DE3672819D1 - Vorrichtung und verfahren zum beschichten in einer vakuumkammer durch lichtbogendampfniederschlag. - Google Patents

Vorrichtung und verfahren zum beschichten in einer vakuumkammer durch lichtbogendampfniederschlag.

Info

Publication number
DE3672819D1
DE3672819D1 DE8686906177T DE3672819T DE3672819D1 DE 3672819 D1 DE3672819 D1 DE 3672819D1 DE 8686906177 T DE8686906177 T DE 8686906177T DE 3672819 T DE3672819 T DE 3672819T DE 3672819 D1 DE3672819 D1 DE 3672819D1
Authority
DE
Germany
Prior art keywords
coating
vacuum chamber
arc evaporation
evaporation
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686906177T
Other languages
English (en)
Inventor
Jiinjen Albert Sue
Henry Troue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27119860&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3672819(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of DE3672819D1 publication Critical patent/DE3672819D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE8686906177T 1985-09-30 1986-09-30 Vorrichtung und verfahren zum beschichten in einer vakuumkammer durch lichtbogendampfniederschlag. Expired - Lifetime DE3672819D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US78146085A 1985-09-30 1985-09-30
US90651486A 1986-09-12 1986-09-12
PCT/US1986/002030 WO1987002072A1 (en) 1985-09-30 1986-09-30 Apparatus and process for arc vapor depositing a coating in an evacuated chamber

Publications (1)

Publication Number Publication Date
DE3672819D1 true DE3672819D1 (de) 1990-08-23

Family

ID=27119860

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686906177T Expired - Lifetime DE3672819D1 (de) 1985-09-30 1986-09-30 Vorrichtung und verfahren zum beschichten in einer vakuumkammer durch lichtbogendampfniederschlag.

Country Status (5)

Country Link
EP (1) EP0238643B1 (de)
KR (1) KR910009841B1 (de)
AU (1) AU594979B2 (de)
DE (1) DE3672819D1 (de)
WO (1) WO1987002072A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8601824A (nl) * 1986-07-11 1988-02-01 Hauzer Holding Werkwijze en inrichting voor het met een geleidend plasmakanaal ontsteken van een boog.
DE3728420A1 (de) * 1987-08-26 1989-03-09 Detlev Dipl Phys Dr Repenning Verfahren zur herstellung von schichten mit hochharten und/oder reibarmen eigenschaften
EP0309733A1 (de) * 1987-09-26 1989-04-05 Detlev Dr. Repenning Verfahren zur Herstellung von wenigstens 2-komponentigen Schichten mit hochharten und/oder reibarmen Eigenschaften
DE3741127A1 (de) * 1987-12-04 1989-06-15 Repenning Detlev Verfahren zur herstellung waermestabiler schichten mit hochharten und/oder reibarmen eigenschaften
US4904528A (en) * 1987-12-24 1990-02-27 United Technologies Corporation Coated gas turbine engine compressor components
CS275226B2 (en) * 1989-09-13 1992-02-19 Fyzikalni Ustav Csav Method of arc discharge's cathode vaporization with cathode spots and macroparticles' reduced emission and device for realization of this method
ATE168819T1 (de) * 1991-03-25 1998-08-15 Commw Scient Ind Res Org Makroteilchenfilter in lichtbogenquelle
WO1992019785A1 (en) * 1991-04-29 1992-11-12 Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' Method and device for treatment of articles in gas-discharge plasma
WO1992019788A1 (en) * 1991-04-29 1992-11-12 Nauchno-Proizvodstvennoe Predpriyatie 'navatekh' Device for electric arc evaporation of metals
WO1992021787A1 (en) * 1991-05-31 1992-12-10 Kharkovsky Fiziko-Tekhnichesky Institut Method and device for thermochemical treatment of articles
GB9503305D0 (en) * 1995-02-20 1995-04-12 Univ Nanyang Filtered cathodic arc source
GB2360790A (en) * 2000-03-28 2001-10-03 Gehan Anil Joseph Amaratunga Low friction coatings produced by cathodic arc evaporation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3278407A (en) * 1963-06-26 1966-10-11 Ibm Deposition of thin film by sputtering
US3391071A (en) * 1963-07-22 1968-07-02 Bell Telephone Labor Inc Method of sputtering highly pure refractory metals in an anodically biased chamber
AU8288282A (en) * 1981-05-04 1982-11-11 Optical Coating Laboratory, Inc. Production and utilization of activated molecular beams
JPS58136775A (ja) * 1982-02-08 1983-08-13 Hitachi Ltd 蒸着方法及び装置
DE3326043A1 (de) * 1983-07-20 1985-02-07 Licentia Gmbh Verfahren zur herstellung eines aerosolstromes und dessen verwendung
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture

Also Published As

Publication number Publication date
AU594979B2 (en) 1990-03-22
EP0238643A1 (de) 1987-09-30
KR910009841B1 (ko) 1991-11-30
KR880700099A (ko) 1988-02-15
WO1987002072A1 (en) 1987-04-09
EP0238643B1 (de) 1990-07-18
AU6407086A (en) 1987-04-24

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee