DE102009000429B4 - Mikromechanische Vorrichtung und Herstellungsverfahren hierfür - Google Patents

Mikromechanische Vorrichtung und Herstellungsverfahren hierfür Download PDF

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Publication number
DE102009000429B4
DE102009000429B4 DE102009000429.7A DE102009000429A DE102009000429B4 DE 102009000429 B4 DE102009000429 B4 DE 102009000429B4 DE 102009000429 A DE102009000429 A DE 102009000429A DE 102009000429 B4 DE102009000429 B4 DE 102009000429B4
Authority
DE
Germany
Prior art keywords
movable element
layer
stop
knob
boundary surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102009000429.7A
Other languages
German (de)
English (en)
Other versions
DE102009000429A1 (de
Inventor
Johannes Classen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102009000429.7A priority Critical patent/DE102009000429B4/de
Priority to ITMI2010A000069A priority patent/IT1397894B1/it
Priority to CN201010103994.1A priority patent/CN101786591B/zh
Publication of DE102009000429A1 publication Critical patent/DE102009000429A1/de
Application granted granted Critical
Publication of DE102009000429B4 publication Critical patent/DE102009000429B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
DE102009000429.7A 2009-01-27 2009-01-27 Mikromechanische Vorrichtung und Herstellungsverfahren hierfür Expired - Fee Related DE102009000429B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102009000429.7A DE102009000429B4 (de) 2009-01-27 2009-01-27 Mikromechanische Vorrichtung und Herstellungsverfahren hierfür
ITMI2010A000069A IT1397894B1 (it) 2009-01-27 2010-01-21 Dispositivo micromeccanico e procedimento per la produzione dello stesso
CN201010103994.1A CN101786591B (zh) 2009-01-27 2010-01-27 微机械装置及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009000429.7A DE102009000429B4 (de) 2009-01-27 2009-01-27 Mikromechanische Vorrichtung und Herstellungsverfahren hierfür

Publications (2)

Publication Number Publication Date
DE102009000429A1 DE102009000429A1 (de) 2010-07-29
DE102009000429B4 true DE102009000429B4 (de) 2021-01-28

Family

ID=42282422

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009000429.7A Expired - Fee Related DE102009000429B4 (de) 2009-01-27 2009-01-27 Mikromechanische Vorrichtung und Herstellungsverfahren hierfür

Country Status (3)

Country Link
CN (1) CN101786591B (it)
DE (1) DE102009000429B4 (it)
IT (1) IT1397894B1 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6343994B2 (ja) 2014-03-25 2018-06-20 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
CN107328954B (zh) * 2017-07-25 2019-12-31 西安交通大学 一种多级台阶高过载谐振式加速度计芯片
CN112551474B (zh) * 2020-12-09 2022-05-24 北京航天控制仪器研究所 一种具有面内止挡的mems可动结构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19539049A1 (de) * 1995-10-20 1997-04-24 Bosch Gmbh Robert Verfahren zur Herstellung eines Coriolis-Drehratensensors
DE19949605A1 (de) * 1999-10-15 2001-04-19 Bosch Gmbh Robert Beschleunigungssensor
DE19930779B4 (de) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Mikromechanisches Bauelement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005054143A1 (de) * 2005-11-14 2007-05-16 Bosch Gmbh Robert Beschleunigungssensor
DE102007002273A1 (de) * 2007-01-16 2008-07-17 Robert Bosch Gmbh Verfahren zur Herstellung eines Bauteils und Sensorelement
CN101279713B (zh) * 2008-03-31 2011-09-14 清华大学 一种制备悬浮式微硅静电陀螺/加速度计敏感结构的方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19539049A1 (de) * 1995-10-20 1997-04-24 Bosch Gmbh Robert Verfahren zur Herstellung eines Coriolis-Drehratensensors
DE19930779B4 (de) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Mikromechanisches Bauelement
DE19949605A1 (de) * 1999-10-15 2001-04-19 Bosch Gmbh Robert Beschleunigungssensor

Also Published As

Publication number Publication date
CN101786591A (zh) 2010-07-28
ITMI20100069A1 (it) 2010-07-28
DE102009000429A1 (de) 2010-07-29
CN101786591B (zh) 2016-01-27
IT1397894B1 (it) 2013-02-04

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R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee