DE60229488D1 - Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung - Google Patents
Piezoelektrisches Bauelement und Verfahren zu dessen HerstellungInfo
- Publication number
- DE60229488D1 DE60229488D1 DE60229488T DE60229488T DE60229488D1 DE 60229488 D1 DE60229488 D1 DE 60229488D1 DE 60229488 T DE60229488 T DE 60229488T DE 60229488 T DE60229488 T DE 60229488T DE 60229488 D1 DE60229488 D1 DE 60229488D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- piezoelectric device
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001388315A JP3953806B2 (ja) | 2001-12-20 | 2001-12-20 | 圧電素子、及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60229488D1 true DE60229488D1 (de) | 2008-12-04 |
Family
ID=19188136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60229488T Expired - Lifetime DE60229488D1 (de) | 2001-12-20 | 2002-12-19 | Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1321987B1 (de) |
JP (1) | JP3953806B2 (de) |
DE (1) | DE60229488D1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003067673A1 (fr) * | 2002-02-08 | 2003-08-14 | Ngk Insulators, Ltd. | Element piezoelectrique multicouche et son procede de fabrication |
JP2004136461A (ja) | 2002-10-15 | 2004-05-13 | Brother Ind Ltd | 液体圧力発生機構 |
JP3999156B2 (ja) * | 2003-03-31 | 2007-10-31 | 日本碍子株式会社 | 圧電/電歪膜型素子及び圧電/電歪磁器組成物 |
JP4777605B2 (ja) | 2003-05-21 | 2011-09-21 | 日本碍子株式会社 | 多層型圧電/電歪素子 |
JP2005170693A (ja) | 2003-12-08 | 2005-06-30 | Ngk Insulators Ltd | 圧電/電歪磁器組成物、圧電/電歪体、及び圧電/電歪膜型素子 |
JP2005183701A (ja) * | 2003-12-19 | 2005-07-07 | Murata Mfg Co Ltd | 圧電素子及びその製造方法 |
JP2005247619A (ja) | 2004-03-03 | 2005-09-15 | Ngk Insulators Ltd | 圧電/電歪磁器組成物、圧電/電歪体、及び圧電/電歪膜型素子 |
JP4537212B2 (ja) | 2005-01-11 | 2010-09-01 | 日本碍子株式会社 | 圧電/電歪素子の製造方法 |
JP2006202990A (ja) * | 2005-01-20 | 2006-08-03 | Ngk Insulators Ltd | 圧電素子 |
JP5004484B2 (ja) | 2006-03-23 | 2012-08-22 | 日本碍子株式会社 | 誘電体デバイス |
US7727585B2 (en) | 2007-02-19 | 2010-06-01 | Ngk Insulators, Ltd. | Dielectric device and its manufacturing method |
US7727584B2 (en) | 2007-02-19 | 2010-06-01 | Ngk Insulators, Ltd. | Dielectric device and its manufacturing method |
JP5295945B2 (ja) | 2007-02-20 | 2013-09-18 | 日本碍子株式会社 | 圧電/電歪素子 |
JP4538493B2 (ja) | 2007-12-18 | 2010-09-08 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JP5054149B2 (ja) * | 2010-04-26 | 2012-10-24 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503519B1 (de) * | 1970-11-11 | 1975-02-05 | ||
JPS60102779A (ja) * | 1983-11-09 | 1985-06-06 | Hitachi Metals Ltd | 圧電磁器組成物 |
MY104019A (en) * | 1988-05-27 | 1993-10-30 | Mitsui Chemicals Inc | Ferroelectric ceramic material. |
US5275988A (en) * | 1991-04-12 | 1994-01-04 | Nec Corporation | Ceramic composition |
JP3151644B2 (ja) * | 1993-03-08 | 2001-04-03 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
US5900274A (en) * | 1998-05-01 | 1999-05-04 | Eastman Kodak Company | Controlled composition and crystallographic changes in forming functionally gradient piezoelectric transducers |
WO2001093345A1 (en) * | 2000-05-26 | 2001-12-06 | Ceramtec Ag | Internal electrode material for piezoceramic multilayer actuators |
-
2001
- 2001-12-20 JP JP2001388315A patent/JP3953806B2/ja not_active Expired - Fee Related
-
2002
- 2002-12-19 DE DE60229488T patent/DE60229488D1/de not_active Expired - Lifetime
- 2002-12-19 EP EP20020258796 patent/EP1321987B1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1321987A2 (de) | 2003-06-25 |
EP1321987A3 (de) | 2004-12-01 |
JP3953806B2 (ja) | 2007-08-08 |
EP1321987B1 (de) | 2008-10-22 |
JP2002217465A (ja) | 2002-08-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |