DE60013620D1 - Heizplatteneinheit - Google Patents

Heizplatteneinheit

Info

Publication number
DE60013620D1
DE60013620D1 DE60013620T DE60013620T DE60013620D1 DE 60013620 D1 DE60013620 D1 DE 60013620D1 DE 60013620 T DE60013620 T DE 60013620T DE 60013620 T DE60013620 T DE 60013620T DE 60013620 D1 DE60013620 D1 DE 60013620D1
Authority
DE
Germany
Prior art keywords
hot plate
heater
casing
opening portion
shaped member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60013620T
Other languages
English (en)
Other versions
DE60013620T2 (de
Inventor
Masakazu Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Publication of DE60013620D1 publication Critical patent/DE60013620D1/de
Application granted granted Critical
Publication of DE60013620T2 publication Critical patent/DE60013620T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lubricants (AREA)
  • Laminated Bodies (AREA)
DE60013620T 2000-06-02 2000-06-02 Heizplatteneinheit Expired - Lifetime DE60013620T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2000/003595 WO2001095379A1 (fr) 2000-06-02 2000-06-02 Plaque de cuisson

Publications (2)

Publication Number Publication Date
DE60013620D1 true DE60013620D1 (de) 2004-10-14
DE60013620T2 DE60013620T2 (de) 2005-02-03

Family

ID=11736107

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60013620T Expired - Lifetime DE60013620T2 (de) 2000-06-02 2000-06-02 Heizplatteneinheit

Country Status (5)

Country Link
US (1) US6756568B1 (de)
EP (2) EP1463097A1 (de)
AT (1) ATE275760T1 (de)
DE (1) DE60013620T2 (de)
WO (1) WO2001095379A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1550477A (zh) * 1999-09-06 2004-12-01 Ibiden股份有限公司 含碳的氮化铝烧结体，用于半导体制造/检测设备的基材
JP2001247382A (ja) * 2000-03-06 2001-09-11 Ibiden Co Ltd セラミック基板
JP3516392B2 (ja) * 2000-06-16 2004-04-05 イビデン株式会社 半導体製造・検査装置用ホットプレート
US20060088692A1 (en) * 2004-10-22 2006-04-27 Ibiden Co., Ltd. Ceramic plate for a semiconductor producing/examining device
JP5111876B2 (ja) * 2007-01-31 2013-01-09 東京エレクトロン株式会社 基板載置構造体及び基板処理装置
JP5524560B2 (ja) * 2009-10-01 2014-06-18 株式会社ブリヂストン ヒータユニット反射板および該反射板を備えたヒータユニット
DE102013113045A1 (de) * 2013-11-26 2015-05-28 Aixtron Se Heizvorrichtung
JP6847610B2 (ja) * 2016-09-14 2021-03-24 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2976386A (en) * 1958-03-31 1961-03-21 Lewis L Salton Electric food warmers
US3805024A (en) * 1973-06-18 1974-04-16 Irex Corp Electrical infrared heater with a coated silicon carbide emitter
US3987275A (en) * 1976-02-02 1976-10-19 General Electric Company Glass plate surface heating unit with sheathed heater
DE3527533A1 (de) * 1985-08-01 1987-02-12 Ego Elektro Blanc & Fischer Elektrokochplatte
JPS6296292A (ja) 1985-10-22 1987-05-02 三菱電機株式会社 ク−ラ−付エレベ−タの冷気流出防止装置
JPS63274768A (ja) 1987-05-06 1988-11-11 Tokuda Seisakusho Ltd 真空処理装置
DE3728466A1 (de) * 1987-08-26 1989-03-09 Ego Elektro Blanc & Fischer Kochgeraet
US5221829A (en) * 1990-10-15 1993-06-22 Shimon Yahav Domestic cooking apparatus
JP2617064B2 (ja) 1992-07-28 1997-06-04 日本碍子株式会社 半導体ウェハー加熱装置およびその製造方法
JP3165938B2 (ja) * 1993-06-24 2001-05-14 東京エレクトロン株式会社 ガス処理装置
JPH07111244A (ja) 1993-10-13 1995-04-25 Mitsubishi Electric Corp 気相結晶成長装置
DE9319245U1 (de) * 1993-12-15 1994-02-03 Bräuer, Dietmar, 78050 Villingen-Schwenningen Heizkörper, bestehend aus einem Grundmaterial mit sehr geringer Wärmeleitfähigkeit, mindestens einem vorzugsweis elektrischen Heizelement und Materialien zur Wärmedämmung und Wärmestrahlungsreflexion
JPH07280462A (ja) 1994-04-11 1995-10-27 Shin Etsu Chem Co Ltd 均熱セラミックスヒーター
JPH08176831A (ja) 1994-12-26 1996-07-09 Touyoko Kagaku Kk 高速熱処理成膜装置
JPH08274147A (ja) 1995-03-30 1996-10-18 Kyocera Corp ウェハ保持装置
JPH08222360A (ja) 1995-02-10 1996-08-30 Noboru Naruo 真空加熱兼冷却均熱ヒータ
US6002109A (en) 1995-07-10 1999-12-14 Mattson Technology, Inc. System and method for thermal processing of a semiconductor substrate
JP3338593B2 (ja) 1995-09-19 2002-10-28 日本碍子株式会社 半導体処理装置およびその製造方法
JP3423131B2 (ja) 1995-11-20 2003-07-07 東京エレクトロン株式会社 熱処理装置及び処理装置
KR100280634B1 (ko) * 1996-05-05 2001-02-01 세이이치로 미야타 전기 발열체 및 이를 이용한 정전 척
JPH11283729A (ja) * 1998-03-27 1999-10-15 Ibiden Co Ltd ホットプレートユニット

Also Published As

Publication number Publication date
ATE275760T1 (de) 2004-09-15
EP1463097A1 (de) 2004-09-29
WO2001095379A1 (fr) 2001-12-13
EP1220303B1 (de) 2004-09-08
EP1220303A1 (de) 2002-07-03
US6756568B1 (en) 2004-06-29
DE60013620T2 (de) 2005-02-03
EP1220303A4 (de) 2003-04-02

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Legal Events

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8364 No opposition during term of opposition