FR2872281B1 - Capteur de pression - Google Patents

Capteur de pression

Info

Publication number: FR2872281B1
Authority: FR; France
Prior art keywords: pressure sensor; sensor; pressure
Prior art date: 2004-06-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR0506408A

Other languages

English (en)

Other versions

FR2872281A1 (fr

Inventor

Inao Toyoda

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Denso Corp

Original Assignee

Denso Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-06-29

Filing date

2005-06-23

Publication date

2007-06-22

2005-06-23 Application filed by Denso Corp filed Critical Denso Corp

2005-12-30 Publication of FR2872281A1 publication Critical patent/FR2872281A1/fr

2007-06-22 Application granted granted Critical

2007-06-22 Publication of FR2872281B1 publication Critical patent/FR2872281B1/fr

Status Expired - Fee Related legal-status Critical Current

2025-06-23 Anticipated expiration legal-status Critical

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)
Pressure Sensors (AREA)

FR0506408A 2004-06-29 2005-06-23 Capteur de pression Expired - Fee Related FR2872281B1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2004191243A JP4337656B2 (ja)	2004-06-29	2004-06-29	圧力センサ

Publications (2)

Publication Number	Publication Date
FR2872281A1 FR2872281A1 (fr)	2005-12-30
FR2872281B1 true FR2872281B1 (fr)	2007-06-22

Family

ID=35504099

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR0506408A Expired - Fee Related FR2872281B1 (fr)	2004-06-29	2005-06-23	Capteur de pression

Country Status (5)

Country	Link
US (1)	US6997058B2 (fr)
JP (1)	JP4337656B2 (fr)
CN (1)	CN100417928C (fr)
DE (1)	DE102005027463A1 (fr)
FR (1)	FR2872281B1 (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7210362B2 (en) *	2002-11-05	2007-05-01	Tanita Corporation	Diaphragm type load detection sensor, load detection unit and electronic scale using same
JP4185478B2 (ja) *	2004-07-23	2008-11-26	長野計器株式会社	歪検出器およびその製造方法
DE102005001298A1 (de) *	2005-01-03	2006-07-13	Hydac Electronic Gmbh	Vorrichtung zum Messen von Kräften, insbesondere Drucksensor, und zugehöriges Herstellverfahren
TWI416739B (zh) *	2006-05-01	2013-11-21	Tanita Seisakusho Kk	半導體型應變檢測器及其製造方法
JP4302720B2 (ja) *	2006-06-28	2009-07-29	株式会社沖データ	半導体装置、ｌｅｄヘッド及び画像形成装置
JP2008039760A (ja) *	2006-07-14	2008-02-21	Denso Corp	圧力センサ
DE102008000128B4 (de) *	2007-01-30	2013-01-03	Denso Corporation	Halbleitersensorvorrichtung und deren Herstellungsverfahren
DE102008011942A1 (de) *	2008-02-29	2009-09-03	Robert Bosch Gmbh	Schaltungsanordnung
DE102010028044B4 (de) *	2010-04-21	2017-08-31	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Drucksensor und Verfahren zu dessen Herstellung
JP5341855B2 (ja) *	2010-10-01	2013-11-13	日本分光株式会社	微小容量圧力計
US8302483B2 (en)	2011-02-25	2012-11-06	Continental Automotive Systems, Inc.	Robust design of high pressure sensor device
CN102998037B (zh) *	2012-09-15	2014-11-12	华东光电集成器件研究所	介质隔离压阻式压力传感器及其制备方法
CN103111492B (zh) *	2013-01-24	2015-03-18	上海工程技术大学	一种实时测量压力机打击力的装置的标定测量方法
JP5971267B2 (ja) *	2013-02-26	2016-08-17	株式会社デンソー	圧力センサおよびその製造方法
JP5839150B2 (ja) *	2013-05-24	2016-01-06	日立金属株式会社	圧力センサ及びそれを用いたマスフローメータ並びにマスフローコントローラ
JP5880499B2 (ja) *	2013-08-19	2016-03-09	横河電機株式会社	振動式圧力センサ及びその製造方法
JP2015184100A (ja) *	2014-03-24	2015-10-22	セイコーエプソン株式会社	物理量センサー、物理量センサーの製造方法、圧力センサー、高度計、電子機器および移動体
CN105444937A (zh) *	2014-09-03	2016-03-30	Wika亚历山大·威甘德欧洲股份两合公司	压力测量装置
US9726587B2 (en)	2015-01-30	2017-08-08	Stmicroelectronics S.R.L.	Tensile stress measurement device with attachment plates and related methods
JP6635806B2 (ja) *	2016-01-26	2020-01-29	エイブリック株式会社	半導体装置
JP6468304B2 (ja) *	2017-02-28	2019-02-13	株式会社デンソー	物理量センサ
KR102520722B1 (ko) *	2018-04-05	2023-04-11	삼성디스플레이 주식회사	압력 센서
US11204293B2 (en)	2018-05-24	2021-12-21	Waters Technologies Corporation	Adiabatic thermal pulse compensating pressure transducer and method
JP2020008307A (ja) *	2018-07-03	2020-01-16	株式会社不二工機	圧力検出ユニット及びこれを用いた圧力センサ
JP7164835B2 (ja) *	2019-03-11	2022-11-02	Tdk株式会社	圧力センサ
TWI700241B (zh) *	2019-12-27	2020-08-01	新唐科技股份有限公司	感測器薄膜結構及其製造方法
DE102020105210A1 (de) *	2020-02-27	2021-09-02	Tdk Electronics Ag	Sensor und Verfahren zur Herstellung eines Sensors
CN112704792A (zh) *	2020-12-30	2021-04-27	西南医科大学	一种集水杯组件及呼吸机

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4332000A (en) *	1980-10-03	1982-05-25	International Business Machines Corporation	Capacitive pressure transducer
JPH0711461B2 (ja)	1986-06-13	1995-02-08	株式会社日本自動車部品総合研究所	圧力検出器
US4975390A (en) *	1986-12-18	1990-12-04	Nippondenso Co. Ltd.	Method of fabricating a semiconductor pressure sensor
US4840068A (en) *	1988-03-14	1989-06-20	Mayhew Jr John D	Pipe pressure sensor
JPH0711461A (ja) *	1993-06-24	1995-01-13	Nippon Steel Corp	加工性と耐食性に優れた合金複合型めっき制振鋼板
JP3420808B2 (ja)	1993-12-13	2003-06-30	長野計器株式会社	半導体圧力センサの製造方法
US5583295A (en) *	1994-03-14	1996-12-10	Nippondenso Co., Ltd.	Pressure sensor having gauge resistors and temperature compensating resistors on the same surface
JPH11135807A (ja)	1997-10-30	1999-05-21	Hitachi Ltd	Ｓｏｉ型圧力センサ
DE19851055C2 (de) *	1998-11-05	2001-03-01	Fraunhofer Ges Forschung	Verfahren zur Herstellung von monolithisch integrierten Sensoren

2004
- 2004-06-29 JP JP2004191243A patent/JP4337656B2/ja not_active Expired - Fee Related
2005
- 2005-05-26 US US11/137,544 patent/US6997058B2/en active Active
- 2005-06-14 DE DE102005027463A patent/DE102005027463A1/de not_active Withdrawn
- 2005-06-23 FR FR0506408A patent/FR2872281B1/fr not_active Expired - Fee Related
- 2005-06-29 CN CNB2005100810796A patent/CN100417928C/zh not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP2006010623A (ja)	2006-01-12
DE102005027463A1 (de)	2006-02-02
JP4337656B2 (ja)	2009-09-30
US20050284228A1 (en)	2005-12-29
CN1715854A (zh)	2006-01-04
FR2872281A1 (fr)	2005-12-30
CN100417928C (zh)	2008-09-10
US6997058B2 (en)	2006-02-14

Legal Events

Date	Code	Title	Description
2015-06-19	PLFP	Fee payment	Year of fee payment: 11
2016-06-27	PLFP	Fee payment	Year of fee payment: 12
2017-06-21	PLFP	Fee payment	Year of fee payment: 13
2018-06-20	PLFP	Fee payment	Year of fee payment: 14
2020-03-13	ST	Notification of lapse	Effective date: 20200206

Publication	Publication Date	Title
FR2872281B1 (fr)	2007-06-22	Capteur de pression
FR2887629B1 (fr)	2014-04-11	Capteur de pression
FR2874088B1 (fr)	2016-11-25	Capteur de pression
FR2871232B1 (fr)	2007-06-15	Capteur de pression
FR2866428B1 (fr)	2007-05-25	Capteur micromecanique de haute pression
FR2836220B1 (fr)	2005-09-09	Capteur de pression
FR2868162B1 (fr)	2007-04-20	Capteur de pression ayant un capteur de temperature integre
DE602005021253D1 (de)	2010-06-24	Kalibrierter drucksensor
DK1794561T3 (da)	2020-03-16	Optoakustisk tryksensor
FR2874780B1 (fr)	2011-11-11	Capteur ultrasonore
DE602006001098D1 (de)	2008-06-19	Kapazitiver Drucksensor
FR2884298B1 (fr)	2007-08-10	Bougie de prechauffage a capteur de pression integre
GB0410135D0 (en)	2004-06-09	Cylinder pressure sensor
DE102005022087A8 (de)	2006-04-20	Druckerfassungsvorrichtung
BRPI0721074A2 (pt)	2016-05-10	dispositivo sensor de pressão
DE602006016034D1 (de)	2010-09-23	Druckmessvorrichtung
SE0500752L (sv)	2005-10-09	Förskjutningssensor
DE102007042439B8 (de)	2013-06-06	Drucksensor
FR2869600B1 (fr)	2006-10-20	Capteur combine de pressions relative et absolue
FR2852102B1 (fr)	2006-12-15	Capteur de pression a semiconducteur ayant une membrane
FR2861570B1 (fr)	2007-07-13	Feuille de capteur
DE602006020042D1 (de)	2011-03-24	Zusammengesetzter sensor
FR2889872B1 (fr)	2016-01-01	Capteur de temperature
FR2865803B1 (fr)	2006-11-24	Capteur de pression comportant un diaphragme
DE502005010090D1 (de)	2010-09-23	Sitzbelegungsdrucksensor