DE3878939D1 - Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer. - Google Patents

Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer.

Info

Publication number: DE3878939D1
Authority: DE; Germany
Prior art keywords: electron; dispersive system; dispersive; energy; focussing
Prior art date: 1987-01-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE8888100724T

Other languages

English (en)

Inventor

Harald Ibach

Heinz-Dieter Bruchmann

Sieghart Lehwald

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Forschungszentrum Juelich GmbH

Original Assignee

Forschungszentrum Juelich GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-01-30

Filing date

1988-01-20

Publication date

1993-04-15

1988-01-20 Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH

1988-01-20 Priority to DE8888100724T priority Critical patent/DE3878939D1/de

1993-04-15 Application granted granted Critical

1993-04-15 Publication of DE3878939D1 publication Critical patent/DE3878939D1/de

2008-01-21 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Electron Tubes For Measurement (AREA)

DE8888100724T 1987-01-30 1988-01-20 Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer. Expired - Lifetime DE3878939D1 (de)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
DE8888100724T DE3878939D1 (de)	1987-01-30	1988-01-20	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer.

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE19873702696 DE3702696A1 (de)	1987-01-30	1987-01-30	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer
DE8888100724T DE3878939D1 (de)	1987-01-30	1988-01-20	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer.

Publications (1)

Publication Number	Publication Date
DE3878939D1 true DE3878939D1 (de)	1993-04-15

Family

ID=6319818

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
DE19873702696 Withdrawn DE3702696A1 (de)	1987-01-30	1987-01-30	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer
DE8888100724T Expired - Lifetime DE3878939D1 (de)	1987-01-30	1988-01-20	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer.

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
DE19873702696 Withdrawn DE3702696A1 (de)	1987-01-30	1987-01-30	Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer

Country Status (4)

Country	Link
US (1)	US4845361A (de)
EP (1)	EP0276731B1 (de)
JP (1)	JP2529712B2 (de)
DE (2)	DE3702696A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE69027602T2 (de) *	1990-08-08	1997-01-23	Philips Electronics Nv	Energiefilter für Ladungsträgervorrichtung
JP2636113B2 (ja) *	1992-03-26	1997-07-30	広島大学長	帯域フィルター型逆光電子分光検出装置
US5466933A (en) *	1992-11-23	1995-11-14	Surface Interface, Inc.	Dual electron analyzer
DE19633496B4 (de) *	1996-08-20	2006-06-08	Ceos Corrected Electron Optical Systems Gmbh	Monchromator für die Elektronenoptik, insbesondere Elketronenmikroskopie
DE50015720D1 (de) *	2000-03-27	2009-10-01	Ellcie Maintenance Gmbh	Elektronenspektrometer mit Ablenkeinheit
KR20060088272A (ko) *	2005-02-01	2006-08-04	삼성전자주식회사	Ｘ-선 광전자 분광분석장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2856244A1 (de) *	1978-12-27	1980-07-03	Kernforschungsanlage Juelich	Elektronenstosspektrometer
US4742223A (en) *	1984-05-23	1988-05-03	Indiana University Foundation	High resolution particle spectrometer
US4559449A (en) *	1984-05-23	1985-12-17	Indiana University Foundation	High resolution particle spectrometer

1987
- 1987-01-30 DE DE19873702696 patent/DE3702696A1/de not_active Withdrawn
1988
- 1988-01-20 EP EP88100724A patent/EP0276731B1/de not_active Expired - Lifetime
- 1988-01-20 DE DE8888100724T patent/DE3878939D1/de not_active Expired - Lifetime
- 1988-01-27 JP JP63014812A patent/JP2529712B2/ja not_active Expired - Lifetime
- 1988-01-28 US US07/149,596 patent/US4845361A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE3702696A1 (de)	1988-08-11
EP0276731A3 (en)	1990-01-24
EP0276731B1 (de)	1993-03-10
US4845361A (en)	1989-07-04
JPS63276861A (ja)	1988-11-15
JP2529712B2 (ja)	1996-09-04
EP0276731A2 (de)	1988-08-03

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Legal Events

Date	Code	Title	Description
1994-04-07	8364	No opposition during term of opposition