CN218232646U

CN218232646U - Heater at bottom of carbon material

Info

Publication number: CN218232646U
Application number: CN202222575930.2U
Authority: CN
Inventors: 郭嘉伟; 王楠; 张宇辉; 董智慧
Original assignee: Wuhai Jingyuntong New Material Technology Co ltd
Current assignee: Wuhai Jingyuntong New Material Technology Co ltd
Priority date: 2022-09-28
Filing date: 2022-09-28
Publication date: 2023-01-06
Anticipated expiration: 2032-09-28

Abstract

The utility model belongs to the technical field of vertical pulling single crystal heating furnace, concretely relates to end heater. The utility model provides a bottom heater, which comprises a first heating body, a second heating body and a third heating body, wherein the second heating body is in a ring shape, electrode holes are arranged on the first heating body and the third heating body, and the first heating body and the third heating body are respectively connected with an electrode through the electrode holes; two sides of the second heating body are respectively connected with the first heating body and the third heating body through the first connecting part in an integrated forming way to form a series connection structure; the first heating body and the third heating body are symmetrical with each other by taking the circle center of the second heating body as the center; the first heating body and the third heating body comprise two adjustable heating bodies and a second connecting part, the two adjustable heating bodies are connected in series through the second connecting part in an integrated forming mode, and the adjustable heating bodies are of a parallel structure. The utility model discloses the holistic resistance of carbon bottom heater has been reduced to more effectual calorific capacity that improves the stove bottom.

Description

Heater at bottom of carbon material

Technical Field

The utility model belongs to the technical field of vertical pulling single crystal heating furnace, concretely relates to heater at bottom of carbon material.

Background

During the growth process of the czochralski silicon, firstly, polysilicon raw materials are put into a quartz crucible and melted at the temperature of above 1420 ℃, after the temperature is stabilized to the target temperature, the monocrystalline silicon seed crystal with the determined crystal orientation is fused with melt, then seeding is carried out, the growth process of the monocrystalline silicon is completed through the procedures of shouldering, shoulder rotating, diameter equalizing, ending, cooling and the like, and the whole process is completed in a monocrystalline heating furnace.

The thermal field used by the single crystal furnace comprises a main heater and a bottom heater, the bottom heater of the single crystal furnace at present adopts a series structure, if the area of a heating area needs to be increased, the total length of the series structure is inevitably increased, so that the total resistance value of the heater is inevitably increased, and the heat productivity of the bottom heater is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model overcomes prior art exists not enough, provides a heater at bottom of carbon material.

In order to solve the technical problem, the utility model discloses a technical scheme be:

a carbon-carbon bottom heater comprises a first heating body, a second heating body and a third heating body, wherein the second heating body is annular, electrode holes are formed in the first heating body and the third heating body, and the first heating body and the third heating body are connected with an electrode through the electrode holes respectively; the two sides of the second heating body are respectively connected with the first heating body and the third heating body through the first connecting part in an integrated forming way to form a series connection structure; the first heating body and the third heating body are symmetrical with each other by taking the circle center of the second heating body as the center;

the first heating body and the third heating body comprise two adjustable heating bodies and a second connecting part, the two adjustable heating bodies are connected in series through the second connecting part in an integrated forming mode, and the adjustable heating bodies are of a parallel structure.

Further, the adjustable heating body comprises two heating strips connected in parallel.

Furthermore, the width of the heating strip is 25-45 mm, and the thickness is 30-45 mm.

Furthermore, the two adjustable heating bodies are concentrically arranged by taking the circle center of the second heating body as the center, and the heating strips are concentrically arranged by taking the circle center of the second heating body as the center.

Furthermore, the outer contour of the heating strip on the outermost side is a circular arc concentric with the second heating body, and the diameter of the outer contour is larger than the distance between the electrode holes.

Furthermore, the connecting line of the two electrode holes is a first axis, and the first axis passes through the circle center of the second heating body; and a straight line which penetrates through the circle center of the second heating body and is connected with the first axis is a second axis.

Furthermore, the two adjustable heating bodies are divided into a first adjustable heating body at the outer side and a second adjustable heating body close to the center, and in the first adjustable heating body, included angles between two ends of the heating strip and a first axis are a and b respectively; in the second adjustable heating body, included angles between two ends of the heating strip and the second axis are c and d respectively; the center of the second connecting part and the second axis form an included angle of e

Furthermore, the angle a is between 9 and 45 degrees, the angle b is between 45 and 70 degrees, the angle c is between 10 and 30 degrees, the angle d is between 9 and 45 degrees, and the angle e minus the angle c is between 5 and 20 degrees.

Compared with the prior art, the utility model following beneficial effect has.

The carbon bottom heater of the utility model adopts the first heating body, the second heating body and the third heating body which are connected in series, and simultaneously adopts the parallel structure, thereby reducing the resistance of the first heating body and the third heating body, further reducing the overall resistance of the carbon bottom heater as much as possible, and further more effectively improving the heat productivity of the furnace bottom; meanwhile, the parallel connection mode is adopted, and when one heating strip is broken and damaged and the like, the heating strip cannot conduct electricity and generate heat, the electrifying and the heating of the whole bottom heater cannot be influenced.

Drawings

The present invention will be further described with reference to the accompanying drawings.

Fig. 1 is a schematic view of the shaft measurement according to the embodiment of the present invention.

Fig. 2 is a front view of the embodiment of the present invention.

In the figure: the heating device comprises a first heating body 1, a second heating body 2, a third heating body 3, a first connecting part 4, an adjustable heating body 5, a first adjustable heating body 51, a second adjustable heating body 52, a second connecting part 6, a heating strip 7, a first axis 8, a second axis 9, an electrode hole 11, an air guide cylinder 12 and a main heater foot plate 13.

Detailed Description

The following description is further provided in connection with specific embodiments.

The bottom heater is disposed below the crucible and is generally used as an auxiliary heater. In the prior art, most of bottom heaters used in the existing single crystal furnaces are of a series structure, and the used materials are generally isostatic pressing graphite or carbon-carbon composite materials. Wherein the tensile strength of the isostatic pressing graphite is between 25 and 45MPa, and the resistivity of the isostatic pressing graphite material is between 9 and 17 mu omega.

The tensile strength of the carbon-carbon composite material is between 100 and 200MPa, the resistivity of the carbon-carbon composite material is between 25 and 35 mu omega-m, and in comparison, the strength and the resistivity of the carbon-carbon composite material are high, if the traditional series connection mode is adopted, in order to prevent the overall resistance value of the bottom heater from being too high and influencing the overall heating power, the heating strips which are connected in series and are made of the carbon-carbon composite material are not too long, but the heating area of the bottom heater is reduced invisibly.

To address the above issues, the present embodiment provides a structure more suitable for a carbon-carbon bottom heater. Fig. 1 is a schematic view of a bottom heater axis measurement provided by an embodiment of the present invention, and the bottom heater axis measurement includes a first heating body 1, a second heating body 2 and a third heating body 3, where the second heating body 2 is annular, the first heating body 1 and the third heating body 3 are both provided with electrode holes 11, and the first heating body 1 and the third heating body 3 are respectively connected with an electrode through the electrode holes 11. The two sides of the second heating body 2 are respectively connected with the first heating body 1 and the third heating body 3 through the first connecting part 4 in an integrated forming way to form a series structure. The first heating body 1 and the third heating body 3 are symmetrical with each other with the center of circle of the second heating body 2 as the center.

First heating member 1 and third heating member 3 include two adjustable heating members 5 and second connecting portion 6, two adjustable heating members 5 use the 2 centre of a circle of second heating member to set up as the center is concentric, and establish ties through 6 integrated into one piece of second connecting portion between the two, adjustable heating member 5 includes two parallel connection's heating strip 7, heating strip 7 all uses the 2 centre of a circle of second heating member to set up as the center is concentric, and the outline of the heating strip 7 in the outside be with the 2 endocentric circular arcs of second heating member, its diameter is greater than the distance between the electrode hole 11, in order to cover as far as possible heating region. Also because of this, the main body portions of the first and

third heating bodies

1 and 3 are disposed at the upper left and lower right as viewed in fig. 1 so as to avoid the gas cylinder 12 and the main heater foot plate 13.

By connecting the heating strips 7 in parallel, the resistance of the adjustable heating body 5 can be reduced, so that the resistances of the first heating body 1 and the third heating body 3 are reduced, and the resistance of the whole bottom heater is reduced. Meanwhile, when one heating strip 7 is broken and damaged to cause that the heating strip cannot conduct electricity and generate heat, the electrification and the heat generation of the whole bottom heater cannot be influenced.

It should be noted that the number of the heating strips 7 connected in parallel in the adjustable heating body 5 may also be greater than 2, but if the number of the heating strips connected in parallel is too large, the service life of the heating strips 7 will be affected by reducing the thickness of the heating strips 7, so the number of the heating strips connected in parallel is generally two or at most three, the width of the heating strips 7 is 25-45 mm, the thickness of the heating strips 7 is consistent with the overall thickness of the bottom heater, and the thickness of the heating strips 7 is preferably 30-45 mm.

As shown in fig. 2, the line connecting the two electrode holes 11 is a first axis 8, the first axis 8 passes through the center of the second heating body 2, and the second axis 9 is perpendicular to the first axis 8 and passes through the center of the second heating body 2.

Further, as shown in fig. 2, the tunable heating body 5 near the outer side is a first tunable heating body 51, and the tunable heating body 5 near the center is a second tunable heating body 52. Wherein, the included angles between the two ends of the heating bar in the first adjustable heating body 51 and the first axis 8 are a and b respectively; the included angles between the two ends of the second adjustable heating body 52 and the second axis 9 are c and d respectively; the included angle between the center of the second connecting part 6 and the second axis 9 is e, and the resistance value of the whole bottom heater can be controlled to be in a proper range by adjusting the sizes of a, b, c, d and e during manufacturing.

In the embodiment, the angles a, b, c, d and e need to be adjusted within a certain range, the angle a is 9-45 degrees, the angle b is 45-70 degrees, the angle c is 10-30 degrees, the angle d is 9-45 degrees, and the angle e minus the angle c is 5-20 degrees.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. It will be apparent to those skilled in the art that modifications and improvements can be made to the above-described embodiments without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention shall be covered by the claims of the present invention.

Claims

1. A carbon material bottom heater is characterized in that: the heating device comprises a first heating body (1), a second heating body (2) and a third heating body (3), wherein the second heating body (2) is annular, electrode holes (11) are formed in the first heating body (1) and the third heating body (3), and the first heating body (1) and the third heating body (3) are respectively connected with one electrode through the electrode holes (11); the two sides of the second heating body (2) are respectively connected with the first heating body (1) and the third heating body (3) through the first connecting part (4) in an integrated forming manner to form a series structure, and the first heating body (1) and the third heating body (3) are mutually symmetrical by taking the circle center of the second heating body (2) as the center;

the first heating body (1) and the third heating body (3) comprise two adjustable heating bodies (5) and a second connecting part (6), the two adjustable heating bodies (5) are connected in series through the second connecting part (6) in an integrated mode, and the adjustable heating bodies (5) are of a parallel structure.

2. A carbon-carbon based heater according to claim 1, wherein: the adjustable heating body (5) comprises two heating strips (7) which are connected in parallel.

3. A carbon-carbon based heater according to claim 2, wherein: the width of the heating strip (7) is 25-45 mm, and the thickness is 30-45 mm.

4. A carbon-carbon based heater according to claim 2, wherein: the two adjustable heating bodies (5) are concentrically arranged by taking the circle center of the second heating body (2) as the center, and the heating strips (7) are concentrically arranged by taking the circle center of the second heating body (2) as the center.

5. The carbon-carbon material substrate heater as claimed in claim 4, wherein: the outer contour of the heating strip (7) on the outermost side is an arc concentric with the second heating body (2), and the diameter of the outer contour is larger than the distance between the electrode holes (11).

6. A carbon-carbon substrate heater as claimed in claim 1 wherein: the connecting line of the two electrode holes (11) is a first axis (8), and the first axis (8) penetrates through the circle center of the second heating body (2); the straight line which passes through the circle center of the second heating body (2) and is connected with the first axis (8) is a second axis (9).

7. A carbon-carbon based substrate heater as claimed in claim 6, wherein: the two adjustable heating bodies (5) are divided into a first adjustable heating body (51) at the outer side and a second adjustable heating body (52) close to the center, and in the first adjustable heating body (51), included angles a and b are formed between two ends of the heating strip (7) and the first axis (8) respectively; in the second adjustable heating body (52), the included angles between the two ends of the heating strip (7) and the second axis (9) are c and d respectively; and the center of the second connecting part (6) forms an included angle e with the second axis (9).

8. A sole heater according to claim 7, wherein: the angle a is 9-45 degrees, the angle b is 45-70 degrees, the angle c is 10-30 degrees, the angle d is 9-45 degrees, and the angle e minus the angle c is 5-20 degrees.