DE602006005521D1 - Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung - Google Patents
Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer HartbeschichtungInfo
- Publication number
- DE602006005521D1 DE602006005521D1 DE602006005521T DE602006005521T DE602006005521D1 DE 602006005521 D1 DE602006005521 D1 DE 602006005521D1 DE 602006005521 T DE602006005521 T DE 602006005521T DE 602006005521 T DE602006005521 T DE 602006005521T DE 602006005521 D1 DE602006005521 D1 DE 602006005521D1
- Authority
- DE
- Germany
- Prior art keywords
- hard coating
- layer
- target
- making
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011248 coating agent Substances 0.000 title abstract 5
- 238000000576 coating method Methods 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000001875 compounds Chemical class 0.000 abstract 2
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
- B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
- B42D3/00—Book covers
- B42D3/12—Book covers combined with other articles
- B42D3/123—Book covers combined with other articles incorporating sound producing or light emitting means or carrying sound records
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
- B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
- B42D1/00—Books or other bound products
- B42D1/08—Albums
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
- B42P—INDEXING SCHEME RELATING TO BOOKS, FILING APPLIANCES OR THE LIKE
- B42P2241/00—Parts, details or accessories for books or filing appliances
- B42P2241/16—Books or filing appliances combined with other articles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Educational Administration (AREA)
- Educational Technology (AREA)
- Business, Economics & Management (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Drilling Tools (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005032199 | 2005-02-08 | ||
JP2005310339A JP4939032B2 (ja) | 2005-02-08 | 2005-10-25 | 硬質皮膜、および硬質皮膜の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006005521D1 true DE602006005521D1 (de) | 2009-04-23 |
Family
ID=36096355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006005521T Active DE602006005521D1 (de) | 2005-02-08 | 2006-01-20 | Hartbeschichtung, Target zur Herstellung einer Hartbeschichtung, und Verfahren zur Herstellung einer Hartbeschichtung |
Country Status (6)
Country | Link |
---|---|
US (2) | US7479331B2 (de) |
EP (4) | EP2060655B1 (de) |
JP (1) | JP4939032B2 (de) |
KR (1) | KR100753738B1 (de) |
AT (1) | ATE425275T1 (de) |
DE (1) | DE602006005521D1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009068047A (ja) * | 2007-09-11 | 2009-04-02 | Kobe Steel Ltd | 硬質皮膜、硬質皮膜被覆材および冷間塑性加工用金型 |
KR101508988B1 (ko) * | 2008-01-11 | 2015-04-14 | 삼성전자주식회사 | 멀티미디어 컨텐츠 리스트 제공방법 및 이를 적용한멀티미디어 기기 |
US9856556B2 (en) | 2010-04-23 | 2018-01-02 | Oerlikon Surface Solutions Ag, Pfaeffikon | PVD coating for metal machining |
JP5344204B2 (ja) * | 2012-03-05 | 2013-11-20 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
JP6211858B2 (ja) * | 2013-09-12 | 2017-10-11 | 株式会社神戸製鋼所 | 潤滑性と耐摩耗性に優れた硬質皮膜の製造方法 |
JP6349581B2 (ja) * | 2015-01-14 | 2018-07-04 | 住友電工ハードメタル株式会社 | 硬質被膜、切削工具および硬質被膜の製造方法 |
CN104805404B (zh) * | 2015-04-30 | 2017-03-01 | 山东大学 | Mo‑W‑S‑C自润滑涂层刀具的制备工艺 |
JP6963932B2 (ja) * | 2017-08-14 | 2021-11-10 | Dowaサーモテック株式会社 | 珪炭窒化バナジウム膜、珪炭窒化バナジウム膜被覆部材およびその製造方法 |
JP6984108B2 (ja) | 2018-03-07 | 2021-12-17 | 住友電工ハードメタル株式会社 | 表面被覆切削工具及びその製造方法 |
CN111587157B (zh) | 2018-03-07 | 2023-06-20 | 住友电工硬质合金株式会社 | 表面被覆切削工具及其制造方法 |
EP3870733A1 (de) | 2018-10-26 | 2021-09-01 | Oerlikon Surface Solutions AG, Pfäffikon | Mit ti und/oder si mikrolegiertes vanadiumaluminiumnitrid (vain) |
WO2020187744A1 (en) * | 2019-03-15 | 2020-09-24 | Nanofilm Technologies International Pte Ltd | Improved coating processes |
CN112126900B (zh) * | 2019-06-24 | 2023-06-23 | 中国科学院宁波材料技术与工程研究所 | 高温低摩擦硬质纳米多层VAlCN/VN-Ag涂层、其制备方法及应用 |
JP2022147771A (ja) * | 2021-03-23 | 2022-10-06 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
CN114351087B (zh) * | 2021-12-15 | 2023-03-17 | 核工业西南物理研究院 | 一种CrAlVSiN涂层的制备方法 |
WO2024062612A1 (ja) * | 2022-09-22 | 2024-03-28 | 住友電気工業株式会社 | 切削工具 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4714660A (en) * | 1985-12-23 | 1987-12-22 | Fansteel Inc. | Hard coatings with multiphase microstructures |
JP3027502B2 (ja) * | 1993-03-15 | 2000-04-04 | 健 増本 | 耐摩耗性非晶質硬質膜及びその製造方法 |
JPH0941127A (ja) * | 1995-08-03 | 1997-02-10 | Kobe Steel Ltd | 硬質皮膜 |
JP4019457B2 (ja) | 1997-07-15 | 2007-12-12 | 日新電機株式会社 | アーク式蒸発源 |
JP2000144376A (ja) * | 1998-11-18 | 2000-05-26 | Sumitomo Electric Ind Ltd | 摺動特性の良好な皮膜 |
ES2273772T3 (es) * | 2000-12-28 | 2007-05-16 | Kabushiki Kaisha Kobe Seiko Sho | Una pelicula dura para herramientas de corte. |
JP4112834B2 (ja) | 2000-12-28 | 2008-07-02 | 株式会社神戸製鋼所 | 切削工具用硬質皮膜を形成するためのターゲット |
JP4062582B2 (ja) * | 2001-07-23 | 2008-03-19 | 株式会社神戸製鋼所 | 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット |
DE10262174B4 (de) | 2001-07-23 | 2007-03-15 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe | Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung |
JP4038448B2 (ja) * | 2003-03-25 | 2008-01-23 | 株式会社神戸製鋼所 | 硬質皮膜 |
JP2005271190A (ja) | 2003-12-05 | 2005-10-06 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
JP2005271106A (ja) * | 2004-03-23 | 2005-10-06 | Sumitomo Electric Hardmetal Corp | 被覆切削工具 |
-
2005
- 2005-10-25 JP JP2005310339A patent/JP4939032B2/ja not_active Expired - Fee Related
-
2006
- 2006-01-18 US US11/333,434 patent/US7479331B2/en not_active Expired - Fee Related
- 2006-01-20 AT AT06001204T patent/ATE425275T1/de not_active IP Right Cessation
- 2006-01-20 EP EP08021470.3A patent/EP2060655B1/de not_active Expired - Fee Related
- 2006-01-20 EP EP08021469A patent/EP2065484B1/de not_active Expired - Fee Related
- 2006-01-20 EP EP06001204A patent/EP1688513B1/de not_active Not-in-force
- 2006-01-20 EP EP09007222.4A patent/EP2138602B1/de not_active Not-in-force
- 2006-01-20 DE DE602006005521T patent/DE602006005521D1/de active Active
- 2006-02-07 KR KR1020060011762A patent/KR100753738B1/ko active IP Right Grant
-
2008
- 2008-10-31 US US12/262,390 patent/US7790301B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20100038232A1 (en) | 2010-02-18 |
JP4939032B2 (ja) | 2012-05-23 |
EP2138602B1 (de) | 2013-07-03 |
EP2060655B1 (de) | 2013-07-17 |
EP1688513A1 (de) | 2006-08-09 |
JP2006249574A (ja) | 2006-09-21 |
EP2138602A1 (de) | 2009-12-30 |
KR100753738B1 (ko) | 2007-08-31 |
EP2065484A1 (de) | 2009-06-03 |
US7790301B2 (en) | 2010-09-07 |
EP1688513B1 (de) | 2009-03-11 |
EP2060655A1 (de) | 2009-05-20 |
ATE425275T1 (de) | 2009-03-15 |
EP2065484B1 (de) | 2011-11-30 |
KR20060090603A (ko) | 2006-08-14 |
US7479331B2 (en) | 2009-01-20 |
US20060177698A1 (en) | 2006-08-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |