CN101017754A - A method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment - Google Patents
A method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment Download PDFInfo
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- CN101017754A CN101017754A CN 200610007362 CN200610007362A CN101017754A CN 101017754 A CN101017754 A CN 101017754A CN 200610007362 CN200610007362 CN 200610007362 CN 200610007362 A CN200610007362 A CN 200610007362A CN 101017754 A CN101017754 A CN 101017754A
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Abstract
The preparation method for nano carbon pipe electron emission source by electrophoresis depositing in proper sequence forms electric field only on cathode plate with multiple cathode electrodes and depositing positions for the emission source, and varies in proper sequence to form potential difference between cathode electrode and anode plate. This invention realizes electrophoresis depositment for all pixels on cathode plate.
Description
Technical field
The present invention relates to a kind of on the cathode electrode of Field Emission Display the deposition technique of electrophoresis carbon nano-tube, be particularly related to a kind of under the situation that must deposit (as glass dust or conductive powder bodies) such as interpolation particles except carbon nano-tube simultaneously, can improve the method for complexity electrophoresis solution with the electrophoresis that carries out uniform deposition, and in ethanol class solution a kind of safer electrophoresis mode during the electrophoretic deposition carbon nano-tube.
Background technology
Thereby Field Emission Display of the present invention is a kind of electric field that utilizes makes cathode electronics emission source (Cathode electron emitter) produce electronics, fluorescent powder by described electron excitation positive plate, it is luminous to make fluorescent powder produce photon, the characteristics of this display are that big I light, thin, effectively display area size is made according to manufacturing process and product demand, in addition, its visual angle problem that does not have flat liquid crystal display and had.
A kind of traditional three-electrode field transmitting display device, its structure mainly comprises positive plate and minus plate, be provided with eyelid retractor (spacer) between this positive plate and the minus plate, as the interval of vacuum area between positive plate and minus plate and as the support between positive plate and minus plate, this positive plate comprises anode substrate, anode conductive layer and fluorescent powder coating (phosphors layer); This minus plate then comprises cathode base, cathode conductive layer, electron emission source layer, dielectric layer and grid layer; Wherein provide potential difference on this grid layer so that electron emission source layer emitting electrons, by the high voltage that anode conductive layer provided, electron beam is quickened, thus make electronics that enough kinetic energy bumps (impinge) be arranged the fluorescent powder coating on the positive plate is so that thus it excites luminous.Therefore, in Field Emission Display, move, need to use vacuum equipment that the vacuum degree of display is remained at least 10 in order to make electronics
-5Below the holder (torr),, should avoid the pollution in electron emission source and fluorescent material district simultaneously and poison so that electronics has enough mean free paths (mean free path).In addition, have enough energy with bump fluorescent material, between two plates, need appropriate gap, make electronics have enough accelerating spaces to clash into fluorescent powder, so that the fluorescent material physical efficiency fully produces luminescent effect for making electronics.
Wherein so-called electron emission source layer is a main component with carbon nano-tube (Carbon nanotubes), (Nature 354 by the Iijima proposition from 1991 for carbon nano-tube, 56 (1991)) possess high characteristic electron after, it is used by multiple electronic building brick.Carbon nano-tube can have very high depth-to-width ratio (aspect ratio), its depth-to-width ratio is greater than more than 500, and has high rigidity, its young's modulus is many more than 1000GPn, and the tip of carbon nano-tube or fault location are exposing of atom magnitude, because it has above these characteristics, therefore be considered to a kind of desirable field electron emission source (electron field emitter) material, for example be used for the electron emission source on a kind of minus plate of Field Emission Display.Because carbon nano-tube possesses above-described physical characteristic, therefore also can be designed to multiple manufacturing process, as wire mark or film manufacturing process etc., to be used for the Butut electronic building brick.
And so-called minus plate manufacturing technology, be that carbon nano-tube is risen material on cathode conductive layer as electronics, its manufacture method is included in the chemical vapor deposition (CVD) method of direct growth carbon nano-tube on the interior negative electrode layer of each cathode pixels, or the method on a kind of cathode conductive layer that photosensitive type carbon nano-tube solution totemization can be made in each pixel, it also can be the method that spraying carbon nano-tube solution collocation guard is made, but according to the electron emission source structure of above-mentioned three-electrode field transmitting display device, carbon nano-tube to be made on the cathode electrode structure in each pixel, above-mentioned several manufacture method all is subjected to the restriction of cost of manufacture and stereochemical structure obstruction, especially for large-sized electron emission source, its uniformity will more be difficult to realize.
