CN216891172U - Roll-to-roll equipment for electron beam evaporation double-sided coating - Google Patents
Roll-to-roll equipment for electron beam evaporation double-sided coating Download PDFInfo
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- CN216891172U CN216891172U CN202220418232.9U CN202220418232U CN216891172U CN 216891172 U CN216891172 U CN 216891172U CN 202220418232 U CN202220418232 U CN 202220418232U CN 216891172 U CN216891172 U CN 216891172U
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Abstract
The utility model discloses a roll-to-roll device for electron beam evaporation double-sided coating, which comprises a vacuum container, wherein an unwinding chamber, a first evaporation coating chamber, a second evaporation coating chamber and a winding chamber are formed in the vacuum container, a film substrate output by the unwinding chamber passes through the first evaporation coating chamber and the second evaporation coating chamber and then enters the winding chamber for rewinding, the first evaporation coating chamber is provided with a first coating roller and a first electron beam evaporation coating device, the second evaporation coating chamber is provided with a second coating roller and a second electron beam evaporation coating device, and the front side and the back side of the film substrate bypass the first coating roller and the second coating roller to respectively correspond to the first electron beam evaporation coating device and the second electron beam evaporation coating device. The utility model provides a roll-to-roll device for electron beam evaporation double-sided coating, which adopts electron beams to heat a film material, has high heating power, concentrated heat energy and high energy, can evaporate various refractory metals and non-metal materials, and adopts double coating rollers and double electron beams to heat, evaporate and coat the film to realize continuous double-sided coating of a film substrate.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to roll-to-roll equipment for electron beam evaporation double-sided coating.
Background
At present, the coating technology generally adopts a single-mode coating such as resistance heating evaporation coating and magnetron sputtering coating and a single-side coating, wherein the resistance heating evaporation coating is a method for depositing and forming a film by heating and gasifying a coating material under a vacuum condition. The coating method has the advantages of high coating speed and high efficiency, but the coating method is low in yield, poor in coating uniformity and bonding force, incapable of evaporating various refractory metals by resistance heating and incapable of meeting the requirements of coating, decorating materials and new energy batteries of 5G electronic products at present. The magnetron sputtering coating is a method for forming a film layer by bombarding target material sputtering material particles through glow discharge ionized gas, and has the advantages of good coating stability, good uniformity and compact film layer. But the coating efficiency is low, the utilization rate of the target material is low, the productivity is not high, and the requirement of high-efficiency production cannot be met.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide roll-to-roll equipment for electron beam evaporation double-sided coating, which adopts electron beams to heat a film material, has high heating power, concentrated heat energy and high energy, can evaporate various refractory metals and non-metal materials, and adopts double coating rollers and double electron beams to heat evaporation coating to realize continuous double-sided coating of a film substrate.
In order to solve the technical problems, the technical scheme provided by the utility model is as follows: the utility model provides a roll-to-roll equipment of two-sided coating film of electron beam evaporation, including vacuum vessel, vacuum vessel is inside to be formed with unreel the room, evaporation coating film room one, evaporation coating film room two and rolling room, unreel the room output film substrate and get into the rolling room rewinding after evaporation coating film room one and evaporation coating film room two, evaporation coating film room one is equipped with coating film roller one and electron beam evaporation coating film ware one, evaporation coating film room two is equipped with coating film roller two and electron beam evaporation coating film ware two, the film substrate walks around coating film roller one and coating film roller two and makes its tow sides correspond with electron beam evaporation coating film ware one and electron beam evaporation coating film ware two respectively.
According to the technical scheme, when the film base material is output from the unwinding chamber and sequentially passes through the first evaporation coating chamber and the second evaporation coating chamber, the electron beam evaporation coating device performs electron beam heating evaporation coating on the first surface of the film base material wound on the first coating roller in a pair, and the electron beam evaporation coating device performs electron beam heating evaporation coating on the second surface of the film base material wound on the second coating roller in a pair, so that the front surface and the back surface of the film base material are coated. The electron beam is adopted to heat the film material, the heating power is high, the energy is concentrated, various refractory metals and non-metallic materials can be evaporated, and the film coating effect is ensured; and the continuous double-sided coating of the film base material is realized by adopting double coating rollers and double electron beams for heating, evaporating and coating, and the film base material enters the winding chamber for rewinding after the film is coated.
