DE602004012793D1 - Chemisch-mechanisches Polierverfahren für STI - Google Patents
Chemisch-mechanisches Polierverfahren für STIInfo
- Publication number
- DE602004012793D1 DE602004012793D1 DE602004012793T DE602004012793T DE602004012793D1 DE 602004012793 D1 DE602004012793 D1 DE 602004012793D1 DE 602004012793 T DE602004012793 T DE 602004012793T DE 602004012793 T DE602004012793 T DE 602004012793T DE 602004012793 D1 DE602004012793 D1 DE 602004012793D1
- Authority
- DE
- Germany
- Prior art keywords
- sti
- chemical
- mechanical polishing
- polishing process
- mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007517 polishing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003144034A JP2004349426A (ja) | 2003-05-21 | 2003-05-21 | Sti用化学機械研磨方法 |
JP2003144034 | 2003-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004012793D1 true DE602004012793D1 (de) | 2008-05-15 |
DE602004012793T2 DE602004012793T2 (de) | 2009-04-30 |
Family
ID=33095450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004012793T Expired - Lifetime DE602004012793T2 (de) | 2003-05-21 | 2004-05-19 | Chemisch-mechanisches Polierverfahren für STI |
Country Status (7)
Country | Link |
---|---|
US (1) | US7163448B2 (de) |
EP (1) | EP1479741B1 (de) |
JP (1) | JP2004349426A (de) |
KR (1) | KR101060441B1 (de) |
CN (1) | CN100457394C (de) |
DE (1) | DE602004012793T2 (de) |
TW (1) | TWI311342B (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050096246A1 (en) | 2003-11-04 | 2005-05-05 | Johnson Robert C. | Solvent compositions containing chlorofluoroolefins |
US20050121969A1 (en) * | 2003-12-04 | 2005-06-09 | Ismail Emesh | Lubricant for wafer polishing using a fixed abrasive pad |
JP4546071B2 (ja) * | 2003-12-10 | 2010-09-15 | パナソニック株式会社 | 半導体装置の製造方法 |
CN1985361A (zh) * | 2004-07-23 | 2007-06-20 | 日立化成工业株式会社 | Cmp研磨剂以及衬底的研磨方法 |
US20060088976A1 (en) * | 2004-10-22 | 2006-04-27 | Applied Materials, Inc. | Methods and compositions for chemical mechanical polishing substrates |
US20060097219A1 (en) * | 2004-11-08 | 2006-05-11 | Applied Materials, Inc. | High selectivity slurry compositions for chemical mechanical polishing |
EP1836268A4 (de) * | 2004-12-13 | 2009-12-23 | Planar Solutions Llc | Auf kolloidaler kieselsäure beruhende aufschlämmung zum chemisch-mechanischen polieren |
US7291280B2 (en) | 2004-12-28 | 2007-11-06 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Multi-step methods for chemical mechanical polishing silicon dioxide and silicon nitride |
KR101275964B1 (ko) * | 2005-02-23 | 2013-06-14 | 제이에스알 가부시끼가이샤 | 화학 기계 연마방법 |
JP4759298B2 (ja) * | 2005-03-30 | 2011-08-31 | 株式会社フジミインコーポレーテッド | 単結晶表面用の研磨剤及び研磨方法 |
TWI338329B (en) * | 2005-07-11 | 2011-03-01 | Fujitsu Semiconductor Ltd | Manufacture of semiconductor device with cmp |
JP5345397B2 (ja) * | 2005-09-26 | 2013-11-20 | プラナー ソリューションズ エルエルシー | 化学機械研磨応用で使用するための超純度コロイド状シリカ |
KR100710804B1 (ko) * | 2006-02-03 | 2007-04-23 | 삼성전자주식회사 | 반도체 소자의 평탄화 방법 |
KR101067095B1 (ko) * | 2006-03-20 | 2011-09-22 | 미쓰이 가가쿠 가부시키가이샤 | 연마용 조성물 |
SG139699A1 (en) * | 2006-08-02 | 2008-02-29 | Fujimi Inc | Polishing composition and polishing process |
KR100852242B1 (ko) * | 2006-08-16 | 2008-08-13 | 삼성전자주식회사 | 화학 기계적 연마용 슬러리 조성물, 이를 이용한 연마 방법및 반도체 메모리 소자의 제조 방법 |
KR100814416B1 (ko) * | 2006-09-28 | 2008-03-18 | 삼성전자주식회사 | 고 평탄화 슬러리 조성물 및 이를 이용한 화학 기계적 연마방법 |
KR100829598B1 (ko) * | 2006-11-16 | 2008-05-14 | 삼성전자주식회사 | 고 평탄화 화학 기계적 연마 방법 및 반도체 소자의제조방법 |
JP4301305B2 (ja) | 2007-02-16 | 2009-07-22 | ソニー株式会社 | 基体研磨方法、半導体装置の製造方法 |
US7696095B2 (en) * | 2007-02-23 | 2010-04-13 | Ferro Corporation | Auto-stopping slurries for chemical-mechanical polishing of topographic dielectric silicon dioxide |
