DE60034096D1 - Balgdämpfer für Druckschwingungen in einer Faltenbalgpumpe - Google Patents

Balgdämpfer für Druckschwingungen in einer Faltenbalgpumpe

Info

Publication number
DE60034096D1
DE60034096D1 DE60034096T DE60034096T DE60034096D1 DE 60034096 D1 DE60034096 D1 DE 60034096D1 DE 60034096 T DE60034096 T DE 60034096T DE 60034096 T DE60034096 T DE 60034096T DE 60034096 D1 DE60034096 D1 DE 60034096D1
Authority
DE
Germany
Prior art keywords
bellows
damper
pressure oscillations
pump
bellows pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60034096T
Other languages
English (en)
Other versions
DE60034096T2 (de
Inventor
Kiyoshi Nishio
Ryo Imanishi
Yoji Minato
Masayoshi Katsura
Hitoshi Kawamura
Makoto Fuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Application granted granted Critical
Publication of DE60034096D1 publication Critical patent/DE60034096D1/de
Publication of DE60034096T2 publication Critical patent/DE60034096T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B11/00—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation
    • F04B11/0008—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using accumulators
    • F04B11/0016—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using accumulators with a fluid spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0027—Pulsation and noise damping means
    • F04B39/0055—Pulsation and noise damping means with a special shape of fluid passage, e.g. bends, throttles, diameter changes, pipes
    • F04B39/0061—Pulsation and noise damping means with a special shape of fluid passage, e.g. bends, throttles, diameter changes, pipes using muffler volumes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
    • F04B9/123—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having only one pumping chamber
    • F04B9/125—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having only one pumping chamber reciprocating movement of the pumping member being obtained by a double-acting elastic-fluid motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE60034096T 1999-10-25 2000-10-13 Balgdämpfer für Druckschwingungen in einer Faltenbalgpumpe Expired - Lifetime DE60034096T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30248599A JP3205909B2 (ja) 1999-10-25 1999-10-25 脈動低減装置付きポンプ
JP30248599 1999-10-25

Publications (2)

Publication Number Publication Date
DE60034096D1 true DE60034096D1 (de) 2007-05-10
DE60034096T2 DE60034096T2 (de) 2007-12-06

Family

ID=17909533

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034096T Expired - Lifetime DE60034096T2 (de) 1999-10-25 2000-10-13 Balgdämpfer für Druckschwingungen in einer Faltenbalgpumpe

Country Status (6)

Country Link
US (1) US6364640B1 (de)
EP (1) EP1096147B1 (de)
JP (1) JP3205909B2 (de)
KR (1) KR100358965B1 (de)
DE (1) DE60034096T2 (de)
TW (1) TW508408B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3845544B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3761754B2 (ja) * 1999-11-29 2006-03-29 日本ピラー工業株式会社 ポンプ、アキュムレータ等の流体機器
JP3610272B2 (ja) * 1999-11-29 2005-01-12 日本ピラー工業株式会社 ベローズを有する流体機器
TW200415310A (en) * 2002-12-03 2004-08-16 Nippon Pillar Packing A pump
JP3874416B2 (ja) 2003-05-02 2007-01-31 日本ピラー工業株式会社 往復動ポンプ
JP5116153B2 (ja) * 2008-03-20 2013-01-09 Ｎｏｋ株式会社 ベローズ式アキュムレータ
JP4982515B2 (ja) 2009-02-24 2012-07-25 日本ピラー工業株式会社 ベローズポンプ
JP5062910B2 (ja) * 2009-07-29 2012-10-31 日本ピラー工業株式会社 ベローズポンプ
KR101295374B1 (ko) * 2011-06-01 2013-08-12 한국수력원자력 주식회사 황-요오드 수소생산공정용 황산용액 이송장치
US9010353B2 (en) 2011-08-04 2015-04-21 Weatherford Technology Holdings, Llc Gas lift valve having edge-welded bellows and captive sliding seal
TWI452207B (zh) * 2012-01-12 2014-09-11 Hong Kel Trading Co Ltd 往復式泵浦
DE102012102700A1 (de) * 2012-03-29 2013-10-02 Elringklinger Ag Dichtungsanordnung
JP6353732B2 (ja) 2014-08-04 2018-07-04 日本ピラー工業株式会社 ベローズポンプ装置
WO2016057797A1 (en) 2014-10-08 2016-04-14 Air Products And Chemicals, Inc. Low pressure fluctuation flow control apparatus and method
JP6362535B2 (ja) 2014-12-25 2018-07-25 日本ピラー工業株式会社 ベローズポンプ装置
GB201601194D0 (en) 2016-01-22 2016-03-09 Carlisle Fluid Tech Inc Active surge chamber
KR101733634B1 (ko) 2017-02-24 2017-05-08 주식회사 이노디스 벨로우즈 펌프
NO20171100A1 (en) * 2017-07-04 2019-01-07 Rsm Imagineering As A dual-acting pressure boosting liquid partition device, system, fleet and use
NO344401B1 (en) * 2017-07-04 2019-11-25 Rsm Imagineering As Method, system and use, of controlling working range of a pump bellows
US11499543B2 (en) 2018-05-25 2022-11-15 Graco Minnesota Inc. Pneumatic surge suppressor
US11326425B2 (en) * 2020-03-17 2022-05-10 Silverwell Technology Ltd Pressure protection system for lift gas injection
CN114017575B (zh) * 2022-01-06 2022-05-20 智程半导体设备科技(昆山)有限公司 一种脉冲阻尼器及半导体设备

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1464024A (en) * 1974-09-13 1977-02-09 Pye Ltd Pulse dampers for liquid chromatography
US4177023A (en) * 1975-02-25 1979-12-04 Toyota Jidosha Kogyo Kabushiki Kaisha Pneumatic system for smoothing discharge pressure from air
US4523612A (en) * 1983-04-15 1985-06-18 The United States Of America As Represented By The United States Department Of Energy Apparatus and method for suppressing vibration and displacement of a bellows
US4537216A (en) * 1984-07-13 1985-08-27 Edwin Schwartz Anti-knock liquid flow control valve
JP2649091B2 (ja) * 1989-09-05 1997-09-03 株式会社 豊田中央研究所 高圧液体供給装置
JPH03179184A (ja) * 1989-12-05 1991-08-05 Nippon Pillar Packing Co Ltd 往復動ポンプ
US5129427A (en) * 1991-04-17 1992-07-14 The Aro Corporation Pulsation damper for a pumped liquid system
US5205326A (en) * 1991-08-23 1993-04-27 Hydraulic Power Systems, Inc. Pressure response type pulsation damper noise attenuator and accumulator
CA2158215A1 (en) * 1994-09-19 1996-03-20 Richard R. Larsen Pressure balanced bellows seal
JP3310566B2 (ja) * 1997-01-10 2002-08-05 日本ピラー工業株式会社 半導体製造装置用ポンプ
US5845621A (en) * 1997-06-19 1998-12-08 Siemens Automotive Corporation Bellows pressure pulsation damper
JPH11132130A (ja) * 1997-10-27 1999-05-18 Mitsubishi Electric Corp 筒内噴射用高圧燃料ポンプ
JP3471587B2 (ja) * 1997-10-27 2003-12-02 三菱電機株式会社 筒内噴射用高圧燃料ポンプ
JP3577580B2 (ja) * 1998-03-17 2004-10-13 東京エレクトロン株式会社 空気駆動式液体供給装置
US6095194A (en) * 1998-03-20 2000-08-01 Nippon Pillar Packaging Co., Ltd. Pulsation suppression device for a pump
US6322338B1 (en) * 1998-10-26 2001-11-27 Nippon Pillar Packing Co., Ltd. Pulsation damping device for a pump

Also Published As

Publication number Publication date
EP1096147B1 (de) 2007-03-28
DE60034096T2 (de) 2007-12-06
KR20010039937A (ko) 2001-05-15
TW508408B (en) 2002-11-01
JP2001123959A (ja) 2001-05-08
EP1096147A2 (de) 2001-05-02
KR100358965B1 (ko) 2002-10-31
US6364640B1 (en) 2002-04-02
JP3205909B2 (ja) 2001-09-04
EP1096147A3 (de) 2003-01-02

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Legal Events

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8364 No opposition during term of opposition