Furthermore, the first electron beam evaporation coating device comprises a first electron gun and a first evaporation crucible, the first evaporation crucible is arranged below the coating roller, and the first electron gun is arranged on the side wall of the vacuum container and emits an electron beam to the first evaporation crucible. And an electron beam emitted by the first electron gun is emitted to the first evaporation crucible to heat an evaporation material in the first evaporation crucible, the evaporation material is heated and then is evaporated upwards to form an evaporation airflow, the evaporation airflow is upwards diffused and attached to the first surface of the film base material wound on the first coating roller, and coating is finished on the surface of the film base material.
Furthermore, the second electron beam evaporation coating device comprises a second electron gun and a second evaporation crucible, the second evaporation crucible is arranged below the second coating roller, the second electron gun is arranged on the side wall of the vacuum container, and the electron beams emitted by the second electron gun are emitted to the second evaporation crucible. And the electron gun II emits an electron beam to irradiate the evaporation crucible II to heat the evaporation material in the evaporation crucible II, the evaporation material is heated and then is evaporated upwards to form evaporation airflow, and the evaporation airflow is upwards diffused and attached to the second surface of the film base material wound on the coating roller II to finish coating on the surface of the film base material.
Furthermore, the winding chamber is separated from the first evaporation coating chamber and the second evaporation coating chamber by baffles. Through the baffle, the film base material rewound in the winding chamber can not contact with the evaporation materials in the first evaporation coating chamber and the second evaporation coating chamber, and the coating quality is ensured without pollution.
Furthermore, an unwinding system is arranged in the unwinding chamber, a winding system is arranged in the winding chamber, the unwinding system winds and outputs the film base material, and the film base material is rewound on the winding system after bypassing the first coating roller and the second coating roller. When the film base material enters the second coating roller from the first coating roller, the film base material enters the upper side of the second coating roller from the lower side of the first coating roller and is wound on the second coating roller, so that the front side and the back side of the film base material are exposed on the coating roller, and double-sided coating is completed when electron beam evaporation coating is matched.
Furthermore, a vacuum pumping system is arranged on the vacuum container. The vacuum pumping system is used for pumping vacuum, so that the interior of the vacuum container meets the vacuum condition.
Furthermore, a guide roller is arranged in the conveying process of the film base material. The guide roller is used for guiding and pressing the film substrate for conveying.
The utility model also has the following beneficial effects: the double-coating roller structure is adopted to realize the double-side coating effect on the film base material; one or two or more sets of electron guns are adopted for heating, evaporating and coating, so that the coating of film substrates with different widths is met, and different production requirements are met; the winding system can wind in the forward direction and can also wind in the reverse direction, so that the continuous reciprocating double-sided plating of the multilayer film is realized, the thickness of the plated film is improved, and the production requirements of the plated film in the aspects of the current decorative materials and new energy batteries are met.
Drawings
Fig. 1 is a schematic view showing a specific structure in a vacuum vessel according to the present invention.
Description of reference numerals: the device comprises a vacuum container 1, an unwinding chamber 2a, an evaporation coating chamber I3 a, an evaporation coating chamber II 3b, a winding chamber 4a, a film substrate 5, a baffle 6, a vacuum pumping system 7, a guide roller 8, an unwinding system 21, a coating roller I31, an electron beam evaporation coating device I32, a coating roller II 33, an electron beam evaporation coating device II 34, an electron gun I321, an evaporation crucible I322, an electron gun II 341, an evaporation crucible II 342 and a winding system 41.
Detailed Description
The utility model is further described with reference to the following figures and detailed description.
Referring to fig. 1, the roll-to-roll equipment for electron beam evaporation double-sided coating comprises a vacuum container 1, wherein an unwinding chamber 2a, a first evaporation coating chamber 3a, a second evaporation coating chamber 3b and a winding chamber 4a are formed inside the vacuum container 1, a film substrate 5 output by the unwinding chamber 2a enters the winding chamber 4a after passing through the first evaporation coating chamber 3a and the second evaporation coating chamber 3b for rewinding, the first evaporation coating chamber 3a is provided with a first coating roller 31 and a first electron beam evaporation coating device 32, the second evaporation coating chamber 3b is provided with a second coating roller 33 and a second electron beam evaporation coating device 34, and the film substrate 5 bypasses the first coating roller 31 and the second coating roller 33 to enable the front surface and the back surface of the film substrate to respectively correspond to the first electron beam evaporation coating device 32 and the second electron beam evaporation coating device 34.
The first electron beam evaporation coater 32 comprises a first electron gun 321 and a first evaporation crucible 322, the first evaporation crucible 322 is arranged below the first coating roller 31, the first electron gun 321 is arranged on the side wall of the vacuum container 1, and electron beams emitted by the first electron gun 321 are emitted to the first evaporation crucible 322.
The second electron beam evaporation coater 34 comprises a second electron gun 341 and a second evaporation crucible 342, the second evaporation crucible 342 is arranged below the second coating roller 33, the second electron gun 341 is arranged on the side wall of the vacuum container 1, and the electron beams emitted by the second electron gun 341 are emitted to the second evaporation crucible 342.
In this embodiment, the electron guns 321 and 341 may be straight electron guns or E-type electron guns, and the straight electron guns and the E-type electron guns are used in parallel. One or more electron guns can be respectively arranged in the first evaporation coating chamber 3a and the second evaporation coating chamber 3 b. The first evaporation crucible 322 and the second evaporation crucible 342 may be in the shape of a long trough, or may be in the shape of a circle, or may be in one or more combinations.
The winding chamber 4a is separated from the first evaporation coating chamber 3a and the second evaporation coating chamber 3b by a baffle 6.
An unwinding system 21 is arranged in the unwinding chamber 2a, a winding system 41 is arranged in the winding chamber 4a, the unwinding system 21 winds and outputs the film base material 5, and the film base material 5 bypasses the first coating roller 31 and the second coating roller 33 and then is rewound on the winding system 41. The unreeling system 21 is matched with the reeling system 41 and used for unreeling and reeling the film substrate. The film can be wound in the forward direction or in the reverse direction, and the film coating roller I31 and the film coating roller II 33 are matched to enable the front side and the back side of the film substrate 5 to respectively correspond to the electron beam evaporation film coating device I32 and the electron beam evaporation film coating device II 34, so that the front side and the back side of the film substrate 5 are coated with films.
The vacuum container 1 is provided with a vacuum pumping system 7. The film base 5 is provided with a guide roller 8 in its transport path. The cross-sectional shape of the vacuum container 1 includes, but is not limited to, a rectangle and a cylinder.
In the specific implementation of the utility model, the film substrate 5 is unreeled through the unreeling system 21, enters the first film coating chamber, namely the evaporation film coating chamber one 3a, and enters the first film coating roller one 31, at the moment, under the vacuum environment, the electron gun one 321 excites the electron beam to irradiate to the evaporation crucible one 322, the evaporation material on the evaporation crucible one 322 is heated and evaporated to form evaporation air flow, the air flow is rapidly diffused upwards, and after contacting the low-temperature film coating roller one 31, the air flow is rapidly deposited on the surface of the film substrate 5 to form the coating of the first mask. After the first surface film is coated on the film base material 5, the film base material enters a second coating chamber, namely an evaporation coating chamber II 3b, and enters a second coating roller II 33, at the moment, an electron gun II 341 excites an electron beam to irradiate to an evaporation crucible II 342, evaporation materials on the evaporation crucible II 342 are heated and evaporated to form evaporation air flow, the air flow is rapidly diffused upwards, and the evaporation air flow is rapidly deposited on the surface of the film base material 5 after contacting with the low-temperature coating roller II 33 to form the coating of the second surface film. Then the film enters a winding system 41 for rewinding, and a continuous double-sided efficient film coating process is completed.
In summary, the actual samples of the present invention are prepared according to the description and the drawings, and after a plurality of usage tests, the effect of the usage tests proves that the present invention can achieve the expected purpose, and the practical value is undoubted. The above-mentioned embodiments are only for convenience of illustration and not intended to limit the utility model in any way, and those skilled in the art will be able to make equivalents of the features of the utility model without departing from the technical scope of the utility model.
Claims (7)
1. The utility model provides a roll-to-roll equipment of two-sided coating film of electron beam evaporation, includes vacuum vessel (1), its characterized in that: the vacuum container (1) is internally provided with an unreeling chamber (2a), a first evaporation coating chamber (3a), a second evaporation coating chamber (3b) and a reeling chamber (4a), the unreeling chamber (2a) outputs a film substrate (5) to enter the reeling chamber (4a) for rewinding after passing through the first evaporation coating chamber (3a) and the second evaporation coating chamber (3b), the first evaporation coating chamber (3a) is provided with a first coating roller (31) and a first electron beam evaporation coating device (32), the second evaporation coating chamber (3b) is provided with a second coating roller (33) and a second electron beam evaporation coating device (34), and the film substrate (5) bypasses the first coating roller (31) and the second coating roller (33) to enable the front and back surfaces of the film substrate to correspond to the first electron beam evaporation coating device (32) and the second electron beam evaporation coating device (34) respectively.
2. The roll-to-roll apparatus for electron beam evaporation double-sided coating according to claim 1, wherein: the first electron beam evaporation coating device (32) comprises a first electron gun (321) and a first evaporation crucible (322), the first evaporation crucible (322) is arranged below the first coating roller (31), the first electron gun (321) is arranged on the side wall of the vacuum container (1), and electron beams emitted by the first electron gun are emitted to the first evaporation crucible (322).
3. The roll-to-roll apparatus for electron beam evaporation double-sided coating according to claim 1, wherein: the second electron beam evaporation coating device (34) comprises a second electron gun (341) and a second evaporation crucible (342), the second evaporation crucible (342) is arranged below the second coating roller (33), the second electron gun (341) is arranged on the side wall of the vacuum container (1), and electron beams emitted by the second electron gun are emitted to the second evaporation crucible (342).
4. The roll-to-roll apparatus for electron beam evaporation double-sided coating according to claim 1, wherein: the winding chamber (4a) is separated from the first evaporation coating chamber (3a) and the second evaporation coating chamber (3b) through a baffle (6).
5. The roll-to-roll apparatus for electron beam evaporation double-sided coating according to claim 4, wherein: unreel and be equipped with unwinding system (21) in room (2a), be equipped with winding system (41) in rolling room (4a), unwinding system (21) winding output film substrate (5), rewinding on winding system (41) behind coating roller (31) and coating roller two (33) is walked around in film substrate (5).
6. The roll-to-roll apparatus for electron beam evaporation double-sided coating according to claim 1, wherein: and a vacuum pumping system (7) is arranged on the vacuum container (1).
7. The roll-to-roll apparatus for electron beam evaporation double-sided coating according to claim 1, wherein: and a guide roller (8) is arranged in the conveying process of the film base material (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220418232.9U CN216891172U (en) | 2022-02-28 | 2022-02-28 | Roll-to-roll equipment for electron beam evaporation double-sided coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220418232.9U CN216891172U (en) | 2022-02-28 | 2022-02-28 | Roll-to-roll equipment for electron beam evaporation double-sided coating |
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| CN216891172U true CN216891172U (en) | 2022-07-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220418232.9U Active CN216891172U (en) | 2022-02-28 | 2022-02-28 | Roll-to-roll equipment for electron beam evaporation double-sided coating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115584473A (en) * | 2022-11-02 | 2023-01-10 | 广东振华科技股份有限公司 | Double-sided electron beam evaporation winding coating device and using method thereof |
| CN115725951A (en) * | 2022-12-16 | 2023-03-03 | 江门市兆业科技有限公司 | Preparation method of metallized film with two-sided continuous deposition coating |
-
2022
- 2022-02-28 CN CN202220418232.9U patent/CN216891172U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115584473A (en) * | 2022-11-02 | 2023-01-10 | 广东振华科技股份有限公司 | Double-sided electron beam evaporation winding coating device and using method thereof |
| CN115725951A (en) * | 2022-12-16 | 2023-03-03 | 江门市兆业科技有限公司 | Preparation method of metallized film with two-sided continuous deposition coating |
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