DE3888423D1 - Positionsfühler. - Google Patents
Positionsfühler.Info
- Publication number
- DE3888423D1 DE3888423D1 DE88105743T DE3888423T DE3888423D1 DE 3888423 D1 DE3888423 D1 DE 3888423D1 DE 88105743 T DE88105743 T DE 88105743T DE 3888423 T DE3888423 T DE 3888423T DE 3888423 D1 DE3888423 D1 DE 3888423D1
- Authority
- DE
- Germany
- Prior art keywords
- position sensor
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Automatic Focus Adjustment (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62196174A JPS6441805A (en) | 1987-08-07 | 1987-08-07 | Position detecting apparatus of two bodies, which are separated by minute distance |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3888423D1 true DE3888423D1 (de) | 1994-04-21 |
DE3888423T2 DE3888423T2 (de) | 1994-10-27 |
Family
ID=16353429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3888423T Expired - Fee Related DE3888423T2 (de) | 1987-08-07 | 1988-04-11 | Positionsfühler. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4918301A (de) |
EP (1) | EP0302178B1 (de) |
JP (1) | JPS6441805A (de) |
DE (1) | DE3888423T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0355496A3 (de) * | 1988-08-15 | 1990-10-10 | Sumitomo Heavy Industries Co., Ltd. | Positionsdetektor mit sektorieller fresnelscher Zonenplatte |
JP2699282B2 (ja) * | 1989-02-27 | 1998-01-19 | 住友重機械工業株式会社 | 色収差を利用した二重焦点検出装置 |
US5053628A (en) * | 1989-07-13 | 1991-10-01 | Matsushita Electric Industrial Co., Ltd. | Position signal producing apparatus for water alignment |
DE69013790T2 (de) * | 1989-08-04 | 1995-05-04 | Canon K.K., Tokio/Tokyo | Verfahren und Vorrichtung zur Positionsbestimmung. |
DE68923802T2 (de) * | 1989-12-28 | 1995-12-07 | Sumitomo Heavy Industries | Verfahren zur beleuchtung mit zusammengesetzten farben sowie beleuchtung in vorgegebener wellenlänge in einem doppelfokusdetektor unter verwendung chromatischer aberration. |
US7777870B2 (en) | 2006-12-12 | 2010-08-17 | Evident Technologies, Inc. | Method and system for the recognition of an optical signal |
US7804587B2 (en) | 2006-12-12 | 2010-09-28 | Evident Technologies, Inc. | System for the recognition of an optical signal and materials for use in such a system |
US8879058B2 (en) * | 2010-11-05 | 2014-11-04 | The University Of Ottawa | Miniaturized multimodal cars endoscope |
JP2012216728A (ja) * | 2011-04-01 | 2012-11-08 | V Technology Co Ltd | 露光装置のアライメント装置 |
JP5747306B2 (ja) * | 2011-05-23 | 2015-07-15 | 株式会社ブイ・テクノロジー | 露光装置のアライメント装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635066B2 (de) * | 1973-09-06 | 1981-08-14 | ||
US3990798A (en) * | 1975-03-07 | 1976-11-09 | Bell Telephone Laboratories, Incorporated | Method and apparatus for aligning mask and wafer |
JPS6042725A (ja) * | 1983-08-18 | 1985-03-07 | Olympus Optical Co Ltd | 焦点検出装置 |
US4650983A (en) * | 1983-11-07 | 1987-03-17 | Nippon Kogaku K. K. | Focusing apparatus for projection optical system |
DE3413374A1 (de) * | 1984-04-10 | 1985-10-17 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Optisches justierverfahren |
US4734570A (en) * | 1985-11-20 | 1988-03-29 | Olympus Optical Co., Ltd. | Active focus detecting device with infrared source |
JP2614843B2 (ja) * | 1985-12-02 | 1997-05-28 | オリンパス光学工業株式会社 | 自動焦点顕微鏡 |
JP2797250B2 (ja) * | 1987-05-14 | 1998-09-17 | 株式会社ニコン | 投影露光装置 |
-
1987
- 1987-08-07 JP JP62196174A patent/JPS6441805A/ja active Granted
-
1988
- 1988-04-11 EP EP88105743A patent/EP0302178B1/de not_active Expired - Lifetime
- 1988-04-11 DE DE3888423T patent/DE3888423T2/de not_active Expired - Fee Related
-
1989
- 1989-04-27 US US07/344,247 patent/US4918301A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3888423T2 (de) | 1994-10-27 |
US4918301A (en) | 1990-04-17 |
JPS6441805A (en) | 1989-02-14 |
EP0302178B1 (de) | 1994-03-16 |
EP0302178A3 (en) | 1989-11-23 |
EP0302178A2 (de) | 1989-02-08 |
JPH054601B2 (de) | 1993-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |