CN102062604A - Capacitive micromachined tuning fork gyroscope - Google Patents
Capacitive micromachined tuning fork gyroscope Download PDFInfo
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- CN102062604A CN102062604A CN2009102375044A CN200910237504A CN102062604A CN 102062604 A CN102062604 A CN 102062604A CN 2009102375044 A CN2009102375044 A CN 2009102375044A CN 200910237504 A CN200910237504 A CN 200910237504A CN 102062604 A CN102062604 A CN 102062604A
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Abstract
The invention provides a capacitive micromachined tuning fork gyroscope. The gyroscope is the symmetrical dual-mass structural gyroscope, comprising a substrate and a framework arranged in the centre of the substrate, wherein the middle of the framework is provided with a framework beam perpendicular to the framework; two detection mass blocks are symmetrically arranged in the framework with the framework beam as a symmetry axis, and four corners of each detection mass block are connected with the framework and the framework beam through at least four drive beams; decoupling drive comb capacitors are respectively arranged at both ends of each detection mass block in the direction of a vertical axis; detection comb capacitors are symmetrically arranged on both outer sides of the framework in the direction of a horizontal axis; at least four detection beams are arranged on both outer sides of the framework in the direction of the vertical axis; and the detection beams are distributed symmetrically relative to the vertical axis and the horizontal axis and are fixed on the substrate through corresponding anchor points. According to the capacitive horizontal-axis micromachined tuning fork gyroscope provided by the invention, the mechanical coupling between the detection mode and the driving mode of the micromachined tuning fork gyroscope can be solved easily and effectively.
Description
Technical field
The present invention relates to the microelectron-mechanical field, especially, relate to a kind of capacitance type micro mechanical tuning fork gyroscope.
Background technology
Micromechanical tuning fork gyroscope is a kind of minitype inertial device that is used for measured angular speed that technical development is got up based on MEMS (micro electro mechanical system) (MEMS, Micro Electro Mechanical System).It has, and volume is little, in light weight, cost is low, power consumption is little and be easy to remarkable advantages such as integrated, can be applicable to guidance system, the light-small aircraft of the tactical missile (as absolutely empty fistfight tactical missile) of short-term operation and intelligent projectile automatic control system, radar antenna systems stabilisation and constitute the high precision navigation positioning system with GPS.In addition, also can expand other many fields that are applied to, as automobile, robot, video camera, oil well probing, biomedical apparatus and even toy for children etc., application prospect is very wide.
Along with the expansion of application and the raising of request for utilization, the tested carrier pair information relevant with angular velocity such as azimuth information, attitude information etc. have proposed more and more higher requirement, this just needs the angular velocity information of three mutual vertical axis of tested carrier, and single single shaft micro-mechanical gyroscope obviously can not satisfy this requirement, traditional way is to realize by quadrature two twin shafts of installation or three single axis gyroscopes, but this way is difficult to guarantee installation accuracy usually because the micro-mechanical gyroscope size is less.By research, the integrated gyroscope of monolithic tri-axial is for the approach that provides is provided.Because structural symmetry, can realize Differential Detection and to characteristics such as linear acceleration are insensitive, micromechanical tuning fork gyroscope becomes one of the most successful micro-mechanical gyroscope type.At present, it is more in the research of Z axle (vertical axes) micro-mechanical gyroscope of measured device surface direction angular velocity to be used for detection of vertical, the inclined to one side value stabilization of Z axle micro-mechanical gyroscope has reached 0.1 °/h, thus, realize becoming the gyrostatic gordian technique of realization monolithic tri-axial integrated micromechanical tuning fork with the high performance horizontal shaft micro-mechanical tuning fork gyroscope instrument of Z axle micromechanical tuning fork gyroscope process compatible.
Micro-mechanical gyroscope has two operation modes: drive mode and detect mode, the mechanical couplings between two mode is an important errors source of micro-mechanical gyroscope.Go for high performance micromechanical tuning fork gyroscope, just must carry out decoupling zero two operation modes." the tuning-fork type angular speed micro-mechanical gyroscope that a kind of broach drives " by name (J.Bernstein that people such as the breadboard Bernstein of U.S. Draper deliver in the 6th MEMS meeting, S.Cho, A.T.King, A.Kourepenis, P.Maciel, and M.Weinberg, " A Micromachined Comb-Drive Tuning Fork Rate Gyroscope ", in Proc.IEEE Micro Electro Mechanical Systems Workshop (MEMS ' 93), Fort Lauderdale, FL, Feb.1993 proposes and has realized a kind of sonic type micro mechanical scopperil instrument structural design scheme in paper pp.143-148).In this scheme, gyrostatic two resonant mass gauge blocks are done simple harmonic oscillation at static driven broach effect lower edge driving shaft, and two the mass Oscillation Amplitude is identical but phase place is opposite.When the angular velocity input is arranged along sensitive axes, will produce the opposite coriolis force of direction respectively on two masses, make two masses produce the opposite off-plane movement of phase place, its amplitude is directly proportional with input angular velocity.The displacement of two masses can adopt modes such as electric capacity to realize Differential Detection, thereby finishes the measurement of angular velocity.In the ideal case, driving mode is realized by coriolis force fully to (motion) energy coupling that detects mode.And in the actual conditions, the asymmetry that causes owing to mismachining tolerance, the reasons such as non-linear deformation of beam drive mode and detect between the motion of mode directly coupling can take place.This mechanical couplings is one of major reason that influences the gyroscope performance.In people's such as Bernstein the design gyrostatic beam has been carried out special design, promptly gyrostatic driving beam directly links to each other with mass, detects beam and directly links to each other with anchor point, links to each other by connecting rod between two kinds of beams.Driving mode, mass only drives and drives beam generation deformation, detects beam and keeps motionless, thereby suppress to be driven into the coupling of detection.Detecting mode, detecting beam generation deformation, driving beam and keep motionless.Though this design has reduced to drive mode to the mechanical couplings that detects mode to a certain extent, but, because gyroscope arrangement integral body twists, the moving tooth of driving comb is decided tooth and hair relatively and is given birth to off-plane movement, destroy the symmetry that static distributes, thereby cause producing parasitic electrostatic force, influence the gyroscope performance from the face direction.Therefore, this detection mode is not well solved in this design proposal that is coupling in people such as Bernstein that drives mode.
In order to eliminate the influence of electrostatic force, the people such as Braxmaier of Germany HSG-IMIT are at the 12nd solid state sensor, (M.Braxmaier in " coupling of vibration gyroscope mode of oscillation " literary composition of delivering in actuator and the micro-system meeting, A.Gaiber, A.Schumacher, I.Simon, J.Frech, H.Sandmaier, and W.Lang, " Cross-coupling of the oscillation modes of vibratory gyroscopes " in Proc.Int.Conf.on Solid State Sensors, Actuators, and Microsystems, Boston, MA, Jun.2003 pp.167-170) has proposed a kind of Z axle gyroscope design proposal of bilingual coupling, can suppress to drive and detect the mechanical couplings between the mode simultaneously.The mechanical couplings motion that the bilingual coupling gyroscope of this scheme adopts additional decoupling zero beam and additional mass piece to isolate two mode, it is by special elastic beam design, make that driving mass can only and detect on the direction of principal axis and do single dof mobility respectively with the detection mass at driving shaft, can think that on other direction perfect rigidity connects, not motion.Inertial mass has the degree of freedom that drives and detect both direction simultaneously, is used for the coupling of coriolis force.During work, drive mass drive inertial mass and vibrate, detect mass this moment and not influenced by driving, keep motionless, promptly avoided being driven into the mechanical couplings that detects mode along driving shaft.When Z deflection speed is imported, coriolis force will make inertial mass along the detection side to vibration, drive to detect the mass vibration simultaneously, realize the detection of angular velocity signal.Because the buffer action of single-degree-of-freedom beam, the motion that detects mode can be coupled to the driving mass yet, thereby realizes detecting the decoupling zero that drives mode.Can realize driving and check the bilingual coupling between the mode on people's such as Braxmaier the design theory, but owing to increased additional mass and decoupling zero beam, it is relatively complicated that system becomes, and also reduced the ratio of inertial mass in the entire device area simultaneously, reduced detection efficiency.In addition, this decoupling zero mode generally is used for Z axle gyroscope more, and its driving and detection mode are motion in the plane.For the transverse axis gyroscope,, directly wait as increase decoupling zero beam and realize that bilingual coupling difficulty is bigger by structural design owing to relate to off-plane movement.
In a word, need the urgent technical matters that solves of those skilled in the art to be exactly: how simply and effectively to solve the mechanical couplings between micromechanical tuning fork gyroscope detection mode and the driving mode, to realize a kind of high performance capacitor type horizontal shaft micro-mechanical tuning fork gyroscope instrument.
Summary of the invention
Technical matters to be solved by this invention provides a kind of high performance capacitor type horizontal shaft micro-mechanical tuning fork gyroscope instrument, can simply and effectively solve the mechanical couplings between micromechanical tuning fork gyroscope detection mode and the driving mode.
In order to address the above problem, the embodiment of the invention provides a kind of capacitance type micro mechanical tuning fork gyroscope, described gyroscope is two quality structure gyroscopes of symmetry, comprise: substrate, be arranged at the framework of described substrate central authorities, the middle part of described framework is provided with Vierendeel girder, and described Vierendeel girder is perpendicular to described framework; Described framework inside is axis of symmetry with described Vierendeel girder, is symmetrical arranged two and detects mass, and four jiaos of each detection mass drive beams by at least four respectively and are connected with described framework and Vierendeel girder; Described each detection mass is respectively arranged with driving comb electric capacity at the two ends of vertical axis; Described driving comb electric capacity comprises movable driving comb electrode and fixed drive comb electrodes, and described movable driving comb electrode is connected with described detection mass, and described fixed drive comb electrodes is fixed on the described substrate by corresponding anchor point; Described movable driving comb electrode overlaps into decoupling zero driving comb electric capacity with the fixed drive comb electrodes; Two outsides of the horizontal axis of described framework are symmetrically arranged with detection comb electric capacity, described detection comb electric capacity comprises movable detection comb electrode and fixed test comb electrodes, described movable detection comb electrode links to each other with described framework, and described fixed test comb electrodes is fixed on the described substrate by corresponding anchor point; Two arranged outside of the vertical axis of described framework have at least four to detect beam, and described detection beam is symmetrically distributed with respect to transverse axis, the Z-axis of described framework, and is fixed on the described substrate by corresponding anchor point.
Preferably, described decoupling zero driving comb electric capacity is: the upper end of described movable driving comb electrode is higher than the upper end of described fixed drive comb electrodes, the lower end of described movable driving comb electrode is lower than the lower end of described fixed drive comb electrodes, and described movable driving comb is the constant driving comb electric capacity of overlapping area during with the relative off-plane movement of fixed drive broach.
Preferably, described decoupling zero driving comb electric capacity is: the upper end of described movable driving comb electrode is lower than the upper end of described fixed drive comb electrodes, the lower end of described movable driving comb electrode is higher than the lower end of described fixed drive comb electrodes, and described movable driving comb is the constant driving comb electric capacity of overlapping area during with the relative off-plane movement of fixed drive broach.
Preferably, described driving beam is for driving folded beam, and described driving folded beam is flexural deformation beam, torsional deflection beam or bending combination beam.
Preferably, described driving comb electric capacity is many group driving comb electric capacity.
Preferably, described detection beam is for detecting folded beam, and described detection folded beam is flexural deformation beam, torsional deflection beam or bending combination beam.
Preferably, the movable detection comb electrode of described detection comb electric capacity and the height of fixed test comb electrodes equate that the upper and lower end of described movable detection comb electrode is higher or lower than the upper and lower end of described fixed test comb electrodes.
Preferably, described detection comb electric capacity is many group detection comb electric capacity, the upper and lower end of the movable detection comb electrode of the detection comb electric capacity of described framework two outer middle side parts is higher or lower than the upper and lower end of described fixed test comb electrodes, the upper and lower end of the movable detection comb electrode of the detection comb electric capacity of described framework two outside upper/lower terminals is below or above the upper and lower end of described fixed test comb electrodes, and the electric capacity of the detection comb electric capacity of described framework two outer middle side parts is the electric capacity sum of the detection comb electric capacity of described framework two outside upper/lower terminals.
Preferably, described driving comb electric capacity adopts open loop driving or closed loop to drive, and described detection comb electric capacity adopts open loop or closed loop to detect.
Preferably, when described detection comb electric capacity adopted closed loop to detect, the detection comb electric capacity of described framework two outer middle side parts was for detecting electric capacity, and the detection comb electric capacity of described framework two outside upper/lower terminals is application of force feedback capacity.
Preferably, when described detection comb electric capacity adopted closed loop to detect, the detection comb electric capacity of described framework two outer middle side parts was application of force feedback capacity, and the detection comb electric capacity of described framework two outside upper/lower terminals is for detecting electric capacity.
Compared with prior art, the present invention has the following advantages:
At first, the upper end of the movable driving comb electrode of driving comb electric capacity of the present invention is higher than/is lower than the upper end of fixed drive comb electrodes, the lower end of movable driving comb electrode is lower than/is higher than the lower end of fixed drive comb electrodes, when the angular velocity of X-axis (transverse axis) direction is imported, two are detected mass and drive movable driving comb along Z axle (vertical axes) when vibrating anyway by driving folded beam and framework, the area that movable driving comb electrode and fixed drive comb electrodes overlap does not change, thereby driving electric capacity can not change along moving of Z axle because of movable driving comb yet, can not produce along the electrostatic force of Z axle, thus detect mode to drive being coupled of mode inhibition.
Secondly, driving beam of the present invention and detection beam are separate, are driving mode, and detection comb electric capacity does not produce vibration, efficiently solve from driving mode to detecting the mechanically decoupled of mode.
Moreover the present invention does not need Vacuum Package can obtain higher quality factor, has reduced encapsulation and has required and device cost.
Then, the present invention adopts symmetrical structure, and is insensitive to linear acceleration, increased the gyroscope range, reduced request for utilization, helped being integrated into system such as little inertance element with other device, and reduced the number of devices of system, thus reduce system cost, improve its reliability simultaneously.
At last, the present invention adopts conventional micro electronmechanical Processes and apparatus, and technological process is simple, and with Z axle tuning fork gyroscope compatibility, can be used for realizing the monolithic tri-axial gyroscope, and can realize producing in enormous quantities.
Description of drawings
Fig. 1 is a kind of symmetric double quality micro-mechanical gyroscope structural representation of prior art;
Fig. 2 is the structural representation of a kind of capacitance type micro mechanical tuning fork gyroscope embodiment of the present invention;
Fig. 3 a is the perspective view of the driving comb electric capacity embodiment one of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention;
Fig. 3 b is the simple structure synoptic diagram of the driving comb electric capacity embodiment one of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention;
Fig. 4 is the working state schematic representation of driving comb electric capacity embodiment one shown in Fig. 3 a of the present invention, the 3b;
Fig. 5 a is the perspective view of the driving comb electric capacity embodiment two of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention;
Fig. 5 b is the simple structure synoptic diagram of the driving comb electric capacity embodiment two of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention;
Fig. 6 is the working state schematic representation of driving comb electric capacity embodiment two shown in Fig. 5 a of the present invention, the 5b;
Fig. 7 is the structural representation of the detection comb electric capacity embodiment one of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention;
Fig. 8 is the working state schematic representation of detection comb electric capacity embodiment one shown in Figure 7;
Fig. 9 is the structural representation of the detection comb electric capacity embodiment two of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention;
Figure 10 is the working state schematic representation of detection comb electric capacity embodiment two shown in Figure 9;
Figure 11 is the differential driving synoptic diagram of the open loop of driving comb electric capacity of the present invention;
Figure 12 is the monolateral driving synoptic diagram of the closed loop of driving comb electric capacity of the present invention;
Figure 13 is the differential driving synoptic diagram of the closed loop of driving comb electric capacity of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
For ease of understanding technical scheme of the present invention, a kind of symmetric double quality micro-mechanical gyroscope with prior art shown in Figure 1 is an example below, briefly introduces the principle of work of micro-mechanical gyroscope.
With reference to Fig. 1, show a kind of symmetric double quality micro-mechanical gyroscope structural representation of prior art, comprising: pedestal 101, driving comb electric capacity 102, detection mass 103, driving framework 104, detection comb electric capacity 105 and detection comb frame 106.The driving framework 104 of the right and left links together by the folded beam of centre, left and right driving framework 104 links to each other with pedestal 101 by driving folded beam, both sides up and down at left and right driving framework 104 are provided with driving comb electric capacity 102, the detection mass 103 on both sides is connected with driving framework 104 by four folded beams respectively, and by two groups of other folded beams respectively with about detection comb frame 106 link to each other, detection comb frame 106 is connected on the pedestal 101 by folded beam, in the design of the outside of left and right sides detection comb frame 106 detection comb electric capacity 105 is arranged.
Micro-mechanical gyroscope utilizes Coriolis effect driving mode and detecting produce power conversion between the mode, Coriolis effect is the kinetic effect that is caused by coriolis force, coriolis force derives from Corioli's acceleration, Corioli's acceleration is not only made circular motion by particle, and does radial motion or circumferential movement and produce.When gyroscope is worked, on driving comb electric capacity 102, apply the alternating voltage that has direct current biasing, producing along driving shaft is the anti-phase line vibration that X-axis (transverse axis) is made alternation.When along input shaft being the angular velocity input of Z axle (vertical axes), the detection mass 103 of the right and left will be subjected to edge and the perpendicular opposite De Geshi masterpiece usefulness of Y-axis of X-axis, two are detected mass 103 works along the opposite vibration of Y direction about causing thus, make detection comb electric capacity 105 along Y axis vibration simultaneously, the electric capacity of detection comb electric capacity 105 changes, and its variable quantity is directly proportional with the angular velocity of input.Two quality structures of symmetry make being changed to of left and right sides detection comb electric capacity 105 differential, by measuring the electric capacitance change of detection comb electric capacity 105, the angular velocity that can obtain to import.
Capacitance type micro mechanical tuning fork gyroscope of the present invention adopts two quality structures of symmetry, is mainly used in the X-axis (transverse axis) of measurement surface level direction and the angular velocity of Y-axis (Z-axis).With reference to Fig. 2, show the structural representation of a kind of capacitance type micro mechanical tuning fork gyroscope embodiment of the present invention, specifically can comprise: substrate 201, anchor point 202, detection beam 203, framework 204, driving beam 205, driving comb electric capacity 206, detection mass 207 and detection comb electric capacity 208.Wherein, described driving comb electric capacity 206 comprises movable driving comb electrode 2061 and fixed drive comb electrodes 2062, and described detection comb electric capacity 208 comprises movable detection comb electrode 2081 and fixed test comb electrodes 2082.
Described anchor point 202, detection beam 203, driving beam 205, driving comb electric capacity 206, detection mass 207 and detection comb electric capacity 208 are symmetrically distributed with respect to gyrostatic X-axis (transverse axis), Y-axis (Z-axis).Particularly, described framework 204 is arranged at the central authorities of described substrate 201, and the internal vertical direction central authorities of framework 204 are provided with Vierendeel girder, and the both sides up and down of described Vierendeel girder connecting frame 204 form " day " font structure.Framework 204 inside are axis of symmetry with the Vierendeel girder, are symmetrical arranged two and detect mass 207, and four jiaos of each detection mass 207 drive beams 205 by four respectively and are connected with described framework 204 and Vierendeel girder.Wherein, each two angle detecting mass 207 close Vierendeel girder avris is connected with Vierendeel girder by driving beam 205, passes through to drive beam 205 away from two angles of Vierendeel girder avris and links to each other with framework.Described each detection mass 207 is respectively arranged with the driving comb electric capacity 206 that comprises movable driving comb electrode 2061 and fixed drive comb electrodes 2062 at the two ends up and down of vertical axis, wherein, movable driving comb electrode 2061 is fixedlyed connected with detection mass 207, and fixed drive comb electrodes 2062 is fixed on the substrate 201 by corresponding anchor point 202.Two outsides in the horizontal axis of framework 204 are symmetrically arranged with detection comb electric capacity 208, described detection comb electric capacity 208 comprises movable detection comb electrode 2081 and fixed test comb electrodes 2082, movable detection comb electrode 2081 is fixedlyed connected with framework 204, and fixed test comb electrodes 2082 is fixed on the substrate 201 by corresponding anchor point 202.Two arranged outside of the vertical axis of framework 204 have four to detect beam 203, and described detection beam 203 distributes with respect to horizontal X axle, the vertical Y rotational symmetry of framework 204, and is fixed on the substrate 201 by corresponding anchor point 202.
In the present embodiment, described driving beam 205 can be straight beam or folded beam, also can think suitable structure for other any those skilled in the art, and the present invention need not make restriction to this.Preferably, the driving beam of present embodiment 205 is for driving folded beam, and described driving folded beam can be in flexural deformation beam, torsional deflection beam or the bending combination beam any, and is gyrostatic from the face torsional movement to realize.Drive beam 205 and adopt the folded beam design, gyroscope is worked in the linear elasticity deformation range that drives beam 205, vibration steadily; And folded beam can effectively reduce the unrelieved stress that produces in the gyroscope process and the course of work, thereby improves the gyrostatic linearity and stability; In addition, adopt folded beam to reduce gyroscope, help enhancing productivity, further reduced cost the requirement of process as aging and humid test.Drive folded beam and be at least four, also can be six or more, those skilled in the art can guarantee freely to select setting under the constant situation of gyroscope mode of resonance.
Equally, detect beam 203 and can be straight beam or folded beam, also can think suitable structure for other any those skilled in the art.Preferably, the detection beam of present embodiment 203 is for detecting folded beam, and described detection folded beam can be in flexural deformation beam, torsional deflection beam or the bending combination beam any.Detect folded beam and be at least four, also can be six or more, those skilled in the art can guarantee freely to select setting under the constant situation of gyroscope mode of resonance.
Driving comb electric capacity 206 of the present invention comprises movable driving comb electrode 2061 and fixed drive comb electrodes 2062, and the two overlapping area remains unchanged when relative motion, forms decoupling zero driving comb electric capacity 206.
With reference to Fig. 3 a and Fig. 3 b, show perspective view and the simple structure synoptic diagram of driving comb electric capacity 206 embodiment one of the present invention's capacitance type micro mechanical tuning fork gyroscope shown in Figure 2 respectively.The driving comb electric capacity 206 of present embodiment adopts in pairs the micromechanics broach electric capacity that uses, is symmetrically distributed, every part micromechanics broach electric capacity comprises movable driving comb electrode 2061 and fixed drive comb electrodes 2062, two parts micromechanics broach electric capacity is fixedly connected by the broach back of the body of movable driving comb electrode 2061, is symmetrically distributed.Particularly, shown in Fig. 3 a, the upper end 2061a of described movable driving comb electrode 2061 is higher than the upper end 2062a of fixed drive comb electrodes 2062, the lower end 2061b of movable driving comb electrode 2061 is lower than the lower end 2062b of fixed drive comb electrodes 2062, the difference in height of movable driving comb electrode 2061 and fixed drive comb electrodes 2062 can be taken all factors into consideration definite by those skilled in the art according to the whole height of broach spacing, broach width and broach, do not repeat them here.Movable driving comb electrode 2061 of left-hand end and fixed drive comb electrodes 2062 constitute driving capacitor C 1, and movable driving comb electrode 2061 of right-hand end and fixed drive comb electrodes 2062 constitute driving capacitor C 2.The voltage that puts on and arranged on left and right sides fixed drive comb electrodes 2062 can be identical, also can be different.When movable driving comb electrode 2061 is done counterclockwise low-angle and is reversed under external force (as inertial force) effect, as shown in Figure 4, the overlapping area remains unchanged because there being difference in height for movable driving comb electrode 2061 and fixed drive comb electrodes 2062, thereby driving capacitor C 1, C2 remain unchanged.When movable driving comb electrode 2062 was done clockwise low-angle, situation was with similar counterclockwise.Equally, when movable driving comb electrode 2061 is done upwards the small perpendicular displacement of (or downwards),, also remain unchanged so drive the numerical value of capacitor C 1 and C2 because of the electrode overlapping area that drives capacitor C 1 and C2 remains unchanged.
With reference to Fig. 5 a and Fig. 5 b, show perspective view and the simple structure synoptic diagram of driving comb electric capacity 206 embodiment two of the present invention's capacitance type micro mechanical tuning fork gyroscope shown in Figure 2 respectively.Described driving comb electric capacity 206 adopts in pairs the micromechanics broach electric capacity that uses, is symmetrically distributed, the upper end 2061a of described movable driving comb electrode 2061 is lower than the upper end 2062a of fixed drive comb electrodes 2062, and the lower end 2061b of movable driving comb electrode 2061 is higher than the lower end 2062b of fixed drive comb electrodes 2062.Movable driving comb electrode 2061 of left-hand end and fixed drive comb electrodes 2062 constitute driving capacitor C 3, movable driving comb electrode 2061 of right-hand end and fixed drive comb electrodes 2062 constitute driving capacitor C 4, the voltage that puts on and arranged on left and right sides fixed drive comb electrodes 2062 can be identical, also can be different.Drive capacitor C 3 and C4 when movable driving comb electrode 2061 low-angles take place reverses, numerical value all remains unchanged, the duty that Fig. 6 shows the movable driving comb electrode 2061 of present embodiment when doing counterclockwise low-angle and reversing.Equally, when movable driving comb electrode 2061 is done upwards the small perpendicular displacement of (or downwards),, also remain unchanged so drive the numerical value of capacitor C 1 and C2 because of the electrode overlapping area that drives capacitor C 1 and C2 remains unchanged.
When the angular velocity of Y-axis (Z-axis) direction is imported, two are detected mass 207 by driving beam 205 (being the driving folded beam in this enforcements) and the movable driving comb electrode 2061 of framework 204 drives along Z axle (vertical axes) when making vibrate in opposite phase, the each several part electric capacity of driving comb electric capacity 206 can not change along moving of Z-direction because of movable driving comb electrode 2061, thereby can not produce electrostatic force, thereby make gyroscope be inhibited to the coupling that drives mode from detecting mode along Z-direction.
Each detects mass 207 can be provided with one group of driving comb electric capacity 206 respectively at the two ends of vertical axis, 206 (as shown in figure 13) of many group driving comb electric capacity also can be set, every group of driving comb electric capacity 206 comprises and detects movable driving comb electrode 2061 that mass 207 fixedlys connected and be fixed in fixed drive comb electrodes 2062 on the substrate 201 by corresponding anchor point 202 separately.Because the electrostatic force size between movable driving comb electrode 2061 and the fixed drive comb electrodes 2062 is directly proportional with the number of broach, therefore, on the one hand, compare with single group driving comb electric capacity 206, adopt many group driving comb electric capacity 206 can increase electrostatic force, thereby reduce driving voltage, gyroscope is worked under low-voltage, can reduce power consumption, circuit design realizes also comparatively simple; On the other hand, under the constant situation of driving voltage, adopt many group driving comb electric capacity 206, just increased original electrostatic force, and then the motion amplitude that causes detecting mass 207 increases, thereby improve gyrostatic detection sensitivity.
Two are detected mass 207 and can or drive jointly by the individual drive of movable driving comb electrode 2061 realizations, its type of drive can adopt open loop as shown in figure 11, also can adopt closed loop to drive as shown in Figure 12 and Figure 13, both can single side comb teeth driving also can the differential driving of bilateral broach.
Detection comb electric capacity 208 of the present invention comprises movable detection comb electrode 2081 and fixed test comb electrodes 2082, is the not contour vertical detection broach of both-end electric capacity.
With reference to Fig. 7, show the structural representation of detection comb electric capacity 208 embodiment one of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention.The height value of movable detection comb electrode 2081 and the height value of fixed test comb electrodes 2082 equate, as are 80 microns.The top and bottom of described movable detection comb electrode 2081 all are higher than the top and bottom of fixed test comb electrodes 2082.Movable detection comb electrode 2081 of left-hand end and fixed test comb electrodes 2082 constitute sensitization capacitance D1, and movable detection comb electrode 2081 of right-hand end and fixed test comb electrodes 2082 constitute sensitization capacitance D2.When initial position, the electrode overlapping area of two sensitization capacitance D1 and D2 is identical, and numerical value equates, as shown in Figure 7.When movable detection comb electrode 2081 was done counterclockwise low-angle and reversed, the overlapping area of movable detection comb electrode 2081 of left-hand end and fixed test comb electrodes 2082 increased, and promptly sensitization capacitance D1 increases; The overlapping area of movable detection comb electrode 2081 of right-hand end and fixed test comb electrodes 2082 reduces, and promptly sensitization capacitance D2 reduces, as shown in Figure 8.When movable detection comb electrode 2081 was done clockwise low-angle and reversed, the situation of the variation of two sensitization capacitance D1 and D2 when reversing counterclockwise was opposite.The difference numerical of two sensitization capacitance D1 and D2 is directly proportional with the windup-degree of movable detection comb electrode 2081.
With reference to Fig. 9, show the structural representation of detection comb electric capacity 208 embodiment two of a kind of capacitance type micro mechanical tuning fork gyroscope of the present invention.The height value of movable detection comb electrode 2081 and the height value of fixed test comb electrodes 2082 equate.The top and bottom of described movable detection comb electrode 2081 all are lower than the top and bottom of fixed test comb electrodes 2082.Movable detection comb electrode 2081 of left-hand end and fixed test comb electrodes 2082 constitute sensitization capacitance D3, and movable detection comb electrode 2081 of right-hand end and fixed test comb electrodes 2082 constitute sensitization capacitance D4.Its principle of work and detection comb electric capacity shown in Figure 7 208 embodiment one are basic identical, but the difference numerical of sensitization capacitance D3 and D4 is opposite with the windup-degree variation tendency of movable detection comb electrode 2081, and its duty as shown in figure 10.
Detection comb electric capacity 208 can be single group, also can be many groups.When detection comb electric capacity 208 is many groups, with described framework 204 left sides is example, can adopt the detection comb electric capacity 208 at middle part to be detection comb electric capacity 208 1 types shown in Figure 7, promptly the upper and lower end of movable detection comb electrode 2081 is higher than the upper and lower end of fixed test comb electrodes 2082; The detection comb electric capacity 208 of the upper/lower terminal of framework 204 adopts detection comb electric capacity 208 2 types shown in Figure 9, be the upper and lower end that the upper and lower end of movable detection comb electrode 2081 is lower than fixed test comb electrodes 2082, and the electric capacity sum of upper/lower terminal detection comb electric capacity 208 2 types equal the electric capacity of middle part detection comb electric capacity 208 1 types; Framework 204 right side detection comb electric capacity 208 distribute in full accord with the left side, promptly adopt this kind to organize detection comb electric capacity 208 in the present embodiment more.Perhaps, framework 204 left side central portion detection comb electric capacity 208 are detection comb electric capacity 208 2 types, the detection comb electric capacity 208 of left side upper/lower terminal is detection comb electric capacity one type, the electric capacity sum of upper/lower terminal detection comb electric capacity 208 1 types equals the electric capacity of middle part detection comb electric capacity 208 2 types, and framework 204 right side detection comb electric capacity 208 distribute in full accord with the left side.
The detection comb electric capacity 208 of framework 204 every sides is divided into two parts, and purpose is to take open loop detection or closed loop to detect as required.Present embodiment adopts middle part detection comb electric capacity 208 1 types, the structure of two ends detection comb electric capacity 208 2 types up and down, when open loop detects, left side detection comb electric capacity 208 1 types and right side detection comb electric capacity 208 2 types have been formed one group of sensitization capacitance, right side detection comb electric capacity 208 1 types and left side detection comb electric capacity 208 2 types are formed another group sensitization capacitance, and two groups of sensitization capacitances form differential capacitance to eliminate the interference of non-detection motor message.When closed loop detected, detection comb electric capacity 208 1 types that can the left side and detection comb electric capacity 208 1 types on right side were as detection electric capacity, and detection comb electric capacity 208 2 types in left side and detection comb electric capacity 208 2 types on right side are as application of force feedback capacity; Detection comb electric capacity 208 1 types on detection comb electric capacity 208 1 types and right side that also can the left side are as application of force feedback capacity, and detection comb electric capacity 208 2 types in left side and detection comb electric capacity 208 2 types on right side are as detection electric capacity.
Middle part detection comb electric capacity 208 2 types, many groups detection comb electric capacity 208 open loop detections of two ends detection comb electric capacity 208 1 type structures and closed loop detect principle and above-mentioned basic identical up and down.
The gyrostatic substrate 201 of the present invention can adopt materials such as silicon, monox, glass; Framework 204, detection beam 203, driving beam 205, detection mass 207, driving comb electric capacity 206 and detection comb electric capacity 208 can adopt materials such as silicon, polysilicon, titanium.Certainly, those skilled in the art also can select other material that is fit to for use according to actual conditions, and the present invention need not make restriction to this.
Gyroscope of the present invention utilizes coriolis force Measuring Object angular velocity, during work, fixed drive comb electrodes 2062 is under the driving voltage effect, movable driving comb electrode 2061 is applied electrostatic force, and two are detected masses 207 and vibrate along X-axis (transverse axis) about driving movable driving comb electrode 2061 and driving.Wherein, two phase phasic differences that detect mass 207 are 180 degree, and can equate also can difference be arranged the resonance frequency, to improve gyrostatic bandwidth to realize high detection sensitivity along the resonance frequency of X-axis.When there is the input of Y-axis (Z-axis) deflection speed in system, two are detected mass 207 and do vibrate in opposite phase by driving beam 205 and the movable detection comb electrode 2081 of framework 204 drives along Z axle (vertical axes), thereby the electric capacity that causes detection comb electric capacity 208 changes, and the differential signal by left and right sides detection comb electric capacity 208 can obtain along the angular velocity information of Y direction input.Obviously, gyroscope revolved turn 90 degrees, can detect along the angular velocity information of X-direction input.
This shows that gyroscope of the present invention adopts decoupling zero driving comb electric capacity 206, efficiently solve gyroscope in a simple manner from detecting mode to the mechanical couplings problem that drives mode; And adopt separate driving beam 205 and detect beam 203, make gyroscope also obtain effective inhibition to the mechanical couplings that detects mode from driving mode.In addition, gyroscope of the present invention can be worked under normal pressure, just can obtain higher quality factor under atmospheric environment, need not Vacuum Package, and effectively reduce and encapsulate requirement and device cost; And gyroscope of the present invention adopts conventional micro electronmechanical technology and equipment can realize that process is simple, is convenient to produce in enormous quantities; Can also with Z axle tuning fork gyroscope compatibility, realize the monolithic tri-axial gyroscope.
More than a kind of capacitance type micro mechanical tuning fork gyroscope provided by the present invention is described in detail, used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (11)
1. a capacitance type micro mechanical tuning fork gyroscope is characterized in that, described gyroscope is two quality structure gyroscopes of symmetry, comprising:
Substrate is arranged at the framework of described substrate central authorities, and the middle part of described framework is provided with Vierendeel girder, and described Vierendeel girder is perpendicular to described framework;
Described framework inside is axis of symmetry with described Vierendeel girder, is symmetrical arranged two and detects mass, and four jiaos of each detection mass drive beams by at least four respectively and are connected with described framework and Vierendeel girder; Described each detection mass is respectively arranged with driving comb electric capacity at the two ends of vertical axis; Described driving comb electric capacity comprises movable driving comb electrode and fixed drive comb electrodes, and described movable driving comb electrode is connected with described detection mass, and described fixed drive comb electrodes is fixed on the described substrate by corresponding anchor point; Described movable driving comb electrode overlaps into decoupling zero driving comb electric capacity with the fixed drive comb electrodes;
Two outsides of the horizontal axis of described framework are symmetrically arranged with detection comb electric capacity, described detection comb electric capacity comprises movable detection comb electrode and fixed test comb electrodes, described movable detection comb electrode links to each other with described framework, and described fixed test comb electrodes is fixed on the described substrate by corresponding anchor point;
Two arranged outside of the vertical axis of described framework have at least four to detect beam, and described detection beam is symmetrically distributed with respect to transverse axis, the Z-axis of described framework, and is fixed on the described substrate by corresponding anchor point.
2. gyroscope according to claim 1 is characterized in that, described decoupling zero driving comb electric capacity is:
The upper end of described movable driving comb electrode is higher than the upper end of described fixed drive comb electrodes, the lower end of described movable driving comb electrode is lower than the lower end of described fixed drive comb electrodes, and described movable driving comb is the constant driving comb electric capacity of overlapping area during with the relative off-plane movement of fixed drive broach.
3. gyroscope according to claim 1 is characterized in that, described decoupling zero driving comb electric capacity is:
The upper end of described movable driving comb electrode is lower than the upper end of described fixed drive comb electrodes, the lower end of described movable driving comb electrode is higher than the lower end of described fixed drive comb electrodes, and described movable driving comb is the constant driving comb electric capacity of overlapping area during with the relative off-plane movement of fixed drive broach.
4. according to claim 1,2 or 3 described gyroscopes, it is characterized in that described driving beam is for driving folded beam, described driving folded beam is flexural deformation beam, torsional deflection beam or bending combination beam.
5. according to claim 1,2 or 3 described gyroscopes, it is characterized in that described driving comb electric capacity is many group driving comb electric capacity.
6. according to claim 1,2 or 3 described gyroscopes, it is characterized in that described detection beam is for detecting folded beam, described detection folded beam is flexural deformation beam, torsional deflection beam or bending combination beam.
7. according to claim 1,2 or 3 described gyroscopes, it is characterized in that, the movable detection comb electrode of described detection comb electric capacity and the height of fixed test comb electrodes equate that the upper and lower end of described movable detection comb electrode is higher or lower than the upper and lower end of described fixed test comb electrodes.
8. gyroscope according to claim 7, it is characterized in that, described detection comb electric capacity is many group detection comb electric capacity, on the movable detection comb electrode of the detection comb electric capacity of described framework two outer middle side parts, the lower end be higher or lower than described fixed test comb electrodes on, the lower end, on described framework two outsides, on the movable detection comb electrode of the detection comb electric capacity at following two ends, the lower end be below or above described fixed test comb electrodes on, lower end, the electric capacity of the detection comb electric capacity of described framework two outer middle side parts are on described framework two outsides, the electric capacity sum of the detection comb electric capacity at following two ends.
9. gyroscope according to claim 8 is characterized in that, described driving comb electric capacity adopts open loop driving or closed loop to drive, and described detection comb electric capacity adopts open loop or closed loop to detect.
10. gyroscope according to claim 9, it is characterized in that, when described detection comb electric capacity adopted closed loop to detect, the detection comb electric capacity of described framework two outer middle side parts was for detecting electric capacity, and the detection comb electric capacity of described framework two outside upper/lower terminals is application of force feedback capacity.
11. gyroscope according to claim 9, it is characterized in that, when described detection comb electric capacity adopted closed loop to detect, the detection comb electric capacity of described framework two outer middle side parts was application of force feedback capacity, and the detection comb electric capacity of described framework two outside upper/lower terminals is for detecting electric capacity.
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