CN213209073U - Decoupling type double-frame micro gyroscope - Google Patents
Decoupling type double-frame micro gyroscope Download PDFInfo
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- CN213209073U CN213209073U CN202021890715.6U CN202021890715U CN213209073U CN 213209073 U CN213209073 U CN 213209073U CN 202021890715 U CN202021890715 U CN 202021890715U CN 213209073 U CN213209073 U CN 213209073U
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Abstract
The utility model discloses a little top of decoupling zero formula double frame, it includes: the left driving mass block group, the right driving mass block group, the left Gow mass block group and the right Gow mass block group are all of a semi-enclosed structure with an opening on one side, the openings of the left driving mass block group and the right driving mass block group are oppositely arranged, and the left driving mass block group and the right driving mass block group are symmetrically distributed; the openings of the left Golgi mass block group and the right Golgi mass block group are oppositely arranged; the left Gothic mass block group and the left driving mass block group are sequentially sleeved on the periphery of the left detection mass block; the right Coriolis mass block group and the right driving mass block group are sequentially sleeved on the periphery of the right detection mass block. Two frame micro-gyroscopes of decoupling zero formula realized that the difference of detecting electric capacity is enlargied, improved the sensitivity of this structure, restrained micro-gyroscope's mechanical coupling, improved micro-gyroscope's detection precision.
Description
Technical Field
The utility model relates to a micromechanical system technical field especially relates to a decoupling type double-frame micro gyroscope with high detection accuracy.
Background
The gyroscope is a sensor for measuring angular rate, is one of core devices of the inertial technology, and plays an important role in the fields of modern industrial control, aerospace, national defense and military, consumer electronics and the like.
The development of a spinning top can be roughly divided into three stages:
the first stage is a traditional mechanical rotor gyro which has high precision and plays an irreplaceable role on military strategic weapons such as nuclear submarines, intercontinental strategic missiles and the like, but has larger volume, complex manufacturing process, high price, long period and unsuitability for batch production; the second stage is an optical detection gyroscope which mainly comprises a laser gyroscope and a fiber-optic gyroscope and mainly utilizes the Sagnac effect, and the optical detection gyroscope has the advantages of no rotating part, higher precision, important function in navigation and aerospace, larger volume, higher cost and difficult integration; the third stage is a micromechanical gyroscope which is developed in the 90 s of the 20 th century, the research of which is started later, but the micromechanical gyroscope is developed rapidly by virtue of the unique advantages of small volume, low power consumption, light weight, batch production, low price, strong overload resistance and integration, is suitable for civil fields of aircraft navigation, automobile manufacturing, digital electronics, industrial instruments and the like and modern national defense and military fields of unmanned aerial vehicles, tactical missiles, intelligent bombs, military aiming systems and the like, has wide application prospect and is more and more concerned by people.
At present, the common driving modes of the micromechanical gyroscope include piezoelectric type, electromagnetic type, electrostatic type and the like; the detection modes are piezoresistive, piezoelectric, resonant tunneling, electron tunneling, capacitive, etc.
For the driving mode, the piezoelectric driving has the advantages of high precision and small error, but the requirement on the structural design of the gyroscope is high, and the gyroscope is not easy to process and manufacture; the electromagnetic driving amplitude is large, but stable control is difficult; the electrostatic driving has an advantage of good stability although the driving amplitude is small.
For the detection mode, wherein the piezoresistive effect detection is adopted, the sensitivity is low, and the temperature coefficient is large, so that the further improvement of the detection precision is limited; the sensitivity of the piezoelectric effect detection is easy to drift, needs to be corrected frequently, is slow to return to zero, and is not suitable for continuous testing; the sensitivity of the resonant tunneling effect is one order of magnitude higher than that of the silicon piezoresistive effect, but the detection sensitivity is lower, and the problem exists that the bias voltage is easy to drift due to the driving of the gyroscope, so that the gyroscope cannot stably work; the manufacturing process of the electronic tunnel effect type device is extremely complex, a detection circuit is relatively difficult to realize, the rate of finished products is low, the normal work is difficult, the integration is not facilitated, especially, the distance between the tunnel junction and the tunnel tip and the electrode plate is difficult to control at a nanometer level, and the normal work of the sensor cannot be guaranteed.
The capacitance detection adopts a comb structure, the displacement resolution is high, the capacitance structure is suitable for MEMS (micro-electromechanical systems) process processing, and electrostatic driving and capacitance detection are still mainstream processes of micro-gyroscope processing at present.
However, the detection precision of the micro gyroscope in the existing processing technology cannot be improved all the time, and the reason for the improvement is mainly two points: firstly, due to errors of gyroscope structure design, processing technology and the like, a driving mode and a detection mode have large mechanical coupling, so that quadrature error interference signals are coupled in output signals of the micro gyroscope; and secondly, because the gyroscope cannot avoid the influence of external linear acceleration, the output signals of the micro gyroscope are coupled with interference signals with the same frequency and direction.
The invention discloses a high-precision MEMS gyroscope, which is disclosed in Chinese invention patent CN109737943A, and the micro gyroscope structure disclosed in the patent is a frame structure, and the innovation point is that the inner frame of the mass block is connected through the interference mode isolation structure, so that the interference mode is far away from the working mode, but the driving mode and the detection mode of the micro gyroscope of the structure have larger mechanical coupling, which brings great quadrature error. Continuing to refer to the chinese invention patent CN108507555A, it discloses an MEMS micro-mechanical fully decoupled closed loop gyroscope, the micro-gyroscope structure disclosed in this patent drives along the X direction, detects along the Y direction, and considers the structural decoupling, but it cannot avoid the influence of the external linear acceleration, in addition, it cannot make the common mode interference mode far away from the reverse working mode during the micro-gyroscope detection, which finally causes the output signal of the micro-gyroscope to be influenced, affecting the detection precision.
Therefore, it is necessary to provide a new technical solution to solve the problem of low detection accuracy of the micro gyroscope in the prior art.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem that exists among the prior art, provide a decoupling type double-frame micro gyroscope with high detection precision, the technical scheme of adoption as follows:
a decoupled dual-frame micro-gyroscope, comprising:
the driving device comprises a left driving mass block group and a right driving mass block group, wherein the left driving mass block group and the right driving mass block group are both of a semi-surrounding structure with an opening at one side, and the openings of the left driving mass block group and the right driving mass block group are oppositely arranged;
the device comprises a left Coriolis mass block group and a right Coriolis mass block group, wherein the left Coriolis mass block group and the right Coriolis mass block group are both of a semi-enclosed structure with an opening on one side, and the openings of the left Coriolis mass block group and the right Coriolis mass block group are oppositely arranged;
the left Coriolis mass block group and the left driving mass block group are sequentially sleeved on the periphery of the left detection mass block, and the opening directions of the left Coriolis mass block group and the left driving mass block group are the same;
the right Coriolis mass block group and the right driving mass block group are sequentially sleeved on the periphery of the right detection mass block, and the opening directions of the right Coriolis mass block group and the right driving mass block group are the same.
The technical scheme is further that the device further comprises an outer frame, and the left driving quality block group and the right driving quality block group are contained in the outer frame.
Further, the left driving mass block group and the right driving mass block group are symmetrically distributed, the left driving mass block group and the right driving mass block group are connected through two driving mass block group decoupling beams, the driving mass block group decoupling beams are fixed on the driving mass block group decoupling beam anchor points, the driving mass block group decoupling beam anchor points are fixedly connected on the micro-gyroscope base body,
further, the drive mass block set decoupling beam is configured to urge the left drive mass block set and the right drive mass block set to maintain opposite directions of movement.
Furthermore, each of the left driving mass block group and the right driving mass block group comprises two driving mass blocks and a connecting arm for connecting the two driving mass blocks, each driving mass block is provided with a first driving end and a second driving end, and two ends of the connecting arm are respectively connected with the first driving ends of the two driving mass blocks, so that the left driving mass block group and the right driving mass block group respectively form a semi-surrounding structure;
further, the second driving end of one driving mass block in the left driving mass block group is connected with the second driving end of one driving mass block in the right driving mass block group through a first driving mass block group decoupling beam,
further, the second driving end of the other driving mass block in the left driving mass block group is connected with the second driving end of the other driving mass block in the right driving mass block group through a second driving mass block group decoupling beam.
Furthermore, two driving folding beams are arranged on each driving mass block, the two driving folding beams are respectively positioned at the first driving end and the second driving end of the driving mass block, and the two driving folding beams are close to the Coriolis mass block;
furthermore, each driving mass block is also provided with two driving electrodes and one driving feedback electrode, and the driving electrodes and the driving feedback electrodes are arranged on one side departing from the Coriolis mass block.
Furthermore, the first driving end and the second driving end of each driving mass block are respectively provided with one driving folding beam anchor point, the driving folding beams are fixedly connected to the micro-gyroscope substrate through the driving folding beam anchor points, and the axis direction of the driving folding beams is the same as the direction of the central connecting line of the first driving end and the second driving end of the driving mass block.
Furthermore, the left coriolis mass block group and the right coriolis mass block group respectively comprise two coriolis mass blocks and a connecting rod for connecting the two coriolis mass blocks, each coriolis mass block is provided with a first end and a second end, and the two ends of the connecting rod are respectively connected with the first ends of the two coriolis mass blocks, so that the left coriolis mass block group and the right coriolis mass block group respectively form a semi-enclosed structure;
furthermore, a first end and a second end of each Coriolis mass block are respectively provided with a detection decoupling beam, one end of each detection decoupling beam is connected with the Coriolis mass block, the other end of each detection decoupling beam is connected with the driving mass block, and the detection decoupling beams are arranged to enable the Coriolis mass block to move along with the driving mass block.
Further, the detection decoupling beam is arranged along the axial direction of the connecting rod, and the rigidity of the detection decoupling beam along the axial direction of the connecting rod is greater than the rigidity of the detection decoupling beam along the connecting line direction of the first end and the second end of the Coriolis mass block.
Furthermore, each Coriolis mass block is provided with two orthogonal correction electrodes which are respectively close to the first end and the second end of the Coriolis mass block,
further, the two coriolis masses of the left coriolis mass block set are arranged oppositely, and the orthogonal correction electrode at the first end or the second end of one coriolis mass block in the left coriolis mass block set and the orthogonal correction electrode at the second end or the first end of the other coriolis mass block in the left coriolis mass block set are adjusted simultaneously, so that the left coriolis mass block set is deflected from the first angle position to the second angle position;
furthermore, the two coriolis mass blocks of the right coriolis mass block group are arranged oppositely, and the orthogonal correction electrode at the first end or the second end of one coriolis mass block in the right coriolis mass block group and the orthogonal correction electrode at the second end or the first end of the other coriolis mass block in the right coriolis mass block group are adjusted simultaneously, so that the right coriolis mass block group is deflected from the third angular position to the fourth angular position.
Furthermore, each Coriolis mass block is provided with a driving decoupling beam, two Coriolis mass blocks in the left Coriolis mass block group are respectively connected with the left detection mass block through the driving decoupling beams, two Coriolis mass blocks in the right Coriolis mass block group are respectively connected with the right detection mass block through the driving decoupling beams,
furthermore, the drive decoupling beam comprises an H-shaped structure, the drive decoupling beam is distributed along the direction of the central connecting line of the first end and the second end of the Coriolis mass block, and the rigidity of the drive decoupling beam along the axial direction of the connecting rod is smaller than that of the drive decoupling beam along the direction of the central connecting line of the first end and the second end of the Coriolis mass block.
Furthermore, four detection electrodes are respectively arranged at the central positions of the left detection mass block and the right detection mass block, the four detection electrodes are arranged in two rows, each row is provided with two detection electrodes,
the left detection mass block and the right detection mass block are respectively provided with four detection feedback electrodes, and the four detection feedback electrodes are respectively arranged at four corners of the left detection mass block or the right detection mass block.
Furthermore, four detection folding beams are respectively arranged on the left detection mass block and the right detection mass block, each detection folding beam is fixedly connected on the micro gyroscope substrate through a detection folding beam anchor point,
furthermore, four detection folding beams are arranged at the periphery of the left detection mass block and respectively close to four corners of the left detection mass block,
furthermore, the four detection folding beams are arranged at the periphery of the right detection mass block and respectively close to four corners of the right detection mass block;
furthermore, the detection folding beam is distributed along the outer wall of the left detection mass block or the right detection mass block, and the distribution direction of the detection folding beam is parallel to the axis direction of the connecting rod of the Coriolis mass block.
Furthermore, the left detection mass block and the right detection mass block are connected through a detection mass block decoupling beam which assists the left detection mass block and the right detection mass block to keep moving in the reverse direction, the detection mass block decoupling beam is located at the center of the outer frame, and the detection mass block decoupling beam is fixedly connected to the micro gyroscope substrate through a detection mass block decoupling beam anchor point.
Further, the drive mass block group decoupling beam comprises a first deformation beam connected with the left drive mass block group, a third deformation beam connected with the right drive mass block group, a second deformation beam connecting the first deformation beam and the third deformation beam, and a support beam connected with the anchor point of the drive mass block group decoupling beam,
further, when the left driving mass block group moves towards a first direction relative to the driving mass block group decoupling beam, the first deformation beam of the driving mass block group decoupling beam generates elastic deformation under the traction of the left driving mass block group, the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass block group to move towards a second direction under the action of the elastic deformation,
furthermore, when the left driving mass block group moves towards the first direction, the left driving mass block group pulls the first deformation beam connected with the left driving mass block group to stretch towards the first direction, the stretched first deformation beam drives the third deformation beam to push the right driving mass block group to move towards the second direction through the second deformation beam,
further, when the left driving mass block group moves towards the second direction relative to the driving mass block group decoupling beam, the first deformation beam of the driving mass block group decoupling beam elastically deforms under the extrusion of the left driving mass block group, the elastic deformation of the first deformation beam is transferred to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass block group to move towards the first direction under the action of the elastic deformation,
furthermore, when the left driving mass block group moves towards the second direction, the left driving mass block group extrudes the first deformation beam connected with the left driving mass block group to compress towards the second direction, the compressed first deformation beam drives the third deformation beam to push the right driving mass block group to move towards the first direction through the second deformation beam,
further, the first direction is opposite to the second direction.
Furthermore, the first deformation beam, the second deformation beam, the third deformation beam and the supporting beam form an E-shaped structure, the first deformation beam, the third deformation beam and the supporting beam are parallel to each other, one end of the supporting beam is connected to the central position of the second deformation beam,
further, drive mass block group decoupling zero roof beam anchor point fixed connection is on decoupling zero gyro's base member, the cross sectional shape of drive mass block group decoupling zero roof beam anchor point is two-legged harpoon type, and it has the spread groove that holds the second deformation roof beam, the one end of second deformation roof beam certainly the notch of spread groove is connected to the tank bottom of spread groove, the spread groove orientation detection mass block decoupling zero roof beam.
Further, the proof mass decoupling beam comprises a first structural part connected with the left proof mass and a second structural part connected with the right proof mass,
furthermore, when the left detection mass block moves away from the detection mass block decoupling beam relative to the detection mass block decoupling beam, the first structural part of the detection mass block decoupling beam elastically deforms under the traction of the left detection mass block, the elastic deformation of the first structural part of the detection mass block decoupling beam causes the second structural part of the detection mass block decoupling beam to elastically deform, and then the second structural part of the detection mass block decoupling beam pushes the right detection mass block to move away from the detection mass block decoupling beam,
furthermore, when the left detection mass block moves close to the detection mass block decoupling beam relative to the detection mass block decoupling beam, the first structural part of the detection mass block decoupling beam elastically deforms under the extrusion of the left detection mass block, and the elastic deformation of the first structural part of the detection mass block decoupling beam causes the second structural part of the detection mass block decoupling beam to elastically deform, so that the second structural part of the detection mass block decoupling beam pulls the right detection mass block to move close to the detection mass block decoupling beam;
further, the first structure portion of proof mass decoupling beam and the second structure portion of proof mass decoupling beam are axisymmetric, the elastic deformation of the first structure portion of proof mass decoupling beam and the elastic deformation of the first structure portion of proof mass decoupling beam are also axisymmetric, the symmetry axis of the first structure portion of proof mass decoupling beam and the second structure portion of proof mass decoupling beam is the symmetry axis of left proof mass and right proof mass.
Furthermore, the decoupling beams of the detection mass blocks comprise four decoupling elastic beams of the detection mass blocks, four decoupling middle connecting beams of the detection mass blocks, four decoupling supporting beams of the detection mass blocks, a decoupling end connecting beam of the left detection mass block and a decoupling end connecting beam of the right detection mass block,
furthermore, one end of a left detection mass block decoupling end connecting beam is connected with the left detection mass block, the other end of the left detection mass block decoupling end connecting beam is connected with the middle part of one detection mass block decoupling elastic beam, one end of a right detection mass block decoupling end connecting beam is connected with the right detection mass block, the other end of the right detection mass block decoupling end connecting beam is connected with the middle part of the other detection mass block decoupling elastic beam, the detection mass block decoupling elastic beam and the detection mass block decoupling middle connecting beam are sequentially and alternately connected end to end, so that the four detection mass block decoupling elastic beams and the four detection mass block decoupling middle connecting beams are alternately connected end to form a closed loop, one end of each detection mass block decoupling supporting beam is connected with a detection mass block decoupling beam anchor point, and the other,
further, a partial structure of the proof mass decoupling beam on the side of the symmetry axis close to the left proof mass is referred to as a first structural portion, and a partial structure of the proof mass decoupling beam on the side of the symmetry axis close to the right proof mass is referred to as a second structural portion;
furthermore, each detection mass block decoupling elastic beam comprises a U-shaped part positioned in the middle and two L-shaped parts positioned at two ends, the two L-shaped parts at two ends of the detection mass block decoupling elastic beam are symmetrically arranged relative to the U-shaped part in the middle of the detection mass block decoupling elastic beam,
furthermore, the opening direction of the L-shaped part at the end part of the decoupling elastic beam of the detection mass block faces towards the anchor point of the decoupling elastic beam of the detection mass block,
furthermore, the left detection mass block decoupling end connecting beam is connected with the bottom of one U-shaped part, and the right detection mass block decoupling end connecting beam is connected with the bottom of the other U-shaped part;
furthermore, each decoupling middle connecting beam of the detection mass block is of an L-shaped structure,
furthermore, one end of each detection mass block decoupling support beam is connected with the detection mass block decoupling beam anchor point, the other end of each detection mass block decoupling support beam is connected with the angular point of the L-shaped structure, so that the four detection mass block decoupling support beams form diagonal lines in the closed loop,
furthermore, the opening direction of the decoupling middle connecting beam of the detection mass block with the L-shaped structure faces towards the anchor point of the decoupling beam of the detection mass block.
Compared with the prior art, the utility model discloses have one or more among following beneficial effect:
1. the utility model provides a decoupling type double-frame micro gyroscope, which ensures that the micro gyroscope can resist the influence of external linear acceleration in the detection process and improves the detection precision; the micro gyroscope realizes the differential amplification of the detection capacitor, improves the sensitivity of the decoupling micro gyroscope, inhibits the mechanical coupling of the driving mode and the detection mode of the micro gyroscope, ensures that the micro gyroscope can keep horizontal up-and-down motion, and greatly reduces the error; the utility model discloses micro-gyroscope structural design is reasonable compact, and the error is little, and it is high to detect the precision.
2. Decoupling type double-frame micro gyroscope has improved micro gyroscope's detection precision, and proof mass piece takes place reverse motion when ensureing to detect for reverse working mode is kept away from to common mode interference mode.
3. Built-in drive mass block group, brother's mass block group, the proof mass piece of being equipped with of the frame construction of little top of two frame of decoupling zero formula, proof mass piece can not take place the motion during drive, has the decoupling zero function, has restrained drive mode and detection mode mechanical coupling.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the overall structure of a micro gyroscope according to the present invention;
FIG. 2 is a schematic view of the driving structure of the micro gyroscope of the present invention;
FIG. 3 is a schematic view of the micro gyroscope detection structure of the present invention;
fig. 4 is a schematic structural view of the decoupling beam of the proof mass of the present invention;
fig. 5 is a schematic structural view of the decoupling beam of the driving mass of the present invention.
Wherein, 1 a-left frame structure; 1 b-a right frame structure;
2 a-left drive mass block set (also referred to as first drive mass block set); 2 b-right drive mass block set (also referred to as second drive mass block set);
3 a-a first drive electrode; 3 b-a second drive electrode; 3 c-a third drive electrode; 3 d-fourth drive electrode; 3 e-a fifth drive electrode; 3 f-a sixth drive electrode; 3 g-a seventh drive electrode; 3 h-eighth drive electrode;
4 a-a first drive feedback electrode; 4 b-a second drive feedback electrode; 4 c-a third drive feedback electrode; 4 d-a fourth drive feedback electrode;
5 a-a first driven folding beam; 5 b-a second driven folding beam; 5 c-a third driven folding beam; 5 d-a fourth drive folding beam; 5 e-a fifth driven folding beam; 5 f-a sixth driven folding beam; 5 g-a seventh driven folding beam; 5 h-eighth drive folding beam;
6 a-a first drive decoupling beam; 6 b-a second drive decoupling beam; 6 c-a third drive decoupling beam; 6 d-a fourth drive decoupling beam;
7 a-a first drive mass block set decoupling beam; 7 b-a second drive mass block set decoupling beam;
8 a-left proof mass (also referred to as first proof mass); 8 b-right proof mass (also referred to as second proof mass);
9 a-a first detection electrode; 9 b-a second detection electrode; 9 c-a third detection electrode; 9 d-a fourth detection electrode; 9 e-a fifth detection electrode; 9 f-a sixth detection electrode; 9 g-a seventh detection electrode; 9 h-eighth detection electrode;
10 a-a first detection feedback electrode; 10 b-a second detection feedback electrode; 10 c-a third detection feedback electrode; 10 d-a fourth detection feedback electrode; 10 e-a fifth detection feedback electrode; 10 f-a sixth detection feedback electrode; 10 g-a seventh detection feedback electrode; 10 h-an eighth detection feedback electrode;
11 a-a first detecting folding beam; 11 b-a second detecting folding beam; 11 c-a third detecting folding beam; 11 d-a fourth detecting folding beam; 11 e-a fifth detecting folding beam; 11 f-sixth inspection folding beam; 11 g-a seventh detecting folding beam; 11 h-eighth detection folding beam;
12 a-a first detection decoupling beam; 12 b-a second detection decoupling beam; 12 c-a third detection decoupling beam; 12 d-a fourth detection decoupling beam; 12 e-a fifth detection decoupling beam; 12 f-a sixth detection decoupling beam; 12 g-a seventh detection decoupling beam; 12 h-an eighth detection decoupling beam;
13-proof mass decoupling beam;
14 a-left boy's mass block set (also referred to as first boy's mass block set); 14 b-right boy's mass block set (also called second boy's mass block set);
15 a-first driven folding beam anchor point; 15 b-second driven folding beam anchor point; 15 c-third drive folding beam anchor point; 15 d-fourth driving folding beam anchor point; 15 e-a fifth drive folding beam anchor point; 15 f-a sixth drive folding beam anchor point; 15 g-a seventh driven folding beam anchor point; 15 h-an eighth drive folding beam anchor point;
16 a-first detection folding beam anchor point; 16 b-a second detection folding beam anchor point; 16 c-a third detection folding beam anchor point; 16 d-fourth detecting a folded beam anchor point; 16 e-a fifth detection folding beam anchor point; 16 f-sixth detection folding beam anchor point; 16 g-a seventh detection folding beam anchor point; 16 h-eighth detection of the folding beam anchor point;
17 a-a first quadrature correction electrode; 17 b-a second quadrature correction electrode; 17 c-a third quadrature correction electrode; 17 d-a fourth quadrature correction electrode; 17 e-a fifth quadrature correction electrode; 17 f-a sixth quadrature correction electrode; 17 g-a seventh orthogonal correction electrode; 17 h-an eighth orthogonal correction electrode;
18 a-a first drive mass block set decoupling beam anchor point; 18 b-a second drive mass block set decoupling beam anchor point;
19-detecting mass block decoupling beam anchor point;
710-a first deformation beam; 720-second beam deformation; 730-a third deformation beam; 740-a support beam;
1310-decoupling the proof mass from the spring beam; 1320-decoupling the proof mass to the intermediate connecting beam; 1330-decoupling the support beam with the proof mass; 1340-a first proof mass decoupling end connecting beam; 1350-a second proof mass decoupling end connecting beam;
a-a first direction; b-a second direction.
Detailed Description
The technical solutions of the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The gist of the present invention will be further explained with reference to the accompanying drawings and examples.
Example (b):
the gyroscope in the prior art always has the problem of mechanical coupling in the motion process, so that the detection precision of the gyroscope is reduced, a Coriolis mass block is additionally arranged in the gyroscope for inhibiting the mechanical coupling, but the processing precision requirement of the Coriolis mass block is high, if the arranged Coriolis mass block cannot meet the required precision requirement, the Coriolis mass block can deflect in the gyroscope, the deflection amount cannot be adjusted, the integral orthogonal error can be increased, and the detection precision of the gyroscope is influenced.
To the problem that exists among the prior art, the utility model provides a little top of decoupling zero formula, it includes: bilateral symmetry's two frame construction (left frame construction 1a and right frame construction 1b), left frame construction 1a and right frame construction 1b constitute outer frame jointly, and left frame construction 1a and right frame construction 1b all are the drive mass block group, the brother mass block group and the proof mass block of holding that dispose, drive mass block group, the brother mass block group and proof mass block are in arrange in proper order from outside to inside in left frame construction 1a and right frame construction 1b, drive mass block group, the brother mass block group and proof mass block loop through decoupling beam structure and be connected, and this decoupling beam structure and folding beam structure pass through anchor point fixed connection on the micro-gyroscope base member, all be provided with the electrode on drive mass block group, the brother mass block group and the proof mass block, be provided with the quadrature correction electrode on the brother mass block group.
In an embodiment, referring to fig. 1-3, the decoupling micro gyroscope structure of the present invention is composed of two frame structures (a left frame structure 1a and a right frame structure 1b) that are bilaterally symmetric, wherein each of the frame structures includes a driving mass block set 2a, 2b, a coriolis mass block set 14a, 14b, a proof mass block 8a, 8b, a beam structure 5 a-5 h, 6 a-6 d, 7 a-7 b, 11 a-11 h, 12 a-12 h, 13, an electrode 3 a-3 h, 4 a-4 d, 9 a-9 h, 10 a-10 h, 17 a-17 h, and an anchor point 15 a-15 h, 16 a-16 h, 18 a-18 b, 19.
The frame structures 1a and 1b are respectively provided with driving mass block groups 2a and 2b, Coriolis mass block groups 14a and 14b and detection mass blocks 8a and 8b from outside to inside, the three different mass blocks are connected through decoupling beams 6a to 6d, 7a to 7b, 12a to 12h and 13, and are fixedly supported through folding beams 5a to 5h and 11a to 11h and anchor points 15a to 15h, 16a to 16h, 18a to 18b and 19. Wherein, the upper and lower both sides of drive mass block group 2a, 2b are provided with drive electrode 3a ~ 3h and drive feedback electrode 4a ~ 4d respectively, and be provided with quadrature correction electrode 17a ~ 17h in the middle of brother's mass block group 14a, 14b, be provided with in the middle of the detection mass block 8a, 8b measuring electrode 9a ~ 9h and detection feedback electrode 10a ~ 10h, above the structure form basically the micro gyroscope structure.
For better illustration, the structure of the decoupling micro gyroscope of the present invention may establish a three-dimensional rectangular coordinate system, in one embodiment, two of the whole mass center of the frame structure is used as the origin of coordinates, the direction parallel to the central axis of the frame structure is used as the Y axis, the direction parallel to the central axis of the cross section of the frame structure is used as the X axis, the X axis and the Y axis both pass through the origin of coordinates, the Z axis is determined by using the Y axis and the X axis as coordinate axes, and the three-dimensional rectangular coordinate system is established by the X axis, the Y axis and the Z axis (the establishment of the coordinate system is shown in fig. 1), and the left frame structure 1a and the right frame structure 1b are symmetrical about the Y axis.
With continued reference to fig. 1-3, the frame structures 1a and 1b are respectively provided with driving mass block sets 2a and 2b, coriolis mass block sets 14a and 14b, and proof mass blocks 8a and 8b from outside to inside. In an embodiment, in the present invention, each of the frame structures is provided with one driving mass block group, the driving mass block group is a rectangular frame with an opening on one side, and the opening direction is toward the origin of coordinates, the driving mass block in the left frame structure and the driving mass block in the right frame structure are symmetrical about the Y axis; therefore, decoupling type micro gyroscope in total have drive mass block group two, for left drive mass block group 2a and right drive mass block group 2b, of course, arbitrary drive mass block group includes the drive mass block of two relative settings, these two drive mass blocks are linked to each other by the linking arm, also consequently make drive mass block group is one side and has open-ended rectangular frame.
In an embodiment, each of the driving mass block sets of the present invention is provided with one of the coriolis mass block sets, the coriolis mass block set is a rectangular frame having an opening at one side, and the opening is oriented toward the origin of coordinates, the coriolis mass block set in the left frame structure and the coriolis mass block set in the right frame structure are symmetrical about the Y axis; therefore, decoupling type micro gyroscope in total have brother's mass block group two, arbitrary one brother's mass block group includes the relative brother's mass block that sets up of two, these two brother's mass blocks are linked to each other by the connecting rod, also consequently make brother's mass block group is one side and has open-ended rectangular frame.
In one embodiment, each of the ge's mass block sets of the present invention is provided with one of the proof masses, the proof mass is a tetragonal frame structure, and the proof mass in the left frame structure and the proof mass in the right frame structure are symmetrical about the Y axis; therefore, the decoupling type micro gyroscope in the utility model has two detection mass blocks.
In a further embodiment, the decoupling beam structures 6a to 6d, 7a to 7b, 12a to 12h, 13 of the present invention include driving decoupling beams 6a to 6d, detecting decoupling beams 12a to 12h, driving mass block set decoupling beams 7a, 7d, detecting mass block decoupling beams 13; the folding beam structures 5 a-5 h and 11 a-11 h comprise driving folding beams 5 a-5 h and detecting folding beams 11 a-11 h; the electrodes 3a to 3h, 4a to 4d, 9a to 9h, 10a to 10h and 17a to 17h comprise driving electrodes 3a to 3h, driving feedback electrodes 4a to 4d, orthogonal correction electrodes 17a to 17h, detection electrodes 9a to 9h and detection feedback electrodes 10a to 10 h; the anchor points 15 a-15 h, 16 a-16 h, 18 a-18 b and 19 comprise drive folding beam anchor points 15 a-15 h, detection folding beam anchor points 16 a-16 h, drive mass block group decoupling beam anchor points 18a and 18b and detection mass block decoupling beam anchor points 19.
Left side drive quality block group 2a and right drive quality block group 2b be connected through two upper and lower drive quality block group decoupling zero roof beams 7a, 7 b. The left driving mass block group 2a is positioned on the left side of the micro-gyroscope structure and is fixedly supported by four driving folding beams 5 a-5 d and four driving folding beam anchor points 15 a-15 d. Four driving electrodes 3 a-3 d and two driving feedback electrodes 4a and 4b are arranged on the upper side and the lower side of the left driving mass block group 2 a. Similarly, the right driving mass block group 2b is positioned on the right side of the micro-gyroscope structure and is connected with the four driving folding beam anchor points 15e to 15h through the four driving folding beams 5e to 5 h. Four driving electrodes 3 e-3 h and two driving feedback electrodes 4c and 4d are arranged on the upper side and the lower side of the right driving mass block group 2 b.
In a further embodiment, with reference to fig. 2, the driving mass block group is a rectangular frame with an opening on one side, the inner wall of the rectangular frame is provided with four driving folding beam anchor points, the four driving folding beam anchor points are respectively connected to four corner points of the rectangular frame, each driving folding beam anchor point is connected to one driving folding beam, and the driving folding beams are distributed along the X-axis direction. The Coriolis mass block group and the driving mass block group are connected through a detection decoupling beam, the detection decoupling beam is distributed along the Y axis, and the rigidity of the detection decoupling beam along the detection direction is smaller than that of the detection decoupling beam along the driving direction (the rigidity of the detection decoupling beam along the axial direction of the connecting rod is larger than that of the detection decoupling beam along the connecting line direction of the first end and the second end of the Coriolis mass block); two driving electrodes are respectively arranged at two ends of the driving mass block group along the Y-axis direction, the driving electrodes are positioned on the outer side of a rectangular frame forming the driving mass block group, the two driving electrodes are oppositely arranged on one side edge of the rectangular frame, and one of the two driving electrodes close to the origin of coordinates is oppositely arranged with the driving feedback electrode.
The utility model discloses a drive folding beam 5a ~ 5h total have 8, and the structural dimension is unanimous, first to fourth drive folding beam 5a ~ 5d are located respectively the left side drives quality block group 2a inboard all around, are connected respectively left side drive quality block group 2a and first to fourth drive folding beam anchor point 15a ~ 15d to carry out the fixed support through first drive folding beam anchor point 15a to fourth drive folding beam anchor point 15 d; the fifth to eighth driving folding beams 5e to 5h are positioned on the inner side of the periphery of the right driving mass block group 2b, are respectively connected with the right driving mass block group 2b and fifth to eighth driving folding beam anchor points 15e to 15h, and are fixedly supported through the fifth to eighth driving folding beam anchor points 15e to 15 h.
The utility model discloses a total of 8 detection folding beams 11 a-11 h, and the structural dimension is unanimous, and first to fourth detection folding beams 11 a-11 d are located the left detection quality piece 8a outside all around respectively, and connect respectively left detection quality piece 8a and first to fourth detection folding beam anchor point 16 a-16 d, and carry out the fixed support through first to fourth detection folding beam anchor point 16 a-16 d; the fifth to eighth detection folding beams 11e to 11h are positioned on the outer sides of the periphery of the right detection mass block 8b, are respectively connected with the right detection mass block 8b and the fifth to eighth detection folding beam anchor points 16e to 16h, and are fixedly supported through the fifth to eighth detection folding beam anchor points 16e to 16 h.
In a further embodiment, the drive mass block group decoupling beam anchor points are in a two-prong structure, the drive mass block group decoupling beam anchor points include two, two of the drive mass block group decoupling beam anchor points are symmetric about the X axis, and one of the drive mass block group decoupling beam anchor points is symmetric about the Y axis. The drive mass block group decoupling beam comprises two drive mass block group decoupling beams, the drive mass block group decoupling beams are of a three-legged fork structure, one drive mass block group decoupling beam is correspondingly connected with one drive mass block group decoupling beam anchor point in a plugging mode, the drive mass block group decoupling beams are symmetrical about the Y axis, and the drive mass block group of the left frame structure is connected with the drive mass block group of the right frame structure through the drive mass block group decoupling beams.
The Coriolis mass block group 14a, 14b quantity include 2, be left Coriolis mass block group 14a and right Coriolis mass block group 14b respectively, both structure size is unanimous, and is axisymmetric along the Y axle. The left Coriolis mass block group 14a is located on the left side of the micro gyroscope structure, is surrounded by the left driving mass block group 2a, and is connected with the left driving mass block group 2a through four detection decoupling beams 12 a-12 d; the left Coriolis mass block group 14a is internally provided with four orthogonal correction electrodes 17a to 17d for adjusting the torsional component of the left Coriolis mass block group 14a so as to enable the left Coriolis mass block group to horizontally move up and down along the Y-axis direction. Similarly, the right coriolis mass block group 14b is located on the right side of the micro gyroscope structure, is surrounded by the right driving mass block 2b, and is connected with the right driving mass block group 2b through four detection decoupling beams 12e to 12 h; the right Coriolis mass block group 14b is internally provided with four orthogonal correction electrodes 17e to 17h for adjusting the torsional component of the right Coriolis mass block group 14b to enable the right Coriolis mass block group to horizontally move up and down along the Y-axis direction.
In one embodiment, each of the left and right coriolis mass block sets includes two coriolis mass blocks and a connecting rod connecting the two coriolis mass blocks, each of the coriolis mass blocks has a first end and a second end, and both ends of the connecting rod are respectively connected to the first ends of the two coriolis mass blocks, so that the left and right coriolis mass block sets respectively form a semi-enclosed structure; each Coriolis mass block is provided with two orthogonal correction electrodes which are respectively close to the first end and the second end of the Coriolis mass block,
the two Coriolis mass blocks of the left Coriolis mass block set are arranged oppositely, the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the left Coriolis mass block set and the orthogonal correction electrode at the second end or the first end of the other Coriolis mass block in the left Coriolis mass block set are adjusted simultaneously, and the left Coriolis mass block set realizes deflection from a first angle position to a second angle position;
the two Coriolis mass blocks of the right Coriolis mass block group are arranged oppositely, the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the right Coriolis mass block group and the orthogonal correction electrode at the second end or the first end of the other Coriolis mass block in the right Coriolis mass block group are adjusted simultaneously, and the right Coriolis mass block group realizes deflection from a third angle position to a fourth angle position.
In a further embodiment, with continued reference to fig. 2-3, two ends of the coriolis mass block set along the Y-axis direction are respectively provided with two orthogonal calibration electrodes, the coriolis mass block is a rectangular frame with an opening at one side, the proof mass block is accommodated in the rectangular frame from the opening, two ends of the proof mass block along the Y-axis direction are respectively provided with the driving decoupling beams, the two driving decoupling beams include an "H" type structure, and the coriolis mass block and the proof mass block are connected through the driving decoupling beams; the rigidity of the driving decoupling beam along the driving direction is smaller than that of the driving decoupling beam along the detection direction (the rigidity of the driving decoupling beam along the axial direction of the connecting rod is smaller than that of the driving decoupling beam along the connecting line direction of the first end and the second end of the Coriolis mass block).
The utility model discloses a total of 4 drive decoupling zero roof beams 6a ~ 6d, and the structural dimension is unanimous, and the shape is "H" type or other shapes, and the rigidity of drive decoupling zero roof beam 6a ~ 6d along the drive direction is far less than along detection direction rigidity, and first drive decoupling zero roof beam 6a and second drive decoupling zero roof beam 6b are connecting left brother's mass block group 14a and left detection mass block 8 a; the third drive decoupling beam 6c and the fourth drive decoupling beam 6b are connected to the right coriolis mass block set 14b and the right proof mass 8 b.
Detect decoupling zero roof beam 12a ~ 12h and have 8 in total, and structural dimension is unanimous, and the shape is the same with the folding beam shape, detects decoupling zero roof beam 12a ~ 12h and is far less than along drive direction rigidity along detection direction's rigidity (detect decoupling zero roof beam edge the rigidity of the axis direction of connecting rod is greater than its edge the rigidity of the first end of brother's quality piece and second end line direction), first to fourth detect decoupling zero roof beam 12a ~ 12d and are connecting left brother's quality piece 14a and left drive quality piece 2a, and fifth to eighth detect decoupling zero roof beam 12e ~ 12h and are connecting right brother's quality piece 14b and right drive quality piece 2 b.
Drive mass block group decoupling zero roof beam 7a, 7b total has 2, and the structure size is unanimous, the shape of each can be the tripod type, be located micro-gyroscope central point and put both sides from top to bottom respectively, be used for connecting left drive mass block group 2a and right drive mass block group 2b, and through first drive mass block group decoupling zero roof beam anchor point 18a and second drive mass block group decoupling zero roof beam anchor point 18b fixed stay, make the common mode resonant frequency of micro-gyroscope during the drive far away from reverse working mode resonant frequency, ensure that left drive mass block group 2a and right drive mass block group 2b take place reverse motion, the influence of external linear acceleration has been suppressed. The two anchor points 18a and 18b of the decoupling beams of the drive mass block group are respectively positioned on the upper side and the lower side of the decoupling beams of the drive mass block group, are in a two-prong shape, and are used for protecting the middle beams of the decoupling beams 7a and 7b of the drive mass block group, so that the decoupling beams are not easy to bend and break at large angles. The number of the decoupling beams 13 of the detection mass block is 1, the decoupling beams are located at the center of the micro gyroscope and used for connecting the left detection mass block 8a and the right detection mass block 8b, and the decoupling beams are fixedly supported by the anchor points 19 of the decoupling beams of the detection mass block, so that the common mode resonance frequency of the micro gyroscope during detection is far greater than the resonance frequency of a reverse working mode, and the left detection mass block 8a and the right detection mass block 8b are ensured to move reversely.
In a further embodiment, with reference to fig. 3, two ends of the proof mass along the Y-axis direction are respectively provided with two anchor points of the folded detection beam, the two anchor points of the folded detection beam are oppositely disposed at the edge of the proof mass, each anchor point of the folded detection beam is connected to one folded detection beam, and the folded detection beam is disposed on the outer wall of the proof mass along the Y-axis direction.
In one embodiment, the proof mass block is a square frame structure, four detection feedback electrodes are disposed in the square frame structure, the four detection feedback electrodes are correspondingly disposed at four corners of the square frame structure one by one, four detection electrodes are further disposed in the square frame structure, and the four detection electrodes are arranged in a secondary array.
In one embodiment, the proof mass in the left frame structure is connected with the proof mass in the right frame structure through a proof mass decoupling beam, the proof mass decoupling beam is fixedly connected to a proof mass decoupling beam anchor point, and the proof mass decoupling beam anchor point is installed at the coordinate origin point.
Detecting electrode 9a ~ 9h total has 8, and the structural dimension is unanimous, detects feedback electrode 10a ~ 10h quantity 8, and the structural dimension is unanimous, all along X axle and Y axle symmetric distribution. The first, second, third and fourth detection electrodes 9 a-9 d are positioned at the center of the inner side of the left detection mass block 8a, and the first, second, third and fourth detection feedback electrodes 10 a-10 d are positioned at the periphery of the inner side of the left detection mass block 8 a; similarly, the fifth, sixth, seventh and eighth sensing electrodes 9a to 9d are located at the center of the inner side of the right proof mass block 8b, and the fifth, sixth, seventh and eighth sensing feedback electrodes 10e to 10h are located at the periphery of the inner side of the right proof mass block 8 b.
In an embodiment, refer to fig. 4 and 5, fig. 4 is a schematic structural diagram of a decoupling beam of the proof mass according to the present invention; fig. 5 is the structure schematic diagram of the decoupling beam of the driving mass block group.
It should be noted that, referring to the drawings, in fact, the left proof mass may also be referred to as a first proof mass, the right proof mass may be referred to as a second proof mass, the left driving mass block may be referred to as a first driving mass block, the right driving mass block may be referred to as a second driving mass block, the left coriolis mass block may be referred to as a first coriolis mass block, and the right coriolis mass block may be referred to as a second coriolis mass block, where "left", "right", "first", and "second" are merely referred to as a single description, and do not refer to any specific or positional limitations.
Referring to fig. 4, in an embodiment, the first proof mass 8a and the second proof mass 8b of the decoupled micro gyroscope of the present invention move in opposite directions under the coriolis force; and proof mass decoupling beams 13 connected between the first proof mass 8a and the second proof mass 8b, configured to urge the first proof mass 8a and the second proof mass 8b to maintain movement in opposite directions.
In one embodiment, the left proof mass 8a in the left frame structure 1a and the right proof mass 8b in the right frame structure 1b are connected by proof mass decoupling beams 13. The proof mass decoupling beam 13 is configured to connect the two proof masses 8a, 8b, and make the two proof masses 8a, 8b perform simple harmonic motion respectively, as the first proof mass 8a moves away (moves in direction C) relative to the proof mass decoupling beams 13, the proof mass decoupling beam 13 is elastically deformed under the traction of the first proof mass 8a, and further pushes the second proof mass 8b to move away (towards direction D) relative to the proof mass decoupling beam 13, and when the first proof mass 8a moves close (towards direction D) relative to the proof mass decoupling beam 13, the proof mass decoupling beam 13 is elastically deformed under the compression of the first proof mass 8a, and further pulls the second proof mass 8b to move closer (toward direction C) relative to the proof mass decoupling beam 13.
In one embodiment, the proof mass decoupling beams 13 comprise a first structural portion connected to the first proof mass 8a and a second structural portion connected to the second proof mass 8b,
when the first proof mass 8a moves away from the proof mass decoupling beam 13, the first structural part of the proof mass decoupling beam 13 elastically deforms under the traction of the first proof mass 8a, the elastic deformation of the first structural part of the proof mass decoupling beam 13 causes the second structural part of the proof mass decoupling beam 13 to elastically deform, and further the second structural part of the proof mass decoupling beam 13 pushes the second proof mass 8b to move away from the proof mass decoupling beam 13,
when the first detection mass block 8a moves close to the detection mass block decoupling beam 13, the first structural part of the detection mass block decoupling beam 13 elastically deforms under the extrusion of the first detection mass block 8a, and the elastic deformation of the first structural part of the detection mass block decoupling beam 13 causes the second structural part of the detection mass block decoupling beam 13 to elastically deform, so that the second structural part of the detection mass block decoupling beam 13 pulls the second detection mass block 8b to move close to the detection mass block decoupling beam 13.
In one embodiment, the first structural portion of the proof mass decoupling beam 13 and the second structural portion of the proof mass decoupling beam 13 are axisymmetric, the elastic deformation of the first structural portion of the proof mass decoupling beam 13 and the elastic deformation of the first structural portion of the proof mass decoupling beam 13 are also axisymmetric, and the symmetry axes of the first structural portion of the proof mass decoupling beam and the second structural portion of the proof mass decoupling beam are the symmetry axes of the first proof mass 8a and the second proof mass 8 b.
In one embodiment, the proof mass decoupling beams 13 comprise four proof mass decoupling spring beams 1310, four proof mass decoupling middle connecting beams 1320, four proof mass decoupling support beams 1330, a first proof mass decoupling end connecting beam 1340 and a second proof mass decoupling end connecting beam 1350,
one end of a first proof mass decoupling end connecting beam 1340 is connected with the first proof mass 8a, the other end is connected with the middle of one proof mass decoupling elastic beam 1310, one end of a second proof mass decoupling end connecting beam 1350 is connected with the second proof mass 8b, the other end is connected with the middle of the other proof mass decoupling elastic beam 1310, the proof mass decoupling elastic beams 1310 and the proof mass decoupling middle connecting beams 1320 are sequentially and alternately connected end to end, so that the four proof mass decoupling elastic beams 1310 and the four proof mass decoupling middle connecting beams 1320 are alternately connected end to form a closed loop, one end of each proof mass decoupling supporting beam 1330 is connected with a proof mass decoupling beam anchor point 19, and the other end is connected with the middle of the corresponding one proof mass decoupling middle connecting beam 1320,
the partial structure of the proof mass decoupling beam 13 on the side of the symmetry axis close to the first proof mass 8a is referred to as a first structural portion, and the partial structure of the proof mass decoupling beam 13 on the side of the symmetry axis close to the second proof mass 8b is referred to as a second structural portion.
In one embodiment, each proof mass decoupling spring beam 1310 includes a U-shaped portion in the middle and two L-shaped portions at two ends, the two L-shaped portions at two ends of the proof mass decoupling spring beam 1310 are symmetrically disposed about the U-shaped portion in the middle of the proof mass decoupling spring beam 1310,
the opening direction of the L-shaped portion of the end of the proof mass decoupling spring beam 1310 is toward the proof mass decoupling beam anchor point 19,
the first proof mass decoupling end connecting beam 1340 is connected to the bottom of one of the U-shaped portions, and the second proof mass decoupling end connecting beam 1350 is connected to the bottom of the other U-shaped portion.
In one embodiment, each proof mass decoupling intermediate connecting beam 1320 is an L-shaped structure,
one end of each proof mass decoupling support beam 1330 is connected to the proof mass decoupling beam anchor point 19, and the other end is connected to the corner points of the L-shaped structure, so that the four proof mass decoupling support beams 1330 form diagonal lines in the closed loop,
the opening direction of the proof mass decoupling intermediate connecting beam 1320 of the L-shaped structure faces the proof mass decoupling beam anchor point 19.
In one embodiment, as the first proof mass 8a moves away relative to the proof mass decoupling beams 13, the proof mass decoupling spring beams 1310 coupled to the first proof mass decoupling end connecting beams 1340 are elastically deformed, the elastic deformation makes the included angle between the two decoupling support beams 1330 of the first structure portion of the decoupling beams 13 of the proof mass smaller to generate an external thrust, this external thrust forces the first proof mass 8a to move away from the proof mass decoupling beams 13, the external thrust generated by the first structural part causes the included angle of the two proof mass decoupling support beams 1330 of the second structural part to be smaller through the proof mass decoupling beam anchor points 19 to generate reverse external thrust, this opposing external thrust forces the second proof mass 8b to move away from the proof mass decoupling beams 13;
when the first proof mass 8a moves close to the proof mass decoupling beam 13, the proof mass decoupling elastic beam 1310 connected with the first proof mass decoupling end connecting beam 1340 deforms elastically, the elastic deformation makes the included angle between the two decoupling support beams 1330 of the first structure portion of the decoupling beams 13 of the proof mass larger to generate an internal thrust, this internal thrust forces the first proof mass 8a to move closer with respect to the proof mass decoupling beams 13, the internal thrust generated by the first structural part causes the included angle of the two proof mass decoupling support beams 1330 of the second structural part to be increased through the proof mass decoupling beam anchor points 19 to generate reverse internal thrust, this opposing internal thrust forces the second proof mass 8b to move closer relative to the proof mass decoupling beams 13.
With continued reference to fig. 5, in an embodiment, when the decoupling type micro gyroscope moves in the first direction (i.e., moves in the a direction) relative to the decoupling beam 7a of the first driving mass block group 2a, the decoupling beam 7a of the first driving mass block group elastically deforms under the traction of the first driving mass block group 2a, and then pushes the second driving mass block group 2B to move in the second direction (i.e., moves in the B direction) relative to the decoupling beam 7a of the first driving mass block group, and when the decoupling beam 2a of the first driving mass block group moves in the second direction (i.e., moves in the B direction) relative to the decoupling beam 7a of the first driving mass block group, the decoupling beam 7a of the first driving mass block group elastically deforms under the extrusion of the first driving mass block group 2a, and then pushes the decoupling beam 2B of the second driving mass block group to move in the first direction (i.e., moves in the a direction) relative to the decoupling beam 7a of the first driving mass block group.
In one embodiment, the first driving mass block set decoupling beam 7a includes a first deformation beam 710 connected to the first driving mass block set 2a, a third deformation beam 730 connected to the second driving mass block set 2b, a second deformation beam 720 connecting the first deformation beam 710 and the third deformation beam 730, and a support beam 740 connected to the first driving mass block set decoupling beam anchor 18a,
when the first driving mass block group 2a moves towards the first direction relative to the first driving mass block group decoupling beam 7a, the first deformation beam 710 of the first driving mass block group decoupling beam 7a is elastically deformed under the traction of the first driving mass block group 2a, the elastic deformation of the first deformation beam 710 is transferred to the third deformation beam 730 under the action of the second deformation beam 720, and the third deformation beam 730 pushes the second driving mass block group 2b to move towards the second direction under the action of the elastic deformation,
when the first driving mass block group 2a moves in the second direction relative to the first driving mass block group decoupling beam 7a, the first deformation beam 710 of the first driving mass block group decoupling beam 7a elastically deforms under the extrusion of the first driving mass block group 2a, the elastic deformation of the first deformation beam 710 is transferred to the third deformation beam 730 under the action of the second deformation beam 720, and the third deformation beam 730 pushes the second driving mass block group 2b to move in the first direction under the action of the elastic deformation,
the first direction is opposite to the second direction.
In one embodiment, when the first driving mass block set 2a moves towards the first direction, the first driving mass block set 2a pulls the first deformation beam 710 connected thereto to stretch towards the first direction, the stretched first deformation beam 710 drives the third deformation beam 730 to push the second driving mass block set 2b to move towards the second direction through the second deformation beam 720,
when the first driving mass block group 2a moves towards the second direction, the first driving mass block group 2a extrudes the first deformation beam 710 connected with the first driving mass block group to compress towards the second direction, the compressed first deformation beam 710 drives the third deformation beam 730 to push the second driving mass block group 2b to move towards the first direction through the second deformation beam 720,
the first driving mass block group 2a and the second driving mass block group 2b are driven by the first driving mass block group decoupling beam 7a to make simple harmonic motion respectively, and the first driving mass block group 2a and the second driving mass block group 2b form differential motion.
In one embodiment, the first deformation beam 710, the second deformation beam 720, the third deformation beam 730 and the support beam 740 form an "E" shaped structure, the first deformation beam 710, the third deformation beam 730 and the support beam 740 are parallel to each other, one end of the support beam 740 is connected to a central position of the second deformation beam 720,
first drive mass block group decoupling zero roof beam anchor point 18a fixed connection is on decoupling zero gyro's base member, first drive mass block group decoupling zero roof beam anchor point 18 a's cross sectional shape is two-legged harpoon type, and it has the spread groove of holding second deformation roof beam 720, second deformation roof beam 720's one end certainly the notch of spread groove is connected to the tank bottom of spread groove, the spread groove orientation detection mass block decoupling zero roof beam.
Decoupling type gyroscope under the drive of electrostatic force, left drive quality block group, right drive quality block group of little gyroscope can drive left brother's quality block group respectively, reverse linear simple harmonic vibration is made along Y axle direction to right brother's quality block group, when detecting Z axle direction angular velocity input, little gyroscope can drive left brother's quality block group because of the koch power that the koch effect produced, right brother's quality block group can drive left proof mass piece respectively, right proof mass piece is reverse in-plane motion along the X axle, the detection of Z axle angular velocity can be realized to the capacitance variation through sensitive detection electrode.
The utility model provides a decoupling type gyroscope, it mainly comprises two frame construction of bilateral symmetry (outer frame promptly, including it wraps up left drive quality block group and right drive quality block group), and bilateral symmetry about outer frame (formed two the same left frame construction and right frame construction promptly), and both sides all include drive quality block group, brother's quality block group, proof mass piece, beam structure (decoupling zero roof beam and folding beam), electrode and anchor point about. The drive mass block group, the Coriolis mass block group and the detection mass block are respectively arranged in the left frame structure and the right frame structure from outside to inside and are connected through a decoupling beam, the decoupling beam is fixedly supported through a folding beam and an anchor point, drive electrodes and drive feedback electrodes are distributed on the upper side and the lower side of the drive mass block group, orthogonal correction electrodes are distributed in the middle of the Coriolis mass block, and detection electrodes and detection feedback electrodes are distributed in the middle of the detection mass block. Micro-gyroscope structure adopt electrostatic drive, differential capacitance detects, its ingenious design drive quality block group decoupling zero roof beam for control two drive quality block groups along Y axle direction reverse motion (see X, Y, Z three-dimensional rectangular coordinate system marked in the attached drawing), can resist external linear acceleration's influence.
The decoupling type micro gyroscope of the utility model designs the decoupling beams of the detection mass blocks, so that the left detection mass block and the right detection mass block move reversely along the X-axis direction, thereby realizing the differential amplification of the detection capacitor and improving the sensitivity of the decoupling type micro gyroscope; by designing a decoupling structure and an orthogonal correction structure, the mechanical coupling of a driving mode and a detection mode of the micro gyroscope is inhibited, so that the micro gyroscope can keep horizontal up-and-down motion, and the orthogonal error is greatly reduced; the utility model discloses micro-gyroscope structural design is reasonable compact, and the quadrature error is little, and it is high to detect the precision.
Decoupling zero formula micro gyroscope adopts lever drive, quadrature correction, resists external linear acceleration to and differential capacitance detection etc. improve micro gyroscope's detection precision, and detection mass piece takes place the reverse motion when detection can be ensured to the detection mass piece decoupling zero roof beam in the micro gyroscope structure, makes the reverse mode of operation of mode keeping away from to the common mode interference mode.
Frame construction installs built-in drive mass block group, brother's mass block group, proof mass piece that is equipped with, drive mass block group drives brother's mass block group and takes place the motion along Y axle direction during the drive of micro-gyroscope, when sensitive when external when having angular velocity input, the brother's mass block group of micro-gyroscope can drive proof mass piece and take place the motion along the X axle, proof mass piece can not take place the motion during the drive, has the decoupling function, has restrained drive mode and detection mode mechanical coupling. Meanwhile, the designed micro gyroscope has an orthogonal error structure, and the voltage is applied to the orthogonal correction electrode to control and adjust the torsion component of the Coriolis mass block group, so that the Coriolis mass block group moves up and down horizontally along the Y-axis direction, and the orthogonal error is greatly reduced.
The decoupling type micro gyroscope structure of the utility model adopts electrostatic drive and differential capacitance detection, and has the design advantages that the decoupling beam of the driving mass block group is skillfully designed, so that the left and right driving mass block groups reversely move along the Y-axis direction, the influence of external linear acceleration can be resisted, and the signal-to-noise ratio of the structure is improved; the structure is also provided with a decoupling beam of the detection mass block, so that the left detection mass block and the right detection mass block move reversely along the X-axis direction, the differential amplification of the detection capacitor is realized, and the sensitivity of the structure is improved; a decoupling structure and an orthogonal correction structure are designed in the structure, mechanical coupling of a micro gyroscope driving mode and a micro gyroscope detection mode is restrained, horizontal up-and-down motion is kept, orthogonal errors are greatly reduced, and detection accuracy of the micro gyroscope is improved.
In summary, compared with the prior art, the decoupling micro gyroscope structure provided by the utility model adopts the decoupling micro gyroscope structure, inhibits the mechanical coupling of the micro gyroscope driving mode and the detection mode, designs the orthogonal correction electrode, and greatly reduces the orthogonal error of the micro gyroscope; the lever type driving mass block group decoupling beam structure and the differential detection mass block decoupling beam structure are ingeniously designed, so that the micro gyroscope works in a reverse working mode during driving and detection, the influence of a micro gyroscope common mode interference mode on the working mode is avoided, and the influence of external linear acceleration on the micro gyroscope is restrained. The utility model discloses micro-gyroscope structural design is reasonable compact, and the quadrature error is little, detects the precision height, has very big progressive meaning.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications and changes may be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (17)
1. A decoupled dual-frame micro-gyroscope, comprising:
the driving device comprises a left driving mass block group and a right driving mass block group, wherein the left driving mass block group and the right driving mass block group are both of a semi-surrounding structure with an opening at one side, and the openings of the left driving mass block group and the right driving mass block group are oppositely arranged;
the device comprises a left Coriolis mass block group and a right Coriolis mass block group, wherein the left Coriolis mass block group and the right Coriolis mass block group are both of a semi-enclosed structure with an opening on one side, and the openings of the left Coriolis mass block group and the right Coriolis mass block group are oppositely arranged;
the left Coriolis mass block group and the left driving mass block group are sequentially sleeved on the periphery of the left detection mass block, and the opening directions of the left Coriolis mass block group and the left driving mass block group are the same;
the right Coriolis mass block group and the right driving mass block group are sequentially sleeved on the periphery of the right detection mass block, and the opening directions of the right Coriolis mass block group and the right driving mass block group are the same.
2. The decoupled dual-frame micro-gyroscope of claim 1,
the left driving mass block group and the right driving mass block group are contained in the outer frame.
3. The decoupled dual-frame micro-gyroscope of claim 1,
the left driving mass block group and the right driving mass block group are symmetrically distributed, the left driving mass block group and the right driving mass block group are connected through two driving mass block group decoupling beams, the driving mass block group decoupling beams are fixed on the driving mass block group decoupling beam anchor points, the driving mass block group decoupling beam anchor points are fixedly connected on the micro gyroscope base body,
the drive mass block set decoupling beam is configured to urge the left drive mass block set and the right drive mass block set to maintain opposite directions of movement.
4. The decoupled dual-frame micro-gyroscope of claim 3,
the left driving mass block group and the right driving mass block group respectively comprise two driving mass blocks and connecting arms for connecting the two driving mass blocks, each driving mass block is provided with a first driving end and a second driving end, and two ends of each connecting arm are respectively connected with the first driving ends of the two driving mass blocks, so that the left driving mass block group and the right driving mass block group respectively form a semi-enclosed structure;
the second driving end of one driving mass block in the left driving mass block group is connected with the second driving end of one driving mass block in the right driving mass block group through a first driving mass block group decoupling beam,
the second driving end of the other driving mass block in the left driving mass block group is connected with the second driving end of the other driving mass block in the right driving mass block group through a second driving mass block group decoupling beam.
5. The decoupled dual-frame micro-gyroscope of claim 4,
two driving folding beams are arranged on each driving mass block, the two driving folding beams are respectively positioned at the first driving end and the second driving end of the driving mass block, and the two driving folding beams are close to the Coriolis mass block;
each driving mass block is also provided with two driving electrodes and one driving feedback electrode, and the driving electrodes and the driving feedback electrodes are arranged on one side departing from the Coriolis mass block.
6. The decoupled dual-frame micro-gyroscope of claim 5,
the first driving end and the second driving end of each driving mass block are respectively provided with one driving folding beam anchor point, the driving folding beams are fixedly connected to the micro-gyroscope substrate through the driving folding beam anchor points, and the axis direction of the driving folding beams is the same as the direction of the central connecting line of the first driving end and the second driving end of each driving mass block.
7. The decoupled dual-frame micro-gyroscope of claim 1,
the left Coriolis mass block group and the right Coriolis mass block group respectively comprise two Coriolis mass blocks and a connecting rod for connecting the two Coriolis mass blocks, each Coriolis mass block is provided with a first end and a second end, and the two ends of the connecting rod are respectively connected with the first ends of the two Coriolis mass blocks, so that the left Coriolis mass block group and the right Coriolis mass block group respectively form a semi-enclosed structure;
the first end and the second end of each Coriolis mass block are respectively provided with a detection decoupling beam, one end of each detection decoupling beam is connected with the Coriolis mass block, the other end of each detection decoupling beam is connected with the driving mass block, and the detection decoupling beams are arranged to enable the Coriolis mass block to move along with the driving mass block.
8. The decoupled dual-frame micro-gyroscope of claim 7,
the detection decoupling beam is arranged along the axial direction of the connecting rod, and the rigidity of the detection decoupling beam along the axial direction of the connecting rod is greater than the rigidity of the detection decoupling beam along the connecting line direction of the first end and the second end of the Coriolis mass block.
9. The decoupled dual-frame micro-gyroscope of claim 7,
each Coriolis mass block is provided with two orthogonal correction electrodes which are respectively close to the first end and the second end of the Coriolis mass block,
the two Coriolis mass blocks of the left Coriolis mass block set are arranged oppositely, the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the left Coriolis mass block set and the orthogonal correction electrode at the second end or the first end of the other Coriolis mass block in the left Coriolis mass block set are adjusted simultaneously, and the left Coriolis mass block set realizes deflection from a first angle position to a second angle position;
the two Coriolis mass blocks of the right Coriolis mass block group are arranged oppositely, the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the right Coriolis mass block group and the orthogonal correction electrode at the second end or the first end of the other Coriolis mass block in the right Coriolis mass block group are adjusted simultaneously, and the right Coriolis mass block group realizes deflection from a third angle position to a fourth angle position.
10. The decoupled dual-frame micro-gyroscope of claim 9,
each Coriolis mass block is provided with a driving decoupling beam, two Coriolis mass blocks in the left Coriolis mass block group are respectively connected with the left detection mass block through the driving decoupling beams, two Coriolis mass blocks in the right Coriolis mass block group are respectively connected with the right detection mass block through the driving decoupling beams,
the drive decoupling beam comprises an H-shaped structure, the drive decoupling beam is distributed along the direction of a central connecting line of the first end and the second end of the Coriolis mass block, and the rigidity of the drive decoupling beam along the direction of the axis of the connecting rod is smaller than that of the drive decoupling beam along the direction of the central connecting line of the first end and the second end of the Coriolis mass block.
11. The decoupled dual-frame micro-gyroscope of claim 1,
four detection electrodes are respectively arranged at the central positions of the left detection mass block and the right detection mass block, the four detection electrodes are arranged in two rows, each row is provided with two detection electrodes,
the left detection mass block and the right detection mass block are respectively provided with four detection feedback electrodes, and the four detection feedback electrodes are respectively arranged at four corners of the left detection mass block or the right detection mass block.
12. The decoupled dual-frame micro-gyroscope of claim 11,
the left detection mass block and the right detection mass block are respectively provided with four detection folding beams, each detection folding beam is fixedly connected on the micro gyroscope substrate through a detection folding beam anchor point,
the four detection folding beams are arranged at the periphery of the left detection mass block and respectively close to four corners of the left detection mass block,
the four detection folding beams are arranged at the periphery of the right detection mass block and respectively close to four corners of the right detection mass block;
the detection folding beam is distributed along the outer wall of the left detection mass block or the outer wall of the right detection mass block, and the distribution direction of the detection folding beam is parallel to the axis direction of the connecting rod of the Coriolis mass block.
13. The decoupled dual-frame micro-gyroscope of claim 2, wherein the left and right proof masses are connected by a proof mass decoupling beam that assists the left and right proof masses in maintaining opposing motion, the proof mass decoupling beam is located at a central position of the outer frame, and the proof mass decoupling beam is fixedly connected to the micro-gyroscope substrate by a proof mass decoupling beam anchor point.
14. The decoupled dual-frame micro-gyroscope of claim 13,
the drive mass block group decoupling beam comprises a first deformation beam connected with the left drive mass block group, a third deformation beam connected with the right drive mass block group, a second deformation beam connecting the first deformation beam and the third deformation beam, and a support beam connected with the drive mass block group decoupling beam anchor point,
when the left driving mass block group moves towards a first direction relative to the driving mass block group decoupling beam, the first deformation beam of the driving mass block group decoupling beam generates elastic deformation under the traction of the left driving mass block group, the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass block group to move towards a second direction under the action of the elastic deformation,
when the left driving mass block group moves towards a first direction, the left driving mass block group pulls the first deformation beam connected with the left driving mass block group to stretch towards the first direction, the stretched first deformation beam drives the third deformation beam to push the right driving mass block group to move towards a second direction through the second deformation beam,
when the left driving mass block group moves towards the second direction relative to the driving mass block group decoupling beam, the first deformation beam of the driving mass block group decoupling beam generates elastic deformation under the extrusion of the left driving mass block group, the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass block group to move towards the first direction under the action of the elastic deformation,
when the left driving mass block group moves towards the second direction, the left driving mass block group extrudes the first deformation beam connected with the left driving mass block group to compress towards the second direction, the compressed first deformation beam drives the third deformation beam to push the right driving mass block group to move towards the first direction through the second deformation beam,
the first direction is opposite to the second direction.
15. The decoupled dual-frame micro-gyroscope of claim 14,
the first deformation beam, the second deformation beam, the third deformation beam and the supporting beam form an E-shaped structure, the first deformation beam, the third deformation beam and the supporting beam are parallel to each other, one end of the supporting beam is connected to the central position of the second deformation beam,
the drive mass block group decoupling beam anchor point is fixedly connected to the base body of the decoupling type micro gyroscope, the cross section of the drive mass block group decoupling beam anchor point is in a two-leg fish fork shape, the cross section of the drive mass block group decoupling beam anchor point is provided with a connecting groove for accommodating the second deformation beam, one end of the second deformation beam is connected to the groove bottom of the connecting groove from the notch of the connecting groove, and the connecting groove faces the detection mass block decoupling beam.
16. The decoupled dual-frame micro-gyroscope of claim 13,
the proof mass decoupling beam comprises a first structural part connected with the left proof mass and a second structural part connected with the right proof mass,
when the left detection mass block moves away from the detection mass block decoupling beam, the first structural part of the detection mass block decoupling beam elastically deforms under the traction of the left detection mass block, the elastic deformation of the first structural part of the detection mass block decoupling beam enables the second structural part of the detection mass block decoupling beam to elastically deform, and therefore the second structural part of the detection mass block decoupling beam pushes the right detection mass block to move away from the detection mass block decoupling beam,
when the left detection mass block moves close to the detection mass block decoupling beam, the first structural part of the detection mass block decoupling beam elastically deforms under the extrusion of the left detection mass block, and the elastic deformation of the first structural part of the detection mass block decoupling beam enables the second structural part of the detection mass block decoupling beam to elastically deform, so that the second structural part of the detection mass block decoupling beam pulls the right detection mass block to move close to the detection mass block decoupling beam;
the first structure part of proof mass decoupling roof beam and the second structure part of proof mass decoupling roof beam are axisymmetric, the elastic deformation of the first structure part of proof mass decoupling roof beam with the elastic deformation of the first structure part of proof mass decoupling roof beam also is axisymmetric, the first structure part of proof mass decoupling roof beam and the symmetry axis of the second structure part of proof mass decoupling roof beam are the symmetry axis of left proof mass and right proof mass.
17. The decoupled dual-frame micro-gyroscope of claim 16,
the decoupling beams of the detection mass blocks comprise four decoupling elastic beams of the detection mass blocks, four decoupling middle connecting beams of the detection mass blocks, four decoupling supporting beams of the detection mass blocks, a left decoupling end connecting beam of the detection mass blocks and a right decoupling end connecting beam of the detection mass blocks,
one end of a left detection mass block decoupling end connecting beam is connected with a left detection mass block, the other end of the left detection mass block decoupling end connecting beam is connected with the middle part of one detection mass block decoupling elastic beam, one end of a right detection mass block decoupling end connecting beam is connected with a right detection mass block, the other end of the right detection mass block decoupling end connecting beam is connected with the middle part of the other detection mass block decoupling elastic beam, the detection mass block decoupling elastic beam and the detection mass block decoupling middle connecting beam are sequentially and alternately connected end to end, so that four detection mass block decoupling elastic beams and four detection mass block decoupling middle connecting beams are alternately connected end to form a closed loop, one end of each detection mass block decoupling supporting beam is connected with a detection mass block decoupling beam anchor point, and the other,
the partial structure of the decoupling beam of the detection mass on the side of the symmetry axis close to the left detection mass is called a first structural part, and the partial structure of the decoupling beam of the detection mass on the side of the symmetry axis close to the right detection mass is called a second structural part;
each detection mass block decoupling elastic beam comprises a U-shaped part positioned in the middle and two L-shaped parts positioned at two ends, the two L-shaped parts at two ends of the detection mass block decoupling elastic beam are symmetrically arranged relative to the U-shaped part in the middle of the detection mass block decoupling elastic beam,
the opening direction of the L-shaped part at the end part of the decoupling elastic beam of the detection mass block faces towards the anchor point of the decoupling elastic beam of the detection mass block,
the left detection mass block decoupling end connecting beam is connected with the bottom of one U-shaped part, and the right detection mass block decoupling end connecting beam is connected with the bottom of the other U-shaped part;
each decoupling middle connecting beam of the detection mass block is of an L-shaped structure,
one end of each detection mass block decoupling support beam is connected with the detection mass block decoupling beam anchor point, the other end of each detection mass block decoupling support beam is connected with the angular point of the L-shaped structure, so that the four detection mass block decoupling support beams form diagonal lines in the closed loop,
the opening direction of the decoupling middle connecting beam of the detection mass block of the L-shaped structure faces towards the decoupling beam anchor point of the detection mass block.
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