CN218932376U

CN218932376U - Novel straight notch bottom heater

Info

Publication number: CN218932376U
Application number: CN202222578515.2U
Authority: CN
Inventors: 郭嘉伟; 王楠; 张宇辉; 董智慧
Original assignee: Wuhai Jingyuntong New Material Technology Co ltd
Current assignee: Wuhai Jingyuntong New Material Technology Co ltd
Priority date: 2022-09-28
Filing date: 2022-09-28
Publication date: 2023-04-28
Anticipated expiration: 2032-09-28

Abstract

The utility model belongs to the technical field of Czochralski single crystal heating furnaces, and particularly relates to a novel straight slot bottom heater. The utility model provides a novel straight slot bottom heater, which comprises a heating body, wherein the heating body comprises: the heating device comprises a heating ring, a first heating body and a second heating body, wherein the left end and the right end of the heating ring are respectively connected with the first heating body and the second heating body in series, one end, far away from the heating ring, of each of the first heating body and the second heating body is respectively integrally formed into a series connection electrode, an electrode hole is formed in each electrode, the connecting line of the two electrode holes is a first axis, and the electrode holes are long-strip-shaped through holes extending along the first axis; the first heating body comprises two serpentine heating bodies which are connected in parallel and are arranged in an axisymmetric mode by taking a first axis as an axis, and the first heating body, the second heating body and the heating ring are integrally formed. The utility model adopts an axisymmetric heating body structure, the deformation is more uniform and controllable, and meanwhile, the electrode holes on the electrodes adopt strip-shaped through holes to counteract the hole displacement caused by the deformation, so that the heater is easier to install.

Description

Novel straight notch bottom heater

Technical Field

The utility model belongs to the technical field of Czochralski single crystal heating furnaces, and particularly relates to a novel straight slot bottom heater.

Background

In the growth process of the Czochralski monocrystalline silicon, firstly, a polycrystalline silicon raw material is filled in a quartz crucible and melted at the temperature of more than 1420 ℃, after the temperature is stabilized to the target temperature, the monocrystalline silicon seed crystal with the determined crystal orientation is welded with a melt and then is subjected to seeding, and then the processes of shouldering, shoulder turning, constant diameter, ending, cooling and the like are carried out to complete the growth process of the monocrystalline silicon, and the whole process is completed in a monocrystalline heating furnace.

The thermal field that single crystal growing furnace used includes main heater and end heater, and the end heater of current single crystal growing furnace adopts the structure of establishing ties mostly, and the material is mostly isostatic pressure graphite, fixes in the heating furnace through the electrode foot, however isostatic pressure graphite tensile strength is lower, in the in-process of circular telegram heating up and cooling down, takes place the deformation easily, and whole end heater will not normally install after the deformation, probably causes the reworking of heater even to scrap from this.

Disclosure of Invention

The utility model overcomes the defects existing in the prior art and provides a novel straight slot bottom heater.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the utility model provides a novel straight notch bottom heater, includes the heating member, the heating member includes: the heating device comprises a heating ring, wherein the left end and the right end of the heating ring are respectively connected with a first heating body and a second heating body in series, one end, far away from the heating ring, of each of the first heating body and the second heating body is respectively integrally formed and connected with an electrode in series, each electrode is provided with an electrode hole, the connecting line of the two electrode holes is a first axis, and the electrode holes are strip-shaped through holes extending along the first axis; the first heating body comprises two snake-shaped heating bodies which are connected in parallel and are arranged in an axisymmetric mode by taking a first axis as an axis, and the first heating body, the second heating body and the heating ring are integrally formed.

Further, the serpentine heating body comprises four heating strips which are concentric with the heating ring and gradually increase in radius, and the four heating strips are integrally connected through three bending parts.

Further, the bending parts are a first bending part, a second bending part and a third bending part from inside to outside, a straight line passing through the heating ring and perpendicular to the first axis is a second axis, the center of the edge of the first bending part is deviated from the second axis by 18-40 degrees, the center of the edge of the second bending part is deviated from the first axis by 18-40 degrees, and the center of the edge of the third bending part is deviated from the second axis by 12-45 degrees.

Further, the diameter of the outer circle of the heating body is smaller than the length of the connecting line of the two electrode holes.

Further, the width of the electrode hole is 30 mm-42 mm, and the length is 40 mm-100 mm.

Further, the bottom heater is made of isostatic pressing graphite.

Compared with the prior art, the utility model has the following beneficial effects.

1. The utility model adopts an axisymmetric heating body structure, has the characteristics of uniform heating and high strength, the symmetric structure promotes the integral deformation of the heater to be more prone to be carried out along the direction of a symmetric axis, the deformation is more uniform and controllable, and meanwhile, the electrode holes on the electrodes adopt strip-shaped through holes so as to offset hole displacement caused by the deformation, thereby the heater is easier to install, and the efficiency and the service life of the heater are improved.

2. Compared with the series resistor, the parallel resistor is used as the whole heater, the area of the heating area of the heater can be adjusted by adjusting the offset angle in design, and meanwhile, the heating efficiency can be prevented from being influenced by the increase of the resistor.

Drawings

The utility model is further described below with reference to the accompanying drawings.

FIG. 1 is an isometric view of an embodiment of the utility model.

Fig. 2 is a front view of an embodiment of the present utility model.

In the figure: 11 is a heating ring, 12 is a first heating body, 13 is a second heating body, 14 is a serpentine heating body, 141 is a heating strip, 142 is a first bending portion, 143 is a second bending portion, 144 is a third bending portion, 2 is an electrode, 21 is an electrode hole, 22 is a first inclined plane, 3 is a first axis, and 4 is a second axis.

Detailed Description

Further description will be provided below with reference to specific examples.

Fig. 1 is a schematic diagram of a novel axial measurement of a heater with a straight slot bottom, which is provided by the embodiment of the utility model, and the novel axial measurement of the heater with the straight slot bottom comprises a heating body and two electrodes 2, wherein the heating body is in a circular shape as a whole, the two electrodes 2 are respectively arranged on the left side and the right side of the heating body, electrode holes 11 are formed in the electrodes 2, and the diameter of the outer circle of the heating body is smaller than the connecting line length of the two electrode holes 11.

Fig. 2 is a front view of a novel heater with a straight slot bottom according to an embodiment of the present utility model, where the heating body includes: the heating ring 11 is in a circular ring shape, a circular hole penetrating through the pot support is formed in the middle of the heating ring 11, the left end and the right end of the heating ring 11 are respectively integrally formed and connected with the first heating body 12 and the second heating body 13 in series, the first heating body 12 and the second heating body 13 are mutually symmetrical, one end, far away from the heating ring 11, of each of the first heating body 12 and the second heating body 13 is respectively integrally formed and connected with one electrode 2 in series, each electrode 2 is provided with an electrode hole 21, the connecting line of the two electrode holes 21 is a first axis 3, and the electrode holes 21 are long-strip-shaped through holes extending along the first axis 3; the first heating body 12 and the second heating body 13 comprise two serpentine heating bodies 14 which are mutually connected in parallel and are arranged in an axisymmetric way by taking the first axis 3 as an axis, and the first heating body 12, the second heating body 13 and the heating ring 11 are integrally formed.

In the present embodiment, a straight line passing through the heating ring 21 and perpendicular to the first axis 12 is the second axis 13. Further, the serpentine-shaped heater 14 includes four heating strips 141 concentric with the heating ring 21 and having gradually increasing radius, and the four heating strips 141 are integrally connected by three curved portions. Wherein two bends are close to the second axis 13 and the other bend is remote from the second axis 13.

As shown in fig. 2, the curved portions are a first curved portion 142, a second curved portion 143, and a third curved portion 144 from inside to outside, respectively, and the first curved portion 142 and the third curved portion 144 are curved portions near the second axis 13. The straight line passing through the heating ring 21 and perpendicular to the first axis 12 is the second axis 13, the center of the edge of the first bending part 142 is deviated from the second axis 13 by 18 ° to 40 °, the center of the edge of the second bending part 143 is deviated from the first axis 12 by 18 ° to 40 °, and the center of the edge of the third bending part 144 is deviated from the second axis 13 by 12 ° to 45 °.

In this embodiment, the bottom heater is made of isostatic graphite, and the tensile strength of the isostatic graphite is 25 mpa-45 mpa, so that deformation is easy to occur. The overall outer diameter of the heating body is 454mm, the width of the electrode hole 21 is 30-42 mm, the length is 40-100 mm, the heater adopts an axisymmetric heating body structure, the heater has the characteristics of uniform heating and high strength, the symmetrical structure enables the overall deformation of the heater to be more prone to be carried out along the direction of a symmetrical axis, the deformation is more uniform and controllable, meanwhile, the electrode hole on the electrode adopts a strip-shaped through hole, thereby counteracting the hole displacement caused by the deformation, so that the heater is easier to install, the efficiency is improved, and the service life of the heater is prolonged.

The above embodiments are merely illustrative of the principles of the present utility model and its effects, and are not intended to limit the utility model. Modifications and improvements to the above-described embodiments may be made by those skilled in the art without departing from the spirit and scope of the present utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims of this utility model, which are within the skill of those skilled in the art, can be made without departing from the spirit and scope of the utility model disclosed herein.

Claims

1. The utility model provides a novel straight notch bottom heater, includes heating member and two electrodes (2), its characterized in that, the heating member includes:

the heating device comprises a heating ring (11), wherein a first heating body (12) and a second heating body (13) are respectively connected at the left end and the right end of the heating ring (11) in series, the first heating body (12) and the second heating body (13) are mutually symmetrical, one ends, far away from the heating ring (11), of the first heating body (12) and the second heating body (13) are respectively integrally formed into a series electrode (2), each electrode (2) is provided with an electrode hole (21), the connecting line of the two electrode holes (21) is a first axis (3), and the electrode holes (21) are strip-shaped through holes extending along the first axis (3);

the first heating body (12) comprises two serpentine heating bodies (14) which are connected in parallel and are arranged in an axisymmetric mode by taking the first axis (3), and the first heating body (12), the second heating body (13) and the heating ring (11) are integrally formed.

2. The novel straight slot bottom heater of claim 1, wherein: the serpentine heating body (14) comprises four heating strips (141) which are concentric with the heating ring (11) and gradually increase in radius, and the four heating strips (141) are integrally connected through three bending parts.

3. The novel straight slot bottom heater of claim 2, wherein: the bending parts are a first bending part (142), a second bending part (143) and a third bending part (144) from inside to outside respectively, a straight line passing through the heating ring (11) and perpendicular to the first axis (3) is a second axis (4), the edge circle center of the first bending part (142) is deviated from the second axis (4) by 18-40 degrees, the edge circle center of the second bending part (143) is deviated from the first axis (3) by 18-40 degrees, and the edge circle center of the third bending part (144) is deviated from the second axis (4) by 12-45 degrees.

4. The novel straight slot bottom heater of claim 1, wherein: the diameter of the outer circle of the heating body is smaller than the length of the connecting line of the two electrode holes (21).

5. The novel straight slot bottom heater of claim 1, wherein: the width of the electrode hole (21) is 30-42 mm, and the length is 40-100 mm.

6. A novel straight slot bottom heater as claimed in any one of claims 1 to 5 wherein: the bottom heater is made of isostatic graphite.