JP2008290169A (ja) | 2007-05-23 | 2008-12-04 | Tdk Corp | アルミナ膜研磨用組成物およびそれを用いる化学機械研磨方法 |
US8404009B2 (en) * | 2007-10-29 | 2013-03-26 | Kao Corporation | Polishing composition for hard disk substrate |
CN101451049A (zh) * | 2007-11-30 | 2009-06-10 | 安集微电子(上海)有限公司 | 一种化学机械抛光液 |
US20090197510A1 (en) * | 2008-02-01 | 2009-08-06 | Shohei Shima | Polishing method and apparatus |
JP2010135472A (ja) * | 2008-12-03 | 2010-06-17 | Fujifilm Corp | 研磨用組成物および研磨方法 |
US8497210B2 (en) * | 2010-10-04 | 2013-07-30 | International Business Machines Corporation | Shallow trench isolation chemical mechanical planarization |
JP2012146975A (ja) * | 2010-12-24 | 2012-08-02 | Hitachi Chem Co Ltd | 研磨液及びこの研磨液を用いた基板の研磨方法 |
JP2013084836A (ja) * | 2011-10-12 | 2013-05-09 | Toshiba Corp | Cmp方法及び半導体装置の製造方法 |
JP5957292B2 (ja) * | 2012-05-18 | 2016-07-27 | 株式会社フジミインコーポレーテッド | 研磨用組成物並びにそれを用いた研磨方法及び基板の製造方法 |
US8748317B2 (en) | 2012-08-03 | 2014-06-10 | Infineon Technologies Austria Ag | Method of manufacturing a semiconductor device including a dielectric structure |
KR102003276B1 (ko) * | 2013-02-14 | 2019-07-24 | 삼성전자 주식회사 | 반도체 소자 제조 방법 |
CN105451940B (zh) * | 2013-08-09 | 2018-12-11 | 福吉米株式会社 | 研磨完的研磨对象物的制造方法及研磨用组合物试剂盒 |
JP6694674B2 (ja) * | 2014-11-07 | 2020-05-20 | 株式会社フジミインコーポレーテッド | 研磨方法およびポリシング用組成物 |
CN117904636B (zh) * | 2024-01-19 | 2024-07-02 | 揭阳市潜信不锈钢制品有限公司 | 一种五金餐具高效抛光工艺 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11181403A (ja) * | 1997-12-18 | 1999-07-06 | Hitachi Chem Co Ltd | 酸化セリウム研磨剤及び基板の研磨法 |
JPH11256141A (ja) * | 1998-03-12 | 1999-09-21 | Sony Corp | 研磨スラリーおよび研磨方法 |
US6326309B2 (en) | 1998-06-30 | 2001-12-04 | Fujitsu Limited | Semiconductor device manufacturing method |
US6638143B2 (en) * | 1999-12-22 | 2003-10-28 | Applied Materials, Inc. | Ion exchange materials for chemical mechanical polishing |
TW572980B (en) | 2000-01-12 | 2004-01-21 | Jsr Corp | Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process |
JP4123685B2 (ja) | 2000-05-18 | 2008-07-23 | Jsr株式会社 | 化学機械研磨用水系分散体 |
JP2002124493A (ja) * | 2000-10-13 | 2002-04-26 | Mitsubishi Materials Silicon Corp | 半導体ウェーハの研磨装置 |
US6617487B2 (en) * | 2001-08-15 | 2003-09-09 | Su Jen Chou | Water absorbable cloth member for surgical operation purposes |
CN1384166A (zh) * | 2002-05-16 | 2002-12-11 | 深圳市纳科实业有限公司 | 用于存储器硬盘磁头表面抛光的抛光组合物及其抛光方法 |
US20050287931A1 (en) * | 2002-10-25 | 2005-12-29 | Showa Denko K.K. | Polishing slurry and polished substrate |
US6964600B2 (en) * | 2003-11-21 | 2005-11-15 | Praxair Technology, Inc. | High selectivity colloidal silica slurry |
-
2003
- 2003-05-21 JP JP2003144034A patent/JP2004349426A/ja active Pending
-
2004
- 2004-04-28 US US10/833,089 patent/US7163448B2/en not_active Expired - Fee Related
- 2004-05-10 TW TW093113089A patent/TWI311342B/zh not_active IP Right Cessation
- 2004-05-19 EP EP04011992A patent/EP1479741B1/de not_active Expired - Fee Related
- 2004-05-19 KR KR1020040035407A patent/KR101060441B1/ko not_active IP Right Cessation
- 2004-05-19 DE DE602004012793T patent/DE602004012793T2/de not_active Expired - Lifetime
- 2004-05-21 CN CNB2004100453934A patent/CN100457394C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1572424A (zh) | 2005-02-02 |
US20040235396A1 (en) | 2004-11-25 |
KR101060441B1 (ko) | 2011-08-29 |
EP1479741A2 (de) | 2004-11-24 |
EP1479741B1 (de) | 2008-04-02 |
CN100457394C (zh) | 2009-02-04 |
US7163448B2 (en) | 2007-01-16 |
TWI311342B (en) | 2009-06-21 |
JP2004349426A (ja) | 2004-12-09 |
EP1479741A3 (de) | 2005-01-05 |
TW200426935A (en) | 2004-12-01 |
DE602004012793T2 (de) | 2009-04-30 |
KR20040100964A (ko) | 2004-12-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |