. Flow measurement diagnostics
US6539267B1 (en) 1996-03-28 2003-03-25 Rosemount Inc. Device in a process system for determining statistical parameter
US6654697B1 (en) 1996-03-28 2003-11-25 Rosemount Inc. Flow measurement with diagnostics
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US5818716A (en) * 1996-10-18 1998-10-06 Taiwan Semiconductor Manufacturing Company Ltd. Dynamic lot dispatching required turn rate factory control system and method of operation thereof
US6519546B1 (en) 1996-11-07 2003-02-11 Rosemount Inc. Auto correcting temperature transmitter with resistance based sensor
US6434504B1 (en) 1996-11-07 2002-08-13 Rosemount Inc. Resistance based process control device diagnostics
US6601005B1 (en) 1996-11-07 2003-07-29 Rosemount Inc. Process device diagnostics using process variable sensor signal
US6449574B1 (en) 1996-11-07 2002-09-10 Micro Motion, Inc. Resistance based process control device diagnostics
US6754601B1 (en) 1996-11-07 2004-06-22 Rosemount Inc. Diagnostics for resistive elements of process devices
JPH1165644A (ja) * 1997-08-12 1999-03-09 Handotai Sentan Technol:Kk データ分類方法及びこれによるデータ管理方法、データベース及びデータ記録媒体
BR9812913A (pt) 1997-10-13 2000-08-08 Rosemount Inc Dispositivo processador, programa em um meio legìvel por computador, estrutura de dados incorporada em um dispositivo processador de fluido e método de trasmitir dados em um laço de controle de processo fluido
US6256550B1 (en) * 1998-08-07 2001-07-03 Taiwan Semiconductor Manufacturing Company Overall equipment effectiveness on-line categories system and method
EP1046090B1 (de) * 1998-10-02 2004-12-29 Philips Electronics N.V. Produktionsverfahren und -einrichtung mit mehreren arbeitsstufen
US6615149B1 (en) 1998-12-10 2003-09-02 Rosemount Inc. Spectral diagnostics in a magnetic flow meter
US6611775B1 (en) 1998-12-10 2003-08-26 Rosemount Inc. Electrode leakage diagnostics in a magnetic flow meter
US8044793B2 (en) 2001-03-01 2011-10-25 Fisher-Rosemount Systems, Inc. Integrated device alerts in a process control system
US6298454B1 (en) 1999-02-22 2001-10-02 Fisher-Rosemount Systems, Inc. Diagnostics in a process control system
US6633782B1 (en) 1999-02-22 2003-10-14 Fisher-Rosemount Systems, Inc. Diagnostic expert in a process control system
US7249356B1 (en) * 1999-04-29 2007-07-24 Fisher-Rosemount Systems, Inc. Methods and structure for batch processing event history processing and viewing
DE19921243C2 (de) * 1999-05-07 2002-12-05 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
US6356191B1 (en) 1999-06-17 2002-03-12 Rosemount Inc. Error compensation for a process fluid temperature transmitter
JP4824234B2 (ja) 1999-07-01 2011-11-30 ローズマウント インコーポレイテッド ２線式温度送信機およびプロセス温度測定方法
US6505517B1 (en) 1999-07-23 2003-01-14 Rosemount Inc. High accuracy signal processing for magnetic flowmeter
US6701274B1 (en) 1999-08-27 2004-03-02 Rosemount Inc. Prediction of error magnitude in a pressure transmitter
US6556145B1 (en) 1999-09-24 2003-04-29 Rosemount Inc. Two-wire fluid temperature transmitter with thermocouple diagnostics
DE19948569C2 (de) * 1999-10-08 2001-09-13 Infineon Technologies Ag Verfahren und Anordnung zur rechnergestützten Ermittlung und Auswahl signifikanter Meßgrößen
JP3515724B2 (ja) * 2000-01-13 2004-04-05 Ｎｅｃエレクトロニクス株式会社 製品の製造管理方法及び製造管理システム
US6856848B2 (en) 2000-04-24 2005-02-15 Matsushita Electric Industrial Co., Ltd. Method and apparatus for controlling progress of product processing
US6735484B1 (en) 2000-09-20 2004-05-11 Fargo Electronics, Inc. Printer with a process diagnostics system for detecting events
US7720727B2 (en) 2001-03-01 2010-05-18 Fisher-Rosemount Systems, Inc. Economic calculations in process control system
US8073967B2 (en) 2002-04-15 2011-12-06 Fisher-Rosemount Systems, Inc. Web services-based communications for use with process control systems
US6859755B2 (en) 2001-05-14 2005-02-22 Rosemount Inc. Diagnostics for industrial process control and measurement systems
US6629059B2 (en) 2001-05-14 2003-09-30 Fisher-Rosemount Systems, Inc. Hand held diagnostic and communication device with automatic bus detection
US6772036B2 (en) 2001-08-30 2004-08-03 Fisher-Rosemount Systems, Inc. Control system using process model
US6615093B1 (en) * 2002-01-04 2003-09-02 Taiwan Semiconductor Manufacturing Company Adaptive control algorithm for improving AMHS push lot accuracy
US7221993B2 (en) 2003-01-27 2007-05-22 Applied Materials, Inc. Systems and methods for transferring small lot size substrate carriers between processing tools
US7778721B2 (en) 2003-01-27 2010-08-17 Applied Materials, Inc. Small lot size lithography bays
US7369912B2 (en) * 2003-05-29 2008-05-06 Fisher-Rosemount Systems, Inc. Batch execution engine with independent batch execution processes
US8005647B2 (en) 2005-04-08 2011-08-23 Rosemount, Inc. Method and apparatus for monitoring and performing corrective measures in a process plant using monitoring data with corrective measures data
US9201420B2 (en) 2005-04-08 2015-12-01 Rosemount, Inc. Method and apparatus for performing a function in a process plant using monitoring data with criticality evaluation data
US8112565B2 (en) 2005-06-08 2012-02-07 Fisher-Rosemount Systems, Inc. Multi-protocol field device interface with automatic bus detection
GB0511891D0 (en) * 2005-06-10 2005-07-20 Milk Direct Ltd Monitoring and managing farms
US20070005170A1 (en) * 2005-06-29 2007-01-04 Thorsten Schedel Method for the preferred processing of workpieces of highest priority
US7966089B1 (en) * 2005-07-05 2011-06-21 Advanced Micro Devices, Inc. Method and apparatus for automated fab control
US20070068225A1 (en) 2005-09-29 2007-03-29 Brown Gregory C Leak detector for process valve
US7793292B2 (en) 2006-09-13 2010-09-07 Fisher-Rosemount Systems, Inc. Compact batch viewing techniques for use in batch processes
US7953501B2 (en) 2006-09-25 2011-05-31 Fisher-Rosemount Systems, Inc. Industrial process control loop monitor
US8788070B2 (en) 2006-09-26 2014-07-22 Rosemount Inc. Automatic field device service adviser
EP2074385B2 (de) 2006-09-29 2022-07-06 Rosemount Inc. Magnetischer flussmesser mit verifikationsfunktion
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US8301676B2 (en) 2007-08-23 2012-10-30 Fisher-Rosemount Systems, Inc. Field device with capability of calculating digital filter coefficients
US7702401B2 (en) 2007-09-05 2010-04-20 Fisher-Rosemount Systems, Inc. System for preserving and displaying process control data associated with an abnormal situation
US8055479B2 (en) 2007-10-10 2011-11-08 Fisher-Rosemount Systems, Inc. Simplified algorithm for abnormal situation prevention in load following applications including plugged line diagnostics in a dynamic process
US7921734B2 (en) 2009-05-12 2011-04-12 Rosemount Inc. System to detect poor process ground connections
US9207670B2 (en) 2011-03-21 2015-12-08 Rosemount Inc. Degrading sensor detection implemented within a transmitter
US9927788B2 (en) 2011-05-19 2018-03-27 Fisher-Rosemount Systems, Inc. Software lockout coordination between a process control system and an asset management system
US9052240B2 (en) 2012-06-29 2015-06-09 Rosemount Inc. Industrial process temperature transmitter with sensor stress diagnostics
US9207129B2 (en) 2012-09-27 2015-12-08 Rosemount Inc. Process variable transmitter with EMF detection and correction
US9602122B2 (en) 2012-09-28 2017-03-21 Rosemount Inc. Process variable measurement noise diagnostic
US11256241B1 (en) 2019-09-12 2022-02-22 Veo Robotics, Inc. Optimized factory schedule and layout generation

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US4027246A (en) * 1976-03-26 1977-05-31 International Business Machines Corporation Automated integrated circuit manufacturing system
JP2504961B2 (ja) * 1986-07-10 1996-06-05 豊田工機株式会社 プログラマブルトランスファマシン
JPS63188247A (ja) * 1987-01-30 1988-08-03 Yokogawa Electric Corp メモリ・アクセス装置
JP2621172B2 (ja) * 1987-04-22 1997-06-18 トヨタ自動車株式会社 生産管理システム
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
US4887218A (en) * 1987-12-01 1989-12-12 International Business Machines Corporation Automated production release system
US4896269A (en) * 1988-02-29 1990-01-23 General Electric Company Job shop scheduling and production method and apparatus
EP0346801B1 (de) * 1988-06-17 1996-12-27 Siemens Aktiengesellschaft Verfahren und Anordnung zur Ausführung eines Programms in einem heterogenen Mehrrechnersystem
US5150288A (en) * 1989-12-18 1992-09-22 Honda Giken Kogyo Kabushiki Kaisha Production management system and method of transmitting data

Also Published As

Publication number Publication date
JPH0519807A (ja) 1993-01-29
EP0487419A3 (de) 1994-03-02
EP0487419A2 (de) 1992-05-27
KR100253742B1 (ko) 2000-04-15
KR920010485A (ko) 1992-06-26
EP0487419B1 (de) 2007-11-14
US5282139A (en) 1994-01-25
DE69133585T2 (de) 2008-09-18
JP3189326B2 (ja) 2001-07-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee