CN2832836Y - Anode metal plate structure for electrophoretic deposition - Google Patents

Anode metal plate structure for electrophoretic deposition Download PDF

Info

Publication number
CN2832836Y
CN2832836Y CN 200520110044 CN200520110044U CN2832836Y CN 2832836 Y CN2832836 Y CN 2832836Y CN 200520110044 CN200520110044 CN 200520110044 CN 200520110044 U CN200520110044 U CN 200520110044U CN 2832836 Y CN2832836 Y CN 2832836Y
Authority
CN
China
Prior art keywords
metal plate
anode metal
electrophoretic deposition
shielding layer
plate structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200520110044
Other languages
Chinese (zh)
Inventor
郑奎文
李裕安
萧俊彦
蔡金龙
李协恒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teco Electric and Machinery Co Ltd
Original Assignee
Teco Electric and Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teco Electric and Machinery Co Ltd filed Critical Teco Electric and Machinery Co Ltd
Priority to CN 200520110044 priority Critical patent/CN2832836Y/en
Application granted granted Critical
Publication of CN2832836Y publication Critical patent/CN2832836Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

The utility model relates to an anode metal plate structure for electrophoretic deposition. The anode metal plate structure for electrophoretic deposition uses a material not easy to generate electrochemical reaction in an electrophoretic process to be provided with a shielding layer on the surface of an anode metal plate through totem; the shielding layer corresponding to a cathode structure is hollowed out by the regions of the electronic emitting sources of carbon nanotubes to be carried out with electrophoretic deposition to form hollow holes, and other ineffective regions corresponding to the cathode structure are all shielded by the shielding layer. When the anode metal plate and the cathode structure are connected and embedded in an electrophoresis tank to be carried out with the electrophoretic deposition, the carbon nanotubes of the electrophoresis tank correspond to a cathode electrode layer of the cathode structure through the hollow holes of the shielding layer to form an electric field so as to deposit the electron emitting sources.

Description

A kind of anode metal plate structure that is used for electrophoretic deposition
Technical field
The utility model relates to a kind of anode metal plate structure that is used for electrophoretic deposition, relate in particular to and a kind ofly on the electrophoresis anode metal plate of electrophoretic deposition CNT (carbon nano-tube), be formed with shielding layer, the corresponding cathode construction of this shielding layer is desired to be hollow hole by the zone of electrophoretic deposition CNT (carbon nano-tube) formation electron emission source, and the CNT (carbon nano-tube) of electrophoresis chamber is passed through the hollow hole of this shielding layer corresponding to forming the anode metal plate of electric field with the deposition electron emission source on the cathode construction.
Background technology
Known three-electrode field transmitting display device, its structure mainly comprises anode construction and cathode construction, between anode construction and cathode construction, be provided with cover keep lever (spacer), provide the interval of vacuum area between anode construction and cathode construction and as the support between anode construction and cathode construction.This anode construction comprises anode substrate, anode electrode layer and fluorescent powder coating (phosphors layer); This cathode construction comprises cathode base, negative electrode layer, electron emission source layer, dielectric layer and gate layer; Wherein, this gate layer is provided potential difference to attract the electron ejection of electron emission source layer, the high-voltage that utilizes this anode electrode layer to provide so that the acceleration of electron beam to be provided, to make electronics have fluorescent powder coating on enough kinetic energy bump (impinge) anode construction to excite and makes it luminous.In view of the above, for electronics is moved in Field Emission Display, need indicating meter to be kept the following vacuum tightness of 10-5 holder (torr) at least with vacuum apparatus, make electronics obtain good mean free path (mean free path), should avoid the pollution in electron emission source and fluorescent material district simultaneously and poison.In addition, there are enough energy to remove to clash into fluorescent material, between two plates, appropriate gap need be arranged, make electronics have enough accelerating spaces to clash into fluorescent powder, reach and make the fluorescent material physical efficiency fully produce luminescent effect for making electronics.
Wherein, this electron emission source layer is main component with the CNT (carbon nano-tube).CNT (carbon nano-tube) (Carbonnanotubes) was proposed back (Nature 354,56 (1991)) from 1991 by Iijima, because it possesses high characteristic electron, was therefore used by multiple electronic package.CNT (carbon nano-tube) can have very high long-width ratio (aspect ratio), greater than more than 500; And high rigidity, its young's modulus is many more than 1000GPn, and the tip of CNT (carbon nano-tube) or fault location are exposing of atom level scale, more than these characteristics therefore be considered to a kind of ideal field electron emission source (electron fieldemitter) material, for example electron emission source on a kind of cathode construction of Field Emission Display.Because CNT (carbon nano-tube) possesses above-described physical property, therefore also can by multiple manufacturing process as, wire mark or thin film fabrication etc. uses at electronic package with totemization.
This cathode construction manufacture craft is that CNT (carbon nano-tube) is implemented to be produced on the negative electrode layer as the electronics material that rises.Its making method can be chemical vacuum deposition (CVD) on the negative electrode layer in this cathode pixels respectively direct growth CNT (carbon nano-tube), or on a kind of negative electrode layer that can photosensitive type CNT (carbon nano-tube) solution totemization be made in this pixel respectively, also can be spraying CNT (carbon nano-tube) solution collocation guard and make.But according to the electron emission source structure of above-mentioned three-electrode field transmitting display device, desire is with on the cathode electrode structure in each pixel of CNT (carbon nano-tube) enforcement making, above-mentioned respectively this making method still has the obstruction restriction of cost of manufacture and three-dimensional arrangement, and the homogeneity of especially large-sized electron emission source will more be difficult to realize.
Recent a kind of electrophoretic deposition EPD (Electrophoresis Deposition) technology is suggested successively, make " the nano structural material deposition method " that patent application discloses US2003/0102222A1 number as U.S.'s invention, this method is for to be formulated as the alcohols aaerosol solution with CNT (carbon nano-tube), and utilize magnesium, lanthanum, yttrium, aluminium plasma salt is as auxiliary salt (Charger), be made as electrophoresis solution, sedimentary cathode construction of desire and electrode are attached in this electrophoresis solution, utilize direct current or voltage of alternating current in solution, to form electric field, utilize auxiliary salt in solution, to be dissociated into ion with attached to the CNT (carbon nano-tube) powder, form electrophoresis moving (Electrophoresis force) by electric field, be deposited on special electrodes to assist CNT (carbon nano-tube); Thus can be on electrode with the CNT (carbon nano-tube) deposition patternsization, utilize above-mentioned electrophoretic deposition technique easily CNT (carbon nano-tube) to be deposited on the electrode layer, and can avoid because of the restriction of three-electrode field transmitting display device on cathode construction, so this technology extensively is used in the making on the cathode construction.
In known electrophoretic deposition technique; for CNT (carbon nano-tube) can only be deposited on the cathode construction; and be not deposited on the gate and cause gate and the conducting of cathodic electricity interpolar; be to form sacrifice layer or protective layer mostly at gate and dielectric layer; the cathode electrode layer region of desiring by totem is exposed; carry out electrophoretic deposition again, again this protective layer is removed afterwards, residual or cause conducting to remove CNT (carbon nano-tube) in the inessential zone.Another kind of known technology, go out to be willing to open designation as Japanese Patent Laid, the spy opens 2001-20093 (P2001-20093A), form projection at electrophoretic anode electrode corresponding to the specific region of negative electrode, owing to be provided with this projection, therefore pairing cathode electrode is cloudy to form specific electric field, and the CNT (carbon nano-tube) that helps in the solution is deposited in this specific region, and the CNT (carbon nano-tube) that is deposited is easy to cohesion and concentrates on the specific electrodes layer region.But the making processes of this Japanese Patent is complicated, and is unfavorable for the making and the trend of large size panel.
The utility model content
Main purpose of the present utility model is to solve the defective that exists in the above-mentioned prior art.The utility model redesigns the anode metal plate structure, make this anode metal plate simpler and easy, can realize with totemization the cathode construction sediment-filled phase with effect, make the demand that the electrophoretic deposition of cathode electronics emissive source is made for following large size and the high pixel of resolving.
To achieve these goals, a kind of anode metal plate structure that is used for electrophoretic deposition that the utility model provides includes: anode metal plate is formed on the lip-deep shielding layer of this anode metal plate.On this shielding layer, be formed with a plurality of hollow holes, this cathode construction be connected with anode metal plate finish after, utilize fixed mechanism that this cathode construction and anode metal plate are fixed, after allowing the shielding layer of cathode construction one side and anode metal plate keep secured in parallel distance, again this cathode construction and anode metal plate are inserted simultaneously the electrophoresis chamber of CNT (carbon nano-tube) solution, after applying electric field again, allow the CNT (carbon nano-tube) of this electrophoresis chamber pass through the hollow hole of this shielding layer corresponding to forming electric field on the negative electrode layer of cathode construction with the deposition electron emission source.
Because the shielding layer of anode metal plate of the present utility model can the making of yellow optical micro-image totem, therefore, can cooperate the change of cathode construction design at any time, changes corresponding displacement design.But also can make high shielding layer of resolving the small pixel totem.With respect to the protruding point-like anode plate structure in the known technology, but the utility model elasticity is used.In addition, because the cathode construction of the utility model anode metal plate correspondence does not have the zone of electron emission source, cover with shielding layer, make uncovered zone and corresponding cathode construction specific region formation electric field, therefore the formed electric field of pixel deposition is more concentrated, the sedimentary density of CNT (carbon nano-tube) powder that produces is higher, the carbon pipe deposition on cathode construction outside the pixel or residual less.
Description of drawings
Fig. 1 is the schematic side view of anode metal plate of the present utility model and shielding layer structure;
Fig. 2 is the stereoscopic synoptic diagram of Fig. 1;
Fig. 3 is cathode construction of the present utility model and anode metal plate connection diagram;
Fig. 4 for cathode construction of the present utility model with carry out the electrophoretic deposition technique synoptic diagram after anode metal plate is connected;
Fig. 5 finishes synoptic diagram for CNT (carbon nano-tube) electrophoretic deposition of the present utility model forms electron emission source.
In the accompanying drawing, the list of parts of each label representative is as follows:
1-anode metal plate 2-shielding layer 21-hollow hole 3-cathode construction 31-lead
4-iontophoretic electrode 41-negative electrode 42-anode 5-electrophoresis chamber 6-electron emission source
Embodiment
Relevant technology contents of the present utility model and detailed description, existing conjunction with figs. is described as follows:
Fig. 1 is the schematic side view of anode metal plate of the present utility model and shielding layer structure; Fig. 2 is the stereoscopic synoptic diagram of Fig. 1.As shown in Figure 1 and Figure 2: the utility model provides a kind of anode metal plate structure that is used for electrophoretic deposition, can be applicable to the electrophoresis anode metal plate structure of electrophoretic deposition CNT (carbon nano-tube), it makes simple, and can satisfy following large size and high making demand of resolving the electrophoretic deposition of the cathode electronics emissive source that pixel makes.
Anode metal plate 1 is a kind of platinum or metal titanium material that is difficult for producing electrochemical reaction in electrophoretic deposition process.
Shielding layer 2 is arranged on anode metal plate 1 surface, shielding layer 2 is a kind of totem setting, the negative electrode layer of its corresponding cathode construction (not shown) is desired to be hollow hole 21 by the zone of electrophoretic deposition CNT (carbon nano-tube) formation electron emission source, and all the other corresponding cathode construction inactive area all utilize shielding layer 2 to cover.Shielding layer 2 can constitute for a kind of high-molecular photosensitive material, and need not dissolve each other with electrophoresis solution, or further be that a kind of epoxy material constitutes, do not dissolve each other with the contained ethanol of electrophoresis solution, and consider part four oxygen ethyl silicon (TEOS) or the modulation of insulation material in light of actual conditions, shielding layer 2 can yellow optical micro-image manufacturing process be implemented to make on anode metal plate 1 surface.
Fig. 3, Fig. 4 carry out the electrophoretic deposition technique synoptic diagram after anode metal plate of the present utility model is connected and connects with cathode construction.As shown in Figure 3, Figure 4: when carrying out electrophoretic deposition, the negative electrode 41 of the lead 31 and the iontophoretic electrode (power supply unit) 4 of cathode construction 3 is connected, and the anode 42 of iontophoretic electrode 4 is connected with anode metal plate 1; Cathode construction 3 can be three extremely above Field Emission Displays.
Treat cathode construction 3 be connected with anode metal plate 1 finish after, utilize the fixed mechanism (not shown) that cathode construction 3 is fixing with anode metal plate 1, and after allowing the shielding layer 2 of cathode construction 3 one sides and anode metal plate 1 keep secured in parallel distance, again cathode construction 3 and anode metal plate 1 are inserted in the electrophoresis chamber 5 of CNT (carbon nano-tube) solution simultaneously, after applying electric field again, allow the CNT (carbon nano-tube) of electrophoresis chamber 5 pass through the hollow hole 21 of shielding layer 2 corresponding to forming electric field on the negative electrode layer of cathode construction 3 with deposition electron emission source 6 (as shown in Figure 5).
Because therefore the shielding layer 2 of anode metal plate 1 of the present utility model can cooperate the change of cathode construction 3 designs, and be easy to change the displacement design, and more can make high shielding layer 3 of resolving the small pixel totem at any time by the making of yellow optical micro-image totem.Because the zone of the cathode construction 3 no electron emission sources of anode metal plate 1 correspondence, cover with shielding layer 2, make uncovered zone and corresponding cathode construction 3 specific regions (forming the zone of electron emission source for the cathode electrode laminar surface) formation electric field, allow easily electrophoretic deposition in this specific region of CNT (carbon nano-tube), make it be easy to be deposited in this specific region.
The above only is a preferred embodiment of the present utility model, be not so promptly limit claim of the present utility model, the equivalent structure transformation that every utilization the utility model specification sheets and accompanying drawing content are done, directly or indirectly be used in other relevant technical field, all in like manner be included in the claim of the present utility model.

Claims (8)

1. an anode metal plate structure that is used for electrophoretic deposition is characterized in that, comprising:
Anode metal plate;
Be formed on the lip-deep shielding layer of described anode metal plate, on described shielding layer, be formed with a plurality of hollow holes.
2. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 1 is characterized in that described anode metal plate is a kind of metal sheet that is difficult for the material of generation electrochemical reaction in electrophoretic deposition process.
3. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 2 is characterized in that described material is a platinum.
4. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 2 is characterized in that described material is the metal titanium material.
5. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 1 is characterized in that described shielding layer is the shielding layer that a kind of high-molecular photosensitive material constitutes.
6. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 5 is characterized in that having any material in four oxygen ethyl silicon or the insulating material in the shielding layer of described high-molecular photosensitive material.
7. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 1 is characterized in that described shielding layer is the shielding layer that a kind of epoxy material constitutes.
8. a kind of anode metal plate structure that is used for electrophoretic deposition as claimed in claim 7 is characterized in that having any material in four oxygen ethyl silicon or the insulating material in the shielding layer of described use epoxy material.
CN 200520110044 2005-06-14 2005-06-14 Anode metal plate structure for electrophoretic deposition Expired - Fee Related CN2832836Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200520110044 CN2832836Y (en) 2005-06-14 2005-06-14 Anode metal plate structure for electrophoretic deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200520110044 CN2832836Y (en) 2005-06-14 2005-06-14 Anode metal plate structure for electrophoretic deposition

Publications (1)

Publication Number Publication Date
CN2832836Y true CN2832836Y (en) 2006-11-01

Family

ID=37197149

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200520110044 Expired - Fee Related CN2832836Y (en) 2005-06-14 2005-06-14 Anode metal plate structure for electrophoretic deposition

Country Status (1)

Country Link
CN (1) CN2832836Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946428A (en) * 2011-11-24 2014-07-23 德诺拉工业有限公司 Anodic structure for horizontal cells for processes of metal electrodeposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946428A (en) * 2011-11-24 2014-07-23 德诺拉工业有限公司 Anodic structure for horizontal cells for processes of metal electrodeposition

Similar Documents

Publication Publication Date Title
US6605894B2 (en) Field emission devices using carbon nanotubes and method thereof
CN1763885A (en) Electron emission device and fabricating method thereof
US20080238285A1 (en) Carbon nanotube field emitter and method for fabricating the same
WO2004114432A2 (en) Improved electrode and associated devices and methods
CN1737984B (en) Field emission device and field emission display using the same
CN1725416A (en) Field emission display device and preparation method thereof
CN2832836Y (en) Anode metal plate structure for electrophoretic deposition
US20060217025A1 (en) Method for enhancing homogeneity of carbon nanotube electron emission source made by electrophoresis deposition
CN101236872B (en) Making method for transmission array of field radiation cathode carbon nano pipe
KR20090031608A (en) Plasma film deposition system and method for producing film
US20060213774A1 (en) Method for enhancing homogeneity and effeciency of carbon nanotube electron emission source of field emission display
CN101017754A (en) A method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment
CN1834305A (en) Method of improving electronic emitting source uniform of nanotube carbon produced by electrophoretic deposition
CN1876898A (en) Electronic emission source preparation method by batch electrophoresis deposition of carbon nanotube
CN100530493C (en) Method for increasing electrophoresis deposition electronic emitting source service life and adhesion
CN101009186A (en) The method for making the carton nano tube electronic radiation source with the point matrix sequential electrophoresis sediment
US20070187246A1 (en) Method of manufacturing carbon nanotube electron field emitters by dot-matrix sequential electrophoretic deposition
JP5549028B2 (en) Method for producing flaky nanocarbon material, electron-emitting device, and surface-emitting device
CN100437881C (en) Method of inproving nano-carbon tube electronic emitting performance of field emitting display
CN101819913A (en) Front gate type field emission cathode structure with edge enhancement effect and preparation method thereof
TWI277996B (en) Field emission display device structure with reflection layer and gate electrode
US20070164657A1 (en) Method of manufacturing electron emission device, electron emission device manufactured using the method, and backlight unit and electron emission display device employing electron emission device
CN100437880C (en) Cathode plate of nanometer carbon tube field effect transmissive display device and production of display device
US20100207923A1 (en) Microplasma current switch
CN101009187A (en) The method for making the carton nano tube electronic radiation source with the point matrix sequential electrophoresis sediment

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20061101