DE3670513D1 - Verfahren zur herstellung eines einkristalls. - Google Patents

Verfahren zur herstellung eines einkristalls.

Info

Publication number
DE3670513D1
DE3670513D1 DE8686300926T DE3670513T DE3670513D1 DE 3670513 D1 DE3670513 D1 DE 3670513D1 DE 8686300926 T DE8686300926 T DE 8686300926T DE 3670513 T DE3670513 T DE 3670513T DE 3670513 D1 DE3670513 D1 DE 3670513D1
Authority
DE
Germany
Prior art keywords
producing
single crystal
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686300926T
Other languages
English (en)
Inventor
Kazutaka C O Patent Terashima
Syoichi C O Patent D Washizuka
Masayuki C O Patent D Watanabe
Johji C O Patent Divisi Nishio
Sadao C O Patent Divis Yoshiro
Masakatu C O Patent Div Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60026742A external-priority patent/JPH06102589B2/ja
Priority claimed from JP6446785A external-priority patent/JPS61222990A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3670513D1 publication Critical patent/DE3670513D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C30B15/305—Stirring of the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE8686300926T 1985-02-14 1986-02-11 Verfahren zur herstellung eines einkristalls. Expired - Lifetime DE3670513D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60026742A JPH06102589B2 (ja) 1985-02-14 1985-02-14 単結晶の製造方法及び製造装置
JP6446785A JPS61222990A (ja) 1985-03-28 1985-03-28 化合物半導体単結晶の製造装置

Publications (1)

Publication Number Publication Date
DE3670513D1 true DE3670513D1 (de) 1990-05-23

Family

ID=26364552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686300926T Expired - Lifetime DE3670513D1 (de) 1985-02-14 1986-02-11 Verfahren zur herstellung eines einkristalls.

Country Status (2)

Country Link
EP (1) EP0194051B1 (de)
DE (1) DE3670513D1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2561072B2 (ja) * 1986-04-30 1996-12-04 東芝セラミツクス株式会社 単結晶の育成方法及びその装置
JP2546736B2 (ja) * 1990-06-21 1996-10-23 信越半導体株式会社 シリコン単結晶引上方法
JP2767074B2 (ja) * 1990-07-13 1998-06-18 信越半導体 株式会社 シリコン単結晶の引上方法
US7291221B2 (en) * 2004-12-30 2007-11-06 Memc Electronic Materials, Inc. Electromagnetic pumping of liquid silicon in a crystal growing process
US7223304B2 (en) 2004-12-30 2007-05-29 Memc Electronic Materials, Inc. Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4606037A (en) * 1983-01-18 1986-08-12 Agency Of Industrial Science & Technology Apparatus for manufacturing semiconductor single crystal

Also Published As

Publication number Publication date
EP0194051A1 (de) 1986-09-10
EP0194051B1 (de) 1990-04-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee