DE60140931D1 - Polyesterfilm als träger eines trockenfilmresists - Google Patents

Polyesterfilm als träger eines trockenfilmresists

Info

Publication number
DE60140931D1
DE60140931D1 DE60140931T DE60140931T DE60140931D1 DE 60140931 D1 DE60140931 D1 DE 60140931D1 DE 60140931 T DE60140931 T DE 60140931T DE 60140931 T DE60140931 T DE 60140931T DE 60140931 D1 DE60140931 D1 DE 60140931D1
Authority
DE
Germany
Prior art keywords
carrier
film
resistance
polyester film
dry film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60140931T
Other languages
English (en)
Inventor
Kei Mizutani
Koji Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26598090&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60140931(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP2000248502A external-priority patent/JP4495841B2/ja
Priority claimed from JP2000248503A external-priority patent/JP2002062661A/ja
Application filed by Teijin Ltd filed Critical Teijin Ltd
Application granted granted Critical
Publication of DE60140931D1 publication Critical patent/DE60140931D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/514—Oriented
    • B32B2307/518—Oriented bi-axially
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
    • C08J2367/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/91—Product with molecular orientation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/269—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension including synthetic resin or polymer layer or component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31786—Of polyester [e.g., alkyd, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31786—Of polyester [e.g., alkyd, etc.]
    • Y10T428/31797—Next to addition polymer from unsaturated monomers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Materials Engineering (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Laminated Bodies (AREA)
  • Materials For Photolithography (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
DE60140931T 2000-08-18 2001-08-15 Polyesterfilm als träger eines trockenfilmresists Expired - Lifetime DE60140931D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000248502A JP4495841B2 (ja) 2000-08-18 2000-08-18 ドライフィルムレジスト用ポリエステルフィルム
JP2000248503A JP2002062661A (ja) 2000-08-18 2000-08-18 ドライフィルムレジスト用ポリエステルフィルム
PCT/JP2001/007043 WO2002016466A1 (fr) 2000-08-18 2001-08-15 Film de polyester servant de support a un vernis isolant sec

Publications (1)

Publication Number Publication Date
DE60140931D1 true DE60140931D1 (de) 2010-02-11

Family

ID=26598090

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60140931T Expired - Lifetime DE60140931D1 (de) 2000-08-18 2001-08-15 Polyesterfilm als träger eines trockenfilmresists

Country Status (6)

Country Link
US (1) US6733873B2 (de)
EP (1) EP1266923B2 (de)
KR (1) KR100789687B1 (de)
DE (1) DE60140931D1 (de)
TW (1) TWI235112B (de)
WO (1) WO2002016466A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003191384A (ja) * 2001-12-26 2003-07-08 Mitsubishi Polyester Film Copp 離型フィルム用ポリエステルフィルム
CN1531481A (zh) * 2001-12-28 2004-09-22 帝人杜邦菲林日本株式会社 层合膜
KR20050109447A (ko) * 2003-03-25 2005-11-21 데이진 듀폰 필름 가부시키가이샤 대전 방지성 적층 폴리에스테르 필름
JP4734237B2 (ja) * 2004-06-17 2011-07-27 帝人デュポンフィルム株式会社 反射板用積層フィルムの製造方法
JP2006169467A (ja) * 2004-12-20 2006-06-29 Mitsubishi Polyester Film Copp 光学用ポリエステルフィルム
US8557950B2 (en) 2005-06-16 2013-10-15 Grupo Petrotemex, S.A. De C.V. High intrinsic viscosity melt phase polyester polymers with acceptable acetaldehyde generation rates
US9267007B2 (en) * 2005-09-16 2016-02-23 Grupo Petrotemex, S.A. De C.V. Method for addition of additives into a polymer melt
US7932345B2 (en) 2005-09-16 2011-04-26 Grupo Petrotemex, S.A. De C.V. Aluminum containing polyester polymers having low acetaldehyde generation rates
US8431202B2 (en) 2005-09-16 2013-04-30 Grupo Petrotemex, S.A. De C.V. Aluminum/alkaline or alkali/titanium containing polyesters having improved reheat, color and clarity
US7838596B2 (en) * 2005-09-16 2010-11-23 Eastman Chemical Company Late addition to effect compositional modifications in condensation polymers
US7655746B2 (en) * 2005-09-16 2010-02-02 Eastman Chemical Company Phosphorus containing compounds for reducing acetaldehyde in polyesters polymers
KR100778268B1 (ko) * 2005-12-13 2007-11-28 삼성전기주식회사 전도성 포토레지스트 필름 및 기판 제조방법
US7709595B2 (en) * 2006-07-28 2010-05-04 Eastman Chemical Company Non-precipitating alkali/alkaline earth metal and aluminum solutions made with polyhydroxyl ether solvents
US20080027207A1 (en) * 2006-07-28 2008-01-31 Jason Christopher Jenkins Non-precipitating alkali/alkaline earth metal and aluminum compositions made with mono-ol ether solvents
US7709593B2 (en) * 2006-07-28 2010-05-04 Eastman Chemical Company Multiple feeds of catalyst metals to a polyester production process
US7745368B2 (en) * 2006-07-28 2010-06-29 Eastman Chemical Company Non-precipitating alkali/alkaline earth metal and aluminum compositions made with organic hydroxyacids
US8901272B2 (en) * 2007-02-02 2014-12-02 Grupo Petrotemex, S.A. De C.V. Polyester polymers with low acetaldehyde generation rates and high vinyl ends concentration
TWI408044B (zh) * 2010-12-31 2013-09-11 Shinkong Materials Technology Corp 多功能聚酯薄膜及其製造方法
US9149955B2 (en) * 2011-12-29 2015-10-06 Toray Plastics (America), Inc. Process for recycling immiscibles in PET film
CN112969743B (zh) * 2018-11-07 2024-01-26 东洋纺株式会社 双轴取向聚酯薄膜和其制造方法
JP7186920B2 (ja) * 2020-03-31 2022-12-09 太陽インキ製造株式会社 構造体

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE536161A (de) † 1954-03-02
GB911245A (en) † 1960-02-11 1962-11-21 Ici Ltd Manufacture of filament and film-forming polyesters
NL121071C (de) † 1964-03-03
DE1815942A1 (de) † 1968-12-20 1970-07-02 Bayer Ag Loesliche Germaniumkatalysatoren fuer die Herstellung von hochmolekularen,linearen Polyestern
JPS6085925A (ja) † 1983-10-18 1985-05-15 Toyobo Co Ltd 高透明ポリエステルフイルム
JPS6178829A (ja) † 1984-09-27 1986-04-22 Teijin Ltd 曇りのないポリエステルの製造法
DE69220423T2 (de) * 1991-07-25 1997-11-27 Toray Industries Polyestermischung, Verfahren zu ihrer Herstellung und daraus geformter Film
JP3789144B2 (ja) 1994-06-14 2006-06-21 三菱化学ポリエステルフィルム株式会社 フォトレジスト用積層ポリエステルフィルム
US5789528A (en) 1995-12-08 1998-08-04 Akzo Nobel Nv Process for the preparation of polyesters and copolyesters
KR0150344B1 (ko) 1995-12-21 1998-10-01 이웅열 감광성 수지 조성물
US5707782A (en) 1996-03-01 1998-01-13 The Board Of Trustees Of The University Of Illinois Photoimageable, dielectric, crosslinkable copolyesters
EP0906356B1 (de) † 1996-06-11 2004-11-10 Dupont Teijin Films U.S. Limited Partnership Verfahren zur Herstellung eines Polyesterpolymers
TW339313B (en) * 1996-08-07 1998-09-01 Teijin Ltd Photoresist layer supporting polyester flm and photoresist film laminate
KR100200244B1 (ko) 1996-12-02 1999-06-15 구광시 드라이 필름 포토레지스터용 폴리에스테르 필름의 제조방법
TR199902814T2 (xx) * 1997-06-10 2000-02-21 Akzo Nobel N.V. Poliesterlerin ve kopoliesterlerin �retilmesi i�in bir i�lem
KR100247706B1 (ko) * 1997-11-07 2000-06-01 구광시 드라이 필름 포토레지스트
EP1071722A1 (de) 1998-04-17 2001-01-31 E.I. Du Pont De Nemours And Company Poly(alkylenarylate) mit optischen eigenschaften
JP2000094507A (ja) * 1998-09-25 2000-04-04 Teijin Ltd ポリエステルフィルム
JP4269389B2 (ja) † 1999-02-01 2009-05-27 東洋紡績株式会社 極細線用フォトレジスト用ポリエステルフィルム
JP2000255015A (ja) 1999-03-10 2000-09-19 Mitsubishi Polyester Film Copp ドライフィルムレジスト用カバーフィルム

Also Published As

Publication number Publication date
WO2002016466A9 (fr) 2002-05-02
EP1266923A4 (de) 2003-02-12
TWI235112B (en) 2005-07-01
EP1266923B1 (de) 2009-12-30
WO2002016466A1 (fr) 2002-02-28
US20020197496A1 (en) 2002-12-26
KR100789687B1 (ko) 2008-01-02
US6733873B2 (en) 2004-05-11
KR20020039691A (ko) 2002-05-27
EP1266923B2 (de) 2014-07-09
EP1266923A1 (de) 2002-12-18

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Legal Events

Date Code Title Description
8363 Opposition against the patent