CN217149389U - Novel heater at bottom of central symmetry - Google Patents
Novel heater at bottom of central symmetry Download PDFInfo
- Publication number
- CN217149389U CN217149389U CN202220702590.2U CN202220702590U CN217149389U CN 217149389 U CN217149389 U CN 217149389U CN 202220702590 U CN202220702590 U CN 202220702590U CN 217149389 U CN217149389 U CN 217149389U
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- Prior art keywords
- heating strip
- heating
- strip
- heater
- included angle
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- 238000010438 heat treatment Methods 0.000 claims abstract description 115
- 238000005452 bending Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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Abstract
The utility model discloses a novel heater at bottom of central symmetry, including heater body and two electrodes, the heater body be connected with two electrodes respectively, the heater body include first heating strip, second heating strip and third heating strip, first heating strip and third heating strip be connected with an electrode respectively, the second heating strip be two sets of parallelly connected structural style of heating strip, first heating strip, third heating strip establish ties with the second heating strip respectively. The utility model has the advantages that: the technical scheme solves the problem that the heating area is small due to the fact that power limits the range of the resistor, the heater is formed by combining series connection and parallel connection, the resistance value of the resistor can be the largest through the series connection, the resistance value of the resistor can be the smallest through the parallel connection, and therefore the problem that the heating area of the heater is insufficient is solved.
Description
Technical Field
The utility model relates to a monocrystalline silicon preparation equipment technical field specifically indicates a novel central symmetry end heater.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method, the single crystal furnace comprises the heater which is an important part in a thermal field and is used as a direct heating element, the temperature can reach more than 1600 ℃ when the temperature is highest, and the bottom heaters used in the single crystal furnace are mostly of a series structure at present, but the structure causes that the area of a heating area is small and the adjustable resistance range is limited, so the improvement of the bottom heaters is needed.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a novel central symmetry end heater that the district area that generates heat is big, resistance is adjustable with above technical problem.
In order to solve the technical problem, the utility model provides a technical scheme does: the utility model provides a novel heater at bottom of central symmetry, includes heater body and two electrodes, the heater body be connected with two electrodes respectively, the heater body include first heating strip, second heating strip and third heating strip, first heating strip and third heating strip be connected with an electrode respectively, the second heating strip be two sets of parallelly connected structural style of heating strip, first heating strip, third heating strip establish ties with the second heating strip respectively, first heating strip, second heating strip and third heating strip be the snakelike structure setting, two sets of heating strips of first heating strip, third heating strip and second heating strip form two kink respectively, first heating strip, second heating strip and third heating strip set up with one heart.
As an improvement, the two groups of heating strips of the second heating strip are arranged in a central symmetry mode and form a parallel connection area.
As an improvement, the first heating strips and the third heating strips are respectively a group of heating strips and are arranged in a central symmetry mode.
As an improvement, an included angle a and an included angle b are respectively formed between a straight line where the circle centers of the two groups of bending parts of the second heating strip and the center are located and the central axis, and the adjustable range of the included angle a and the included angle b is 9-45 degrees.
As an improvement, an included angle c and an included angle d are respectively formed between a straight line where the circle centers of the bending parts of the first heating strip and the third heating strip are located and the central axis, and the adjustable ranges of the included angle c and the included angle d are 9-45 degrees.
Compared with the prior art, the utility model the advantage lie in: the technical scheme solves the problem that the heating area is small due to the fact that power limits the range of the resistor, the heater is formed by combining series connection and parallel connection, the resistance value of the resistor can be the largest through the series connection, the resistance value of the resistor can be the smallest through the parallel connection, and therefore the problem that the heating area of the heater is insufficient is solved.
Drawings
Fig. 1 is a schematic structural view of the novel central symmetrical bottom heater of the present invention.
Fig. 2 is a schematic view of the included angle of the central symmetrical bottom heater of the present invention.
As shown in the figure: 1. a first heating bar; 2. a second heating bar; 3. and a third heating bar.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Combine attached figure 1 ~ 2, a novel heater at bottom of central symmetry, including heater body and two electrodes, the heater body be connected with two electrodes respectively, the heater body include first heating strip 1, second heating strip 2 and third heating strip 3, first heating strip 1 and third heating strip 3 be connected with an electrode respectively, first heating strip 1 and third heating strip 3 be a set of heating strip and centrosymmetric setting respectively, second heating strip 2 be the parallelly connected structural style of two sets of heating strips, the two sets of heating strip centrosymmetric setting of second heating strip 2 and form parallelly connected region, first heating strip 1, third heating strip 3 respectively with second heating strip 2 establish ties, first heating strip 1, second heating strip 2 and third heating strip 3 be the setting of snakelike structure, first heating strip 1, Two sets of heating strips of third heating strip 3 and second heating strip 2 form two kink respectively, first heating strip 1, second heating strip 2 and third heating strip 3 set up with the heart.
An included angle a and an included angle b are respectively formed between the straight line where the circle centers of the two groups of bending parts of the second heating strip 2 and the center and the central axis, and the adjustable range of the included angle a and the included angle b is 9-45 degrees.
An included angle c and an included angle d are respectively formed between the straight line where the circle centers of the bending parts of the first heating strip 1 and the third heating strip 3 and the center axis, and the adjustable ranges of the included angle c and the included angle d are 9-45 degrees.
The utility model discloses a theory of operation: when the heater is used, the first heating strip is connected with one electrode, the third heating strip is connected with the other electrode, the first heating strip and the third heating strip are respectively connected with the second heating strip to form a heater body of a series-parallel structure, the first heating strip, the second heating strip and the third heating strip are concentrically arranged, the ground shapes of the first heating strip, the second heating strip and the third heating strip which are arranged in a snake shape can be adjusted, the angle between a straight line and a central axis of the center of the bending part between the circle center and the center of the bending part can be adjusted, the resistance value can be adjusted, and therefore the heating area of the heater can be adjusted.
The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.
Claims (5)
1. The utility model provides a novel heater at bottom of central symmetry, includes heater body and two electrodes, its characterized in that: the heater body is respectively connected with the two electrodes and comprises a first heating strip (1), a second heating strip (2) and a third heating strip (3), the first heating strip (1) and the third heating strip (3) are respectively connected with an electrode, the second heating strips (2) are in a structural form that two groups of heating strips are connected in parallel, the first heating strips (1) and the third heating strips (3) are respectively connected with the second heating strips (2) in series, the first heating strip (1), the second heating strip (2) and the third heating strip (3) are all arranged in a snake-shaped structure, two groups of heating strips of the first heating strip (1), the third heating strip (3) and the second heating strip (2) respectively form two bending parts, the first heating strip (1), the second heating strip (2) and the third heating strip (3) are arranged concentrically.
2. The novel centrosymmetric bottom heater of claim 1, characterized in that: the two groups of heating strips of the second heating strip (2) are arranged in a central symmetry mode and form a parallel connection area.
3. The novel centrosymmetric bottom heater of claim 1, characterized in that: the first heating strip (1) and the third heating strip (3) are respectively a group of heating strips and are arranged in central symmetry.
4. The new central symmetric bottom heater of claim 2, wherein: an included angle a and an included angle b are respectively formed between the straight line where the circle centers of the two groups of bending parts of the second heating strip (2) and the center and the central axis, and the adjustable range of the included angle a and the included angle b is 9-45 degrees.
5. A novel centrosymmetric bottom heater as claimed in claim 3, wherein: an included angle c and an included angle d are respectively formed between a straight line where the circle centers of the bending parts of the first heating strip (1) and the third heating strip (3) and the center axis, and the adjustable ranges of the included angle c and the included angle d are 9-45 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220702590.2U CN217149389U (en) | 2022-03-29 | 2022-03-29 | Novel heater at bottom of central symmetry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220702590.2U CN217149389U (en) | 2022-03-29 | 2022-03-29 | Novel heater at bottom of central symmetry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217149389U true CN217149389U (en) | 2022-08-09 |
Family
ID=82697253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220702590.2U Expired - Fee Related CN217149389U (en) | 2022-03-29 | 2022-03-29 | Novel heater at bottom of central symmetry |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217149389U (en) |
-
2022
- 2022-03-29 CN CN202220702590.2U patent/CN217149389U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220809 |