A kind of so-called electrophoretic deposition EPD (ElectrophoresisDeposition) technology has been proposed recently successively, open as the application for a patent for invention of the US2003/0102222 U.S., this invention is that carbon nano-tube is formulated as the alcohols aaerosol solution, and utilize magnesium, lanthanum, yttrium, aluminium plasma salt is as auxiliary salt (Charger), be made into electrophoresis solution, with cathode electrode substrate to be deposited, link to each other with electrode and be positioned in this electrophoresis solution, by providing direct current or alternating voltage in solution, to form electric field, the auxiliary salt ion that ionization goes out in solution is attached on the carbon nanotube dust, it forms electrophoretic force by electric field, to assist carbon nano-tube to be deposited on specific electroplax, the carbon nano-tube one patterned can be deposited on the electrode thus, utilize above-mentioned electrophoretic deposition technique, can simply carbon nano-tube be deposited on the electrode layer, and can avoid the restriction structurally of three-electrode field transmitting display device cathode construction, so present technique has been widely used in the minus plate structure fabrication.
In addition, the past inventor once proposed to improve by the pulsed electrophoretic deposition technique uniformity of electrophoretic deposition carbon nano-tube, can improve the carbon nano-tube deposition in the unit are greatly and have the advantage that may be implemented in aqueous solution.But, have following shortcoming with present pulsed electrophoretic deposition technique:
1, comprehensively moving the suspension for the carbon pipe in the increasingly sophisticated electrophoresis solution of composition of electrophoresis is distributed with physically restriction, especially for the adhesive force that increases the carbon pipe or conductivity etc., can in solution, add some specified particles to increase the effect that electron emission source is made, therefore it is difficult keeping the suspension characteristic of these particles in solution, even some particle distributes for specific electric field and also has high sensitiveness or selectivity, thereby make the concentration that is deposited on panel or thickness that difference in the distribution be arranged, especially more obvious for large size panel.
Though 2 pulseds have its effect for the water-based electrophoresis solution, but because carbon current supervisor mode sample is complicated, some is applicable to that the carbon pipe of use for field emission has high selectivity for solution in addition, still have most carbon pipe to have splendid dispersing characteristic to be used for non-aqueous solution (as ethanolic solution) to it, but if select for use pulsed electrophoresis mode to have since the electrophoresis area more greatly electric current easily cause the danger of ethanolic solution burning.
3, the distribution of impedance of minus plate electrode is subject to the distributional difference of electrode length, cause the difference of impedance on the electrode, especially big panel length electrode is obvious especially, cause electrode one end higher electric current can be arranged near a side of power supply supply, the deposition of bigger concentration causes electrophoretic deposition effect inequality.
Summary of the invention
Main purpose of the present invention is bigger in order to change traditional electric current with the use that exists in the directly corresponding electrophoretic techniques of anode and cathode panel large tracts of land, corresponding deposition is also disperseed, and especially will present the moving inhomogeneity shortcoming that causes deposition efficiency to disperse the influence deposition such as the electrophoresis that does not wait when the particle that is deposited in advance in the electrophoresis liquid is complicated.Therefore, the invention provides a kind of positive plate, only single cathode electrode is carried out electrophoretic deposition at electrophoresis process, thereby described electrode is formed reducing-pitch thread concentrate the electric field effect, make in the deposition process between only single cathode electrode and positive plate corresponding unit are dwindle concentrated electric current, utilizing electrophoresis to move impels the complicated particle set in the solution to be deposited on the electrode, change the cathode electrode corresponding in proper order with positive plate, make electrophoretic deposition one by one corresponding to electrode in proper order to reach the purpose of comprehensive electrophoretic deposition.
For achieving the above object, the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment of the present invention comprises:
The anode tap of power supply device is connected in positive plate, and cathode terminal is connected in the input of a plurality of control units, the output of a plurality of control units is connected on a plurality of cathode electrodes of minus plate, the signal generation unit is connected in the input of a plurality of control units again;
The electrophoresis solution of modulated electrophoretic groove inside, then minus plate and positive plate being parallel is seated in the electrophoresis tank accordingly, anode tap by power supply device provides voltage on positive plate, the signal generation unit will produce pulse signal and import one of them control unit with formula in proper order, perhaps the signal generation unit is imported a plurality of control units with the pulse signal that produces, formula control conducting is whether in proper order by control unit, make one of them cathode electrode of minus plate be "on" position, and all the other cathode electrodes are the no power state, thereby make only to have in the electrophoresis time and form potential difference generation electric field between a cathode electrode and positive plate, cathode electrode is prepared on the position that deposits electron emission source form carbon nano-tube, enter next cathode electrode energising in proper order, the cold state of all the other cathode electrodes is made with the circular sequence electrophoresis sediment of the carbon nano-pipe electronic emission source of finishing a plurality of cathode electrodes.
Description of drawings
Fig. 1 is a yin, yang pole plate schematic diagram of the present invention;
Fig. 2 is yin, yang pole plate of the present invention and electrophoresis equipment connection diagram;
Fig. 3 is a cathode and anode plate electrophoresis manufacturing process schematic diagram of the present invention;
Fig. 4 is that yin, yang pole plate of the present invention is connected simple and easy schematic diagram with electrophoresis equipment.
In the accompanying drawing, the list of parts of each label representative is as follows:
Minus plate ... ... ... .1
Cathode electrode ... ... ..11
Positive plate ... ... ... .2
Power supply device ... ... .3
Control unit ... ... ..4
The signal generation unit ... ... .5
Electrophoresis tank ... ... ... .6
Embodiment
About technology contents of the present invention and detailed description, existing accompanying drawings is as follows:
Fig. 1 and Fig. 2 are yin, yang pole plate of the present invention and the moon, pole plate and electrophoresis equipment connection diagram.As shown in the figure, the method of making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment of the present invention, mainly be to utilize in proper order that the formula electrophoretic deposition technique is assigned to electric current on a plurality of cathode electrodes of negative electrode panel in proper order, in electrophoretic deposition process, allow between cathode electrode and positive plate corresponding unit are dwindle, to concentrate electric current, allow and form electric field between single cathode electrode and positive plate, to make the carbon nano-pipe electronic emission source on the minus plate, the method can effectively reduce peak value (peak) electric current, and may be used in the large-area panel making.
Said method is when making, be to get minus plate 1 earlier, have a plurality of on the minus plate 1 or 32 cathode electrodes 11, these a plurality of cathode electrodes 11 are the semi-finished product structure of finishing grid and sacrifice layer making, it is sedimental residual that this sacrifice layer is used to protect the zone (as grid, dielectric layer etc.) that need not to carry out electrophoretic deposition can not produce, and treats the sacrifice layer stripping to be removed after electrophoretic deposition manufacturing process is finished again;
Get a positive plate 2 again, this positive plate 2 is by any formation of platinum, titanium panel or half tone;
The anode tap 31 of power supply device 3 is connected with positive plate 2, and the cathode terminal 32 of power supply device 3 is connected with the input of each control unit 4, and the output of control unit 4 is connected with each cathode electrode 11 of minus plate 1;
In addition, another input with control unit 4 is connected with signal generation unit 5 again, to finish the connection that electrophoretic deposition is made, wherein signal generation unit 5 provides signal in proper order for each cathode electrode 11, and be connected with cathode electrode 11 by a plurality of control units 4, control unit 4 is used to provide the state of cathode electrode 11 conductings or not conducting.Control unit 4 can be signal amplifier or switch, described signal amplifier can amplify the signal that signal generation unit 5 is exported or not amplify, thereby make 2 of cathode electrode 11 and positive plates form potential difference and produce electric field, on single cathode electrode 11, to make carbon nano-pipe electronic emission source.
Described switch is a time switch, this time switch will be counted one section ON time, the signal that signal generation unit 5 is produced is sent to cathode electrode 11, thereby make cathode electrode 11 form potential difference and produce electric field, on single cathode electrode 11, to make carbon nano-pipe electronic emission source with positive plate 2.When gate time then, the not conducting of described time switch, the next time switch conducting of conversion, thereby on cathode electrode, make carbon nano-pipe electronic emission source by this circular sequence electrophoresis sediment method.
Fig. 3 is the simple and easy schematic diagram that cathode and anode plate electrophoresis manufacturing process of the present invention and yin, yang pole plate are connected with electrophoresis equipment with Fig. 4.As shown in the figure, when minus plate 1, positive plate 2, power supply device 3, after control unit 4 and 5 connections of signal generation unit are finished, to carry out the electrophoresis solution modulation of electrophoresis tank 6 inside: with ethanol is solvent, the electron emission source material powder of electrophoresis adopts a kind of carbon nano-tube of making by arc discharge, its average carbon length of tube is below 5 μ m, average carbon pipe caliber is below 100nm, carbon nano tube structure for a kind of multiple wall, it adds weight concentration is 0.1%～0.005% (being preferably 0.02%), auxiliary salt is selected the burning salt that can have conductivity behind the electrophoresis for use, as inidum chloride, and indium nitrate, or other similar salt, it is the inidum chloride salt of 0.1%～0.005% (being preferably 0.01%) that the present invention selects weight concentration for use, and weight concentration increases the glass dust etc. of adhesive force at least in being used to more than 5%;
Perhaps, signal generation unit 5 produces signal and exports a plurality of signal amplifiers to, wherein first amplifier does not carry out the signal processing and amplifying, make first cathode electrode of minus plate 1 form low-potential state, this moment, remaining cathode electrode 11 formed high potential state (cathode electrode and anode electrode do not have potential difference), thereby therefore in electrophoresis time, make 2 of first cathode electrode 11 and positive plates form potential difference and produce electric field, cathode electrode 11 is prepared on the position that deposits electron emission sources form carbon nano-tube, and then carry out electrophoretic deposition to next cathode electrode 11 in proper order and make.
When control unit 4 is time switch, signal generation unit 5 produces the continuity square-wave signal and exports a plurality of time switchs to, first time switch conducting this moment, remaining not conducting of time switch, the square-wave signal that the time switch of conducting produces signal generation unit 5 puts on first cathode electrode 11, form "on" position on first cathode electrode 11 this moment, thereby therefore in electrophoresis time only first cathode electrode 11 form potential difference generation electric field with 2 of positive plates, cathode electrode 11 is prepared on the position that deposits electron emission sources form carbon nano-tube, when electrophoretic deposition is made, this first time switch is counted synchronously, after in case the gate time of first time switch arrives, this first time switch stops timing at once, and cut off the power supply state of first cathode electrode 11, enter second time switch conducting, the state of rest switch unit 4 not conductings, carry out the circular sequence electrophoresis sediment of next cathode electrode 11 by this mode in proper order and make, make with the electron emission source of finishing cathode electrode 11.
By above-mentioned explanation, the advantage of making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment method of the present invention as can be known is as follows:
1, can overcome the electrophoresis method that need deposit the complicated ingredient particle simultaneously, distributivity is good, and variant particle can more effective deposition.
2, the current density of unit electrophoresis generation area can improve.
3, large tracts of land electrophoretic current amount is big, use the consume of instrument and equipment design cost and electric weight to reduce, and the fail safe of operation improves.
The above is the preferred embodiments of the present invention only, is not to be used for limiting practical range of the present invention.Every equal variation and modification of being done in the present patent application claim includes in claim of the present invention.
Claims (18)
1. the method for a making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment comprises:
A) anode tap with power supply device is connected in positive plate, and cathode terminal is connected in the input of a plurality of control units, the output of described a plurality of control units is connected on a plurality of cathode electrodes of minus plate, the signal generation unit is connected in the input of described a plurality of control units again;
B) electrophoresis solution of modulated electrophoretic groove inside is parallel with the described positive plate of described minus plate and is seated in accordingly in the described electrophoresis tank;
C) anode tap by described power supply device provides voltage on described positive plate, described signal generation unit will produce pulse signal and import one of them control unit with formula in proper order, whether control conducting by described control unit, make one of them cathode electrode of described minus plate be "on" position, and all the other cathode electrodes are the no power state, form potential difference generation electric field between a cathode electrode and described positive plate thereby make only to have in the electrophoresis time, described cathode electrode is prepared on the position that deposits electron emission source form carbon nano-tube;
D) after above-mentioned (c) step is finished, enter the energising of next cathode electrode in proper order, the cold state of all the other cathode electrodes is made with the circular sequence electrophoresis sediment of the carbon nano-pipe electronic emission source of finishing a plurality of cathode electrodes.
2. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described power supply device provides direct current or dc pulse voltage for described positive plate, and voltage can be 100～300V, be preferably 120V, pulse frequency is 250Hz.
3. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described positive plate can be formed by any of platinum, titanium panel or half tone.
4. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described control unit can be amplifier or switch.
5. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 4, wherein, described switch is a time switch.
6. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1 wherein, has many cathode electrodes on the described minus plate.
7. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described cathode electrode is for having finished the semi-finished product structure that gate and sacrifice layer are made.
8. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 7, wherein, described sacrifice layer is used to protect the zone that need not to carry out electrophoretic deposition can not produce sedimental residual.
9. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 7 wherein, removes described sacrifice layer stripping behind the electrophoretic deposition processing procedure again.
10. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described minus plate is seated in the described electrophoresis tank so that the spacing of 3～5cm is parallel accordingly with described positive plate.
11. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described solution is solvent with ethanol, the electron emission source material powder of electrophoresis adopts a kind of carbon nano-tube of making by arc discharge, its average carbon length of tube is below 5 μ m, average carbon pipe caliber is a kind of carbon nano tube structure of multiple wall below 100nm, adding weight concentration is 0.1%～0.005%.
12. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 11, wherein, described interpolation weight concentration is preferably 0.02%.
13. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described solution also includes auxiliary salt, and described auxiliary salt is selected the burning salt that can have conductivity behind the electrophoresis for use.
14. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 13, wherein, described burning salt is inidum chloride and indium nitrate.
15. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 13, wherein, it is 0.1%～0.005% inidum chloride salt that described auxiliary salt is selected weight concentration for use, and adds weight concentration increases adhesive force in being used to more than 5% glass dust.
16. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 15, wherein, the weight concentration of described auxiliary salt is preferably 0.01%.
17. the method for making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment as claimed in claim 1, wherein, described signal generation unit produces the output of continuity square wave.
18. the method for a making carbon nano-pipe electronic emission source with circular sequence electrophoresis sediment includes:
A) anode tap with power supply device is connected in positive plate, cathode terminal is connected in the input of a plurality of control units, the output of described a plurality of control units is connected on a plurality of cathode electrodes of minus plate, the signal generation unit is connected in the input of described a plurality of control units again;
B) electrophoresis solution of modulated electrophoretic groove inside is parallel with described minus plate and described positive plate and is seated in accordingly in the described electrophoresis tank;
C) anode tap by described power supply device provides voltage on described positive plate, described signal generation unit is imported described a plurality of control unit with the pulse signal that produces, formula control conducting is whether in proper order by described control unit, make one of them cathode electrode of described minus plate be "on" position, and all the other cathode electrodes are the no power state, form potential difference generation electric field between a cathode electrode and described positive plate thereby make only to have in the electrophoresis time, described cathode electrode is prepared on the position that deposits electron emission source form carbon nano-tube;
D) after above-mentioned (c) step is finished, enter the energising of next cathode electrode in proper order, the cold state of all the other cathode electrodes is made with the circular sequence electrophoresis sediment of the carbon nano-pipe electronic emission source of finishing described a plurality of cathode electrodes.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102230207A (en) * | 2011-06-21 | 2011-11-02 | 华映光电股份有限公司 | Electrophoretic deposition apparatus and electrophoretic deposition method |
| CN106637355A (en) * | 2016-11-25 | 2017-05-10 | 北京工业大学 | Electrophoretic deposition device and method for preparing film by using electorphoretic deposition method |
| CN106757284A (en) * | 2016-12-12 | 2017-05-31 | 中国科学院国家空间科学中心 | A kind of multichannel negative electrode autophoresis device for vacuum |
-
2006
- 2006-02-09 CN CN 200610007362 patent/CN101017754A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102230207A (en) * | 2011-06-21 | 2011-11-02 | 华映光电股份有限公司 | Electrophoretic deposition apparatus and electrophoretic deposition method |
| CN106637355A (en) * | 2016-11-25 | 2017-05-10 | 北京工业大学 | Electrophoretic deposition device and method for preparing film by using electorphoretic deposition method |
| CN106757284A (en) * | 2016-12-12 | 2017-05-31 | 中国科学院国家空间科学中心 | A kind of multichannel negative electrode autophoresis device for vacuum |
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