JPH0551222A - Piezoelectric porcelain material - Google Patents
Piezoelectric porcelain materialInfo
- Publication number
- JPH0551222A JPH0551222A JP3065881A JP6588191A JPH0551222A JP H0551222 A JPH0551222 A JP H0551222A JP 3065881 A JP3065881 A JP 3065881A JP 6588191 A JP6588191 A JP 6588191A JP H0551222 A JPH0551222 A JP H0551222A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- nio
- porcelain
- sb2o3
- dielectric loss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は圧電磁器材料、より詳細
には圧電振動子あるいはフィルタ用として使用され、特
に超音波振動子、超音波モータ用材料として適した圧電
磁器材料に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric ceramic material, and more particularly to a piezoelectric ceramic material used as a piezoelectric vibrator or a filter, and particularly suitable as a material for ultrasonic vibrators and ultrasonic motors.
【0002】[0002]
【従来の技術及び発明が解決しようとする課題】ジルコ
ン酸チタン酸鉛(Pb(Ti,Zr)O3 )は従来より圧電磁器材
料として広く知られている磁器組成物である。この化合
物はPbを含むため、焼成の際にPbが蒸発する等の製造上
の問題はあるが、圧電性が大きいこと、使用可能温度が
高いこと、更には第3成分を置換あるいは添加すること
により変化に富んだ磁器が得られること等の利点があ
り、このことから圧電ブザー、周波数フィルタ、着火素
子等の材料に利用されてきた。BACKGROUND OF THE INVENTION Lead zirconate titanate (Pb (Ti, Zr) O 3 ) is a porcelain composition which has been widely known as a piezoelectric ceramic material. Since this compound contains Pb, there are manufacturing problems such as Pb evaporating during firing, but the piezoelectricity is large, the usable temperature is high, and the third component must be replaced or added. This has the advantage that porcelain with a great variety can be obtained, and for this reason it has been used as a material for piezoelectric buzzers, frequency filters, ignition elements and the like.
【0003】またメカトロニクスの発展とともに、応答
性が良く、緻密な制御が可能な変位素子の必要性が高ま
っており、これに圧電歪を利用した駆動用素子の使用が
試みられている。Further, with the development of mechatronics, there is an increasing need for a displacement element having good response and capable of precise control, and use of a driving element utilizing piezoelectric strain has been attempted.
【0004】近年、エレクトロニクス等種々の分野で汚
染の低減に対する要求が増大しており、各製造工程にお
ける洗浄品質が生産性及び製品の品質を左右するように
なってきていることから、駆動用素子の一例である超音
波モータを使用した超音波洗浄器が製造設備の一つとし
て重要な役割を果たしている。これら超音波利用機器に
は、通常圧電磁器材料を利用した超音波振動子が用いら
れているが、超音波振動子としては一般に振動振幅が大
きく、発熱の小さいことが要求される。このような特性
を得るためには、圧電磁器材料として圧電定数、機械的
品質係数が大きく、誘電体損失が小さいことが必要とな
る。In recent years, there has been an increasing demand for reduction of pollution in various fields such as electronics, and the cleaning quality in each manufacturing process has come to influence the productivity and the quality of the product. An ultrasonic cleaning device using an ultrasonic motor, which is an example of the above, plays an important role as one of manufacturing facilities. An ultrasonic vibrator using a piezoelectric ceramic material is usually used in these ultrasonic utilizing devices, but the ultrasonic vibrator is generally required to have a large vibration amplitude and a small heat generation. In order to obtain such characteristics, it is necessary for the piezoelectric ceramic material to have a large piezoelectric constant and mechanical quality factor and a small dielectric loss.
【0005】しかし、従来の材料のうち、例えば特公昭
47−43513号公報、特公昭48−12355号公
報によって知られているPb(Mn1/3Sb2/3)O3-PbTiO3-PbZr
O3は機械的品質係数、圧電定数を大きくすることが可能
であるが、誘電体損失が大きい。また、特公昭55−1
8059号公報に示されたPb(SnaSb1-a)O3-PbTiO3-PbZr
O3は誘電体損失は小さいが圧電定数を大きくすることが
できない。従って、例えば上記した圧電磁器材料を超音
波洗浄器等の振動子として使用した場合、大きな振動が
得られず、また発熱も大きくなるというように、機械的
品質係数、圧電定数、誘電体損失のいづれかが所望の値
を得られないという課題があった。However, among conventional materials, for example, Pb (Mn 1/3 Sb 2/3 ) O 3 -PbTiO 3 -PbZr known from Japanese Patent Publication No. 47-43513 and Japanese Patent Publication No. 48-12355.
O 3 can increase the mechanical quality factor and the piezoelectric constant, but has a large dielectric loss. In addition,
Pb (Sn a Sb 1-a ) O 3 -PbTiO 3 -PbZr disclosed in Japanese Patent No. 8059
O 3 has a small dielectric loss but cannot increase the piezoelectric constant. Therefore, for example, when the above-mentioned piezoelectric ceramic material is used as a vibrator of an ultrasonic cleaner, large vibration cannot be obtained and heat generation also becomes large, such as mechanical quality factor, piezoelectric constant, and dielectric loss. There is a problem that either one cannot obtain a desired value.
【0006】本発明はこのような課題に鑑み発明された
ものであって、超音波振動子として使用した場合に、大
きな振動を得ることができ、しかも発熱の少ない圧電磁
器材料、すなわち、機械的品質係数、圧電定数及び誘電
体損失のすべてが一定の水準以上である圧電磁器材料を
提供することを目的としている。The present invention has been invented in view of the above problems, and when it is used as an ultrasonic vibrator, it is possible to obtain a large vibration and to generate a small amount of heat. It is an object of the present invention to provide a piezoelectric ceramic material whose quality coefficient, piezoelectric constant and dielectric loss are all above a certain level.
【0007】[0007]
【課題を解決するための手段】上記目的を達成するため
に本発明に係る圧電磁器材料は、組成式がaPbTiO3−b
PbZrO3(ただしa+b=100、43≦a≦53)で表
わされ、かつPbの10atm%以下がSr、Ca、Baのうち
の1種以上で置換されている磁器組成物100molに
対し、MnO2が0.1〜5mol、NiO が0.1〜5mo
l、Sb2O3 が0.05〜2.5molの割合で添加され
ていることを特徴としている。In order to achieve the above object, the piezoelectric ceramic material according to the present invention has a composition formula of aPbTiO 3 -b.
PbZrO 3 (provided that a + b = 100, 43 ≦ a ≦ 53), and 10 atm% or less of Pb is replaced with one or more of Sr, Ca, and Ba to porcelain composition 100 mol, MnO 2 is 0.1 to 5 mol, NiO is 0.1 to 5 mol
1 and Sb 2 O 3 are added at a ratio of 0.05 to 2.5 mol.
【0008】[0008]
【作用】上記した構成によれば、組成式がaPbTiO3−b
PbZrO3(ただしa+b=100、43≦a≦53)で表
わされ、かつPbの10atm%以下がSr、Ca、Baのうち
の1種以上で置換されている磁器組成物100molに
対し、MnO2が0.1〜5mol、NiO が0.1〜5mo
l、Sb2O3 が0.05〜2.5molの割合で添加され
ていることにより、圧電定数、機械的品質係数がともに
大きく、誘電体損失が小さくなり、超音波振動子として
使用した場合には少ない発熱量で大きな振動が得られ
る。According to the above construction, the composition formula is aPbTiO 3 -b
PbZrO 3 (provided that a + b = 100, 43 ≦ a ≦ 53), and 10 atm% or less of Pb is replaced with one or more of Sr, Ca, and Ba to porcelain composition 100 mol, MnO 2 is 0.1 to 5 mol, NiO is 0.1 to 5 mol
l and Sb 2 O 3 are added in a proportion of 0.05 to 2.5 mol, the piezoelectric constant and mechanical quality coefficient are both large, the dielectric loss is small, and when used as an ultrasonic transducer A large amount of vibration can be obtained with a small amount of heat generation.
【0009】なお、各成分の組成範囲を上記範囲に限定
したのは、Pbの10atm%以下をSr、Ca、Baで置換す
ると圧電定数を大きくすることができるが、10atm
%を越えると圧電定数はかえって小さくなるためであ
る。The composition range of each component is limited to the above range because the piezoelectric constant can be increased by substituting 10 atm% or less of Pb with Sr, Ca and Ba, but 10 atm.
This is because if it exceeds%, the piezoelectric constant becomes rather small.
【0010】また、MnO2は機械的品質定数を高め、誘電
体損失を小さくするのに有効であるが、0.1〜5mo
l%の範囲を越えると所望の効果が得られない。Further, MnO 2 is effective in increasing the mechanical quality constant and reducing the dielectric loss, but it is 0.1-5 mo.
If it exceeds the range of 1%, the desired effect cannot be obtained.
【0011】さらに、NiO2は圧電定数を高める効果があ
るが、0.1mol%以下ではその効果が小さく、5m
ol%を越えると圧電定数は高い値が得られるが誘電体
損失が大きくなってしまう。Further, NiO 2 has an effect of increasing the piezoelectric constant, but if it is 0.1 mol% or less, the effect is small and it is 5 m.
When it exceeds ol%, a high piezoelectric constant can be obtained, but the dielectric loss becomes large.
【0012】またSb2O3 は誘電体損失を小さくするのに
有効であるが、0.05mol%以下ではその効果が得
られず、2.5mol%を越えると誘電体損失はかえっ
て大きくなる。Sb 2 O 3 is effective in reducing the dielectric loss, but if it is less than 0.05 mol%, the effect cannot be obtained, and if it exceeds 2.5 mol%, the dielectric loss becomes rather large.
【0013】[0013]
【実施例及び比較例】以下本発明に係る圧電磁器材料の
実施例及び比較例を説明する。原料としてPbO 、ZrO2、
TiO2、SrCO3 、CaCO3 、BaCO3 、MnO2、NiO 、Sb2O3を
用いた。なお原料はこれらに限られず最終的に上記の酸
化物になるものであれば他の化合物を使用することがで
きる。これら原料を表1に示した組成となるように秤量
し、ボールミルを用いて十分に混合した。混合した原料
を800〜1100℃の温度範囲で約2時間仮焼し、こ
の仮焼物を再びボールミルにて粉砕した。この粉末に適
量の有機バインダを加え、造粒した後、この造粒粉を約
1000kg/cm2の圧力で直径20mm、厚さ1.5mmの円
板形状にに成形し、これを1200〜1300℃の温度
範囲で約2時間焼成して焼結体を得た。そしてこの円板
状の焼結体の表裏面に銀電極を蒸着により作成し、10
0℃のシリコンオイル中で2〜3kV/mmの直流電圧
を印加して分極処理を行なった。このようにして得られ
た磁器の圧電特性を表1に示す。EXAMPLES AND COMPARATIVE EXAMPLES Examples and comparative examples of piezoelectric ceramic materials according to the present invention will be described below. PbO, ZrO 2 as raw materials,
TiO 2 , SrCO 3 , CaCO 3 , BaCO 3 , MnO 2 , NiO and Sb 2 O 3 were used. The raw materials are not limited to these, and other compounds can be used as long as they finally become the above oxides. These raw materials were weighed so as to have the composition shown in Table 1 and sufficiently mixed using a ball mill. The mixed raw materials were calcined in the temperature range of 800 to 1100 ° C. for about 2 hours, and the calcined product was pulverized again by the ball mill. After adding an appropriate amount of an organic binder to this powder and granulating, the granulated powder is molded into a disc shape having a diameter of 20 mm and a thickness of 1.5 mm at a pressure of about 1000 kg / cm 2 , and this is formed into 1200 to 1300. A sintered body was obtained by firing in the temperature range of ° C for about 2 hours. Then, silver electrodes were formed on the front and back surfaces of this disk-shaped sintered body by vapor deposition, and 10
Polarization was performed by applying a DC voltage of 2 to 3 kV / mm in 0 ° C. silicon oil. Table 1 shows the piezoelectric characteristics of the porcelain thus obtained.
【0014】[0014]
【表1】 [Table 1]
【0015】[0015]
【表1の2】 [Table 1-2]
【0016】なお、表1中*印のものは本発明の範囲外
のものを示し、それ以外はすべて本発明の範囲内のもの
を示している。In Table 1, the items marked with * indicate those outside the scope of the present invention, and all other items indicate those within the scope of the present invention.
【0017】表1より明らかなように、本発明の範囲内
のものはすべての特性において十分満足のできる結果が
得られた。一方比較例において、試料番号1及び5のも
のはPbTiO3の割合が低く、圧電定数が小さくなった。ま
た試料番号8及び12のものはPbの置換量が大きく、圧
電定数、機械的品質定数及び誘電体損失のすべてにおい
て、満足の行く結果が得られなかった。また試料番号1
3のものはMnO2が全く含まれておらず、機械的品質定数
が小さくなり、誘電体損失が大きくなった。また試料番
号16のものはMnO2の含有量が多く、圧電定数、機械的
品質定数及び誘電体損失のすべてにおいて、満足の行く
結果が得られなかった。また試料番号17のものはNiO
が全く含まれておらず、圧電定数が小さくなった。また
試料番号20のものはNiO の含有量が多く、機械的品質
定数が小さくなり、誘電体損失が大きくなった。また試
料番号21のものはSb2O3 が全く含まれておらず、機械
的品質定数が小さくなり、誘電体損失が大きくなった。
また試料番号24のものはSb2O3 の含有量が大きく、機
械的品質定数が小さくなり、誘電体損失が大きくなっ
た。このように、上記実施例に係る圧電磁器材料におい
ては、圧電定数、機械的品質係数がともに大きく、誘電
体損失が小さいため、超音波振動子として使用した場合
には、少ない発熱量で大きな振動を得ることができる。
従って超音波振動子、超音波モータ等の材料として幅広
く利用することが可能となる。As is apparent from Table 1, those within the scope of the present invention have sufficiently satisfactory results in all characteristics. On the other hand, in Comparative Examples, Sample Nos. 1 and 5 had a low PbTiO 3 ratio and a small piezoelectric constant. Further, in the samples Nos. 8 and 12, the Pb substitution amount was large, and satisfactory results were not obtained in all of the piezoelectric constant, mechanical quality constant and dielectric loss. Sample number 1
No. 3 did not contain MnO 2 at all, the mechanical quality constant was small, and the dielectric loss was large. Further, the sample No. 16 had a large MnO 2 content, and satisfactory results could not be obtained in all of the piezoelectric constant, mechanical quality constant and dielectric loss. Sample No. 17 is NiO
Is not included at all, and the piezoelectric constant is reduced. The sample No. 20 had a large NiO content, a small mechanical quality constant, and a large dielectric loss. The sample No. 21 did not contain Sb 2 O 3 at all, the mechanical quality constant was small, and the dielectric loss was large.
The sample No. 24 had a large Sb 2 O 3 content, a small mechanical quality constant, and a large dielectric loss. As described above, in the piezoelectric ceramic materials according to the above-mentioned examples, since both the piezoelectric constant and the mechanical quality factor are large and the dielectric loss is small, when used as an ultrasonic vibrator, a large amount of heat is generated with a small amount of heat generation. Can be obtained.
Therefore, it can be widely used as a material for ultrasonic transducers, ultrasonic motors, and the like.
【0018】[0018]
【発明の効果】以上詳述したように本発明に係る圧電磁
器材料にあっては、組成式がaPbTiO3−bPbZrO3(ただ
しa+b=100、43≦a≦53)で表わされ、かつ
Pbの10atm%以下がSr、Ca、Baのうちの1種以上で
置換されている磁器組成物100molに対し、MnO2が
0.1〜5mol、NiO が0.1〜5mol、Sb2O3 が
0.05〜2.5molの割合で添加されているので、
圧電定数、機械的品質係数がともに大きく、誘電体損失
が小さくなり、超音波振動子として使用した場合には、
少ない発熱量で大きな振動を得ることができる。従って
超音波振動子、超音波モータ等の材料として幅広く利用
することが可能となる。As described in detail above, in the piezoelectric ceramic material according to the present invention, the composition formula is represented by aPbTiO 3 -bPbZrO 3 (where a + b = 100, 43 ≦ a ≦ 53), and
0.1 to 5 mol of MnO 2 , 0.1 to 5 mol of NiO, and Sb 2 O 3 with respect to 100 mol of a porcelain composition in which 10 atm% or less of Pb is substituted with one or more of Sr, Ca, and Ba. Is added at a ratio of 0.05 to 2.5 mol,
Both piezoelectric constant and mechanical quality factor are large, dielectric loss is small, and when used as an ultrasonic transducer,
Large vibration can be obtained with a small amount of heat generation. Therefore, it can be widely used as a material for ultrasonic transducers, ultrasonic motors, and the like.
【0019】[0019]
Claims (1)
+b=100、43≦a≦53)で表わされ、かつPbの
10atm%以下がSr、Ca、Baのうちの1種以上で置換
されている磁器組成物100molに対し、MnO2が0.
1〜5mol、NiO が0.1〜5mol、Sb2O3 が0.
05〜2.5molの割合で添加されていることを特徴
とする%圧電磁器材料。1. The composition formula is aPbTiO 3 —bPbZrO 3 (where a
+ B = 100, 43 ≦ a ≦ 53), and 100 mol of the porcelain composition in which 10 atm% or less of Pb is replaced with one or more of Sr, Ca, and Ba, MnO 2 is 0.
1-5 mol, NiO 0.1-5 mol, Sb 2 O 3 0.
% Piezoelectric ceramic material, which is added in a proportion of 05 to 2.5 mol.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3065881A JPH0551222A (en) | 1991-03-29 | 1991-03-29 | Piezoelectric porcelain material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3065881A JPH0551222A (en) | 1991-03-29 | 1991-03-29 | Piezoelectric porcelain material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0551222A true JPH0551222A (en) | 1993-03-02 |
Family
ID=13299766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3065881A Pending JPH0551222A (en) | 1991-03-29 | 1991-03-29 | Piezoelectric porcelain material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0551222A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63175846A (en) * | 1987-01-16 | 1988-07-20 | Fuji Photo Film Co Ltd | Radiographic information recorder and reader |
JPS63212931A (en) * | 1987-03-02 | 1988-09-05 | Fuji Photo Film Co Ltd | Radiation image information recording and reading device |
EP2145697A2 (en) | 2008-05-19 | 2010-01-20 | Fujifilm Corporation | Ultrasonic probe, ultrasonic diagnostic apparatus and ultrasonic endoscopic apparatus |
CN102491750A (en) * | 2011-11-29 | 2012-06-13 | 佛山市亿强电子有限公司 | Piezoelectric ceramic for extrusion type igniter and preparation process of piezoelectric ceramic |
CN111747743A (en) * | 2020-06-12 | 2020-10-09 | 广州凯立达电子股份有限公司 | Spherical piezoelectric ceramic and preparation method thereof |
-
1991
- 1991-03-29 JP JP3065881A patent/JPH0551222A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63175846A (en) * | 1987-01-16 | 1988-07-20 | Fuji Photo Film Co Ltd | Radiographic information recorder and reader |
JPS63212931A (en) * | 1987-03-02 | 1988-09-05 | Fuji Photo Film Co Ltd | Radiation image information recording and reading device |
EP2145697A2 (en) | 2008-05-19 | 2010-01-20 | Fujifilm Corporation | Ultrasonic probe, ultrasonic diagnostic apparatus and ultrasonic endoscopic apparatus |
US8216142B2 (en) | 2008-05-19 | 2012-07-10 | Fujifilm Corporation | Ultrasonic probe, ultrasonic diagnostic apparatus and ultrasonic endoscopic apparatus |
CN102491750A (en) * | 2011-11-29 | 2012-06-13 | 佛山市亿强电子有限公司 | Piezoelectric ceramic for extrusion type igniter and preparation process of piezoelectric ceramic |
CN111747743A (en) * | 2020-06-12 | 2020-10-09 | 广州凯立达电子股份有限公司 | Spherical piezoelectric ceramic and preparation method thereof |
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