DE3376357D1 - Detecting irregularities in a coating on a substrate - Google Patents

Detecting irregularities in a coating on a substrate

Info

Publication number
DE3376357D1
DE3376357D1 DE8383100170T DE3376357T DE3376357D1 DE 3376357 D1 DE3376357 D1 DE 3376357D1 DE 8383100170 T DE8383100170 T DE 8383100170T DE 3376357 T DE3376357 T DE 3376357T DE 3376357 D1 DE3376357 D1 DE 3376357D1
Authority
DE
Germany
Prior art keywords
coating
substrate
detecting irregularities
irregularities
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383100170T
Other languages
English (en)
Inventor
Frederich R Reich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Closures Co Ltd
Original Assignee
Japan Crown Cork Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Crown Cork Co Ltd filed Critical Japan Crown Cork Co Ltd
Application granted granted Critical
Publication of DE3376357D1 publication Critical patent/DE3376357D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1045—Spiral scan

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8383100170T 1982-01-11 1983-01-11 Detecting irregularities in a coating on a substrate Expired DE3376357D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/338,384 US4469442A (en) 1982-01-11 1982-01-11 Detecting irregularities in a coating on a substrate

Publications (1)

Publication Number Publication Date
DE3376357D1 true DE3376357D1 (en) 1988-05-26

Family

ID=23324611

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383100170T Expired DE3376357D1 (en) 1982-01-11 1983-01-11 Detecting irregularities in a coating on a substrate

Country Status (5)

Country Link
US (1) US4469442A (de)
EP (1) EP0083942B1 (de)
JP (1) JPS58122411A (de)
KR (1) KR860002073B1 (de)
DE (1) DE3376357D1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655599A (en) * 1982-11-15 1987-04-07 Canon Kabushiki Kaisha Mask aligner having a photo-mask setting device
US4671446A (en) * 1982-12-02 1987-06-09 Stanley Electric Company, Ltd. Method and system for automatically bonding a leadwire on a semiconductor
US4668860A (en) * 1985-10-09 1987-05-26 Optical Coating Laboratory, Inc. Scattermeter using polarized light to distinguish between bulk and surface scatter
DE3601939A1 (de) * 1986-01-23 1987-07-30 Licentia Gmbh Verfahren zum messen einer laufzeitleitung fuer hochfrequenzwellen
US4893932A (en) * 1986-05-02 1990-01-16 Particle Measuring Systems, Inc. Surface analysis system and method
JP2661913B2 (ja) * 1986-05-02 1997-10-08 パ−テイクル、メジユアリング、システムズ インコ−ポレ−テツド 表面分析方法および表面分析装置
US4731854A (en) * 1986-07-17 1988-03-15 Perceptics Corporation Optical system for producing an image for a set of characters
US4747684A (en) * 1986-09-30 1988-05-31 The United States Of America As Represented By The Secretary Of The Army Method of and apparatus for real-time crystallographic axis orientation determination
US5293538A (en) * 1990-05-25 1994-03-08 Hitachi, Ltd. Method and apparatus for the inspection of defects
US5149948A (en) * 1990-07-16 1992-09-22 Computer Identics Improved bar code reader system for reading bar codes under high specular reflection conditions with a variety of surface effects
JP3013519B2 (ja) * 1991-06-24 2000-02-28 キヤノン株式会社 薄膜構造の検査方法及び検査装置
JPH05106519A (ja) * 1991-10-18 1993-04-27 Kubota Corp 火花点火式エンジンでの排気ガス還流装置
CA2133307A1 (en) * 1992-04-24 1993-11-11 Lee H. Pearson Acousto-optic tunable filter-based surface scanning system and process
ES2076083B1 (es) * 1993-06-04 1996-06-01 Fuesca Sl Aparato y metodo de medida y control de la densidad de reticulacion de los tratamientos en caliente y frio del vidrio aligerado.
JP3386269B2 (ja) * 1995-01-25 2003-03-17 株式会社ニュークリエイション 光学検査装置
US6118525A (en) 1995-03-06 2000-09-12 Ade Optical Systems Corporation Wafer inspection system for distinguishing pits and particles
DE19741824C2 (de) * 1997-09-23 2002-05-29 Schott Glas Verfahren zur Überwachung des Aufbringens einer Innensilikonisierung bei einem transparenten Behältnis und zugehörige Vorrichtung
US6169601B1 (en) 1998-06-23 2001-01-02 Ade Optical Systems Method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light
US6630998B1 (en) 1998-08-13 2003-10-07 Acushnet Company Apparatus and method for automated game ball inspection
US6486946B1 (en) 1999-06-15 2002-11-26 Ade Corporation Method for discriminating between holes in and particles on a film covering a substrate
US6597454B1 (en) * 2000-05-12 2003-07-22 X-Rite, Incorporated Color measurement instrument capable of obtaining simultaneous polarized and nonpolarized data
US6615062B2 (en) * 2001-05-31 2003-09-02 Infraredx, Inc. Referencing optical catheters
JP2005283527A (ja) * 2004-03-31 2005-10-13 Hitachi High-Technologies Corp 異物検出装置
US7553449B2 (en) * 2004-09-21 2009-06-30 Exxonmobil Research & Engineering Company Method of determination of corrosion rate
JP2006128557A (ja) * 2004-11-01 2006-05-18 Topcon Corp レーザ結晶評価装置
US7586607B2 (en) 2006-04-21 2009-09-08 Rudolph Technologies, Inc. Polarization imaging
FR2903492B1 (fr) * 2006-07-07 2009-02-20 Centre Nat Rech Scient Dispositif d'evaluation de l'etat de mouillage d'une surface, procede d'evaluation et dispositif d'indication associe
WO2008033779A2 (en) * 2006-09-12 2008-03-20 Rudolph Technologies, Inc. Polarization imaging
KR100994392B1 (ko) * 2008-07-24 2010-11-16 가부시키가이샤 야마다케 엣지 검출 장치 및 엣지 검출 장치용 라인 센서
NL2004949A (en) * 2009-08-21 2011-02-22 Asml Netherlands Bv Inspection method and apparatus.
CN103884687B (zh) * 2014-03-28 2016-09-07 福建中烟工业有限责任公司 滤棒成型机热熔胶喷涂量的检测方法及装置
DE102014016679A1 (de) 2014-11-12 2016-05-12 Cl Schutzrechtsverwaltungs Gmbh Verfahren und Vorrichtung zur Belichtungssteuerung einer selektiven Lasersinter- oder Laserschmelzvorrichtung
US11752558B2 (en) 2021-04-16 2023-09-12 General Electric Company Detecting optical anomalies on optical elements used in an additive manufacturing machine

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2947212A (en) * 1956-04-30 1960-08-02 American Brass Co Method of detecting surface conditions of sheet metal
US3790286A (en) * 1972-04-21 1974-02-05 Phillips Petroleum Co Carbon black testing by analyzing non-specularly reflected polarized light
US3904293A (en) * 1973-12-06 1975-09-09 Sherman Gee Optical method for surface texture measurement
US4015127A (en) * 1975-10-30 1977-03-29 Aluminum Company Of America Monitoring film parameters using polarimetry of optical radiation
US4342515A (en) * 1978-01-27 1982-08-03 Hitachi, Ltd. Method of inspecting the surface of an object and apparatus therefor
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
US4381151A (en) * 1980-10-23 1983-04-26 The United States Of America As Represented By The Secretary Of The Air Force Hand-holdable contamination tester

Also Published As

Publication number Publication date
EP0083942A3 (en) 1984-05-09
KR840003359A (ko) 1984-08-20
JPS58122411A (ja) 1983-07-21
EP0083942B1 (de) 1988-04-20
EP0083942A2 (de) 1983-07-20
JPH0240961B2 (de) 1990-09-14
US4469442A (en) 1984-09-04
KR860002073B1 (ko) 1986-11-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee