DE602004032105D1 - Elektronenquelle - Google Patents

Elektronenquelle

Info

Publication number
DE602004032105D1
DE602004032105D1 DE602004032105T DE602004032105T DE602004032105D1 DE 602004032105 D1 DE602004032105 D1 DE 602004032105D1 DE 602004032105 T DE602004032105 T DE 602004032105T DE 602004032105 T DE602004032105 T DE 602004032105T DE 602004032105 D1 DE602004032105 D1 DE 602004032105D1
Authority
DE
Germany
Prior art keywords
electron source
electron
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004032105T
Other languages
English (en)
Inventor
Yoshinori Terui
Ryozo Nonogaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Publication of DE602004032105D1 publication Critical patent/DE602004032105D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044—Point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
DE602004032105T 2003-02-03 2004-02-03 Elektronenquelle Expired - Lifetime DE602004032105D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003025718A JP4210131B2 (ja) 2003-02-03 2003-02-03 電子源及び電子源の使用方法
PCT/JP2004/001035 WO2004070766A1 (ja) 2003-02-03 2004-02-03 電子源

Publications (1)

Publication Number Publication Date
DE602004032105D1 true DE602004032105D1 (de) 2011-05-19

Family

ID=32844113

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004032105T Expired - Lifetime DE602004032105D1 (de) 2003-02-03 2004-02-03 Elektronenquelle

Country Status (5)

Country Link
US (1) US7556749B2 (de)
EP (1) EP1592040B1 (de)
JP (1) JP4210131B2 (de)
DE (1) DE602004032105D1 (de)
WO (1) WO2004070766A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1760762B1 (de) * 2005-09-06 2012-02-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung und Verfahren zur Auswahl einer Emissionsfläche einer Emissionsstruktur
WO2008031058A2 (en) * 2006-09-07 2008-03-13 Michigan Technological University Self-regenerating nanotips for low-power electric propulsion (ep) cathodes
JP4782736B2 (ja) * 2007-07-12 2011-09-28 電気化学工業株式会社 電子源
WO2009044564A1 (ja) 2007-10-05 2009-04-09 Denki Kagaku Kogyo Kabushiki Kaisha 電子源及び電子ビーム装置
JP2010061898A (ja) * 2008-09-02 2010-03-18 Denki Kagaku Kogyo Kk 電子源及び電子機器
DE112009003724B4 (de) * 2008-12-16 2017-07-13 Hitachi High-Technologies Corporation Verwendung eines Elektronenstrahlgeräts
JP2011065790A (ja) * 2009-09-15 2011-03-31 Tokyo Electron Ltd 電子源、電子源の製造方法及び電子放出方法
JP2011076753A (ja) * 2009-09-29 2011-04-14 Denki Kagaku Kogyo Kk 電子源及び電子機器
JP5063715B2 (ja) * 2010-02-04 2012-10-31 株式会社日立ハイテクノロジーズ 電子源，電子銃、それを用いた電子顕微鏡装置及び電子線描画装置
US8896195B2 (en) * 2010-10-21 2014-11-25 Hermes Microvision, Inc. Filament for electron source
US9496673B2 (en) * 2011-03-18 2016-11-15 Denka Company Limited Enclosure and method for handling electron gun or ion gun
US9117821B2 (en) * 2013-03-12 2015-08-25 Carnegie Mellon University Oriented crystal nanowire interconnects
JP6492824B2 (ja) * 2015-03-18 2019-04-03 宇部興産株式会社 光変換用セラミックス複合材料およびその製造方法
JP2019527918A (ja) 2016-08-08 2019-10-03 エーエスエムエル ネザーランズ ビー．ブイ． 電子エミッタ及びそれを製作する方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3582855B2 (ja) 1994-07-22 2004-10-27 電気化学工業株式会社 熱電界放射陰極及びその製造方法
US5733688A (en) * 1994-12-14 1998-03-31 Canon Kabushiki Kaisha Lithographic mask structure and method of producing the same comprising W and molybdenum alloy absorber
US5847498A (en) * 1994-12-23 1998-12-08 Philips Electronics North America Corporation Multiple layer composite electrodes for discharge lamps
US5744905A (en) * 1994-12-23 1998-04-28 Philips Electronics North America Corporation Emission materials for discharge lamps and method for manufacturing electrode structures with such materials
JP3397570B2 (ja) * 1996-04-02 2003-04-14 電気化学工業株式会社 熱電界放射陰極
JPH10154477A (ja) * 1996-09-27 1998-06-09 Hitachi Ltd 拡散補給型電子源およびそれを用いた電子線応用装置
TW388048B (en) * 1997-04-30 2000-04-21 Hitachi Ltd Cathode-ray tube and electron gun thereof
US5911919A (en) * 1997-09-08 1999-06-15 Integrated Thermal Sciences, Inc. Electron emission materials and components
JPH11185681A (ja) 1997-12-24 1999-07-09 Hitachi Ltd 熱拡散補給型電子源，電子線発生方法および電子線応用装置
JPH11224629A (ja) * 1998-02-09 1999-08-17 Hitachi Ltd 拡散補給型電子源、その製造方法および電子線装置
JPH11288658A (ja) 1998-04-01 1999-10-19 Hitachi Ltd 酸化物陰極
JPH11354007A (ja) 1998-06-11 1999-12-24 Hitachi Ltd 電子源およびそれを用いた電子線装置
JP3137961B2 (ja) * 1999-03-19 2001-02-26 ティーディーケイ株式会社 電子放出電極
JP2000357464A (ja) * 1999-06-14 2000-12-26 Hitachi Ltd 陰極線管
JP2001167687A (ja) 1999-12-06 2001-06-22 Tdk Corp 電子放出材料、電極および放電灯
JP2001325910A (ja) * 2000-05-16 2001-11-22 Denki Kagaku Kogyo Kk 電子銃とその使用方法
JP2003031170A (ja) 2001-07-18 2003-01-31 Denki Kagaku Kogyo Kk 電子放射陰極とその製造方法

Also Published As

Publication number Publication date
JP4210131B2 (ja) 2009-01-14
EP1592040A1 (de) 2005-11-02
EP1592040B1 (de) 2011-04-06
US7556749B2 (en) 2009-07-07
WO2004070766A1 (ja) 2004-08-19
EP1592040A4 (de) 2010-06-02
JP2004265614A (ja) 2004-09-24
US20060076866A1 (en) 2006-04-13

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