CN85100507B

CN85100507B - Modifed lead barium sodium niobate piezoelectric ceramic material

Info

Publication number: CN85100507B
Application number: CN85100507A
Authority: CN
Inventors: 过蝶农; 郭演仪; 邹怿如; 张秀春
Original assignee: Shanghai Institute of Ceramics of CAS
Current assignee: Shanghai Institute of Ceramics of CAS
Priority date: 1985-04-01
Filing date: 1985-04-01
Publication date: 1987-11-11
Also published as: CN85100507A

Abstract

The present invention belongs to a tungsten bronze type modified lead barium sodium niobate piezoelectric ceramic material. A chemical formula of the material is as follows: (Ba1-x Pbx) 4+that/2+n/2 (Na1-yLiy) 2-that Nb10-etaMetaO30, wherein M is a tetravalent metallic element, such as Zr, Ti, etc., which are Nb elements in a replacing part, x is equal to 0.5 to 0.9, y is equal to 0.03 to 0.05, theta is equal to 0 to 1.5, and eta is equal to 0.1 to 2. A component which is preferentially recommended to contain 26% to 36% of PbO (weight), and 1% to 3% of Na-(2) O, Li-(2) O (weight). The material has the characteristics of simple manufacturing process, good repeatability, high coercive field and strong and high capacity of alternate current resistance and depolarization. The varying linearity of the displacement of the material following voltage is good and fundamentally returns to zero. The material is suitable for a piezoelectric micro potentiometer with high precision.

Description

Modifed lead barium sodium niobate piezoelectric ceramic material

The invention relates to tungsten bronze type modification niobium acid lead titanate sodium piezoelectric stupalith.

Utilize piezoceramic material can produce the characteristic of certain displacement corresponding to a certain impressed voltage, can make electric micro positioner, as the fine motion control of laser mirror, laser interferometer, automatically controlled distorting lens, the driving mechanism that large-scale integrated circuit is used the exposure machine micro displacement workbench.Yet, the relation of displacement and voltage is different because of the piezoceramic material prescription, " soft " material that displacement is bigger in general, the phenomenon that displacement lags behind voltage is serious, displacement is the two-valued function of voltage, form a loop line that does not seal, thereby same magnitude of voltage correspondence different displacements, displacement did not return zero when voltage returned zero.United States Patent (USP) 4,263,527th adopts the method that changes pilot circuit to reduce lag-effect, rather than sets about from improving the stupalith prescription.The method of this pilot circuit often causes complex structure though can reach the purpose that reduces to lag behind, and brings and makes complexity, and problems such as use inconvenience also increase the cost of manufacturing; Less " rigid " material of another kind of displacement though the displacement hysteresis is less, still forms less loop line, has influenced the use in the high precision field.

The objective of the invention is to set about providing a kind of displacement to be linear substantially with voltage change from improving the piezoelectric ceramics prescription, it is very little to lag behind, and displacement in time, the strength of electric field variation is all stablized and manufacturing process is simple, " rigid " piezoceramic material of good reproducibility.

Piezoceramic material provided by the invention, chemical formula is

Wherein M represents the tetravalent metal element, as Zr, Ti etc.

x＝0.5～0.9，y＝0.03～0.5，θ＝0～1.5。η＝0.1～2。

Crystalline structure belongs to tungsten bronze type, be characterized in lead tolerance than lead zirconate-titanate ceramic few half, during sintering without any need for preventing plumbous evaporable measure.

Piezoceramic material manufacturing process provided by the invention is simple, after partly replacing Nb with metallic elements such as Zr, Ti, can enlarge sintering range and dense sintering (can than the low about 100 ℃ of sintering temperatures of general Pb-based lanthanumdoped zirconate titanates) at a lower temperature.The preferential composition of recommending of the present invention is PbO26～36%(weight), Na ₂O and Li ₂O1～3%(weight), MO ₂1～5%(weight).

Material coercive field strength provided by the invention, room temperature can reach 1800V/mm, though the polarization condition harshness, after polarization fully, anti-interchange depolarize ability is also strong, room temperature is 800V/mm in the time of 150 ℃ greater than 1000V/mm.Its dielectric coefficient ε ^T ₃₅Be 1100, tg δ 0.5% and also change with temperature, strength of electric field more smooth, K _p=0.34, K ₁=0.44, d ₃₃180 * 10 ^-12M/V is rigid piezoelectric.

Advantage of the present invention is that the displacement of material is linear substantially with the variation of voltage, as shown in Figure 1.X-coordinate is a voltage among the figure, ordinate zou is displacement, frequency 0.01Hz/S, when figure can find out that voltage returns zero, displacement also returned zero substantially, to the collinear maximum deviation in 1～2%, returning the general piezoelectric ceramics of zero problem is greatly improved, response is fast, creep is little, even strength of electric field is also stable up to the 1600V/mm displacement, is suitable as the high precision piezoelectric actuator.The piezoelectric actuator driving exposure machine micro displacement workbench displacement sensitivity made from it can reach 0.04 μ m, bearing accuracy ± 0.02 μ m, and reproducibility error is less than 0.01 μ m.

Embodiments of the invention are to contain PbO35.12%(weight), BaO6.03%(weight), Na ₂O and Li ₂O1.91%(weight), MO ₂1.75%(weight), all the other compositions are Nb ₂O ₃By said components batching, the alcohol wet mixing is after 10～15 hours, the infrared lamp oven dry, and it is synthetic to sieve, and synthesis condition is 800 ℃, carries out levigate compressing tablet again, can burn till under 1190 ℃.

Claims

1, a kind of piezoceramic material that belongs to the tungsten bronze type Modifed lead barium sodium niobate is by PbO-BaO-Na ₂O-Li ₂O-Nb ₂O ₅-TiO ₂/ ZrO ₂Deng becoming to be grouped into, it is characterized in that:

(1) chemical formula is:

Wherein M is Zr, Ti tetravalent metal element, replaces part Nb element;

x＝0.5～0.9，y＝0.03～0.5，θ＝0～1.5。η＝0.1～2

(2) the preferential PbO content of recommending is 26～36%(weight); Na ₂O and Li ₂The total content of O is 1～3%(weight); MO ₂Content be 1～5%(weight).