DE60232204D1 - Piezoelektrisches/elektrostriktives Bauelement zur Lichtreflexion sowie dessen Herstellungsverfahren - Google Patents
Piezoelektrisches/elektrostriktives Bauelement zur Lichtreflexion sowie dessen HerstellungsverfahrenInfo
- Publication number
- DE60232204D1 DE60232204D1 DE60232204T DE60232204T DE60232204D1 DE 60232204 D1 DE60232204 D1 DE 60232204D1 DE 60232204 T DE60232204 T DE 60232204T DE 60232204 T DE60232204 T DE 60232204T DE 60232204 D1 DE60232204 D1 DE 60232204D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- production method
- light reflection
- electrostrictive component
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
- H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/4908—Acoustic transducer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001059281 | 2001-03-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60232204D1 true DE60232204D1 (de) | 2009-06-18 |
Family
ID=18918864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60232204T Expired - Lifetime DE60232204D1 (de) | 2001-03-02 | 2002-03-01 | Piezoelektrisches/elektrostriktives Bauelement zur Lichtreflexion sowie dessen Herstellungsverfahren |
Country Status (3)
Country | Link |
---|---|
US (2) | US6624549B2 (de) |
EP (1) | EP1237205B1 (de) |
DE (1) | DE60232204D1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100631013B1 (ko) * | 2003-12-29 | 2006-10-04 | 엘지.필립스 엘시디 주식회사 | 주기성을 가진 패턴이 형성된 레이저 마스크 및 이를이용한 결정화방법 |
US7340960B2 (en) | 2004-01-30 | 2008-03-11 | Analatom Inc. | Miniature sensor |
US7107848B2 (en) * | 2004-12-03 | 2006-09-19 | Texas Instruments Incorporated | Active scan velocity control for torsional hinged MEMS scanner |
US20070092179A1 (en) * | 2005-10-11 | 2007-04-26 | Samsung Electro-Mechanics Co., Ltd. | MEMS module package |
WO2008102687A1 (ja) | 2007-02-20 | 2008-08-28 | Ngk Insulators, Ltd. | 圧電/電歪素子 |
JP4941161B2 (ja) * | 2007-08-02 | 2012-05-30 | ブラザー工業株式会社 | 動作検出装置 |
JP5040558B2 (ja) * | 2007-09-26 | 2012-10-03 | ブラザー工業株式会社 | 圧電変換素子、アクチュエータ、センサー、光走査装置、及び、光走査型表示装置 |
KR101309795B1 (ko) * | 2007-10-15 | 2013-09-23 | 삼성전자주식회사 | 가변 초점 광학 장치 |
EP2202815B1 (de) * | 2007-10-16 | 2019-04-10 | Murata Manufacturing Co. Ltd. | Schwingungsgerät und piezoelektrische pumpe |
KR101653826B1 (ko) * | 2009-06-29 | 2016-09-02 | 삼성전자주식회사 | 초음파 모터 및 그 제조 방법 |
US8848278B2 (en) * | 2013-01-10 | 2014-09-30 | Eastman Kodak Company | Asymmetrical deformable diffractive grating modulator |
US8861067B2 (en) * | 2013-01-10 | 2014-10-14 | Eastman Kodak Company | Asymmetrical deformable diffractive grating modulator |
DE102013215091A1 (de) * | 2013-08-01 | 2014-08-07 | Carl Zeiss Smt Gmbh | Optisches modul |
KR102167318B1 (ko) * | 2014-02-07 | 2020-10-20 | 삼성디스플레이 주식회사 | 도광판의 제조 장치 및 도광판의 제조 방법 |
JP2018004683A (ja) * | 2016-06-27 | 2018-01-11 | 豊田合成株式会社 | 光学デバイス、及び光学装置 |
US9818054B1 (en) * | 2017-01-16 | 2017-11-14 | International Business Machines Corporation | Tag with tunable retro-reflectors |
JP7013151B2 (ja) * | 2017-07-13 | 2022-01-31 | キヤノン株式会社 | 積層圧電素子、振動子、振動波モータ、光学機器および電子機器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0654743B2 (ja) * | 1990-02-03 | 1994-07-20 | 太陽誘電株式会社 | 積層電子部品の製造方法 |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
JPH06334236A (ja) * | 1993-05-20 | 1994-12-02 | Fujitsu Ltd | 積層型圧電・電歪アクチュエータの製造方法 |
PL176406B1 (pl) * | 1993-10-29 | 1999-05-31 | Daewoo Electronics Co Ltd | Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych |
JP3165444B2 (ja) * | 1993-11-09 | 2001-05-14 | テーウー エレクトロニクス カンパニー リミテッド | M×n個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 |
FR2737019B1 (fr) * | 1995-07-19 | 1997-08-22 | Commissariat Energie Atomique | Microelements de balayage pour systeme optique |
US5636051A (en) * | 1996-01-03 | 1997-06-03 | Daewoo Electronics Co., Ltd | Thin film actuated mirror array having dielectric layers |
KR19990004774A (ko) | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치의 제조 방법 |
US6335586B1 (en) | 1998-12-28 | 2002-01-01 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and production method thereof |
US6452309B1 (en) * | 1999-10-01 | 2002-09-17 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
JP4058223B2 (ja) * | 1999-10-01 | 2008-03-05 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
US6822374B1 (en) * | 2000-11-15 | 2004-11-23 | General Electric Company | Multilayer piezoelectric structure with uniform electric field |
-
2001
- 2001-03-09 US US09/802,474 patent/US6624549B2/en not_active Expired - Lifetime
-
2002
- 2002-03-01 DE DE60232204T patent/DE60232204D1/de not_active Expired - Lifetime
- 2002-03-01 EP EP02251453A patent/EP1237205B1/de not_active Expired - Lifetime
- 2002-03-12 US US10/096,059 patent/US6931698B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6624549B2 (en) | 2003-09-23 |
US20020175599A1 (en) | 2002-11-28 |
EP1237205B1 (de) | 2009-05-06 |
EP1237205A2 (de) | 2002-09-04 |
US20020121843A1 (en) | 2002-09-05 |
EP1237205A3 (de) | 2005-02-09 |
US6931698B2 (en) | 2005-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |