DE60317970D1 - Verfahren zur Herstellung eines Tintenstrahlkopfes - Google Patents
Verfahren zur Herstellung eines TintenstrahlkopfesInfo
- Publication number
- DE60317970D1 DE60317970D1 DE60317970T DE60317970T DE60317970D1 DE 60317970 D1 DE60317970 D1 DE 60317970D1 DE 60317970 T DE60317970 T DE 60317970T DE 60317970 T DE60317970 T DE 60317970T DE 60317970 D1 DE60317970 D1 DE 60317970D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- ink jet
- jet head
- head
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S29/00—Metal working
- Y10S29/016—Method or apparatus with etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002108794A JP2003300323A (ja) | 2002-04-11 | 2002-04-11 | インクジェットヘッド及びその製造方法 |
JP2002108794 | 2002-04-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60317970D1 true DE60317970D1 (de) | 2008-01-24 |
DE60317970T2 DE60317970T2 (de) | 2008-12-04 |
Family
ID=28786542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60317970T Expired - Lifetime DE60317970T2 (de) | 2002-04-11 | 2003-04-10 | Verfahren zur Herstellung eines Tintenstrahlkopfes |
Country Status (7)
Country | Link |
---|---|
US (1) | US6766579B2 (de) |
EP (1) | EP1366905B1 (de) |
JP (1) | JP2003300323A (de) |
KR (1) | KR100492828B1 (de) |
CN (1) | CN1241744C (de) |
DE (1) | DE60317970T2 (de) |
TW (1) | TWI236430B (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4280574B2 (ja) * | 2002-07-10 | 2009-06-17 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
US7444551B1 (en) | 2002-12-16 | 2008-10-28 | Nvidia Corporation | Method and apparatus for system status monitoring, testing and restoration |
EP2163389B1 (de) * | 2003-07-22 | 2012-07-04 | Canon Kabushiki Kaisha | Tintenstrahlkopf und Herstellungsverfahren |
AU2003304346A1 (en) * | 2003-07-22 | 2005-02-04 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
CN100358721C (zh) * | 2004-02-13 | 2008-01-02 | 明基电通股份有限公司 | 利用多重牺牲层扩张流体腔的制造方法 |
JP4529621B2 (ja) * | 2004-09-29 | 2010-08-25 | セイコーエプソン株式会社 | 液体噴射装置、及び、液体噴射ヘッドの製造方法 |
JP4667028B2 (ja) * | 2004-12-09 | 2011-04-06 | キヤノン株式会社 | 構造体の形成方法及びインクジェット記録ヘッドの製造方法 |
US7837299B2 (en) * | 2005-11-24 | 2010-11-23 | Ricoh Company, Ltd. | Liquid ejecting head and method of manufacturing the same, image forming apparatus, liquid drop ejecting device, and recording method |
US7938974B2 (en) * | 2007-03-12 | 2011-05-10 | Silverbrook Research Pty Ltd | Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face |
US8042908B2 (en) * | 2007-07-27 | 2011-10-25 | Hewlett-Packard Development Company, L.P. | Fluid ejector device |
US8012363B2 (en) | 2007-11-29 | 2011-09-06 | Silverbrook Research Pty Ltd | Metal film protection during printhead fabrication with minimum number of MEMS processing steps |
JP5606269B2 (ja) * | 2010-10-27 | 2014-10-15 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
US8343712B2 (en) * | 2010-10-28 | 2013-01-01 | Canon Kabushiki Kaisha | Method for manufacturing inkjet recording head |
JP5787603B2 (ja) | 2011-04-28 | 2015-09-30 | キヤノン株式会社 | インクジェット記録ヘッドおよびインクジェット記録装置 |
JP6039259B2 (ja) * | 2011-07-25 | 2016-12-07 | キヤノン株式会社 | 液体吐出ヘッド、およびその製造方法 |
JP6000715B2 (ja) * | 2011-09-29 | 2016-10-05 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP5449590B2 (ja) * | 2012-03-14 | 2014-03-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP6308751B2 (ja) * | 2013-11-12 | 2018-04-11 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板、液体吐出ヘッド、および記録装置 |
JP2017185705A (ja) * | 2016-04-06 | 2017-10-12 | 東芝テック株式会社 | インクジェットヘッド記録装置 |
US9855566B1 (en) * | 2016-10-17 | 2018-01-02 | Funai Electric Co., Ltd. | Fluid ejection head and process for making a fluid ejection head structure |
JP2022150859A (ja) * | 2021-03-26 | 2022-10-07 | セイコーエプソン株式会社 | 液体吐出装置 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0288247A (ja) * | 1988-09-27 | 1990-03-28 | Canon Inc | インクジェット記録ヘッド |
JPH0410941A (ja) | 1990-04-27 | 1992-01-16 | Canon Inc | 液滴噴射方法及び該方法を用いた記録装置 |
JPH0412859A (ja) | 1990-04-28 | 1992-01-17 | Canon Inc | 液体噴射方法、該方法を用いた記録ヘッド及び該方法を用いた記録装置 |
JPH0410942A (ja) | 1990-04-27 | 1992-01-16 | Canon Inc | 液体噴射方法および該方法を用いた記録装置 |
DE69110958T2 (de) | 1990-04-27 | 1995-11-30 | Canon Kk | Aufzeichnungsverfahren und Vorrichtung. |
JP2783647B2 (ja) | 1990-04-27 | 1998-08-06 | キヤノン株式会社 | 液体噴射方法および該方法を用いた記録装置 |
EP0495520B1 (de) * | 1991-01-18 | 1996-04-03 | Canon Kabushiki Kaisha | Tinte, Tintenstrahlaufzeichnungsverfahren und Gerät unter Verwendung desselben |
JP3278186B2 (ja) | 1991-03-08 | 2002-04-30 | キヤノン株式会社 | インクジェット記録ヘッド |
JP2960608B2 (ja) * | 1992-06-04 | 1999-10-12 | キヤノン株式会社 | 液体噴射記録ヘッドの製造方法 |
KR100191749B1 (ko) | 1992-10-19 | 1999-06-15 | 미따라이 하지메 | 개선된 잉크 토출구면을 갖는 잉크 제트 헤드 및 이 잉크 제트 헤드를 구비한 잉크 제트 장치 |
US5798778A (en) | 1992-10-19 | 1998-08-25 | Canon Kabushiki Kaisha | Ink jet head having an ink discharging outlet face and ink jet apparatus provided with said ink jet head |
JP3332503B2 (ja) | 1992-10-19 | 2002-10-07 | キヤノン株式会社 | 改善されたインク吐出口面を備えたインクジェットヘッド、該インクジェットを備えたインクジェット装置及び該インクジェットヘッドの製造方法 |
JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP3143308B2 (ja) | 1994-01-31 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP3478669B2 (ja) * | 1995-06-13 | 2003-12-15 | キヤノン株式会社 | 溶剤易溶性のフッ素含有エポキシ樹脂組成物およびそれを用いた表面処理方法 |
JP3343875B2 (ja) | 1995-06-30 | 2002-11-11 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
EP0882593A1 (de) | 1997-06-05 | 1998-12-09 | Xerox Corporation | Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes |
JP3768645B2 (ja) * | 1997-06-18 | 2006-04-19 | キヤノン株式会社 | インクジェット記録ヘッド |
JPH1178029A (ja) | 1997-09-04 | 1999-03-23 | Canon Inc | インクジェット記録ヘッド |
JPH1199649A (ja) * | 1997-09-30 | 1999-04-13 | Canon Inc | インクジェットヘッド、その製造方法、及びインクジェット装置 |
JP3559697B2 (ja) | 1997-12-01 | 2004-09-02 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP3408130B2 (ja) | 1997-12-19 | 2003-05-19 | キヤノン株式会社 | インクジェット記録ヘッドおよびその製造方法 |
JP4592038B2 (ja) * | 2000-07-10 | 2010-12-01 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
-
2002
- 2002-04-11 JP JP2002108794A patent/JP2003300323A/ja active Pending
-
2003
- 2003-04-04 TW TW092107775A patent/TWI236430B/zh not_active IP Right Cessation
- 2003-04-09 US US10/409,088 patent/US6766579B2/en not_active Expired - Fee Related
- 2003-04-10 DE DE60317970T patent/DE60317970T2/de not_active Expired - Lifetime
- 2003-04-10 KR KR10-2003-0022504A patent/KR100492828B1/ko not_active IP Right Cessation
- 2003-04-10 EP EP03008359A patent/EP1366905B1/de not_active Expired - Lifetime
- 2003-04-11 CN CNB031107052A patent/CN1241744C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2003300323A (ja) | 2003-10-21 |
KR20030081127A (ko) | 2003-10-17 |
TWI236430B (en) | 2005-07-21 |
DE60317970T2 (de) | 2008-12-04 |
CN1449917A (zh) | 2003-10-22 |
KR100492828B1 (ko) | 2005-06-07 |
CN1241744C (zh) | 2006-02-15 |
US6766579B2 (en) | 2004-07-27 |
US20030198899A1 (en) | 2003-10-23 |
EP1366905A1 (de) | 2003-12-03 |
TW200304874A (en) | 2003-10-16 |
EP1366905B1 (de) | 2007-12-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |