DE602004009609D1 - Modifizierter doppelmembran-drucksensor - Google Patents

Modifizierter doppelmembran-drucksensor

Info

Publication number
DE602004009609D1
DE602004009609D1 DE602004009609T DE602004009609T DE602004009609D1 DE 602004009609 D1 DE602004009609 D1 DE 602004009609D1 DE 602004009609 T DE602004009609 T DE 602004009609T DE 602004009609 T DE602004009609 T DE 602004009609T DE 602004009609 D1 DE602004009609 D1 DE 602004009609D1
Authority
DE
Germany
Prior art keywords
pressure sensor
membrane pressure
double membrane
modified double
modified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602004009609T
Other languages
English (en)
Other versions
DE602004009609T2 (de
Inventor
Tzu-Yu Wang
Eugen I Cabuz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602004009609D1 publication Critical patent/DE602004009609D1/de
Application granted granted Critical
Publication of DE602004009609T2 publication Critical patent/DE602004009609T2/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE602004009609T 2003-12-30 2004-12-20 Modifizierter doppelmembran-drucksensor Expired - Fee Related DE602004009609T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US748817 2003-12-30
US10/748,817 US6886410B1 (en) 2003-12-30 2003-12-30 Modified dual diaphragm pressure sensor
PCT/US2004/042759 WO2005066599A2 (en) 2003-12-30 2004-12-20 Modified dual diaphragm pressure sensor

Publications (2)

Publication Number Publication Date
DE602004009609D1 true DE602004009609D1 (de) 2007-11-29
DE602004009609T2 DE602004009609T2 (de) 2008-08-07

Family

ID=34523269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004009609T Expired - Fee Related DE602004009609T2 (de) 2003-12-30 2004-12-20 Modifizierter doppelmembran-drucksensor

Country Status (5)

Country Link
US (1) US6886410B1 (de)
EP (1) EP1700092B1 (de)
JP (1) JP2007517226A (de)
DE (1) DE602004009609T2 (de)
WO (1) WO2005066599A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6901807B1 (en) * 2003-12-30 2005-06-07 Honeywell International Inc. Positive and negative pressure sensor
US7100453B2 (en) * 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
US20070028697A1 (en) * 2005-08-08 2007-02-08 Honeywell International Inc. One piece needle and diaphragm assembly
US20070045128A1 (en) * 2005-08-19 2007-03-01 Honeywell International Inc. Chlorine dioxide sensor
US7331239B1 (en) * 2006-09-26 2008-02-19 Honeywell International Inc. Self calibrating dual diaphragm pressure sensor
GB2470399B (en) 2009-05-21 2013-11-27 Ge Infrastructure Sensing Inc A sensor arranged to measure more than one characteristic of a fluid
DE102009051611A1 (de) * 2009-11-02 2011-05-05 Vega Grieshaber Kg Messzelle
US9194760B2 (en) * 2013-03-14 2015-11-24 Dwyer Instruments, Inc. Capacitive pressure sensor with reduced parasitic capacitance
KR101500840B1 (ko) * 2013-06-24 2015-03-10 서울대학교산학협력단 변형 센서 제조 방법, 변형 센서 및 변형 센서를 이용한 움직임 감지 장치

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336567A (en) * 1980-06-30 1982-06-22 The Bendix Corporation Differential pressure transducer
JPS60253944A (ja) * 1984-05-31 1985-12-14 Shimadzu Corp 圧力センサおよびその製造方法
US4598576A (en) * 1984-06-25 1986-07-08 National Technical Systems Fluid detection device and method
US4926874A (en) * 1985-11-25 1990-05-22 Lee Arnold St J Method for determining blood pressure
JPH0744281B2 (ja) * 1986-04-09 1995-05-15 石塚硝子株式会社 半導体圧力変換器の製造方法
JPH0726887B2 (ja) * 1986-05-31 1995-03-29 株式会社堀場製作所 コンデンサマイクロフオン型検出器用ダイアフラム
US4754365A (en) * 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
JPH051669A (ja) * 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
US5545594A (en) * 1993-10-26 1996-08-13 Yazaki Meter Co., Ltd. Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented
US5699041A (en) * 1996-02-14 1997-12-16 Ballyns; Jan Pneumatic pressure sensor device
JP3724151B2 (ja) * 1997-10-09 2005-12-07 富士電機ホールディングス株式会社 圧力および温度計測用静電容量型センサ、センサ装置およびそれらの製造方法
WO1999034185A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Membrane für eine kapazitive vakuummesszelle
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
JP4522567B2 (ja) * 2000-10-24 2010-08-11 株式会社プリモ 圧力センサ
US6520477B2 (en) * 2001-02-01 2003-02-18 William Trimmer Micro pump
JP4296728B2 (ja) * 2001-07-06 2009-07-15 株式会社デンソー 静電容量型圧力センサおよびその製造方法並びに静電容量型圧力センサに用いるセンサ用構造体

Also Published As

Publication number Publication date
EP1700092B1 (de) 2007-10-17
JP2007517226A (ja) 2007-06-28
US6886410B1 (en) 2005-05-03
DE602004009609T2 (de) 2008-08-07
WO2005066599A2 (en) 2005-07-21
EP1700092A2 (de) 2006-09-13
WO2005066599A3 (en) 2005-10-06

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee