DE69117103D1 - Vorrichtung und Verfahren zum Messen der Ätzgeschwindigkeit - Google Patents

Vorrichtung und Verfahren zum Messen der Ätzgeschwindigkeit

Info

Publication number
DE69117103D1
DE69117103D1 DE69117103T DE69117103T DE69117103D1 DE 69117103 D1 DE69117103 D1 DE 69117103D1 DE 69117103 T DE69117103 T DE 69117103T DE 69117103 T DE69117103 T DE 69117103T DE 69117103 D1 DE69117103 D1 DE 69117103D1
Authority
DE
Germany
Prior art keywords
measuring
etching rate
etching
rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69117103T
Other languages
English (en)
Other versions
DE69117103T2 (de
Inventor
Bruno Strul
Geus Richard De
Peter Ebbing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69117103D1 publication Critical patent/DE69117103D1/de
Application granted granted Critical
Publication of DE69117103T2 publication Critical patent/DE69117103T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69117103T 1990-06-19 1991-06-19 Vorrichtung und Verfahren zum Messen der Ätzgeschwindigkeit Expired - Fee Related DE69117103T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US54066090A 1990-06-19 1990-06-19

Publications (2)

Publication Number Publication Date
DE69117103D1 true DE69117103D1 (de) 1996-03-28
DE69117103T2 DE69117103T2 (de) 1996-06-27

Family

ID=24156415

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69117103T Expired - Fee Related DE69117103T2 (de) 1990-06-19 1991-06-19 Vorrichtung und Verfahren zum Messen der Ätzgeschwindigkeit

Country Status (4)

Country Link
EP (1) EP0462599B1 (de)
JP (1) JP3065380B2 (de)
KR (1) KR100226002B1 (de)
DE (1) DE69117103T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6818559B2 (en) 2001-03-21 2004-11-16 Intel Corporation Method of fabrication to sharpen corners of Y-branches in integrated optical components and other micro-devices
US20050042777A1 (en) * 2003-08-20 2005-02-24 The Boc Group Inc. Control of etch and deposition processes
JP5920255B2 (ja) * 2013-03-18 2016-05-18 株式会社デンソー 半導体装置の製造方法およびそれに用いられるドライエッチング装置
ES2540921B2 (es) * 2015-03-06 2016-02-08 Universidad Complutense De Madrid Dispositivo opto-electrónico y métodos para colimar y determinar el grado de colimación de un haz de luz
WO2024091628A1 (en) * 2022-10-28 2024-05-02 Applied Materials, Inc. Methods of geometry parameters measurement for optical gratings

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60173837A (ja) * 1984-09-26 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 組合せ回折格子によるギヤツプ・位置合せ制御法
JPH0682636B2 (ja) * 1985-04-19 1994-10-19 株式会社日立製作所 ドライエッチング方法
US4927485A (en) * 1988-07-28 1990-05-22 Applied Materials, Inc. Laser interferometer system for monitoring and controlling IC processing
US4873430A (en) * 1988-10-25 1989-10-10 International Business Machines Corporation Method and apparatus for optically measuring characteristics of a thin film by directing a P-polarized beam through an integrating sphere at the brewster's angle of the film
JPH088242B2 (ja) * 1989-10-31 1996-01-29 株式会社東芝 エッチング深さ測定装置

Also Published As

Publication number Publication date
JP3065380B2 (ja) 2000-07-17
KR920001667A (ko) 1992-01-30
JPH04297028A (ja) 1992-10-21
EP0462599A2 (de) 1991-12-27
DE69117103T2 (de) 1996-06-27
EP0462599B1 (de) 1996-02-14
KR100226002B1 (ko) 1999-10-15
EP0462599A3 (en) 1992-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee